CN211669495U - Device for calibrating multiplying power of optical path system of direct-write lithography equipment - Google Patents
Device for calibrating multiplying power of optical path system of direct-write lithography equipment Download PDFInfo
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- CN211669495U CN211669495U CN202020034777.0U CN202020034777U CN211669495U CN 211669495 U CN211669495 U CN 211669495U CN 202020034777 U CN202020034777 U CN 202020034777U CN 211669495 U CN211669495 U CN 211669495U
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Abstract
The utility model relates to a device for demarcating direct-write lithography apparatus optical path system multiplying power. The apparatus includes a lift system, a slide bar system, a transfer system, and a camera system. The slide rod system comprises an X-direction slide rod assembly and a Y-direction slide rod assembly. The X-direction sliding rod assembly comprises a first X-direction sliding rod and a second X-direction sliding rod; the Y-direction sliding rod component comprises a first Y-direction sliding rod and a second Y-direction sliding rod. The X-direction sliding rod I, the X-direction sliding rod II, the Y-direction sliding rod I and the Y-direction sliding rod II comprise sliding rod bodies and fixing assemblies arranged at two ends of the sliding rod bodies. The switching system comprises a first switching block, a second switching block, a third switching block and a fourth switching block. The camera system comprises a first camera, a second camera, a third camera and a fourth camera. The utility model discloses a fixed camera of a plurality of position relations has replaced original high accuracy motion platform, has reduced and has markd the multiplying power cost, has solved the unable off-line problem of demarcating of light path system multiplying power, is applicable to multiplying power under the different environment and marks, has characteristics such as rational in infrastructure, overall arrangement compactness, coupling nature are strong.
Description
Technical Field
The utility model relates to a direct-write lithography technology field, concretely relates to a device for marking direct-write lithography apparatus optical path system multiplying power.
Background
The optical path system is a core component of the direct-write lithography equipment, and the magnification of the accurate calibration optical path system is the premise of detecting other performances of the optical path system. The existing method for calibrating the multiplying power is to change the position of a high-precision three-degree-of-freedom motion platform, collect calibration points at different positions of an optical path system by a camera system, and obtain the multiplying power of the system through calculation. The precision requirement of the magnification of the optical path system is 0.0001, so that a three-degree-of-freedom motion platform with higher precision is required. Such platforms are expensive; meanwhile, the three-degree-of-freedom motion platform is large in size; due to space limitation, the method cannot be applied to an off-line optical path system.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device for maring directly write lithography apparatus optical path system multiplying power, the device adopt the fixed camera of a plurality of position relations to replace original high accuracy motion platform, have reduced and have markd the multiplying power cost, and have solved the unable off-line problem of marking of optical path system multiplying power, are applicable to multiplying power under the different environment and mark, have characteristics such as rational in infrastructure, overall arrangement compactness, coupling nature are strong.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a device for calibrating magnification of an optical path system of direct-writing photoetching equipment comprises a lifting system, a slide rod system detachably mounted at the top of the lifting system, a switching system mounted on the slide rod system and a camera system mounted on the switching system.
The sliding rod system comprises an X-direction sliding rod component and a Y-direction sliding rod component which is arranged vertically to the X-direction sliding rod component and is positioned in the same horizontal plane with the X-direction sliding rod component; the X-direction sliding rod assembly comprises a first X-direction sliding rod and a second X-direction sliding rod which are parallel to each other; the Y-direction sliding rod component comprises a Y-direction sliding rod I and a Y-direction sliding rod II which are parallel to each other; the X-direction sliding rod I, the X-direction sliding rod II, the Y-direction sliding rod I and the Y-direction sliding rod II respectively comprise a sliding rod main body and fixing assemblies arranged at two ends of the sliding rod main body.
The switching system comprises a first switching block, a second switching block, a third switching block and a fourth switching block, wherein the first switching block is sleeved on the first X-direction sliding rod and the first Y-direction sliding rod, the second switching block is sleeved on the first X-direction sliding rod and the second Y-direction sliding rod, the third switching block is sleeved on the second X-direction sliding rod and the first Y-direction sliding rod, and the fourth switching block is sleeved on the second X-direction sliding rod and the second Y-direction sliding rod.
