CN211696671U - Optical fiber type photoelectric detector, detection system and test system - Google Patents
Optical fiber type photoelectric detector, detection system and test system Download PDFInfo
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- CN211696671U CN211696671U CN202020009053.0U CN202020009053U CN211696671U CN 211696671 U CN211696671 U CN 211696671U CN 202020009053 U CN202020009053 U CN 202020009053U CN 211696671 U CN211696671 U CN 211696671U
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Abstract
The utility model discloses an optic fibre formula photoelectric detector, detecting system, survey and test system. The optical fiber type photoelectric detector comprises an optical fiber and a probe; the probe is arranged at the first end of the optical fiber; the probe forms a Fabry-Perot interference cavity between the first end face and the second end face of the probe; the probe is made of a one-dimensional semiconductor material; the probe is parallel to the optical fiber, and the end face of the first end of the probe corresponds to the end face of the first end of the optical fiber, so that the Fabry-Perot interference cavity of the probe is coupled with the optical fiber. According to the method and the device, detection of external light is realized by modulating the detection light by the signal light; the influence of dark current on the device is effectively avoided; meanwhile, the response time of the detector is greatly prolonged, and the characteristic of sub-millisecond quick response is achieved; the detector has simple structure, easy manufacture and low material cost; the detection is performed using a probe having a smaller diameter than the fiber so that the detector can detect light that any of the probes can reach the location.
Description
Technical Field
The utility model relates to a photoelectric detector technical field especially relates to optic fibre formula photoelectric detector, detecting system, and test system.
Background
A photodetector is a device that converts an optical signal into an electrical signal, and the main principle of the photodetector is that the electrical conductivity of an irradiated material changes due to optical radiation, and the photodetector is widely used in the fields of optical communication, chemical analysis, optical imaging, and biosensing. The photoelectric detector mainly utilizes the photoelectric effect of a semiconductor material, when the energy of incident photons is larger than the forbidden bandwidth of the material, the incident photons can absorb the photons and generate electron-hole pairs, and under the action of an external electric field, the electrons and the holes are separated and directionally move, so that the photocurrent is generated.
The conventional photoelectric detector, such as an ultraviolet light detector, which uses current as a signal source, inevitably introduces dark current, resulting in reduced sensitivity and slow response of the device.
SUMMERY OF THE UTILITY MODEL
In order to overcome the problems existing in the prior art, the utility model provides an optical fiber type photoelectric detector, include:
an optical fiber;
a probe disposed at a first end of the optical fiber;
the probe forms a Fabry-Perot interference cavity between the first end face and the second end face of the probe; the probe is made of semiconductor materials;
the probe is parallel to the optical fiber, and the end face of the first end of the probe corresponds to the end face of the first end of the optical fiber, so that the Fabry-Perot interference cavity of the probe is coupled with the optical fiber.
As an improvement of the optical fiber type photoelectric detector provided by the present invention, the detector further includes a tubular structure, wherein a first end of the tubular structure is fixed to the optical fiber; the first end of the probe is located within the tubular structure and the second end of the probe is exposed from the tubular structure.
As an improvement of the optical fiber type photoelectric detector provided by the present invention, the tubular structure is a glass tube; the glass tube is located at the first end of the optical fiber, and the end face of the first end of the glass tube is fused with the end face of the first end of the optical fiber.
As an improvement of the optical fiber type photoelectric detector provided by the present invention, the optical fiber includes a fiber core located inside; the first end of the probe corresponds to the fiber core at the end face of the first end of the optical fiber; the probe is made of a one-dimensional semiconductor material.
As the utility model provides an improvement of optic fibre formula photoelectric detector, the terminal surface next-door neighbour optic fibre first end terminal surface of probe first end.
As the utility model provides an improvement of optic fibre formula photoelectric detector, optic fibre is single mode fiber.
As an improvement of the fiber-optic photodetector provided by the present invention, the probe material is any one of ZnO, AlN, and GaN.
As an improvement of the optical fiber type photoelectric detector provided by the present invention, the inner diameter of the glass tube is matched with the diameter of the probe.
The application also provides an optical fiber type photoelectric detection system, including: the optical fiber type photoelectric detector, the signal light source and the circulator are adopted; the signal light source is connected with the first end of the circulator; the second end of the circulator is connected with the second end of the optical fiber and used for inputting signal light to the photoelectric detector; the signal light emitted by the signal light source enters the fiber core after passing through the circulator and then is emitted into the probe; after light is emitted, the light is reflected between the two end faces of the first end and the second end of the probe, the emitted light and the reflected light are interfered to form an interference peak and are coupled and transmitted back to the fiber core; the reflected light is output through the third end of the fiber core and the circulator.
