CN211627362U - Device suitable for spectrum normal position sign - Google Patents
Device suitable for spectrum normal position sign Download PDFInfo
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- CN211627362U CN211627362U CN201922348057.1U CN201922348057U CN211627362U CN 211627362 U CN211627362 U CN 211627362U CN 201922348057 U CN201922348057 U CN 201922348057U CN 211627362 U CN211627362 U CN 211627362U
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Abstract
The utility model provides a device suitable for spectrum in-situ characterization, which comprises a vacuum chamber experimental device and a full spectrum in-situ characterization experimental device arranged in the vacuum chamber experimental device; the vacuum chamber experimental device comprises a vacuum chamber body used for providing a vacuum environment, an electron gun is arranged in the vacuum chamber body, and the full-spectrum in-situ characterization experimental device comprises a spectrometer, a high-resolution electron microscope and an in-situ probe electrical test structure. The utility model is suitable for a spectrum normal position sign can obtain more microcosmic, more dynamic change's material information.
Description
Technical Field
The utility model relates to a space optical imaging and spectral measurement technical field especially relate to a device suitable for spectrum normal position sign.
Background
In-situ infrared diffuse reflection infrared spectroscopy (DRIFTS) analyzes the reaction mechanism by tracking and characterizing the on-site reaction adsorption state on the catalyst to obtain some valuable surface reaction information. The apparatus for in situ characterization of spectra is a very useful means for determining the process conditions, process state conditions or end points of an ongoing process. At present, the conventional device for spectrum in-situ characterization has single spectrum information, and is lack of a related experiment for comprehensive in-situ characterization by combining multiple spectrum technologies.
SUMMERY OF THE UTILITY MODEL
In order to solve the above-mentioned drawbacks, an object of the present invention is to provide a device for spectrum in-situ characterization, which overcomes the above-mentioned drawbacks and deficiencies of the prior art.
In order to achieve the above object, the present invention provides a device suitable for spectrum in-situ characterization, which comprises a vacuum chamber experimental device and a full spectrum in-situ characterization experimental device disposed in the vacuum chamber experimental device; the vacuum chamber experimental device comprises a vacuum chamber body used for providing a vacuum environment, an electron gun is arranged in the vacuum chamber body, and the full-spectrum in-situ characterization experimental device comprises a spectrometer, a high-resolution electron microscope and an in-situ probe electrical test structure.
The spectrometer is connected with a sensing element for collecting spectrum signals, the sensing element is connected with a light source, the sensing element is positioned in the vacuum cabin body, and the light source is positioned outside the vacuum cabin body.
The vacuum cabin body experimental device also comprises a vacuum control unit connected with the vacuum cabin body and used for forming a vacuum environment in the vacuum cabin body; the vacuum control unit comprises a vacuum pump and a vacuum gauge connected with the vacuum cabin, and the vacuum pump is communicated with the vacuum cabin through a sealing pipeline.
The vacuum chamber body experimental device further comprises a pressure control unit, a gas supply unit and a gas configuration piece, wherein the pressure control unit comprises a gas flowmeter and is connected with a pressure controller, and the gas flowmeter is arranged in the sealing pipeline communicated with the gas supply unit.
The utility model has the advantages that: the method is suitable for spectrum in-situ characterization, and can obtain more microscopic and dynamic change material information.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Wherein: 1. vacuum chamber experimental apparatus, 2, full spectrum in-situ characterization experimental apparatus, 11, vacuum chamber body, 12, electron gun, 13, vacuum control unit, 14, vacuum pump, 15, vacuum gauge, 16, sealed pipeline, 17, gas flowmeter, 18, pressure controller, 21, spectrometer, 22, high-resolution electron microscope, 23, in-situ probe electrical test structure, 24, sensing element, 25, light source.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1, a device suitable for spectrum in-situ characterization includes a vacuum chamber experimental apparatus 1 and a full spectrum in-situ characterization experimental apparatus 2 disposed in the vacuum chamber experimental apparatus 1; the vacuum chamber experimental device 1 comprises a vacuum chamber body 11 for providing a vacuum environment, an electron gun 12 is arranged in the vacuum chamber body 11, and the full-spectrum in-situ characterization experimental device 2 comprises a spectrometer 21, a high-resolution electron microscope 22 and an in-situ probe electrical test structure 23.