The camera system comprises a first camera arranged on the top of the first transfer block, a second camera arranged on the top of the second transfer block, a third camera arranged on the top of the third transfer block and a fourth camera arranged on the top of the fourth transfer block.
Furthermore, the lifting system is a scissor type lifting mechanism, and the scissor type lifting mechanism comprises a fixed seat and a base which are sequentially arranged from top to bottom and a lifting frame arranged between the fixed seat and the base; the fixed seat is provided with a plurality of closely-arranged screw holes.
Furthermore, the fixed component is provided with a slide rod mounting port for detachably fixing the slide rod and a screw hole for connecting a lifting system.
Furthermore, an X-direction sliding rod I, a Y-direction sliding rod I and a camera I fixing screw hole are formed in the first transfer connecting block; the second transfer block is provided with a first X-direction sliding rod opening II, a second Y-direction sliding rod opening I and a second camera fixing screw hole; the third transfer block is provided with a first X-direction sliding rod opening, a second Y-direction sliding rod opening and a third camera fixing screw hole; the transfer block IV is provided with a second X-direction sliding rod opening, a second Y-direction sliding rod opening and a fourth camera fixing screw hole; and the first X-direction sliding rod outlet, the second X-direction sliding rod outlet, the first Y-direction sliding rod outlet, the second Y-direction sliding rod outlet, the first Y-direction sliding rod outlet and the second Y-direction sliding rod outlet are all provided with jackscrew holes for fixing the position of the sliding rods.
Furthermore, the first X-direction sliding rod and the first Y-direction sliding rod are driving sliding rods, fixing components at two ends of the first X-direction sliding rod and the first Y-direction sliding rod are locked and fixed on the lifting system, and the first switching block is locked and fixed with the first X-direction sliding rod and the first Y-direction sliding rod; the second X-direction sliding rod and the second Y-direction sliding rod are driven sliding rods, after the position relation of the first camera, the second camera, the third camera and the fourth camera is determined, the positions of the second X-direction sliding rod and the second Y-direction sliding rod are determined, the second transfer block is locked and fixed on the first X-direction sliding rod and the second Y-direction sliding rod, the third transfer block is locked and fixed on the second X-direction sliding rod and the first Y-direction sliding rod, the fourth transfer block is locked and fixed on the second X-direction sliding rod and the second Y-direction sliding rod, and finally fixing assemblies at two ends of the second X-direction sliding rod and the second Y-direction sliding rod are locked and fixed on the lifting system.
Furthermore, the first camera, the second camera, the third camera and the fourth camera are all board-level cameras.
According to the above technical scheme, the utility model discloses a camera that a plurality of positional relations are fixed has replaced original high accuracy motion platform, has reduced and has markd the multiplying power cost, and has solved the unable off-line problem of maring of light path system multiplying power, is applicable to multiplying power calibration under the different environment, has characteristics such as rational in infrastructure, overall arrangement compactness, coupling nature are strong.
Drawings
Fig. 1 is a schematic structural diagram of an apparatus for calibrating the magnification of an optical path system of a direct-write lithography apparatus according to the present invention;
FIG. 2 is a schematic structural view of a middle slide rod system according to the present invention;
FIG. 3 is a schematic diagram of a calibration magnification graph used by the optical path system of the middle direct-writing lithography apparatus of the present invention;
fig. 4 is a schematic diagram of the coordinates of the calibration points collected by the cameras according to the present invention;
fig. 5 is a schematic view of a usage status of the optical path system for calibrating a direct-write lithography apparatus according to the present invention.
