CN211698588U

CN211698588U - Extension sucker for double-table laser direct writing exposure machine

Info

Publication number: CN211698588U
Application number: CN202020561523.4U
Authority: CN
Inventors: 陈波
Original assignee: Hefei Xinqi Microelectronics Equipment Co ltd
Current assignee: Hefei Xinqi Microelectronics Equipment Co ltd
Priority date: 2020-04-14
Filing date: 2020-04-14
Publication date: 2020-10-16
Anticipated expiration: 2030-04-14

Abstract

The utility model relates to an extension sucking disc for two mesa laser direct writing exposure machine, including upper plate and the hypoplastron of setting in the upper plate below. The bottom of the upper plate is provided with a cavity with a downward opening, and the top of the cavity is provided with a plurality of vacuum adsorption holes. The lower plate comprises a horizontal plate and a vertical plate arranged below the end part of the horizontal plate. The top of the horizontal plate and the cavity enclose a vacuum adsorption cavity. And the lower plate is provided with a first gas channel communicated with the vacuum adsorption cavity. The utility model discloses can use with the cooperation of current double-table-board exposure direct writing exposure machine sucking disc, satisfy the production requirement of jumbo size PCB board, have characteristics such as the dismouting is simple, easily debugging, application scope are wide.

Description

Extension sucker for double-table laser direct writing exposure machine

Technical Field

The utility model relates to a directly write lithography machine sucking disc technical field, concretely relates to extension sucking disc that is used for double table face laser to directly write exposure machine.

Background

The chuck of the direct-write lithography machine is an important component of the lithography machine. Factors such as the size, the flatness, the adsorption mode and the adsorption force of the sucker have important influence on the actual production and manufacture of PCB plate making.

When a direct-write lithography machine is used for making a PCB, the PCB is very different, and the sucking disc parts of the single-table-board type and the double-table-board type which are commonly used in the market are similar and are all used for the PCB with the size below 700 mm. Along with market development, a PCB with a large size needs to be manufactured gradually, and the existing machine type can not meet the requirement. However, because the demand of the existing large-size PCB is not very large, and the cost of developing a special machine type is high, in order to save the production cost, the existing double-table-board base needs to be modified, and the production requirement of the large-size PCB is met.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an extension sucking disc for two mesa laser direct writing exposure machine, this extension sucking disc can use with the cooperation of current two mesa exposure direct writing exposure machine sucking disc, satisfies the production requirement of jumbo size PCB board, has characteristics such as the dismouting is simple, easily debugging, application scope are wide.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an extension sucking disc for a double-table laser direct writing exposure machine comprises an upper plate and a lower plate arranged below the upper plate. The bottom of the upper plate is provided with a cavity with a downward opening, and the top of the cavity is provided with a plurality of vacuum adsorption holes. The lower plate comprises a horizontal plate and a vertical plate arranged below the end part of the horizontal plate. The top of the horizontal plate and the cavity enclose a vacuum adsorption cavity. And the lower plate is provided with a first gas channel communicated with the vacuum adsorption cavity.

Furthermore, the device also comprises a fixed plug arranged in the gas channel of the extended sucker of the double-table laser direct writing exposure machine, a threaded hole is formed in the middle of the fixed plug, and an external thread is arranged on the outer wall of the fixed plug.

Furthermore, a plurality of reinforcing ribs are arranged in the cavity, and gaps are reserved between the bottoms of the reinforcing ribs and the top of the horizontal plate.

Furthermore, a plurality of first connecting holes are formed in the horizontal plate, and a plurality of second connecting holes are formed in the vertical plate.

Further, the first gas channel comprises a ventilation blind hole formed in the vertical plate and a ventilation hole for communicating the ventilation blind hole with the vacuum adsorption cavity; the middle-lower section of the vent hole is positioned on the vertical plate, and the upper end of the vent hole extends upwards to the upper surface of the horizontal plate.

