CN211627633U

CN211627633U - Anti-falling device for wafer cassette

Info

Publication number: CN211627633U
Application number: CN201922412427.3U
Authority: CN
Inventors: 孙军; 潘亮良
Original assignee: Wuxi Xinweiyang Technology Co ltd
Current assignee: Wuxi Xinweiyang Technology Co ltd
Priority date: 2019-12-27
Filing date: 2019-12-27
Publication date: 2020-10-02
Anticipated expiration: 2029-12-27

Abstract

The utility model relates to a wafer casket dropout prevention means belongs to wafer detection technology field, and it includes the wafer casket, the wafer casket holds puts and surveys the bench in, well survey platform one side is provided with the elevating platform that is used for holding and puts the wafer casket, its characterized in that: the wafer box comprises a wafer box body and is characterized in that a plurality of supporting grooves used for clamping wafers are formed in the inner wall of the wafer box body in the height direction, connecting rods connected with the inner walls of two sides of the wafer box body are arranged on one side of the wafer box body, a limiting block is arranged on the top wall of a lifting table, a centering block is arranged on one side, facing the limiting block, of each connecting rod, a centering groove used for inserting the centering block is formed in one side, deviating from the lifting table, of each limiting block, and anti-falling devices connected with the lifting table. The utility model discloses have and be difficult for appearing the effect that drops and empty when the wafer casket holds.

Description

Anti-falling device for wafer cassette

Technical Field

The utility model belongs to the technical field of the wafer detection technique and specifically relates to a wafer casket dropout prevention means is related to.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions.

The wafer can be put into the market after being produced and detected, the conventional detection mode for the wafer usually adopts a middle detection table to detect the wafer, and when the wafer is detected, a wafer box with the wafer is usually placed on a lifting platform at present, and the wafer in the wafer box is conveyed to a detection part in the middle detection table through a conveying device to be detected. Because the wafer box is placed on the lifting platform and is not positioned, when the wafer is conveyed, the wafer box is easy to shake and topple, so that the wafer is damaged.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a wafer casket dropout prevention means, it has the effect that is difficult for appearing droing and empting when the wafer casket holds and puts to exist to prior art.

The above utility model discloses an above-mentioned utility model purpose can realize through following technical scheme:

the utility model provides a wafer casket dropout prevention means, includes the wafer casket, the wafer casket holds puts on well test table, well test table one side is provided with the elevating platform that is used for holding the wafer casket, a plurality of support grooves that are used for the block wafer are seted up to wafer casket inner wall along the direction of height, wafer casket one side is provided with the connecting rod of connecting wafer casket both sides inner wall, the elevating platform roof is provided with the stopper, one side that the connecting rod is towards the stopper is provided with centering block, the centering groove that supplies centering block to insert is seted up to one side that the stopper deviates from the elevating platform, the both sides outer wall of wafer casket all is provided with the dropout prevention means who is connected with the elevating platform.

Through adopting above-mentioned technical scheme, when needs examine the wafer casket, in advancing the support groove of wafer casket with the wafer block, place the wafer casket on the elevating platform, the centering piece card on the connecting rod advances the centering inslot of stopper and tentatively fixes a position the wafer casket, after tentatively fixing a position the wafer casket, further fixes a position the wafer casket through the anticreep device, reaches the difficult phenomenon that drops and topple over that appears of wafer casket.

The utility model discloses further set up to: the anticreep device includes set casing, anticreep component and linkage component, the set casing respectively with the outer wall connection of wafer casket both sides, one side that the set casing deviates from the wafer casket is provided with the connection platform, the linkage component includes control lever, receipts reel, driving gear and driven gear, in control lever one end was worn to establish into the set casing through the connection platform, the one end coaxial coupling driving gear in the set casing was worn to establish to the control lever, the both sides of control lever all set up the receipts reel, the driven gear with driving gear meshing, arbitrary one is established to the outer coaxial cover of reel receipts reel connection control wafer casket anti-drop anticreep component.

Through adopting above-mentioned technical scheme, when needs carry out the anticreep location to the wafer casket, operating personnel rotates the control lever, through the rotation of driving gear and meshed driven gear, drives the reel and rotates to the realization realizes the control to the anticreep component, realizes the location and the release location to the wafer casket.