Wherein:
1. the optical path system comprises a first 21, a first 22X-direction slide rod, a second 23, a first 24Y-direction slide rod, a second 3Y-direction slide rod, a fixing component 41, a first 42 switching block, a second 43 switching block, a third 44 switching block, a fourth 51 switching block, a first 52 camera, a second 53 camera, a third 54 camera, a fourth 6 camera, a lifting system 71, a first 72 calibration point, a second 73 calibration point, a third 74 calibration point, a fourth 8 calibration point, a calibration system 91 for the direct-writing photoetching equipment, a first camera coordinate origin, 92 camera two coordinate origin, 93 camera three coordinate origin, 94 camera four coordinate origin.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings:
an apparatus for calibrating magnification of an optical path system of a direct-write lithography apparatus as shown in fig. 1-2 comprises a lifting system, a slide rod system detachably mounted on the top of the lifting system, a switching system mounted on the slide rod system, and a camera system mounted on the switching system.
The sliding rod system comprises an X-direction sliding rod component and a Y-direction sliding rod component which is arranged vertically to the X-direction sliding rod component and is positioned in the same horizontal plane with the X-direction sliding rod component; the X-direction sliding rod component comprises a first X-direction sliding rod 21 and a second X-direction sliding rod 22 which are parallel to each other; the Y-direction sliding rod component comprises a first Y-direction sliding rod 23 and a second Y-direction sliding rod 24 which are parallel to each other; the X-direction slide rod I21, the X-direction slide rod II 22, the Y-direction slide rod I23 and the Y-direction slide rod II 24 respectively comprise a slide rod main body and fixing components 3 arranged at two ends of the slide rod main body.
The switching system comprises a first switching block 41 which is sleeved on the first X-direction sliding rod 21 and the first Y-direction sliding rod 23 at the same time, a second switching block 42 which is sleeved on the first X-direction sliding rod 21 and the second Y-direction sliding rod 24 at the same time, a third switching block 43 which is sleeved on the second X-direction sliding rod 22 and the first Y-direction sliding rod 23 at the same time, and a fourth switching block 44 which is sleeved on the second X-direction sliding rod 22 and the second Y-direction sliding rod 24 at the same time.
The camera system comprises a first camera 51 mounted on the top of a first junction block 41, a second camera 52 mounted on the top of a second junction block 42, a third camera 53 mounted on the top of a third junction block 43, and a fourth camera 54 mounted on the top of a fourth junction block 44.
Further, the lifting system 6 is a scissor type lifting mechanism, and the scissor type lifting mechanism comprises a fixed seat and a base which are sequentially arranged from top to bottom, and a lifting frame arranged between the fixed seat and the base; the fixed seat is provided with a plurality of closely-arranged screw holes. The closely-arranged screw holes are arranged corresponding to the screw holes in the fixing component, and the fixing component 3 is connected to the fixing seat of the lifting system 6 through screws.
Furthermore, a sliding rod mounting port for detachably fixing the sliding rod and a screw hole for connecting a lifting system are arranged on the fixing component 3. The end of the slide rod main body extends into and is fixed in the slide rod mounting opening, so that the slide rod main body and the fixing component 3 are fixedly connected together.
Furthermore, an X-direction slide rod I, a Y-direction slide rod I and a camera I fixing screw hole are formed in the first transfer connecting block 41; the second transfer block 42 is provided with a first X-direction sliding rod opening II, a second Y-direction sliding rod opening I and a second camera fixing screw hole; the third transfer block 43 is provided with a first X-direction sliding rod opening, a second Y-direction sliding rod opening and a third camera fixing screw hole; a second X-direction sliding rod opening, a second Y-direction sliding rod opening and a fourth camera fixing screw hole are formed in the fourth switching block 44; and the first X-direction sliding rod outlet, the second X-direction sliding rod outlet, the first Y-direction sliding rod outlet, the second Y-direction sliding rod outlet, the first Y-direction sliding rod outlet and the second Y-direction sliding rod outlet are all provided with jackscrew holes for fixing the position of the sliding rods. Two ends of the X-direction sliding rod I respectively penetrate through the first opening of the X-direction sliding rod I and the second opening of the X-direction sliding rod I, and the relative positions of the X-direction sliding rod I, the first switching block I and the second switching block II can be adjusted by moving the X-direction sliding rod I or the first switching block I