The spectrometer 21 is connected with a sensing element 24 for collecting spectrum signals, the sensing element 24 is connected with a light source 25, the sensing element 24 is positioned in the vacuum chamber 11, and the light source 25 is positioned outside the vacuum chamber 11.
The experimental device of the vacuum cabin 11 further comprises a vacuum control unit 13 connected with the vacuum cabin 11 and used for forming a vacuum environment in the vacuum cabin 11; the vacuum control unit 13 includes a vacuum pump 14 and a vacuum gauge 15 connected to the vacuum chamber 11, and the vacuum pump 14 is connected to the vacuum chamber 11 through a sealed pipe 16.
The experimental device of the vacuum cabin 11 further comprises a pressure control unit, a gas supply unit and a gas configuration piece, wherein the pressure control unit comprises a gas flowmeter 17 and a pressure controller 18 connected with the gas flowmeter 17, and the gas flowmeter 17 is arranged on a sealing pipeline 16 communicated with the gas supply unit and the gas configuration piece.
The method of the utility model specifically comprises the following steps:
1) detecting the experimental device, debugging the experimental device to a normal working state, and adding a sample to be detected into a sample containing piece in the experimental device;
2) adjusting the temperature, humidity and pressure values in a vacuum cabin of the experimental device;
3) opening a spectrometer, observing the appearance and the structural change of a detected sample in real time by adopting a high-resolution electron microscope, acquiring a spectrum by the spectrometer, and detecting an electric signal in an in-situ electron emission structure by adopting an in-situ probe electrical test structure;
4) and after the spectrum collection of all the tested samples is finished, closing the detection experimental device.
The present invention is not limited to the above embodiment, and if various modifications or variations of the present invention do not depart from the spirit and scope of the present invention, they are intended to be covered if they fall within the scope of the claims and the equivalent technology of the present invention.
Claims (4)
1. An apparatus suitable for in-situ characterization of spectra, comprising: the system comprises a vacuum chamber experimental device and a full-spectrum in-situ characterization experimental device arranged in the vacuum chamber experimental device; the vacuum chamber experimental device comprises a vacuum chamber body used for providing a vacuum environment, an electron gun is arranged in the vacuum chamber body, and the full-spectrum in-situ characterization experimental device comprises a spectrometer, a high-resolution electron microscope and an in-situ probe electrical test structure.
2. The apparatus for in-situ characterization of spectra according to claim 1, wherein: the spectrometer is connected with a sensing element for collecting spectrum signals, the sensing element is connected with a light source, the sensing element is positioned in the vacuum cabin body, and the light source is positioned outside the vacuum cabin body.
3. The apparatus for in-situ characterization of spectra according to claim 1, wherein: the vacuum cabin body experimental device also comprises a vacuum control unit connected with the vacuum cabin body and used for forming a vacuum environment in the vacuum cabin body; the vacuum control unit comprises a vacuum pump and a vacuum gauge connected with the vacuum cabin, and the vacuum pump is communicated with the vacuum cabin through a sealing pipeline.
4. The apparatus for in-situ characterization of spectra according to claim 1, wherein: the vacuum chamber body experimental device further comprises a pressure control unit, a gas supply unit and a gas configuration piece, wherein the pressure control unit comprises a gas flowmeter and is connected with a pressure controller, and the gas flowmeter is arranged in the sealing pipeline communicated with the gas supply unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922348057.1U CN211627362U (en) | 2019-12-24 | 2019-12-24 | Device suitable for spectrum normal position sign |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922348057.1U CN211627362U (en) | 2019-12-24 | 2019-12-24 | Device suitable for spectrum normal position sign |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211627362U true CN211627362U (en) | 2020-10-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922348057.1U Active CN211627362U (en) | 2019-12-24 | 2019-12-24 | Device suitable for spectrum normal position sign |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211627362U (en) |
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2019
- 2019-12-24 CN CN201922348057.1U patent/CN211627362U/en active Active
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