The utility model discloses further set up to: a plurality of anti-falling grooves are arranged on one side of the lifting platform facing the wafer box, a clamping groove is arranged on the inner wall of one side of each anti-falling groove, the anti-drop component comprises a winding rope, an anti-drop rod, a resisting spring and a plurality of guide wheels, one end of the winding rope is connected with the winding drum and wound on the winding drum, the plurality of guide wheels are arranged in the fixed shell, the winding rope is wound on the guide wheel, one end of the fixed shell is clamped into the anti-falling groove, the fixed shell is provided with a placement cavity corresponding to the clamping groove, the anti-falling rod is connected with the placing cavity in a sliding manner, one end of the rolling rope, far away from the end connected with the winding drum, is connected with one side of the anti-falling rod, far away from the clamping groove, the resisting spring is connected with the side wall of the placing cavity and one side of the anti-falling rod, which is connected with the rolling rope, and is positioned below the coiling rope, and one side of the connecting platform is provided with a locking screw which is connected with the screw thread in a penetrating way and is used for locking the control rod.

By adopting the technical scheme, when the fixed shell is not clamped into the anti-falling groove, the winding drum winds the winding rope, so that the anti-falling rod is accommodated in the accommodating cavity, the abutting spring is in a compressed state at the moment, and the control rod is locked by the locking screw, so that the anti-falling rod is not easy to pop out of the accommodating cavity; when the wafer box is placed on the lifting table, the two ends of the fixing shell are clamped into the anti-falling grooves, the winding reel is driven by rotating the control rod to loosen the winding rope, the anti-falling rod is ejected out by the resisting spring at the moment, and the anti-falling rod is clamped into the anti-falling grooves, so that the wafer box is positioned.

The utility model discloses further set up to: the wafer casket both sides outer wall still is provided with the mounting bar, the mounting bar in-connection has the quick detach component, one side that the quick detach component deviates from the mounting bar is connected with the set casing.

By adopting the technical scheme, the whole anti-drop device and the wafer box are conveniently disassembled and assembled under the action of the quick-release component, so that the anti-drop device is conveniently replaced.

The utility model discloses further set up to: the quick detach component includes angle seat, joint pole and pressing spring, the angle seat is connected with the set casing, the outer wall that the angle seat is located the set casing both sides all sets up the groove of pressing that runs through the angle seat, the joint pole slides with pressing the groove and is connected, set up in the angle seat and press the spring groove of groove intercommunication, press spring one end and spring groove diapire and be connected, the other end is connected with joint pole one side, the joint pole deviates from and presses spring coupling's one end and mounting bar block.

Through adopting above-mentioned technical scheme, when installation anti-disengaging device, remove along pressing the groove through pulling the joint pole in opposite directions to in can advancing the mounting bar with the angle seat block, and after loosening the pressing of joint pole, the joint pole is in the block advances the mounting bar under the effect of pressing the spring, realizes fixing anti-disengaging device, and has made things convenient for the dismantlement to anti-disengaging device.

The utility model discloses further set up to: and positioning wedge blocks are arranged at both ends of the bracket.

Through adopting above-mentioned technical scheme, under the effect of location voussoir for the wafer casket of bearing in the bearing groove is difficult breaks away from in the bearing groove.

The utility model discloses further set up to: and the bottom wall of the bracket is adhered with a damping pad, and two ends of the damping pad are also connected with the positioning wedge block.

By adopting the technical scheme, when an operator takes the wafer box, the wafer generates vibration in the wafer box, and the possibility of damage to the wafer is reduced under the action of the shock absorption pad.

The utility model discloses further set up to: and a handle is arranged on one side of the wafer box, which is far away from the connecting rod.

By adopting the technical scheme, when the wafer box needs to be taken, the wafer box is conveniently lifted and moved through the lifting handle.

To sum up, the utility model discloses a beneficial technological effect does:

1. the centering block on the connecting rod at the bottom of the wafer box is clamped into the centering groove of the limiting block, so that the effect of primarily positioning the wafer box is achieved, and after the anti-falling device further positions the wafer box, the wafer box is not easy to shake or topple, so that the bearing stability of the wafer box is improved;

2. the positioning wedge blocks arranged in the bearing grooves reduce the possibility that the wafer slides away from the bearing, and the shock absorption pads in the bearing grooves reduce the possibility that the wafer and the wafer box are collided and damaged.

Drawings

Fig. 1 is a schematic view of the overall structure embodying the present embodiment.