or the second switching block II; after the X-direction sliding rod is adjusted to a proper position, the screw in the jackscrew hole is screwed, and the X-direction sliding rod I, the switching block I and the switching block II can be locked and fixed. Two ends of the X-direction sliding rod II respectively penetrate through the first opening of the X-direction sliding rod II and the second opening of the X-direction sliding rod II, and the relative positions of the X-direction sliding rod II, the third switching block and the fourth switching block can be adjusted by moving the X-direction sliding rod II, the third switching block or the fourth switching block; after the X-direction sliding rod is adjusted to a proper position, the screw in the jackscrew hole is screwed, and the X-direction sliding rod II, the switching block III and the switching block IV can be locked and fixed. Two ends of the Y-direction sliding rod I respectively penetrate through the first opening of the Y-direction sliding rod I and the second opening of the Y-direction sliding rod I, the relative position between the Y-direction sliding rod I and the first switching block I and between the Y-direction sliding rod I and the third switching block III can be adjusted by moving the Y-direction sliding rod I or the first switching block I or the third switching block III, and after the Y-direction sliding rod I and the first switching block I and the third switching block III are adjusted to a proper position, screws in the jackscrew holes are tightened, so that the Y-direction sliding rod I, the first switching block I and the third switching block III can be locked and fixed. Two ends of the Y-direction sliding rod II respectively penetrate through the first opening of the Y-direction sliding rod II and the second opening of the Y-direction sliding rod II, the relative positions of the Y-direction sliding rod II, the second switching block and the fourth switching block can be adjusted by moving the Y-direction sliding rod II, the second switching block or the fourth switching block, and after the Y-direction sliding rod II, the second switching block and the fourth switching block are adjusted to proper positions, screws in the jackscrew holes are screwed, so that the Y-direction sliding rod II, the second switching block and the fourth switching block can be locked and fixed.
Furthermore, the X-direction sliding rod I21 and the Y-direction sliding rod I23 are driving sliding rods, the fixing assemblies 3 at two ends of the X-direction sliding rod I21 and the Y-direction sliding rod I23 are locked and fixed on the lifting system 6, and the first switching block 41 is locked and fixed with the X-direction sliding rod I21 and the Y-direction sliding rod I23; the second X-direction sliding rod 22 and the second Y-direction sliding rod 24 are driven sliding rods, after the position relation of the first camera 51, the second camera 52, the third camera 53 and the fourth camera 54 is determined, the positions of the second X-direction sliding rod 22 and the second Y-direction sliding rod 24 are determined, the second transfer block 42 is locked and fixed on the first X-direction sliding rod 21 and the second Y-direction sliding rod 24, the third transfer block 43 is locked and fixed on the second X-direction sliding rod 22 and the first Y-direction sliding rod 23, the fourth transfer block 44 is locked and fixed on the second X-direction sliding rod 22 and the second Y-direction sliding rod 24, and finally the fixing assemblies 3 at the two ends of the second X-direction sliding rod 22 and the second Y-direction sliding rod 24 are locked and fixed on the lifting system 6.
Further, the first camera 51, the second camera 52, the third camera 53 and the fourth camera 54 are all board level cameras. And four corners of the board-level camera are respectively provided with a screw hole, and the board-level camera is fixed on each transfer block through screws. The plate-level camera has small size and is suitable for multiplying power calibration of a small-multiplying-power optical path system.
The utility model discloses a working process does:
(1) the device for calibrating the magnification of the optical path system of the direct-write lithography device is placed below the optical path system 1 of the direct-write lithography device, and the optical path system 1 bids a graph of the calibrated magnification, as shown in fig. 3, the graph of the calibrated magnification includes a first calibrated point 71, a second calibrated point 72, a third calibrated point 73 and a fourth calibrated point 74, the X-direction calibrated point interval is L1, and the Y-direction calibrated point interval is L2.
(2) The positions of the first camera 51, the second camera 52, the third camera 53 and the fourth camera 54 in the vertical direction are adjusted by adjusting the lifting system, so that the first camera 51, the second camera 52, the third camera 53 and the fourth camera 54 are located at the focal plane position of the optical path system 1, and various calibration points can be clearly acquired.