As the utility model provides an improvement of optic fibre formula photoelectric detection system, the light signal source is tunable laser, and it carries out the transmission of light signal through single wavelength light.
As an improvement of the optical fiber type photoelectric detection system provided by the present invention, the detection system further includes a photoelectric detector; the photoelectric detector is connected with the third end of the circulator and used for converting an optical signal output by the detector into an electric signal; the detection system further comprises an oscilloscope, and the oscilloscope is connected with the photoelectric detector.
As the utility model provides an optical fiber formula photoelectric detection system's an improvement, detection system still includes the spectrum appearance, the spectrum appearance is connected with circulator third end.
The application also provides a test system of optical fiber type photoelectric detector, including: the optical fiber type photoelectric detector, the signal light source, the circulator, the test light source and the photoelectric detector are arranged in the optical fiber type photoelectric detector; the signal light source is connected with the first end of the circulator; the second end of the circulator is connected with the second end of the optical fiber and used for inputting signal light to the photoelectric detector; the test light source is used for outputting test light, and the test light irradiates the surface of the probe; and the photoelectric detector is connected with the third end of the circulator and is used for converting the optical signal output by the detector into an electric signal.
As the utility model provides an optical fiber formula photoelectric detector's test system's an improvement, test system still includes oscilloscope, oscilloscope and photoelectric detector are connected.
As an improvement of the test system of the optical fiber type photoelectric detector provided by the present invention, the test system further includes a photointerrupter and an optical path system; and the test light emitted by the test light source irradiates the surface of the probe after passing through the photointerrupter and the light path system.
As the utility model provides an optical fiber formula photoelectric detector's test system's an improvement, the test light source is used for exporting the ultraviolet ray.
The application discloses optic fibre formula photoelectric detector has following beneficial effect:
according to the optical fiber type photoelectric detector, signal light is transmitted to the probe through the optical fiber, the light is reflected in a Fabry-Perot interference cavity of the probe to form an interference peak, and the interference peak is finally coupled and transmitted back to the inside of the light; external light to be detected irradiates the surface of the probe, so that the refractive index of the semiconductor material is changed, the position of an interference peak is changed, and the detection of the external light is realized by modulating the detection light by the signal light; the current is not needed to be used as a signal source, so that the influence of dark current on the device is effectively avoided; compared with the traditional photoelectric detector, the response time of the detector is greatly prolonged;
the optical fiber type photoelectric detector is used for detecting light and has the characteristic of quick response (sub-millisecond); the detector has simple structure, easy manufacture and low material cost;
the detection is performed using a probe having a smaller diameter than the fiber so that the detector can detect light that any of the probes can reach the location.
Drawings
Fig. 1 is a schematic structural diagram of an optical fiber type photoelectric detector according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an optical fiber type photoelectric detection system according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a test system of an optical fiber type photoelectric detector according to an embodiment of the present invention.
Reference numerals:
21-a second laser;
22-a photointerrupter;
23-a mirror;
a 24-convex lens;
25-a probe;
26-a tubular structure;
27-an optical fiber; 28-a circulator;
29-a first laser;
30-a photodetector;
31-oscilloscope.
The specific implementation mode is as follows:
in order to make the technical solution of the present invention better understood, the technical solution of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Fig. 1 is a schematic structural diagram of an optical fiber photodetector 30 according to an embodiment of the present invention.
The fiber optic photodetector 30 includes an optical fiber and a probe 25.
And an optical fiber 27 for propagating the optical signal.
And a probe 25 disposed at a first end of the optical fiber 27.
The probe 25 is substantially parallel to the extending direction of the optical fiber 27, and an end surface of the first end of the probe 25 is disposed to correspond to the end surface of the first end of the optical fiber 27. Preferably, the probe 25 is substantially coaxial with the optical fiber 27.
For convenience of explanation, the left end of probe 25 as in FIG. 1 will be referred to as the first end of probe 25. The right end of the optical fiber 27 in fig. 1 is referred to as the first end of the optical fiber 27, and the left end of the optical fiber 27 in fig. 1 is referred to as the second end of the optical fiber 27.
The first end face and the second end face of the probe 25 are parallel, and a fabry-perot interference cavity structure is formed between the two end faces.
