CN211625865U - Rectification and purification device for liquid sulfur dioxide - Google Patents
Rectification and purification device for liquid sulfur dioxide Download PDFInfo
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- CN211625865U CN211625865U CN202020267705.0U CN202020267705U CN211625865U CN 211625865 U CN211625865 U CN 211625865U CN 202020267705 U CN202020267705 U CN 202020267705U CN 211625865 U CN211625865 U CN 211625865U
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- 239000007788 liquid Substances 0.000 title claims abstract description 144
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 238000000746 purification Methods 0.000 title claims description 26
- 239000002994 raw material Substances 0.000 claims abstract description 66
- 239000002699 waste material Substances 0.000 claims abstract description 18
- 239000012071 phase Substances 0.000 claims description 40
- 230000001105 regulatory effect Effects 0.000 claims description 32
- 239000007791 liquid phase Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000087 stabilizing effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 68
- 239000004065 semiconductor Substances 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000012527 feed solution Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000002778 food additive Substances 0.000 description 1
- 235000013373 food additive Nutrition 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model relates to a device for purifying and rectifying liquid sulfur dioxide. The device comprises a raw material liquid storage tank, a rectifying tower, a waste liquid tank, a heat pump and a filling row, wherein the raw material liquid storage tank is connected with a first raw material liquid inlet in a first rectifying tower; a first tee joint is arranged between a gas phase outlet at the top of the first rectifying tower and a raw material gas inlet of the second rectifying tower, and the third end of the first tee joint is connected with a second raw material liquid inlet in the first rectifying tower through a first raw material gas inlet of the main condenser and a first raw material gas outlet of the main condenser; the method has the advantages of utilizing the double-tower rectification process to stabilize production, stabilizing the liquefaction pressure of the circulating liquid through the circulating liquid balance tank, stabilizing the circulating system, and further providing stable load for the rectification process so as to effectively ensure the stability of the product purity.
Description
Technical Field
The utility model belongs to the technical field of high-purity liquid sulfur dioxide production, especially, relate to a rectification purification device to liquid sulfur dioxide.
Background
The specifications of the liquid sulfur dioxide in the current market comprise qualified products (the purity is more than or equal to 99.6%), first-class products (the purity is more than or equal to 99.9%), superior products (the purity is more than or equal to 99.97%) and the purity is less than 99.999%; at present, high-purity liquid sulfur dioxide products are widely used in the semiconductor industry, the purity of the liquid sulfur dioxide of the products cannot be lower than 99.999 percent generally, so that the purity of most of the liquid sulfur dioxide produced by enterprises cannot reach the standard, and the high-purity liquid sulfur dioxide products used in the semiconductor industry mainly come from imports; some domestic enterprises try to produce high-purity sulfur dioxide products, but the product purity is unstable due to imperfect production process, and large-scale production cannot be realized.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defect that exists among the prior art, and provide one kind and regard as the raw materials with industrial sulfur dioxide, carry out the purification of rectifying to industrial sulfur dioxide, and utilize two tower rectification technology stable production, through circulation liquid compensating tank gaseous phase regulation, the liquefaction pressure of the steady circulation liquid, for main condenser provides stable cold volume, and then provides steady load for the rectification, in order to reach the rectification purification device to liquid sulfur dioxide who effectively guarantees product purity stability.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a rectification purification device for liquid sulfur dioxide comprises a raw material liquid storage tank, a rectification tower, a waste liquid tank, a heat pump and a charging row, wherein the raw material liquid storage tank is connected with a first raw material liquid inlet in the first rectification tower, a gas phase outlet at the top of the first rectification tower is connected with a raw material gas inlet of the second rectification tower, and a liquid phase outlet at the bottom of the second rectification tower is connected with the charging row through the charging pump;
a first tee joint is arranged between a gas phase outlet at the top of the first rectifying tower and a raw material gas inlet of the second rectifying tower, and a third end of the first tee joint is connected with a second raw material liquid inlet in the first rectifying tower through a first raw material gas inlet of the main condenser and a first raw material gas outlet of the main condenser;
and a gas-phase outlet at the top of the second rectifying tower is connected with a gas-liquid separator through a second raw material gas inlet of the main condenser and a second raw material gas outlet of the main condenser, and a liquid-phase outlet at the bottom of the gas-liquid separator is connected with a raw material liquid inlet at the middle upper part of the second rectifying tower.