(3) As shown in fig. 4, adjusting the relative position between the device for calibrating the magnification of the optical path system of the direct-write lithography apparatus and the optical path system of the direct-write lithography apparatus, so that the first camera 51 acquires an image of a first calibration point 71; adjusting the position of the second camera 52 by adjusting the position of the second Y-direction slide rod 24, so that the second camera 52 acquires the second calibration point 72 image; adjusting the position of the third camera 53 by adjusting the position of the second X-direction slide rod 22, so that the third camera 53 acquires an image of the third calibration point 73; the positions of the second X-direction slide rod 22 and the second Y-direction slide rod 24 are finely adjusted again, so that the fourth camera 54 acquires the fourth calibration point 74 image; after confirming that the first camera 51, the second camera 52, the third camera 53 and the fourth camera 54 can acquire corresponding images of the index point, the second transfer block 42, the third transfer block 43 and the fourth transfer block 44 are locked and fixed on corresponding slide rods, the positions of the second camera 52, the third camera 53 and the fourth camera 54 are fixed, and the fixing assemblies 3 at two ends of the second X-direction slide rod 22 and the second Y-direction slide rod 24 are locked and fixed on the lifting system 6.
Where the origin of coordinates 91 for camera one is at its lower right, the origin of coordinates 92 for camera two is at its lower left, the origin of coordinates 93 for camera three is at its upper right, and the origin of coordinates 94 for camera four is at its upper left.
(4) As shown in fig. 5, the fixed position of the above-mentioned device for calibrating the magnification of the optical path system of the direct-write lithography apparatus is placed below the calibration system 8 of the direct-write lithography apparatus, and the distances Δ between the first camera 51 and the second camera 52 are measured by the calibration system of the direct-write lithography apparatus respectively1-2The spacing Δ of camera three 53 and camera four 543-4A distance delta between camera one 51 and camera three 531-3 Second camera 52 and fourth camera 542-4. A calibration device only needs to be calibrated once and calibrated periodically at the later stage.
(5) The device for calibrating the multiplying power of the optical path system of the direct-write lithography equipment, which is used for measuring the position relation of the camera, is placed back to the lower part of the optical path system 1 of the direct-write lithography equipment, and the first camera 51 collects the position information of the first calibration point 71 to obtain the position (x1, y1) of the first calibration point 71 in the first camera 51; the second camera 52 collects the position information of the second calibration point 72 to obtain the position (x2, y2) of the second calibration point 72 in the second camera 52; the third camera 53 collects the position information of the third calibration point 73, and the position (x3, y3) of the third calibration point 73 in the third camera 53 is obtained; camera four 54 captures position information of index point four 74, resulting in the position of index point four 74 in camera four 54 (x4, y 4).
(6) According to the position information of each calibration point obtained in the step (5), the multiplying power of the optical path system of the direct-write lithography equipment in the X direction and the multiplying power of the optical path system of the direct-write lithography equipment in the Y direction are obtained by adopting the following formulas to finish the calibration of the multiplying power of the optical path system of the direct-write lithography equipment:
magnification in X direction ((X1+ X2+ Δ)1-2)^2+(y2+y1)^2)^0.5/L1＝((x3+x4+Δ3-4) ^2+(y4+y3)^2)^0.5/L1，
Magnification in Y direction ((Y1+ Y3+ Δ)1-3)^2+(x3+x1)^2)^0.5/L1＝((y2+y4+Δ2-4) ^2+(x4+x2)^2)^0.5/L1。
The above-mentioned embodiments are only for describing the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art without departing from the design spirit of the present invention should fall into the protection scope defined by the claims of the present invention.
