CN211707288U

CN211707288U - Spin coater for processing silicon wafers

Info

Publication number: CN211707288U
Application number: CN202020058554.8U
Authority: CN
Inventors: 张曹朋
Original assignee: Anhui Hongdian Microelectronics Co ltd
Current assignee: Anhui Hongdian Microelectronics Co ltd
Priority date: 2020-01-13
Filing date: 2020-01-13
Publication date: 2020-10-20
Anticipated expiration: 2030-01-13

Abstract

The utility model discloses a silicon chip processing is with even machine of gluing, the on-line screen storage device comprises a base, the top of base is provided with cylindrical cavity, the inside central point of cylindrical cavity puts the department and is provided with the motor, and is provided with annular tooth along its circumferencial direction on the inboard top of cylindrical cavity, the output fixedly connected with rotor plate of motor, one side of rotor plate is provided with the rotary rod through the bearing, the rotary rod bottom extends to the inboard fixedly connected with gear of annular tooth. The utility model discloses the motor drives the rotary disk and rotates, and glues the bottle and take place to rotate along with the rotary disk at the horizontal direction for glue the inside dimethyl benzene diluent photoresist of bottle and mix, and because the rotary rod gear and the annular tooth intermeshing of gluing bottle fixed column bottom, and then make the rotary rod drive and glue the bottle fixed column and take place to rotate, thereby make gluey bottle self take place to rotate, improved dimethyl benzene diluent photoresist mixing efficiency, simultaneously the utility model discloses simple structure, the cost of manufacture is low.

Description

Spin coater for processing silicon wafers

Technical Field

The utility model relates to a semiconductor material processing technology field, specificly relate to a silicon chip processing is with even machine of glue.

Background

In the processing of a silicon wafer, a photoresist is required to be coated on the silicon wafer to meet the exposure requirement of the silicon wafer, and the photoresist is prepared by diluting a finished product of negative photoresist which is purchased from a manufacturer and adding a dimethyl benzene diluent. In the prior art, the operation of adding the thinner into the photoresist and uniformly stirring is carried out by manpower, but the operation mode has the defects of large labor amount of workers, long mixing time and poor uniform mixing degree.

The patent of the utility model entitled "a silicon wafer processing spin coater" is granted by the national intellectual property office 2016 at 5 months and 4 days, and the application number is as follows: 201520933669.6, this patent passes through the friction power through the initiative rubber coating roller and drives the bottle rotation of gluing, and the back thinner mixes with the photoresist misce bene after rotatory many times, but when in actual use, glues the bottle and moves between initiative rubber coating roller and driven rubber coating roller easily, glues the bottle and only carries out the thinner through rotating and mix with the photoresist, and its mixed effect is poor, and is inefficient.

SUMMERY OF THE UTILITY MODEL

1. Technical problem to be solved

An object of the utility model is to provide a spin coater is used in silicon chip processing to solve the problem that proposes among the above-mentioned background art.

2. Technical scheme

In order to solve the above problem, the utility model adopts the following technical scheme:

the utility model provides a silicon chip processing is with even machine of gluing, includes the base, the top of base is provided with cylindrical cavity, the inside central point of cylindrical cavity puts the department and is provided with the motor, and is provided with annular tooth on the inboard top of cylindrical cavity along its circumferencial direction, the output fixedly connected with rotor plate of motor, one side of rotor plate is provided with the rotary rod through the bearing, the rotary rod bottom extends to the inboard fixedly connected with gear of annular tooth, gear and annular tooth intermeshing, the top fixedly connected with of rotary rod glues the bottle fixed column, the rotor plate top of gluing bottle fixed column one side is provided with the diaphragm perpendicularly, the top in the gluey bottle fixed column outside is provided with the roof through the bearing, and one side and the diaphragm lateral wall fixed connection of roof, the inside gluey bottle fixed chamber that is provided with.

Preferably, a cover body is arranged on the rubber bottle fixing column on one side of the rubber bottle fixing cavity.

Preferably, the output end of the motor is fixedly connected with the circle center of the rotating plate.

Preferably, a switch for controlling the on and off of the motor is arranged on the outer side of the base.

3. Advantageous effects

The utility model discloses a at the output fixed connection rotor plate of motor, one side of rotor plate sets up the rotary rod through the bearing, the rotary rod bottom extends to the inboard fixed connection gear of ring tooth, gear and ring tooth intermeshing, the top fixed connection of rotary rod has the glue bottle fixed column, the rotor plate top of glue bottle fixed column one side sets up the diaphragm perpendicularly, the top in the glue bottle fixed column outside sets up the roof through the bearing, and one side of roof and diaphragm lateral wall fixed connection, the inside glue bottle fixed column that sets up of roof below sets up glue bottle fixed chamber, and set up the lid on the glue bottle fixed column of glue bottle fixed chamber one side, when using, add the dimethyl benzene diluent to the glue bottle that holds the photoresist, and place the glue bottle and cover the lid inside the glue bottle fixed chamber, the starter motor, the output of motor drives the rotor plate and rotates so that the glue bottle fixed chamber rotates along with the rotor plate, and then make the glue bottle take place to rotate at the horizontal direction along with the rotary disk for glue the inside dimethyl benzene diluent photoresist of bottle and mix, and because the rotary rod gear and the annular tooth intermeshing of glue bottle fixed column bottom, and then make the rotary rod drive and glue the bottle fixed column and take place to rotate, thereby make glue bottle self take place to rotate, improved dimethyl benzene diluent photoresist mixing efficiency, simultaneously the utility model discloses simple structure, the cost of manufacture is low.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic front view of the structure of the present invention;