Preferably, the liquid phase outlet at the bottom of the first rectifying tower and the gas phase outlet at the top of the gas-liquid separator are respectively communicated with a waste liquid tank.
Preferably, the circulating gas outlet of the heat pump is respectively connected with the corresponding first reboiler and second reboiler through the second end of the second tee and the third end of the second tee, and the outlets of the first reboiler and second reboiler are respectively connected with the liquid inlet of the circulating liquid balancing tank;
a liquid phase outlet at the bottom of the circulating liquid balance tank is connected with a circulating inlet of the heat pump through a circulating liquid inlet of the main condenser and a circulating liquid outlet of the main condenser;
the first reboiler is arranged at the bottom of the first rectifying tower, and the second reboiler is arranged at the bottom of the second rectifying tower.
Preferably, a third tee joint is arranged between the circulating gas outlet of the heat pump and the second tee joint, and the gas phase outlet at the top of the circulating liquid balancing tank is connected with the third end of the third tee joint.
Preferably, a sixth regulating valve is arranged between the circulating gas outlet of the heat pump and the third tee joint, and a seventh regulating valve is arranged between the gas phase outlet at the top of the circulating liquid balancing tank and the third end of the third tee joint.
Preferably, a fifth regulating valve is arranged between the second end of the second tee and the first reboiler.
Preferably, a first regulating valve is arranged between the raw material liquid storage tank and a first raw material liquid inlet in the first rectifying tower, and a second regulating valve is arranged between the first tee joint and a raw material gas inlet of the second rectifying tower.
Preferably, a third regulating valve is arranged between the liquid phase outlet at the bottom of the first rectifying tower and the waste liquid tank, and a fourth regulating valve is arranged between the gas phase outlet at the top of the gas-liquid separator and the waste liquid tank.
The utility model discloses an industrial grade sulfur dioxide provides the raw materials for entire system, then utilizes two tower rectification stable production one kind product purity to be not less than 99.999% high-purity sulfur dioxide purification technology. Compared with the traditional process technology, the utility model has the advantages of as follows: 1. the rectification tail gas is recovered by adopting a special waste liquid tank, so that the direct discharge into the atmosphere and the environmental pollution are avoided; 2. the circulating liquid after heat exchange by the first reboiler and the second reboiler is sent to a circulating liquid balancing tank, and gas phase in the circulating liquid is discharged to the inlet of the heat pump through a seventh regulating valve, so that the liquefaction pressure of the circulating liquid is stabilized, the stability of a circulating system is facilitated, a stable load is provided for rectification, and the stability of the product purity is effectively ensured; 3. the purity of the product can reach more than 99.999 percent, the dependence of the domestic semiconductor industry on imported high-purity sulfur dioxide is solved, sufficient raw materials are provided for the research of the domestic semiconductor industry and the electronic special gas industry, and the development of economic and social benefits is promoted.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure: 1. a first regulating valve; 2. a second regulating valve; 3. a third regulating valve; 4. a fourth regulating valve; 5. a fifth regulating valve; 6. a sixth regulating valve; 7. a seventh regulating valve; 8. a first tee joint; 9. a second tee joint; 10. a third tee joint; 11. a raw material liquid storage tank; 12. a rectifying tower; 13. a main condenser; 14. a second rectification column; 15. a gas-liquid separator; 16. a waste liquid tank; 17. a filling pump; 18. a heat pump; 19. a first reboiler; 20. a second reboiler; 21. a circulating liquid balancing tank; 22. a first feed solution inlet; 23. a first feed gas inlet; 24. a first feed gas outlet; 25. a second feed solution inlet; 26. a second feed gas inlet; 27. a second feed gas outlet; 28. a raw material liquid inlet; 29. filling rows; 30. a recycle gas outlet; 31. a circulating liquid inlet; 32. and a circulating liquid outlet.