The probe 25 is made of a one-dimensional semiconductor material, and the surface of the probe 25 is used for detection of light.
The end face of the probe 25 and the end face of the optical fiber 27 both have good flatness, when the probe 25 is arranged at the first end of the optical fiber 27, the end face of the first end of the probe 25 and the end face of the first end of the optical fiber 27 are arranged correspondingly, and the fabry-perot interference cavity of the probe 25 is coupled with the optical fiber 27, so that light is transmitted between the optical fiber 27 and the probe 25.
The basic operation principle of the optical fiber type photodetector 30 is as follows: signal light is input at the second end of the optical fiber 27, and the signal light propagates along the optical fiber 27 to the first end face of the optical fiber 27. When the first end facet of the optical fiber 27 is in close proximity to the first end facet of the probe 25, light is then incident from the optical fiber 27 into the probe 25 of semiconductor material. Light is reflected between the two smooth and flat end faces of the probe 25, and the incident light and the reflected light interfere to form an interference peak, and finally are coupled and transmitted back to the inside of the optical fiber.
In order to avoid that the optical field is rapidly dissipated to both sides due to the large air gap between the end face of the first end of the probe and the end face of the first end of the optical fiber, the end face of the first end of the probe is closely adjacent to the end face of the first end of the optical fiber, so that the optical fiber 27 and the probe 25 are well coupled to facilitate the propagation of light. The close proximity may be with a small gap between the faces or with the faces in direct contact. The size of the gap between the end face of the first end of the probe and the end face of the first end of the optical fiber affects the coupling efficiency. Under the ideal condition, when the end face of the first end of the probe is attached to the end face of the first end of the optical fiber and directly contacts with the end face of the first end of the optical fiber, the coupling efficiency is good.
If the gap between the end face of the first end of the probe and the end face of the first end of the optical fiber is large, the coupling efficiency is too low, and the detected signal cannot be observed and identified on the existing instrument due to the limitation of the resolution of the existing instrument. In order to ensure a certain coupling efficiency and make the instrument easy to observe, the gap between the end face of the first end of the probe and the end face of the first end of the optical fiber can be properly adjusted. In one embodiment, the gap between the end surface of the first end of the probe and the end surface of the first end of the optical fiber is set to 0-10 μm.
Taking ultraviolet light detection as an example, when the optical fiber type photodetector 30 is placed in a light detection environment, the probe 25 of the one-dimensional semiconductor material is irradiated by ultraviolet light, so that the refractive index of the one-dimensional semiconductor material changes, the position of an interference peak changes accordingly, and the light intensity at the original interference peak changes accordingly. And the detection of the ultraviolet light is realized through the variation of the interference peak and the variation of the light intensity.
The fabry-perot interference cavity of probe 25 is coupled to optical fiber 27 such that light propagates between optical fiber 27 and probe 25; the signal light is transmitted to the probe 25 through the optical fiber 27, and the light is reflected in the Fabry-Perot interference cavity to form an interference peak, and is finally coupled and transmitted back to the inside of the light; external light to be detected irradiates the surface of the probe 25, so that the refractive index of the semiconductor material is changed, and the position of an interference peak is changed, thereby realizing the detection of the external light;
the optical fiber type photoelectric detector 30 modulates the detection light through the signal light, does not need to adopt current as a signal source, and effectively avoids the influence of dark current on devices; meanwhile, compared with the traditional photoelectric detector, the response time of the detector is greatly prolonged;
the fiber optic photodetector 30 of the present application uses a probe 25 for detection, the diameter of the probe 25 being small so that the detector can detect light at any location that can be reached by the probe.
The probe 25 of the embodiment is a one-dimensional semiconductor material, which is a material with excellent optical performance, and under optical radiation, the generation and recombination of photon-generated carriers greatly improve the response time of the device, and the probe has the characteristic of quick response; meanwhile, the absorption coefficient is large, and the preparation cost is low.
In this particular embodiment, the optical fiber 27 is preferably a single mode optical fiber. The single mode optical fiber used for optical transmission may be replaced by other types of optical fibers, but it is ensured that the mode propagated by the optical fiber 27 is mainly single mode.
The optical fiber 27 includes a core located in the innermost layer, and a cladding and a coating layer. When the probe 25 is disposed at the first end of the optical fiber 27, the probe 25 corresponds to the position of the core to facilitate the propagation of light.
In one particular embodiment, the probe 25 is a ZnO material. Other one-dimensional semiconductor materials of similar properties, such as AlN, GaN, etc., may also be selected for the probe 25. In this embodiment, the diameter of the probe 25 may be on the micrometer, submicron, or nanometer scale.
