CN211651976U - TFT equipment Anode Bar device part leak hunting tool - Google Patents
TFT equipment Anode Bar device part leak hunting tool Download PDFInfo
- Publication number
- CN211651976U CN211651976U CN201922139166.2U CN201922139166U CN211651976U CN 211651976 U CN211651976 U CN 211651976U CN 201922139166 U CN201922139166 U CN 201922139166U CN 211651976 U CN211651976 U CN 211651976U
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- pipeline mouth
- anode bar
- movable block
- bar device
- barometer
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Abstract
The utility model discloses a TFT equipment Anode Bar device part leak hunting tool, connect, sealing washer, barometer, valve and pipeline mouth including the movable block, sealing washer one end embedding movable block connect, the other end cup joints with pipeline mouth one end, the pipeline mouth other end is open end, valve and barometer setting on the pipeline mouth, the utility model discloses the simple structure shows directly perceived, can detect at the headroom room, can not pollute the portion article, and the activity articulate detects convenient and fast, shortens the activity duration, improves the operating efficiency.
Description
Technical Field
The utility model relates to a TFT equipment Anode Bar device part leak hunting tool.
Background
The Anode Bar device is arranged inside the TFT equipment, and when the device works, circulating water is introduced into the TFT equipment under the external vacuum clean environment to cool the target part. Therefore, during the cleaning and regeneration process of the Anode Bar device, the leak detection of the component is very important, and any tiny leakage under the vacuum environment is not allowed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a TFT equipment Anode Bar device part leak hunting tool to solve the problem that provides in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: including movable block joint, sealing washer, barometer, valve and pipeline mouth, sealing washer one end embedding movable block joint, the other end cup joints with pipeline mouth one end, the pipeline mouth other end is open end, valve and barometer set up on the pipeline mouth.
Preferably, the joint connecting end of the sealing ring and the movable block is provided with a groove, the groove is rectangular, and two short edges of the rectangle are arc-shaped.
Preferably, the jig material is stainless steel or resin.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the structure is simple, and the display is visual.
2. The detection can be carried out in a clean room after the parts are cleaned and regenerated, and parts cannot be polluted.
3. The detection is convenient and fast.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of the structure of the sealing ring of the present invention.
In the figure: 1 movable block joint, 2 sealing rings, 3 barometers, 4 valves and 5 pipeline ports.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a TFT equipment Anode Bar device part leak hunting tool, includes movable block joint 1, sealing washer 2, barometer 3, valve 4 and pipeline mouth 5, 2 one end embedding movable block of sealing washer connect 1, the other end cup joints with 5 one end of pipeline mouth, 5 other ends of pipeline mouth are open end, valve 4 and barometer 3 set up on pipeline mouth 5, this tool material is stainless steel or resin.
The sealing washer 2 is equipped with the recess with the movable block connects 1 link, and the recess is the rectangle, and two minor faces of rectangle are the arc.
The working principle is as follows: directly connect the Anode Bar device water filling port through the movable block joint 1 with this tool, connect clean room compressed air interface with the pipeline mouth, open valve 4, treat that barometer 3 indicates assigned pressure, close the valve, 15min stews, observe the barometer pressure variation condition, judge whether Anode Bar device leakproofness.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. A TFT equipment Anode Bar device part leak hunting tool, characterized by: including movable block joint (1), sealing washer (2), barometer (3), valve (4) and pipeline mouth (5), sealing washer (2) one end embedding movable block joint (1), the other end cup joints with pipeline mouth (5) one end, the pipeline mouth (5) other end is open end, valve (4) and barometer (3) set up on pipeline mouth (5).
2. The leak detection jig for the components of the Anode Bar apparatus of the TFT equipment according to claim 1, which is characterized in that: the sealing ring (2) is connected with the movable block joint (1) through a connecting end and is provided with a groove, the groove is rectangular, and two short edges of the rectangle are arc-shaped.
3. The leak detection jig for the components of the Anode Bar apparatus for TFT devices of claim 1, wherein the material of the jig is stainless steel or resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922139166.2U CN211651976U (en) | 2019-12-03 | 2019-12-03 | TFT equipment Anode Bar device part leak hunting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922139166.2U CN211651976U (en) | 2019-12-03 | 2019-12-03 | TFT equipment Anode Bar device part leak hunting tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211651976U true CN211651976U (en) | 2020-10-09 |
Family
ID=72694353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922139166.2U Active CN211651976U (en) | 2019-12-03 | 2019-12-03 | TFT equipment Anode Bar device part leak hunting tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211651976U (en) |
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2019
- 2019-12-03 CN CN201922139166.2U patent/CN211651976U/en active Active
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