Claims (6)
1. A device for calibrating magnification of an optical path system of direct-write lithography equipment is characterized in that: the system comprises a lifting system, a sliding rod system detachably arranged at the top of the lifting system, a switching system arranged on the sliding rod system and a camera system arranged on the switching system;
the sliding rod system comprises an X-direction sliding rod component and a Y-direction sliding rod component which is arranged vertically to the X-direction sliding rod component and is positioned in the same horizontal plane with the X-direction sliding rod component; the X-direction sliding rod assembly comprises a first X-direction sliding rod and a second X-direction sliding rod which are parallel to each other; the Y-direction sliding rod component comprises a Y-direction sliding rod I and a Y-direction sliding rod II which are parallel to each other; the X-direction sliding rod I, the X-direction sliding rod II, the Y-direction sliding rod I and the Y-direction sliding rod II respectively comprise a sliding rod main body and fixing components arranged at two ends of the sliding rod main body;
the switching system comprises a first switching block, a second switching block, a third switching block and a fourth switching block, wherein the first switching block is sleeved on the first X-direction sliding rod and the first Y-direction sliding rod at the same time;
the camera system comprises a first camera arranged on the top of the first transfer block, a second camera arranged on the top of the second transfer block, a third camera arranged on the top of the third transfer block and a fourth camera arranged on the top of the fourth transfer block.
2. The apparatus according to claim 1, wherein the apparatus is further configured to calibrate the magnification of the optical path system of the direct-write lithography apparatus, and the apparatus further comprises: the lifting system is a scissor type lifting mechanism which comprises a fixed seat and a base which are sequentially arranged from top to bottom and a lifting frame arranged between the fixed seat and the base; the fixed seat is provided with a plurality of closely-arranged screw holes.
3. The apparatus according to claim 1, wherein the apparatus is further configured to calibrate the magnification of the optical path system of the direct-write lithography apparatus, and the apparatus further comprises: the fixed component is provided with a sliding rod mounting port for detachably fixing a sliding rod and a screw hole for connecting a lifting system.
4. The apparatus according to claim 1, wherein the apparatus is further configured to calibrate the magnification of the optical path system of the direct-write lithography apparatus, and the apparatus further comprises: the first transfer block is provided with a first X-direction sliding rod opening, a first Y-direction sliding rod opening and a first camera fixing screw hole; the second transfer block is provided with a first X-direction sliding rod opening II, a second Y-direction sliding rod opening I and a second camera fixing screw hole; the third transfer block is provided with a first X-direction sliding rod opening, a second Y-direction sliding rod opening and a third camera fixing screw hole; the transfer block IV is provided with a second X-direction sliding rod opening, a second Y-direction sliding rod opening and a fourth camera fixing screw hole; and the first X-direction sliding rod outlet, the second X-direction sliding rod outlet, the first Y-direction sliding rod outlet, the second Y-direction sliding rod outlet, the first Y-direction sliding rod outlet and the second Y-direction sliding rod outlet are all provided with jackscrew holes for fixing the position of the sliding rods.
5. The apparatus according to claim 1, wherein the apparatus is further configured to calibrate the magnification of the optical path system of the direct-write lithography apparatus, and the apparatus further comprises: the first X-direction sliding rod and the first Y-direction sliding rod are driving sliding rods, fixing components at two ends of the first X-direction sliding rod and the first Y-direction sliding rod are locked and fixed on the lifting system, and the first switching block is locked and fixed with the first X-direction sliding rod and the first Y-direction sliding rod; the second X-direction sliding rod and the second Y-direction sliding rod are driven sliding rods, after the position relation of the first camera, the second camera, the third camera and the fourth camera is determined, the positions of the second X-direction sliding rod and the second Y-direction sliding rod are determined, the second transfer block is locked and fixed on the first X-direction sliding rod and the second Y-direction sliding rod, the third transfer block is locked and fixed on the second X-direction sliding rod and the first Y-direction sliding rod, the fourth transfer block is locked and fixed on the second X-direction sliding rod and the second Y-direction sliding rod, and finally fixing assemblies at two ends of the second X-direction sliding rod and the second Y-direction sliding rod are locked and fixed on the lifting system.
6. The apparatus according to claim 1, wherein the apparatus is further configured to calibrate the magnification of the optical path system of the direct-write lithography apparatus, and the apparatus further comprises: the first camera, the second camera, the third camera and the fourth camera are all board-level cameras.
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