According to the technical scheme provided by the utility model, the utility model discloses not only can use with the cooperation of current double-table-board laser direct writing exposure machine sucking disc, connect the adsorption working face of double-table-board dispersion fast for continuous complete adsorption working face, provide great working plane, satisfy the production requirement of jumbo size PCB board, still have vacuum adsorption capacity, guarantee the plane degree after the PCB face adsorbs, prevent the warpage of seam region board, improve the operational capability of original model. The utility model discloses need not to reform transform double-table-board laser direct writing exposure machine, have characteristics such as the dismouting is simple, easily debugging, application scope are wide.

Drawings

Fig. 1 is a schematic view of an assembly structure of the present invention;

fig. 2 is a schematic structural diagram of the present invention;

FIG. 3 is a schematic structural view of the upper plate;

FIG. 4 is a schematic view of the structure of the lower plate;

fig. 5 is a schematic structural view of the fixed choke plug.

Wherein:

100. the vacuum suction device comprises an upper plate, 101, vacuum suction holes, 102, a cavity, 103, reinforcing ribs, 200, a lower plate, 201, a horizontal plate, 202, a vertical plate, 203, a first gas channel, 204, a second connecting hole, 205, a first connecting hole, 300, a fixing plug, 301, external threads, 302, a threaded hole, 400, a second gas channel, 500, an extended sucker, 600 and a connecting piece.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings:

an extension chuck for a double-mesa laser direct write exposure machine as shown in fig. 1 to 4 includes an upper plate 100 and a lower plate 200 disposed below the upper plate 100. The bottom of the upper plate 100 is provided with a cavity 102 with a downward opening, and the top of the cavity 102 is provided with a plurality of vacuum adsorption holes 101. The lower plate 200 includes a horizontal plate 201 and a vertical plate 202 disposed below an end of the horizontal plate 201. The top of the horizontal plate 201 and the cavity 102 enclose a vacuum adsorption cavity. The lower plate 200 is provided with a first gas channel 203 communicated with the vacuum adsorption cavity. The vacuum adsorption holes 101 have an adsorption effect on the PCB when the vacuum adsorption cavity is vacuumized. The first gas channel 203 is used for communicating the vacuum adsorption cavity with the vacuum adsorption cavity of the extended sucker 500. The vacuum adsorption cavity is only provided with the vacuum adsorption hole 101 and the first gas channel 203 which are communicated with the outside. The vacuum adsorption cavity is communicated with the vacuum adsorption cavity of the extended suction cup 500, and further communicated to a vacuum generation source. The flatness of the utility model is consistent with the flatness of the extended sucker. The utility model discloses have the vacuum adsorption function, and when using, need adjust its and by the depth of parallelism and the difference in height of extension sucking disc, ensure double-table-board laser direct writing exposure machine with the utility model discloses after the concatenation, the working face satisfies the performance requirement. According to the design demand, adjust the utility model discloses a structure size to match not unidimensional sucking disc.

Further, the extended sucker 500 of the double-mesa laser direct writing exposure machine is provided with a gas channel communicated with the vacuum adsorption cavity of the extended sucker, and the gas channel is set as a second gas channel 400. And a fixed plug 300 is installed inside the outer end part of the second gas channel 400 in a threaded manner. As shown in fig. 5, a threaded hole 302 is formed in the middle of the fixing plug 300, and an external thread 301 is formed on the outer wall of the fixing plug 300. The fixing plug 300 may be connected to the connector 600 of fig. 1 through the screw hole 302 to connect the lower plate 200 with the extended suction cup 500, or may be connected to the vacuum suction chamber of the extended suction cup 500 through the screw hole 302 and the first gas passage 203, which are connected to the vacuum suction chamber of the extended suction cup 500. In fig. 1, the fixing plugs 300 of 1 st, 3 rd and 5 th from left to right are used in cooperation with the connecting member 600 of fig. 1 to connect the lower plate 200 and the extended suction cup 500 together. The 2 nd and 4 th fixed plugs 300 counted from left to right are arranged corresponding to the first gas channel and are used for communicating the first gas channel 203 with the second gas channel 400.