Detailed Description
Referring to fig. 1, a rectification purification device for liquid sulfur dioxide comprises a raw material liquid storage tank 11, a rectification tower 12, a waste liquid tank 16, a heat pump 18 and a filling row 29, wherein the raw material liquid storage tank 11 is connected with a first raw material liquid inlet 22 in the first rectification tower 12, a gas phase outlet at the top of the first rectification tower 12 is connected with a raw material gas inlet of a second rectification tower 14, and a liquid phase outlet at the bottom of the second rectification tower 14 is connected with the filling row 29 through the filling pump 17; a first tee joint 8 is arranged between a gas phase outlet at the top of the first rectifying tower 12 and a raw material gas inlet of the second rectifying tower 14, and a third end of the first tee joint 8 is connected with a second raw material liquid inlet 25 in the first rectifying tower 12 through a first raw material gas inlet 23 of the main condenser 13 and a first raw material gas outlet 24 of the main condenser 13; and a gas-phase outlet at the top of the second rectifying tower 14 is connected with a gas-liquid separator 15 through a second raw material gas inlet 26 of the main condenser 13 and a second raw material gas outlet 27 of the main condenser 13, and a liquid-phase outlet at the bottom of the gas-liquid separator 15 is connected with a raw material liquid inlet 28 at the middle upper part of the second rectifying tower 14. And a liquid phase outlet at the bottom of the first rectifying tower 12 and a gas phase outlet at the top of the gas-liquid separator 15 are respectively communicated with a waste liquid tank 16. A circulating gas outlet 30 of the heat pump 18 is respectively connected with a first reboiler 19 and a second reboiler 20 corresponding to the heat pump through a second end of a second tee joint 9 and a third end of the second tee joint 9, and outlets of the first reboiler 19 and the second reboiler 20 are respectively connected with a liquid inlet of a circulating liquid balancing tank 21; a liquid phase outlet at the bottom of the circulating liquid balancing tank 21 is connected with a circulating inlet of the heat pump 18 through a circulating liquid inlet 31 of the main condenser 13 and a circulating liquid outlet 32 of the main condenser 13; the first reboiler 19 is disposed at the bottom of the first rectification column 12, and the second reboiler 20 is disposed at the bottom of the second rectification column 14. A third tee joint 10 is arranged between a circulating gas outlet 30 of the heat pump 18 and the second tee joint 9, and a gas phase outlet at the top of the circulating liquid balancing tank 21 is connected with a third end of the third tee joint 10. A sixth regulating valve 6 is arranged between a circulating gas outlet 30 of the heat pump 18 and the third tee joint 10, and a seventh regulating valve 7 is arranged between a gas phase outlet at the top of the circulating liquid balancing tank 21 and the third end of the third tee joint 10. A fifth regulating valve 5 is arranged between the second end of the second tee joint 9 and the first reboiler 19. A first regulating valve 1 is arranged between the raw material liquid storage tank 11 and a first raw material liquid inlet 22 in the first rectifying tower 12, and a second regulating valve 2 is arranged between the first tee joint 8 and a raw material gas inlet of the second rectifying tower 14. A third regulating valve 3 is arranged between a liquid phase outlet at the bottom of the first rectifying tower 12 and the waste liquid tank 16, and a fourth regulating valve 4 is arranged between a gas phase outlet at the top of the gas-liquid separator 15 and the waste liquid tank 16.
