CN211620370U - Prefabricated excellent vacuum sintering stove electrode insulation sealing device of easy dismouting - Google Patents

Prefabricated excellent vacuum sintering stove electrode insulation sealing device of easy dismouting Download PDF

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Publication number
CN211620370U
CN211620370U CN202020094294.XU CN202020094294U CN211620370U CN 211620370 U CN211620370 U CN 211620370U CN 202020094294 U CN202020094294 U CN 202020094294U CN 211620370 U CN211620370 U CN 211620370U
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electrode
connecting piece
graphite
flange
piece
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宋大吉
朱守标
陈威
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Hangzhou Yongtong Smart Manufacturing Technology Co ltd
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Hangzhou Yongtong Smart Manufacturing Technology Co ltd
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Abstract

The utility model discloses an easy-to-assemble and disassemble prefabricated rod vacuum sintering furnace electrode insulation sealing device, which comprises a vacuum sintering furnace, an electrode, a graphite connecting piece, a water inlet pipe and a second flange, wherein the vacuum sintering furnace comprises a furnace wall and a graphite heat-preservation piece, the furnace core pipe, the oven, install first flange on the graphite heat preservation piece respectively, the graphite adapter sleeve, the electrode left end links to each other with conductive connecting piece and graphite connecting piece, be equipped with a plurality of electrode insulation spare between electrode and the second flange, the graphite connecting piece links to each other with heater connection spare, conductive connecting piece is outer along overlapping the first insulation piece that is equipped with, the graphite adapter sleeve is outer along having connect radiation isolation piece, electrode right-hand member sealing connection have with condenser tube connecting device, the inlet tube is made inside the inlet tube that inserts the electrode at the inlet tube left end, condenser tube connecting device, be formed with the cooling water flow passageway between electrode and the outlet pipe, second flange and first flange seal link to each. The utility model has the advantages of it is sealed, leak protection water, thermal-insulated and insulating effectual, whole dismouting maintenance convenience.

Description

Prefabricated excellent vacuum sintering stove electrode insulation sealing device of easy dismouting
[ technical field ] A method for producing a semiconductor device
The utility model relates to a prefabricated excellent vacuum sintering stove's technical field, especially a prefabricated excellent vacuum sintering stove electrode insulation sealing device's of easy dismouting technical field.
[ background of the invention ]
With the development of the optical fiber market, the large-size preform cannot be sintered by using a traditional sintering furnace, and vacuum sintering equipment is required. The vacuum sintering equipment keeps the inside in a vacuum state, is used for manufacturing a long high-temperature heating area, and integrally sintering the loose body of the prefabricated rod, so that the helium consumption can be obviously reduced, and the production cost is reduced. The vacuum degree of the preform vacuum sintering equipment needs to be kept at 0.5-3Pa, the sealing performance of all accessories needs to be ensured, meanwhile, all internal heating elements and the like are made of graphite materials, air needs to be absolutely isolated in a high-temperature state, the graphite elements are prevented from being oxidized, and the sealing performance of the equipment also needs to be ensured. However, the preform vacuum sintering equipment adopts an internal heating mode, a power supply needs to be introduced from the outside, absolute insulation needs to be guaranteed when the power supply penetrates through a furnace wall and a heat insulation material, sealing insulation between an electrode and a vacuum sintering furnace needs to be guaranteed through an electrode insulation sealing device, and therefore the use safety of the equipment is guaranteed, the electrode needs to be cooled in the heating process, common cooling liquid is water, if the sealing effect of the sealing device is poor in the use process, the water leakage phenomenon can occur, and the safe use of the equipment can be affected. When an electrode and a cooling water device are installed in the existing vacuum sintering furnace, the problems of poor sealing, water leakage prevention and heat insulation effects exist, the electrode is easy to leak air when penetrating through a furnace wall, the electrode is easy to leak electricity when penetrating through a graphite heat-insulating piece, the temperature of an internal heating temperature area is influenced, the whole vacuum sintering furnace is inconvenient to disassemble, assemble and maintain, and the like.