Further, a plurality of reinforcing ribs 103 are arranged in the cavity 102, and a gap is reserved between the bottom of each reinforcing rib 103 and the top of the horizontal plate 201 to provide a passage for gas flow. The reinforcing rib can improve the rigidity of the upper plate, can not block the vacuum adsorption cavity, and can not shield the vacuum adsorption hole.

Further, a plurality of first connecting holes 205 are formed in the horizontal plate 201, and a plurality of second connecting holes 204 are formed in the vertical plate 202. The first connecting hole 205 is used for connecting the upper plate 100 and the lower plate 200 through the connecting member 600 in fig. 2. And the second connecting hole 204 is used for connecting the lower plate 200 with the extended suction cup 500 of the double-mesa laser direct writing exposure machine through the connecting piece 600 in fig. 1.

Further, the first gas channel 203 comprises a blind ventilation hole formed in the vertical plate 202 and a vent hole communicating the blind ventilation hole with the vacuum adsorption cavity. The middle-lower section of the vent hole is positioned on the vertical plate 202, and the upper end of the vent hole extends upwards to the upper surface of the horizontal plate 201. The ventilation blind holes are arranged along the horizontal direction, and the ventilation holes are arranged along the vertical direction. When the lower plate 200 is mounted on the side wall of the extended suction cup 500, the outer end opening of the blind ventilation hole is arranged corresponding to the fixing plug 300 for communicating the first gas channel 203 and the second gas channel 400, and the openings of the two are exactly aligned.

In addition, the arrangement mode of the air vent and the mounting hole is not limited to the mode shown in the figure, and the air vent and the mounting hole can be correspondingly changed according to the structure of the extended sucker. In addition, the arrangement of the vacuum adsorption holes and the size of the vacuum adsorption cavity can be correspondingly adjusted according to the change of the distance between the double-table-board suckers. The design resulting from the above-described modifications is still within the scope of protection defined by the patent claims.

The above-mentioned embodiments are only for describing the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art without departing from the design spirit of the present invention should fall into the protection scope defined by the claims of the present invention.

Claims

1. The utility model provides an extension sucking disc that is used for two mesa laser direct write exposure machine which characterized in that: comprises an upper plate and a lower plate arranged below the upper plate; the bottom of the upper plate is provided with a cavity with a downward opening, and the top of the cavity is provided with a plurality of vacuum adsorption holes; the lower plate comprises a horizontal plate and a vertical plate arranged below the end part of the horizontal plate; the top of the horizontal plate and the cavity enclose a vacuum adsorption cavity; and the lower plate is provided with a first gas channel communicated with the vacuum adsorption cavity.

2. The extension chuck for a double-mesa laser direct write exposure machine according to claim 1, wherein: the laser direct-writing exposure machine is characterized by further comprising a fixed plug arranged in a gas channel of an extended sucker of the double-table laser direct-writing exposure machine, a threaded hole is formed in the middle of the fixed plug, and external threads are arranged on the outer wall of the fixed plug.

3. The extension chuck for a double-mesa laser direct write exposure machine according to claim 1, wherein: a plurality of reinforcing ribs are arranged in the cavity, and gaps are reserved between the bottoms of the reinforcing ribs and the top of the horizontal plate.

4. The extension chuck for a double-mesa laser direct write exposure machine according to claim 1, wherein: the horizontal plate is provided with a plurality of first connecting holes, and the vertical plate is provided with a plurality of second connecting holes.

5. The extension chuck for a double-mesa laser direct write exposure machine according to claim 1, wherein: the first gas channel comprises a ventilation blind hole formed in the vertical plate and a ventilation hole for communicating the ventilation blind hole with the vacuum adsorption cavity; the middle-lower section of the vent hole is positioned on the vertical plate, and the upper end of the vent hole extends upwards to the upper surface of the horizontal plate.