FIG. 2 is an exploded view of the anti-slip device, the quick release member and the cassette.

Fig. 3 is a schematic cross-sectional view of a wafer cassette.

FIG. 4 is a schematic view showing the connection between the anti-separation device and the quick release member.

Fig. 5 is a partial sectional view showing the interior of the anti-drop device.

Fig. 6 is a schematic cross-sectional view showing a quick release member.

In the figure, 1, a wafer cassette; 11. a bracket; 12. a connecting rod; 13. centering blocks; 14. positioning a wedge block; 15. a shock pad; 16. a handle; 2. a middle measuring table; 3. a lifting platform; 31. a limiting block; 32. centering the groove; 33. a drop-proof groove; 34. a card slot; 4. an anti-drop device; 41. a stationary case; 411. a connecting table; 412. a placement cavity; 42. an anti-drop member; 421. winding the rope; 422. an anti-drop rod; 423. the spring is tightly propped; 424. a guide wheel; 43. a linkage member; 431. a control lever; 432. winding the roll; 433. a driving gear; 434. a driven gear; 5. locking the screw; 6. mounting a bar; 7. a quick release member; 71. a corner seat; 72. a clamping and connecting rod; 73. a pressing spring; 74. pressing the groove; 75. a spring slot.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Refer to fig. 1 and fig. 2, for the utility model discloses a wafer casket dropout prevention means, including the wafer casket 1 that is used for holding the dress wafer, the wafer casket 1 that holds the wafer is placed in being arranged in carrying out the mesoscopic platform 2 that detects to the wafer, one side of mesoscopic platform 2 is provided with the lift platform that is used for bearing wafer casket 1, be provided with stopper 31 on lift platform's the roof, set up in the stopper 31 and to middle groove 32, the one end that handle 16 was kept away from to wafer casket 1 is provided with the connecting rod 12 of connecting the both sides inner wall, connecting rod 12 has set firmly centering block 13 towards one side of stopper 31, when centering block 13 and centering groove 32 are inserted, realize tentatively fixing a position wafer casket 1, the detection mode of mesoscopic platform 2 to wafer in the wafer casket 1 is the detection means commonly used among the prior art, do not repeated here.

Referring to fig. 3, a plurality of supporting grooves 11 for supporting wafers are equidistantly formed in the inner walls of the two sides of the wafer cassette 1 along the height direction, so that the wafers can be supported in the wafer cassette 1, positioning wedges 14 for preventing the wafers from sliding from the supporting grooves 11 are respectively arranged at the two ends of the supporting grooves 11, a shock pad 15 is adhered to the bottom wall of the supporting grooves 11, the two ends of the shock pad 15 are further connected with the positioning wedges 14, a handle 16 for lifting the wafer cassette 1 is arranged at the top of the wafer cassette 1, so that the wafer cassette 1 can be conveniently lifted to move, and the shock damage between the wafers and the supporting grooves 11 is reduced under the action of the shock pad 15.

Referring to fig. 4 and 5, the outer walls of both sides of the wafer cassette 1 (see fig. 2) are provided with an anti-falling device 4 for connecting with the lift table 3 (see fig. 2), the anti-falling device 4 includes a fixed housing 41, an anti-falling member 42 and a linkage member 43, the fixed housing 41 is connected with the outer wall of the wafer cassette 1, one side of the fixed housing 41 away from the wafer cassette 1 is provided with a connection table 411, the linkage member 43 includes a control rod 431, a winding drum 432, a driving gear 433 and a driven gear 434, the control rod 431 is inserted into the connection table 411, one end of the control rod 431 is inserted into the fixed housing 41 through the connection table 411, one end of the control rod 431 is coaxially connected with the driving gear 433, both sides of the control rod 431 are provided with the winding drum 432, the axis of the winding drum 432 is parallel to the axis of the control rod 431, the driven gear 434 engaged with the driving gear 433 is coaxially sleeved and fixed outside the winding drum 432, so that when the, the winding drums 432 at two sides are driven to rotate synchronously, the rotation directions of the two winding drums 432 are the same, and any one winding drum 432 is connected with the anti-falling component 42 for controlling the wafer cassette 1 to fall off.