[ Utility model ] content
The utility model aims at solving the problem among the prior art, provide an easy prefabricated stick vacuum sintering stove electrode insulation sealing device who assembles, can make vacuum sintering stove sealed, leak protection water, thermal-insulated and insulating effectual, the electrode is difficult for leaking gas when passing the oven, is difficult for leaking electricity and guarantees inside heating warm area temperature stability when passing graphite heat preservation spare, whole dismouting easy maintenance.
In order to realize the purpose, the utility model provides an easy-to-assemble and disassemble prefabricated rod vacuum sintering furnace electrode insulation sealing device, which comprises a vacuum sintering furnace, an electrode, a graphite connecting piece, a water inlet pipe and a second flange, wherein the vacuum sintering furnace comprises a furnace wall, a graphite heat-insulating piece and a furnace core pipe, a first flange is fixedly arranged on the furnace wall, a graphite connecting sleeve is arranged on the graphite heat-insulating piece, the electrode is arranged on a power supply copper plate in a matching way, the left end of the electrode is connected with the graphite connecting piece by a conductive connecting piece after passing through the second flange and the first flange, a plurality of electrode insulating pieces are arranged between the electrode and the second flange and are compressed and sealed by a sealing nut and a fixing nut, the left end of the graphite connecting piece is connected with a heater connecting piece, the sealing nut and the power supply copper plate are separated by the insulating piece, a first insulating piece is, graphite adapter sleeve outer edge has connect radiation isolation piece and radiation isolation piece to support graphite heat preservation inner wall, electrode right-hand member sealing connection has the condenser tube connecting device who links to each other with the outlet pipe, insert inside the feasible cooling water passageway that is formed between inlet tube, condenser tube connecting device, electrode and the outlet pipe of electrode behind the condenser tube connecting device is passed to the inlet tube left end, second flange and the sealed continuous of first flange, all be equipped with O type sealing washer between condenser tube connecting device and the inlet tube, between condenser tube connecting device and the electrode, between electrode and the electrode insulation, between electrode insulation and the second flange.
Preferably, the conductive connecting piece is formed by connecting a molybdenum rear end connecting piece and a molybdenum front end connecting piece in a matching manner, the left end of the electrode is detachably connected with the molybdenum front end connecting piece, and the molybdenum rear end connecting piece is detachably connected with the graphite connecting piece.
Preferably, the power supply copper plate is provided with a semicircular notch, the electrodes are matched and arranged in the circular notches formed by correspondingly splicing the semicircular notches on the two power supply copper plates and are fixed by screws, and the power supply copper nose connected with a cable is fixedly arranged on the power supply copper plate on the left side of the electrode 4 by screws.
Preferably, the cooling water pipe connecting device comprises a water outlet pipe connecting piece and a water inlet pipe fixing cover, the water outlet pipe is communicated with the water outlet pipe connecting piece, the water inlet pipe fixing cover is fixedly installed at the right end of the water outlet pipe connecting piece, and O-shaped sealing rings are installed between the water outlet pipe connecting piece and the electrode and between the water pipe connecting piece and the water inlet pipe in a matched mode.
Preferably, the number of the electrode insulators is 2, the electrode insulators are respectively a first electrode insulator and a second electrode insulator, and a plurality of O-shaped sealing rings are arranged between the first electrode insulator and the electrode and between the first electrode insulator and the second flange in a matched mode.
Preferably, a third electrode insulating part is arranged between the left side of the fixing nut and the right end of the second flange, and a fourth electrode insulating part is arranged between the right side of the fixing nut and the inner wall of the sealing nut.
Preferably, the water inlet pipe is formed by connecting a water inlet hose, a water inlet connecting pipe fitting and a water inlet pipeline in a detachable mode from right to left in sequence.
Preferably, the water outlet pipe is formed by sequentially detachably connecting a first water outlet pipe, a second water outlet pipe, a third water outlet pipe and a water outlet hose from top to bottom.