In one embodiment, the probe 25 is a micron rod, and the diameter of the probe 25 is 3-7 μm. The optical fiber 27 is correspondingly a micro-nano level single mode fiber.
The diameter of the probe 25 may be the same as or different from the diameter of the core, and the application is not limited thereto. For better understanding, the mode mismatch (mode mismatch) between the probe and the fiber is briefly described here: the probe and the optical fiber are equivalent to two waveguides, and the mode in each waveguide can be solved into a guided mode and a high-order mode (solved through Maxwell equations) according to the material property, the shape of the end face, the material of the surrounding medium and the like. When the two waveguides are coupled, it can be understood that the electric fields of the two waveguides are integrated under corresponding boundary conditions (different mode boundary conditions are different), and both the electric fields are calculated according to a theory, so that corresponding calculated values are obtained. When the probe 25 is coupled to the optical fiber 27, the coupling efficiency is ideally 1; however, in practice, it is difficult to achieve a coupling efficiency of 1. Therefore, only a certain coupling efficiency needs to be ensured, and the detected signals can be easily observed and identified on the existing instrument.
Preferably, a carrier may be provided at the optical fiber 27 to facilitate fixing the probe 25. Specifically, the first end of the tubular structure 26 may be fixed to the optical fiber 27 using the tubular structure 26 as a carrier. Positioning the first end of probe 25 within tubular structure 26 to facilitate coupling of the end face of optical fiber 27 with the end face of probe 25; a second end of the probe 25 is exposed from the tubular structure 26 for detection of light.
In the present application, the tubular structure 26 may be a glass tube. The glass tube is fixedly connected to the optical fiber 27 by fusing the end face of the first end of the glass tube to the end face of the first end of the optical fiber 27. It will be appreciated that the glass tube is fixedly attached to the outer layer of the optical fiber 27, thereby avoiding the core.
The tubular structure 26 serves to secure one end to the optical fiber 27 and also serves as a carrier for the probe 25. Other configurations for the tubular structure 26 are possible, and it will be understood that the above-described glass tube embodiment is not intended to be limiting as to the tubular structure 26 and the manner in which it is attached.
The probe 25 can be inserted inside the glass tube. The glass tube has a length to facilitate the fixed clamping of the probe 25. In a specific embodiment, the length of the glass tube is 30 μm. + -. 10 μm. The inside diameter of the glass tube is sized to match the diameter of the probe 25 so that the probe 25 can be inserted into the glass tube but does not fall out.
After the probe 25 is inserted into the glass tube, the first end face of the probe 25 abuts against the first end face of the optical fiber 27.
The embodiment of the present application further provides an optical fiber type photoelectric detection system, which includes the optical fiber type photoelectric detector 30 as described above, and a signal light source, a circulator 28.
Wherein the signal light source is used to input signal light to the photodetector 30.
The signal light source is connected to a first end of a circulator 28, and a second end of the circulator 28 is connected to a second end of an optical fiber 27. The signal light emitted by the signal light source is passed through a circulator 28 and enters the core, where it is coupled into the probe 25. After the light enters the probe 25, the light is reflected between the two end surfaces of the first end and the second end of the probe 25, and the incident light and the reflected light interfere with each other to form an interference peak and are coupled back to the fiber core. The reflected light is output through the third end of the core, circulator 28.
As shown in fig. 2, the signal light source of the present application is a first laser 29 that transmits an optical signal by single-wavelength light. The first laser 29 is a tunable laser.
In one embodiment, the detection system further comprises a photodetector 30. The photodetector 30 is connected to the third end of the circulator 28, and is used for converting the optical signal output by the detector into an electrical signal.
For ease of viewing, the detection system also includes an oscilloscope 31. The oscilloscope 31 is connected to the photodetector 30, and the change in voltage of the electrical signal can be observed by the oscilloscope 31.
Alternatively, the photodetector 30 and the oscilloscope 31 may be replaced with a spectrometer.
The signal light transmitted by the first laser 29 enters the optical fiber 27 through the circulator 28 and then enters the probe 25, and after the light is reflected back to the circulator 28 and enters the photodetector 30, the voltage change can be observed through the oscilloscope 31.
The embodiment of the present application further provides a test system of the optical fiber type photodetector 30, which includes the optical fiber type photodetector 30 as described above, and a signal light source, a circulator 28, the photodetector 30, and a test light source.