Referring to fig. 2 and 5, a plurality of anti-slip grooves 33 are formed in one side of the lift table 3 facing the wafer cassette 1, the number of the anti-slip grooves 33 is four, the number of the anti-slip grooves 33 is set to be symmetrical, a plurality of engaging grooves 34 are formed in an inner wall of the anti-slip groove 33, the anti-slip member 42 includes a winding rope 421, an anti-slip rod 422, a biasing spring 423 and a plurality of guide wheels 424, one end of the winding rope 421 is connected to the winding cylinder 432 and wound around the winding cylinder 432, the plurality of guide wheels 424 are disposed in the fixed case 41, the winding rope 421 is wound around the guide wheels 424, such that the winding rope 421 is tensioned, an end of the fixed case 41 is engaged with the anti-slip grooves 33, the fixed case 41 is formed with an accommodating chamber 412 corresponding to the engaging grooves 34, the anti-slip rod 422 is slidably connected to the accommodating chamber 412 and is not prone to sway, an end of the winding rope 421 far away from the winding cylinder 432 is connected to a side of the biasing rod 422, one end of the resisting spring 423 is connected with one side of the anti-falling rod 422, which is connected with the winding rope 421, the other end of the resisting spring is connected with the inner wall of the placing cavity 412 and is positioned below the winding rope 421, and a locking screw 5 (see fig. 4) which is in threaded connection and used for locking the control rod 431 is arranged at one side of the connecting table 411 (see fig. 4);

when the wafer cassette 1 (see fig. 2) is not placed on the lifting table 3 (see fig. 2), the winding drum 432 winds the winding rope 421, so that the anti-falling rod 422 is pulled into the placing cavity 412 to be stored, the resisting spring 423 is in a compressed state at the moment, and the locking screw 5 is screwed, so that the control rod 431 is locked, and the effect that the anti-falling rod 422 is not easy to pop out from the placing cavity 412 is achieved;

when the wafer cassette 1 is placed on the lifting table 3, the end of the fixing shell 41 is clamped into the anti-falling groove 33, the locking screw 5 is loosened, the control rod 431 is rotated, the winding rope 421 is loosened, the anti-falling rod 422 is popped out under the action of the abutting spring 423 and is clamped with the clamping groove 34, the wafer cassette 1 is positioned, and the wafer cassette 1 is not prone to shaking and falling.

Referring to fig. 2 and 6, the outer walls of the two sides of the wafer cassette 1 are provided with mounting bars 6, quick release members 7 are connected in the mounting bars 6, the quick release members 7 include an angle seat 71, a clamping rod 72 and a pressing spring 73, one side of the angle seat 71 is connected with the fixed casing 41, the length of the angle seat 71 is greater than the width of the fixed casing 41, so that two ends of the angle seat 71 extend out of two sides of the fixed casing 41, outer walls of the angle seat 71 at two sides of the fixed casing 41 are both provided with a pressing groove 74 clamping rod 72 penetrating through the angle seat 71 and inserted into the pressing groove 74 in an interference fit manner, so that the clamping rod 72 is not easy to fall off from the pressing groove 74 and can slide along the pressing groove 74, a spring groove 76 communicated with one side of the pressing groove 74 facing the clamping rod 72 is formed in the corner seat 71, one end of the pressing spring 73 is connected with the bottom wall of the spring groove 76, the other end of the pressing spring is connected with one side of the clamping rod 72, and the section of the clamping rod 72 is L-shaped;

when the anti-disengaging device 4 and the wafer box 1 need to be installed, the clamping rods 72 on the same corner seat 71 are pressed, so that the clamping rods 72 move oppositely, the pressing spring 73 is stressed and compressed at the moment, one end, away from the clamping rod 72, connected with the pressing spring 73 is clamped with the mounting strip 6, the anti-disengaging device 4 and the wafer box 1 are installed and fixed, and the wafer box 1 is convenient to detach.

The implementation principle of the embodiment is as follows: can conveniently carry out the dismouting with anticreep device 4 and wafer casket 1 through quick detach component 7, when centering block 13 on connecting rod 12 and the slot 32 that is inserted to on the stopper 31, realize the preliminary location to wafer casket 1, realize the further location to wafer casket 1 under the effect of anticreep device 4 to wafer casket 1 is difficult for appearing rocking and toppling over, and under the positioning wedge 14 effect at support groove 11 both ends, reduces the possibility that the wafer drops from holding in the palm groove 11.