The utility model has the advantages that: the vacuum sintering furnace is sealed, leak protection water, it is effectual to insulate against heat and insulate, make the electrode pass the oven through setting up a plurality of O type sealing washers difficult gas leakage, water is difficult for spilling along the joint gap department between electrode and the outlet pipe connecting piece, it has the radiation isolation piece to prevent the inside high temperature light radiation of graphite heat preservation piece to twist on the graphite link sleeve, ensure the outside and keep the normal use of low temperature state and accessory, guarantee inside heating warm area temperature stability, be equipped with first insulating part between graphite link sleeve and the molybdenum rear end connecting piece, it is difficult for the electric leakage to guarantee to be in the insulating environment between electrode and the graphite heat preservation piece, this prefabricated excellent vacuum sintering furnace electrode insulation sealing device whole dismouting is maintained conveniently.
The features and advantages of the present invention will be described in detail by embodiments with reference to the accompanying drawings.
[ description of the drawings ]
Fig. 1 is a schematic structural view of an electrode insulation sealing device of an easily detachable preform vacuum sintering furnace of the present invention;
FIG. 2 is a partial top view of the vacuum sintering furnace of the electrode insulation sealing device of the prefabricated rod vacuum sintering furnace of the present invention;
FIG. 3 is a schematic view of the partial installation of the electrode insulation sealing device of the prefabricated rod vacuum sintering furnace of the present invention;
FIG. 4 is a schematic view of the partial installation of the electrode insulation sealing device of the prefabricated rod vacuum sintering furnace of the present invention;
FIG. 5 is an illustration of the installation of the electrode and the power copper plate of the electrode insulation sealing device of the prefabricated rod vacuum sintering furnace of the present invention;
fig. 6 is a schematic view of the partial structure of the electrode insulating and sealing device of the prefabricated rod vacuum sintering furnace of the present invention, which is easy to disassemble and assemble.
In the figure: 1-a vacuum sintering furnace, 2-a graphite connecting sleeve, 3-a power supply copper plate, 4-an electrode, 5-a graphite connecting piece, 6-a water inlet pipe, 7-a water outlet pipe, 8-a molybdenum rear end connecting piece, 9-a second flange, 11-a furnace wall, 12-a graphite heat-insulating piece, 13-a furnace core pipe and 14-a heater connecting piece, 15-a first flange, 21-a radiation isolation piece, 22-a first insulation piece, 31-a power supply copper nose, 61-a water inlet pipe fixing cover, 71-a water outlet pipe connecting piece, 81-a molybdenum front end connecting piece, 91-a first electrode insulation piece, 92-a sealing nut, 93-a fixing nut, 94-a fourth electrode insulation piece, 95-a third electrode insulation piece and 96-a second electrode insulation piece.
[ detailed description ] embodiments
Referring to fig. 1 to 6, the utility model relates to an easy-to-assemble and disassemble prefabricated rod vacuum sintering furnace electrode insulation sealing device, which comprises a vacuum sintering furnace 1, an electrode 4, a graphite connecting piece 5, a water inlet pipe 6 and a second flange 9, wherein the vacuum sintering furnace 1 comprises a furnace wall 11, a graphite heat preservation piece 12 and a furnace core pipe 13, the furnace wall 11 is fixedly provided with a first flange 15, the graphite heat preservation piece 12 is provided with a graphite connecting sleeve 2, the electrode 4 is arranged on a power supply copper plate 3 in a matching way, the left end of the electrode 4 passes through the second flange 9 and is connected with the graphite connecting piece 5 by a conductive connecting piece after passing through the first flange 15, a plurality of electrode insulation pieces are arranged between the electrode 4 and the second flange 9 and are compressed and sealed by a sealing nut 92 and a fixing nut 93, the left and right ends of the graphite connecting piece 5 are respectively connected with a heater connecting piece 14 and a conductive connecting, a first insulating part 22 is arranged between the inner wall of the graphite connecting sleeve 2 and the outer edge of the conductive connecting part, the outer