The signal light source, circulator 28 and photodetector 30 are as described above and will not be described in detail herein.
And a test light source for outputting test light so that the test light/probe light is irradiated on the surface of the probe 25. When the test system is used for detection of ultraviolet light, the test light source is used for outputting ultraviolet light.
The test light/probe light irradiated on the surface of the probe 25 needs to be discontinuous light. The test system also includes a photointerrupter 22 when the test light source emits continuous light. The switching of the on and off of the probe light can be realized by controlling the rotation of the photointerrupter 22, so that the continuous light is converted into discontinuous 'switching light', and the light intensity is changed into 'increasing and decreasing'.
In the present application, as shown in fig. 3, the test light source is a second laser 21.
The semiconductor material (especially a one-dimensional semiconductor material) is irradiated by additional 'switching light', so that the refractive index of the material is changed, the position of an interference peak is changed, the light intensity at the original interference peak is changed, and the purpose of light intensity modulation is achieved.
The test system further includes an optical path system, and the test light/probe light emitted from the test light source irradiates the surface of the probe 25 after passing through a certain path. The optical path system may specifically include a mirror 23 and a convex lens 24.
In the embodiment, the second laser 21 is used as a detection light signal, passes through the photointerrupter 22, is focused by the reflector 23 and the convex lens 24, and then irradiates the surface of the probe 25; by controlling the rotation of the photointerrupter 22, switching of the light on and off is performed for the light irradiated to the surface of the probe 25. The waveform of the electrical signal can be seen through the oscilloscope 31, and the detection of the light to be detected (ultraviolet light) is realized through the continuous change of the high level and the low level. Meanwhile, the response time of the optical fiber type photodetector 30 can be obtained by the rising and falling edges of the high and low levels.
The embodiment of the present application further provides a method for manufacturing the optical fiber type photoelectric detector 30, which includes the following steps:
s1, flattening the end face of the optical fiber 27 with a cutter;
s2, fixedly connecting the first end of the tubular structure 26 to the optical fiber 27, so that the tubular structure 26 remains a certain length;
s3, the probe 25 is transferred to the tubular structure 26, the first end of the probe 25 is coupled to the end face of the optical fiber 27, the end face of the first end of the probe 25 is aligned with the core of the end face of the first end of the optical fiber 27, and the second end of the probe 25 is exposed from the tubular structure 26.
When the tubular structure 26 is a glass tube, the method of fixedly connecting the first end of the tubular structure 26 to the optical fiber 27 in step S2 includes:
s21, cutting the end surface of the first end of the glass tube flat by a cutter;
and S22, performing discharge fusion on the end face of the first end of the glass tube and the end face of the optical fiber 27 after being flattened, and fixedly connecting the glass tube and the cladding of the optical fiber 27.
The method of transferring the probe 25 into the tubular structure 26 in step S3 includes:
cutting the end faces of the two ends of the probe 25 by using a focused ion beam to ensure the flatness of the two ends;
after the glass tube is fixedly connected with the optical fiber 27, the tungsten wire is used for adsorbing the probe 25, and the probe 25 is transferred into the glass tube, so that the probe 25 can be well coupled with the end face of the optical fiber 27.
The optical fiber type photoelectric detector 30 of the present application has the following beneficial effects:
the signal light is transmitted to the probe 25 through the optical fiber 27, the light is reflected in a Fabry-Perot interference cavity of the probe 25 to form an interference peak, and the interference peak is finally coupled and transmitted back to the inside of the light; external light to be detected irradiates the surface of the probe 25, so that the refractive index of the semiconductor material is changed, the position of an interference peak is changed, and the detection of the external light is realized by modulating the detection light by the signal light; the influence of dark current on the device is effectively avoided; meanwhile, the response time of the detector is greatly prolonged;
the optical fiber type photoelectric detector 30 is used for detecting light and has the characteristic of quick response (sub-millisecond); the detector has simple structure, easy manufacture and low material cost; the detector can be directly applied to the field of detection of light (especially ultraviolet light);
the probe is used for detection and has a small diameter so that the detector can detect light at any position that the probe can reach.
It is to be understood that the above-described embodiments are merely illustrative of some, but not restrictive, of the broad invention, and that the appended drawings illustrate preferred embodiments of the invention and do not limit the scope of the invention. This application is capable of embodiments in many different forms and is provided for the purpose of enabling a thorough understanding of the disclosure of the application. Although the present application has been described in detail with reference to the foregoing embodiments, it will be apparent to one skilled in the art that the present application may be practiced without modification or with equivalents of some of the features described in the foregoing embodiments. All equivalent structures made by using the contents of the specification and the drawings of the present application are directly or indirectly applied to other related technical fields and are within the protection scope of the present application.