The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. The utility model provides a wafer casket dropout prevention means, includes wafer casket (1), wafer casket (1) holds and puts on well test table (2), well test table (2) one side is provided with elevating platform (3) that are used for holding wafer casket (1), its characterized in that: wafer casket (1) inner wall is seted up a plurality of support grooves (11) that are used for the block wafer along the direction of height, wafer casket (1) one side is provided with connecting rod (12) of connecting wafer casket (1) both sides inner wall, elevating platform (3) roof is provided with stopper (31), connecting rod (12) are provided with centering block (13) towards one side of stopper (31), stopper (31) deviate from one side of elevating platform (3) and offer the centering block (13) of confession and insert centering groove (32), the both sides outer wall of wafer casket (1) all is provided with anticreep device (4) of being connected with elevating platform (3).

2. The drop preventing device for wafer cassette of claim 1, wherein: the anti-falling device (4) comprises a fixed shell (41), an anti-falling component (42) and a linkage component (43), the fixed shell (41) is respectively connected with the outer walls of the two sides of the wafer box (1), one side of the fixed shell (41) departing from the wafer box (1) is provided with a connecting platform (411), the linkage member (43) comprises a control rod (431), a winding drum (432), a driving gear (433) and a driven gear (434), one end of the control rod (431) is arranged in the fixed shell (41) in a penetrating way through the connecting platform (411), one end of the control rod (431) which is arranged in the fixed shell (41) in a penetrating way is coaxially connected with a driving gear (433), the two sides of the control rod (431) are respectively provided with a winding drum (432), the outer of the winding drum (432) is coaxially sleeved with a driven gear (434) meshed with the driving gear (433), and any winding drum (432) is connected with an anti-falling component (42) for controlling the wafer box (1) to fall off.

3. The drop preventing device for wafer cassette of claim 2, wherein: the lifting platform (3) is provided with a plurality of anti-dropping grooves (33) on one side facing the wafer box (1), a clamping groove (34) is formed in the inner wall of one side of each anti-dropping groove (33), each anti-dropping component (42) comprises a winding rope (421), an anti-dropping rod (422), a resisting spring (423) and a plurality of guide wheels (424), one end of each winding rope (421) is connected with the corresponding winding drum (432) and wound on the corresponding winding drum (432), the plurality of guide wheels (424) are arranged in a fixed shell (41), the winding rope (421) is wound on the guide wheels (424), one end of the fixed shell (41) is clamped into the corresponding anti-dropping grooves (33), the fixed shell (41) is provided with a placement cavity (412) corresponding to the position of the clamping groove (34), the anti-dropping rod (422) is connected with the placement cavity (412) in a sliding manner, one end of the winding rope (421) far away from the connection with the corresponding winding drum (432) is connected with one side, which deviates from the anti-dropping rod (34), the abutting spring (423) is connected with one side of the side wall of the arranging cavity (412) and one side of the anti-falling rod (422) which is connected with the coiling rope (421) and is positioned below the coiling rope (421), and a locking screw (5) which is in threaded connection and used for locking the control rod (431) penetrates through one side of the connecting table (411).

4. The wafer cassette dropout prevention apparatus of any one of claims 2 or 3, wherein: wafer casket (1) both sides outer wall still is provided with mounting bar (6), quick detach component (7) are connected in mounting bar (6), one side that quick detach component (7) deviate from mounting bar (6) is connected with set casing (41).

5. The drop preventing device for wafer cassette of claim 4, wherein: quick detach component (7) are including angle seat (71), joint pole (72) and press spring (73), angle seat (71) are connected with set casing (41), press groove (74) that run through angle seat (71) are all seted up to the outer wall that angle seat (71) are located set casing (41) both sides, joint pole (72) with press groove (74) to slide and be connected, set up in angle seat (71) and press spring groove (76) that groove (74) communicate, press spring (73) one end and spring groove (76) diapire to be connected, the other end is connected with joint pole (72) one side, joint pole (72) deviate from and press the one end and the mounting bar (6) block that spring (73) are connected.

6. The drop preventing device for wafer cassette of claim 5, wherein: and two ends of the bracket (11) are provided with positioning wedges (14).

7. The drop preventing device for wafer cassette of claim 6, wherein: the damping pad (15) is adhered to the bottom wall of the bracket (11), and two ends of the damping pad (15) are connected with the positioning wedge block (14).

8. The drop preventing device for wafer cassette of claim 6, wherein: and a handle (16) is arranged on one side of the wafer box (1) deviating from the connecting rod (12).