edge of the graphite connecting sleeve 2 is connected with a radiation isolating part 21, the radiation isolating part 21 is propped against the inner wall of the graphite heat-insulating part 12, the right end of the electrode 4 is hermetically connected with a cooling water pipe connecting device connected with a water outlet pipe 7, the left end of the water inlet pipe 6 penetrates through the cooling water pipe connecting device and then is inserted into the electrode 4, so that a cooling water flow channel is formed among the water inlet pipe 6, the cooling water pipe connecting device, the electrode 4 and the water outlet pipe 7, the second flange 9 is connected with the first flange 15 by a plurality of fastening screws, and an O, o-shaped sealing rings are arranged between the cooling water pipe connecting device and the water inlet pipe 6, between the cooling water pipe connecting device and the electrode 4, between the electrode 4 and the electrode insulating part, and between the electrode insulating part and the second flange 9;
the conductive connecting piece is formed by matching and connecting a molybdenum rear end connecting piece 8 and a molybdenum front end connecting piece 81, the left end of the electrode 4 is detachably connected with the molybdenum front end connecting piece 81, and the molybdenum rear end connecting piece 8 is detachably connected with the graphite connecting piece 5;
the power supply copper plate 3 is provided with a semicircular notch, the electrode 4 is arranged in the circular notch formed by correspondingly splicing the semicircular notches on the two power supply copper plates 3 in a matching way and is fixed by screws, and the power supply copper nose 31 connected with a cable is fixedly arranged on the power supply copper plate 3 on the left side of the electrode 4 by screws;
the cooling water pipe connecting device comprises a water outlet pipe connecting piece 71 and a water inlet pipe fixing cover 61, a water outlet pipe 7 is communicated with the water outlet pipe connecting piece 71, the water inlet pipe fixing cover 61 is fixedly arranged at the right end of the water outlet pipe connecting piece 71, O-shaped sealing rings are arranged between the water outlet pipe connecting piece 71 and the electrode 4 and between the water outlet pipe connecting piece 71 and the water inlet pipe 6 in a matching way, the water outlet pipe connecting piece 71 and the water inlet pipe fixing cover 61 are connected by fastening screws, and the left end of the water inlet pipe 6 penetrates through the water inlet pipe fixing cover 61;
the number of the electrode insulators is 2, the electrode insulators are respectively a first electrode insulator 91 and a second electrode insulator 96, a plurality of O-shaped sealing rings are arranged between the first electrode insulator 91 and the electrode 4 and between the first electrode insulator 91 and the second flange 9 in a matched mode, a third electrode insulator 95 is arranged between the left side of a fixing nut 93 and the right end of the second flange 9, a fourth electrode insulator 94 is arranged between the right side of the fixing nut 93 and the inner wall of a sealing nut 92, the outer edge of the fixing nut 93 is wrapped by the fourth electrode insulator 94 and the third electrode insulator 95, the fixing nut 93 is in threaded connection with the outer edge of the electrode 4 and can horizontally press the first electrode insulator 91, the second electrode insulator 96 and the third electrode insulator 95 by screwing the fixing nut 93, the sealing nut 92 is in threaded connection with the second flange 9 and can horizontally press the fourth electrode insulator 94 by screwing the sealing nut 92, Fixing the nut 93 and longitudinally pressing the second flange 9 to achieve sealing;
the inlet tube 6 is by the water inlet hose, water inlet connection pipe fitting and inlet channel turn left from the right side and form threaded connection in proper order, outlet pipe 7 is by first play water pipe fitting, the second goes out water pipe fitting, the third goes out water pipe fitting, it forms to go out water hose from the top down threaded connection in proper order, second flange 9 is close to the one end of first flange 15, the upper and lower both ends of first electrode insulating part 91, be close to the one end of electrode 4 on the outlet pipe connecting piece 71, all be equipped with the mounting groove that installation O type sealing washer was used between outlet pipe fitting 71 and the inlet tube 6.