A purification process of a rectification purification device for liquid sulfur dioxide comprises the following steps:
the method comprises the following steps: the raw material liquid in the raw material liquid storage tank 11 enters the first rectifying tower 12 through the first regulating valve 1 and a first raw material liquid inlet 22 in the first rectifying tower 12; the temperature of the raw material liquid is as follows: 20-30 ℃, and the pressure is as follows: 0.5Mpa, flow: 35Nm/h, gas phase fraction: 0, sulfur dioxide mole fraction: 99-99.6%;
step two: performing primary rectification purification on the raw material liquid entering the first rectification tower 12 in the step one, and enabling part of the rectified and purified gas phase to enter the second rectification tower 14 through a gas phase outlet at the top of the first rectification tower 12, the first tee joint 8 and the second regulating valve 2 for secondary rectification purification; the temperature of the gas phase outlet at the top of the first rectifying tower 12 is as follows: 10-20 ℃, and the molar fraction of sulfur dioxide is as follows: 99.5 to 99.95 percent;
step three: the liquid phase obtained after the secondary rectification and purification in the step two enters a filling row 29 through a liquid phase outlet at the bottom of the second rectifying tower 14 and a filling pump 17; the liquid phase temperature after the secondary rectification and purification is as follows: 10-15 ℃, and the molar purity of sulfur dioxide is not lower than 99.999%;
step four: the other part of the gas phase after rectification and purification in the step two sequentially passes through a gas phase outlet at the top of the first rectification tower 12, a third end of the first tee joint 8, a first raw material gas inlet 23 of the main condenser 13, a first raw material gas outlet 24 of the main condenser 13 and a second raw material liquid inlet 25 in the first rectification tower 12 to enter the first rectification tower 12 for rectification and purification again;
step five: the liquid phase after rectification and purification in the step two enters a waste liquid tank 16 through a liquid phase outlet at the bottom of the first rectifying tower 12 and the third regulating valve 3; the temperature of the waste liquid at the bottom of the first rectifying tower 12 is as follows: 10-20 ℃, and the molar fraction of sulfur dioxide is as follows: 99.5-99.9%;
step six: the gas phase purified by the secondary rectification in the third step enters the gas-liquid separator 15 through the gas phase outlet at the top of the second rectification tower 14, the second raw material gas inlet 26 of the main condenser 13 and the second raw material gas outlet 27 of the main condenser 13 for gas-liquid separation, and the gas phase after gas-liquid separation enters the waste liquid tank 16 through the gas phase outlet at the top of the gas-liquid separator 15 and the fourth regulating valve 4; the gas phase outlet temperature at the top of the second rectifying tower 14 is as follows: 7 to 12 ℃ SO2The mole fraction is: 99.9-99.99%; what is needed isThe gas-phase outlet temperature of the gas-liquid separator 15 is: SO at 10-20 deg.C2The mole fraction is: 99.9-99.99%; the liquid phase after gas-liquid separation enters the second rectifying tower 14 through a raw material liquid inlet 28 at the middle upper part of the second rectifying tower 14 to be rectified again;
step seven: circulating gas in the heat pump 18 enters the second tee joint 9 through a circulating gas outlet 30, a part of circulating gas enters the first reboiler 19 through the second end of the second tee joint 9, and the other part of circulating gas enters the second reboiler 20 through the third end of the second tee joint 9; circulating liquid in the first reboiler 19 and the second reboiler 20 respectively enters a circulating liquid balancing tank 21 through corresponding outlets, the temperature of the circulating gas outlet 30 is 40-60 ℃, and the pressure is 0.5-1.3 mPaG; the temperature of the circulating liquid at the outlet of the first reboiler 19 is: 15-20 ℃, and the pressure is as follows: 0.5 to 1.0 mPAG;
step eight: the gas phase in the circulating liquid balancing tank 21 in the seventh step enters the third tee joint 10 through the gas phase outlet at the top of the circulating liquid balancing tank 21 and the seventh regulating valve 7 and enters the second tee joint 9 again to complete the circulation in the seventh step; the gas phase temperature in the gas phase outlet at the top of the circulating liquid balancing tank 21 is as follows: 15-20 ℃, pressure: 0.5 to 1.0 mPAG;
step nine: the liquid phase in the circulation liquid balance tank 21 in the seventh step enters the heat pump 18 through a liquid phase outlet at the bottom of the circulation liquid balance tank 21, a circulation liquid inlet 31 of the main condenser 13, a circulation liquid outlet 32 of the main condenser 13 and a circulation inlet of the heat pump 18 to complete circulation; the temperature of the circulating liquid inlet 31 of the main condenser 13 is as follows: 5-10 ℃, pressure: 0.35 to 0.5mPAG, gas phase fraction: 0; the cycle inlet temperature of the heat pump 18 is: -15 to-30 ℃, flow rate: 180-225 Nm/h, fraction in gas phase: 1.