Claims (16)
1. An optical fiber type photodetector, comprising:
an optical fiber;
a probe disposed at a first end of the optical fiber;
the probe forms a Fabry-Perot interference cavity between the first end face and the second end face of the probe; the probe is made of a one-dimensional semiconductor material;
the probe is parallel to the optical fiber, and the end face of the first end of the probe corresponds to the end face of the first end of the optical fiber, so that the Fabry-Perot interference cavity of the probe is coupled with the optical fiber.
2. The fiber optic photodetector of claim 1, further comprising a tubular structure having a first end secured to the optical fiber;
the first end of the probe is located within the tubular structure and the second end of the probe is exposed from the tubular structure.
3. The fiber optic photodetector of claim 2, wherein the tubular structure is a glass tube; the glass tube is located at the first end of the optical fiber, and the end face of the first end of the glass tube is fused with the end face of the first end of the optical fiber.
4. The fiber optic photodetector of claim 1, wherein the optical fiber includes an inner core; the first end of the probe corresponds to the fiber core at the end face of the first end of the optical fiber.
5. The fiber optic photodetector of claim 1, wherein the end face of the first end of the probe is proximate to the end face of the first end of the optical fiber.
6. The fiber optic photodetector of claim 1, wherein the optical fiber is a single mode fiber.
7. The optical fiber type photodetector according to claim 1, wherein the probe material is any one of ZnO, AlN, GaN.
8. The fiber optic photodetector of claim 3, wherein the glass tube has an inner diameter that matches the diameter of the probe.
9. An optical fiber type photoelectric detection system, comprising:
the optical fiber type photodetector as claimed in any one of claims 1 to 8, and a signal light source, a circulator;
the signal light source is connected with the first end of the circulator; the second end of the circulator is connected with the second end of the optical fiber and used for inputting signal light to the photoelectric detector;
the signal light emitted by the signal light source enters the fiber core after passing through the circulator and then is emitted into the probe; after light is emitted, the light is reflected between the two end faces of the first end and the second end of the probe, the emitted light and the reflected light are interfered to form an interference peak and are coupled and transmitted back to the fiber core; the reflected light is output through the third end of the fiber core and the circulator.
10. The detection system of claim 9, wherein the signal light source is a tunable laser that transmits the optical signal via a single wavelength of light.
11. The detection system of claim 9, further comprising a photodetector; the photoelectric detector is connected with the third end of the circulator and used for converting an optical signal output by the detector into an electric signal; the detection system further comprises an oscilloscope, and the oscilloscope is connected with the photoelectric detector.
12. The detection system of claim 9, further comprising a spectrometer connected to the third end of the circulator.
13. A test system for an optical fiber photodetector, comprising:
the optical fiber type photodetector as claimed in any one of claims 1 to 8, and a signal light source, a circulator, a test light source, a photodetector;
the signal light source is connected with the first end of the circulator; the second end of the circulator is connected with the second end of the optical fiber and used for inputting signal light to the photoelectric detector;
the test light source is used for outputting test light, and the test light irradiates the surface of the probe;
and the photoelectric detector is connected with the third end of the circulator and is used for converting the optical signal output by the detector into an electric signal.
14. The test system of claim 13, further comprising an oscilloscope coupled to the photodetector.
15. The test system of claim 13, further comprising a photointerrupter, an optical path system; and the test light emitted by the test light source irradiates the surface of the probe after passing through the photointerrupter and the light path system.
16. The test system of claim 13, wherein the test light source is configured to output ultraviolet light.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114624483A (en) * | 2022-05-13 | 2022-06-14 | 苏州联讯仪器有限公司 | Telescopic chip probe and chip test system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114624483A (en) * | 2022-05-13 | 2022-06-14 | 苏州联讯仪器有限公司 | Telescopic chip probe and chip test system |
| CN114624483B (en) * | 2022-05-13 | 2022-08-02 | 苏州联讯仪器有限公司 | Telescopic chip probe and chip test system |
| CN115201532A (en) * | 2022-05-13 | 2022-10-18 | 苏州联讯仪器有限公司 | Chip testing system |
| CN115201532B (en) * | 2022-05-13 | 2024-03-08 | 苏州联讯仪器股份有限公司 | Chip test system |
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