FIG. 3 is a schematic view of the structure of the plane A-A of FIG. 2;

fig. 4 is a schematic top view of the present invention.

Reference numerals: the rubber bottle fixing device comprises a base 1, a motor 2, a rotating plate 3, a transverse plate 4, a rubber bottle fixing column 5, a top plate 6, a rubber bottle fixing cavity 7, a rotating rod 8, a ring-shaped tooth 9, a gear 10, a cylindrical cavity 11 and a cover 12.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples.

Examples

As shown in fig. 1-4, a spin coater for silicon wafer processing comprises a base 1, a cylindrical cavity 11 is disposed at the top of the base 1, a motor 2 is disposed at the central position inside the cylindrical cavity 11, an annular tooth 9 is disposed at the top end of the inner side of the cylindrical cavity 11 along the circumferential direction, a rotating plate 3 is fixedly connected to the output end of the motor 2, the output end of the motor 2 is fixedly connected to the center of the rotating plate 3, a rotating rod 8 is disposed at one side of the rotating plate 3 through a bearing, a gear 10 is fixedly connected to the bottom end of the rotating rod 8 and extends to the inner side of the annular tooth 9, the gear 10 is engaged with the annular tooth 9, a glue bottle fixing column 5 is fixedly connected to the top end of the rotating rod 8, a transverse plate 4 is vertically disposed at the top of the rotating plate 3 at one side of the glue bottle fixing column 5, a, the inside gluey bottle fixed column 5 that is provided with of roof 6 below glues bottle fixed chamber 7, glues and is provided with lid 12 on the gluey bottle fixed column 5 of bottle fixed chamber 7 one side, and the base 1 outside is provided with the switch that is used for controlling the motor to open and close.

The working principle is as follows: during the use, add the dimethyl benzene diluent to the gluey bottle that holds the photoresist in, and place the gluey bottle and cover lid 12 in gluey bottle fixed cavity 4 inside, starter motor 2, motor 2's output drives rotor plate 3 and rotates and make gluey bottle fixed column 5 rotate along with rotor plate 3, and then make gluey bottle take place the displacement along with rotary disk 3 at the horizontal direction, make the inside dimethyl benzene diluent photoresist of gluey bottle mix, and because the rotary rod 8 gear 10 and the annular tooth 9 intermeshing of gluey bottle fixed column 5 bottom, and then make rotary rod 8 drive gluey bottle fixed column 5 and take place to rotate, thereby make gluey bottle self take place to rotate, improved dimethyl benzene diluent photoresist mixing efficiency, simultaneously the utility model discloses simple structure, the cost of manufacture is low.

It will be appreciated by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as limitations of the present invention, and that changes and modifications to the above described embodiments will fall within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.

Claims

1. A spin coater for processing silicon wafers is characterized by comprising a base (1), wherein a cylindrical cavity (11) is arranged at the top of the base (1), a motor (2) is arranged at the central position inside the cylindrical cavity (11), an annular tooth (9) is arranged at the top end of the inner side of the cylindrical cavity (11) along the circumferential direction of the cylindrical cavity, a rotating plate (3) is fixedly connected with the output end of the motor (2), a rotating rod (8) is arranged on one side of the rotating plate (3) through a bearing, a gear (10) is fixedly connected with the bottom end of the rotating rod (8) and extends to the inner side of the annular tooth (9), the gear (10) and the annular tooth (9) are mutually meshed, a glue bottle fixing column (5) is fixedly connected with the top end of the rotating rod (8), and a transverse plate (4) is vertically arranged at the top of the rotating, the top end of the outer side of the rubber bottle fixing column (5) is provided with a top plate (6) through a bearing, one side of the top plate (6) is fixedly connected with the side wall of the transverse plate (4), and a rubber bottle fixing cavity (7) is arranged inside the rubber bottle fixing column (5) below the top plate (6).

2. The spin coater for processing silicon wafers as claimed in claim 1, wherein a cover body (12) is arranged on the glue bottle fixing column (5) at one side of the glue bottle fixing cavity (7).

3. The spin coater for processing silicon wafers as claimed in claim 1, wherein the output end of the motor (2) is fixedly connected to the center of the rotating plate (3).

4. A spin coater for processing silicon wafers as claimed in claim 1, wherein a switch for controlling the on and off of the motor is arranged outside the base (1).