preferably, the raw material liquid in the first step is industrial-grade liquid sulfur dioxide.
The utility model relates to a process for further rectifying and purifying liquid sulfur dioxide by using industrial sulfur dioxide as a raw material. The quality of the high-purity sulfur dioxide product has no national standard, the quality standard of the liquid sulfur dioxide of the food additive is more than or equal to 99.9 percent according to the national food safety standard GB1886.213-2016, the quality standard of the liquid sulfur dioxide of the domestic superior product GB/T3637-2011 is more than or equal to 99.97 percent, the quality technical index of the foreign gas company is the highest purity according to the fourth volume of Chinese Industrial gas university, page table II 3711, 3.50-34 and table II, 3.50-35 compared with the foreign like products: not less than 99.98% (anhydrous grade). The book was published by the university press of the university, authored by the gas industry association of china. The process method of the utility model has the advantages that: 1. the heat pump circulating system is provided with a circulating liquid balancing tank, so that the pressure of circulating liquid after heat exchange by the reboiler is effectively balanced, and stable liquid phase cold energy is provided for the main condenser, thus being more beneficial to stabilizing the reflux quantity of the first rectifying tower and the second rectifying tower, being more beneficial to mass transfer and heat transfer of materials in the rectifying towers, maintaining the heat balance of the rectifying towers and being more beneficial to controlling the product quality; 2. the industrial-grade liquid sulfur dioxide is further rectified and purified, and the purified sulfur dioxide product has extremely low content of impurities such as water, normal isobutane and the like, so that the requirement of the semiconductor industry on the impurities in the high-purity sulfur dioxide product is met.
Claims (8)
1. The utility model provides a to liquid sulfur dioxide's rectification purification device, this rectification purification device includes feed liquid storage tank (11), rectifying column (12), waste liquid jar (16), heat pump (18) and fills dress row (29), its characterized in that: the raw material liquid storage tank (11) is connected with a first raw material liquid inlet (22) in the first rectifying tower (12), a gas phase outlet at the top of the first rectifying tower (12) is connected with a raw material gas inlet of the second rectifying tower (14), and a liquid phase outlet at the bottom of the second rectifying tower (14) is connected with a filling row (29) through a filling pump (17);
a first tee joint (8) is arranged between a gas phase outlet at the top of the first rectifying tower (12) and a raw material gas inlet of the second rectifying tower (14), and a third end of the first tee joint (8) is connected with a second raw material liquid inlet (25) in the first rectifying tower (12) through a first raw material gas inlet (23) of the main condenser (13) and a first raw material gas outlet (24) of the main condenser (13);
and a gas-phase outlet at the top of the second rectifying tower (14) is connected with a gas-liquid separator (15) through a second raw material gas inlet (26) of the main condenser (13) and a second raw material gas outlet (27) of the main condenser (13), and a liquid-phase outlet at the bottom of the gas-liquid separator (15) is connected with a raw material liquid inlet (28) at the middle upper part of the second rectifying tower (14).
2. The rectification and purification device for liquid sulfur dioxide as claimed in claim 1, wherein: and a liquid phase outlet at the bottom of the first rectifying tower (12) and a gas phase outlet at the top of the gas-liquid separator (15) are respectively communicated with a waste liquid tank (16).
3. The rectification and purification device for liquid sulfur dioxide as claimed in claim 1, wherein: a circulating gas outlet (30) of the heat pump (18) is respectively connected with a first reboiler (19) and a second reboiler (20) which respectively correspond to a second end of a second tee joint (9) and a third end of the second tee joint (9), and outlets of the first reboiler (19) and the second reboiler (20) are respectively connected with a liquid inlet of a circulating liquid balancing tank (21);
a liquid phase outlet at the bottom of the circulating liquid balancing tank (21) is connected with a circulating inlet of the heat pump (18) through a circulating liquid inlet (31) of the main condenser (13) and a circulating liquid outlet (32) of the main condenser (13);
the first reboiler (19) is disposed at the bottom of the first rectifying column (12), and the second reboiler (20) is disposed at the bottom of the second rectifying column (14).
4. The rectification and purification device for liquid sulfur dioxide as claimed in claim 3, wherein: a third tee joint (10) is arranged between a circulating gas outlet (30) of the heat pump (18) and the second tee joint (9), and a gas phase outlet at the top of the circulating liquid balance tank (21) is connected with a third end of the third tee joint (10).
5. The rectification and purification device for liquid sulfur dioxide as claimed in claim 4, wherein: a sixth regulating valve (6) is arranged between a circulating gas outlet (30) of the heat pump (18) and the third tee joint (10), and a seventh regulating valve (7) is arranged between a gas phase outlet at the top of the circulating liquid balancing tank (21) and the third end of the third tee joint (10).
6. The rectification and purification device for liquid sulfur dioxide as claimed in claim 3, wherein: a fifth regulating valve (5) is arranged between the second end of the second tee joint (9) and the first reboiler (19).
7. The rectification and purification device for liquid sulfur dioxide as claimed in claim 1, wherein: a first adjusting valve (1) is arranged between the raw material liquid storage tank (11) and a first raw material liquid inlet (22) in the first rectifying tower (12), and a second adjusting valve (2) is arranged between the first tee joint (8) and the raw material gas inlet of the second rectifying tower (14).
8. The rectification and purification device for liquid sulfur dioxide as claimed in claim 2, wherein: a third regulating valve (3) is arranged between a liquid phase outlet at the bottom of the first rectifying tower (12) and the waste liquid tank (16), and a fourth regulating valve (4) is arranged between a gas phase outlet at the top of the gas-liquid separator (15) and the waste liquid tank (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020267705.0U CN211625865U (en) | 2020-03-06 | 2020-03-06 | Rectification and purification device for liquid sulfur dioxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020267705.0U CN211625865U (en) | 2020-03-06 | 2020-03-06 | Rectification and purification device for liquid sulfur dioxide |
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| Publication Number | Publication Date |
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| CN211625865U true CN211625865U (en) | 2020-10-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020267705.0U Withdrawn - After Issue CN211625865U (en) | 2020-03-06 | 2020-03-06 | Rectification and purification device for liquid sulfur dioxide |
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| Country | Link |
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| CN (1) | CN211625865U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111141108A (en) * | 2020-03-06 | 2020-05-12 | 河南心连心深冷能源股份有限公司 | Rectification purification device and purification process for liquid sulfur dioxide |
-
2020
- 2020-03-06 CN CN202020267705.0U patent/CN211625865U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111141108A (en) * | 2020-03-06 | 2020-05-12 | 河南心连心深冷能源股份有限公司 | Rectification purification device and purification process for liquid sulfur dioxide |
| CN111141108B (en) * | 2020-03-06 | 2024-02-13 | 河南心连心深冷能源股份有限公司 | Rectification purification device and purification process for liquid sulfur dioxide |
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