The utility model discloses the working process:
the utility model relates to an easy prefabricated excellent vacuum sintering stove electrode insulation sealing device of dismouting is in the course of the work, overlap first insulating part 22 in the molybdenum rear end connecting piece 8 outside, graphite connecting piece 5 is screwed up with molybdenum rear end connecting piece 8 is rotatory, radiation isolation part 21 is twisted soon and is twisted in the graphite adapter sleeve 12 outside and support graphite heat preservation 12 inner wall, screw up molybdenum rear end connecting piece 8 right-hand member and molybdenum front end connecting piece 81, molybdenum rear end connecting piece 8 left end and graphite connecting piece 5 are screwed up, hang heater connection piece 14 in graphite connecting piece 5 and screw up with graphite screw, install four O type sealing washers on first electrode insulating part 91, in the mounting groove of lower extreme, pack into second flange 9 with first electrode insulating part 91 and second electrode insulating part 96 in proper order after the equipment, third electrode insulating part 95 overlaps and supports second electrode insulating part 96 in the electrode 4 outside, twist soon and compress tightly first electrode insulating part 91 on electrode 4 with fixation nut 93, A second electrode insulator 96 and a third electrode insulator 95, a fourth electrode insulator 94 is sleeved outside the electrode 4 and is pressed against a fixed nut 93 and the third electrode insulator 95, then a sealing nut 92 is screwed on a second flange 9 and is pressed tightly against the fourth electrode insulator 94, the left end of the electrode 4 is screwed with a molybdenum front end connecting piece 81, an O-shaped sealing ring is installed in an installation groove on the second flange 9, the left end of the second flange 9 is attached to the right end of a first flange 15 and is fixed by a fastening screw so that the electrode 4 is fixed on the furnace wall 11, the electrode 4 is placed in a circular notch formed by splicing two power supply copper plates 3 and is fixed by the fastening screw, an insulator is arranged between the power supply copper plates 3 and the sealing nut 92, the insulator is sleeved outside the electrode 4, the O-shaped sealing ring is installed in the installation groove on the water outlet pipe connecting piece 71, the water outlet pipe connecting piece 71 is screwed at the left end of the electrode 4, an O-shaped sealing ring is sleeved on the outer side of a water inlet pipe, a water inlet pipe fixing cover 61 is fixed at the right end of a water outlet pipe connecting piece 71 through a fastening screw, the water inlet pipe penetrates through the water inlet pipe fixing cover 61 and the water outlet pipe connecting piece 71 and then is inserted into an electrode 4, a first water outlet pipe piece is screwed at the lower end of the water outlet pipe connecting piece, a heater connecting piece 14 is connected with a heater, a power supply copper nose 31 is connected with an external power supply, a first water outlet pipe piece, a second water outlet pipe piece, a third water outlet pipe piece and a water outlet hose are sequentially in threaded connection from top to bottom to form a water outlet pipe 7, and the water inlet hose, a water inlet connecting pipe piece;
when the prefabricated bar product needs to be sintered, place the prefabricated bar product in furnace core pipe 13, switch on, the electric current passes through electrode 4 in proper order, molybdenum front end connecting piece 81, molybdenum rear end connecting piece 8, graphite connecting piece 5, circulate to the heater behind the heater connecting piece 14, the heater heating makes furnace core pipe temperature rise and then heats the prefabricated bar product, when the electrode temperature is too high needs the cooling, the cooling water is along the hose that intakes, it is inside intake connecting pipe spare and inlet channel inflow electrode 4, the cooling water absorbs electrode heat and follows first water outlet pipe spare behind the inside outflow pipe connecting piece 71 of the inside flow direction of electrode 4, the second water outlet pipe spare, the third water outlet pipe spare, thereby the water-cooling that outlet hose flowed out and realizes electrode 4.
The utility model relates to an easy prefabricated excellent vacuum sintering stove electrode insulation sealing device of dismouting, the sealing of vacuum sintering stove, leak protection water, it is thermal-insulated effectual with insulating, make electrode 4 difficult gas leakage when passing oven 11 through setting up a plurality of O type sealing washers, water is difficult for spilling along the joint gap department between electrode 4 and the outlet pipe connecting piece 71, it has radiation barrier 21 to twist on the graphite adapter sleeve 2 in order to prevent the inside high temperature light irradiation radiation of graphite heat preservation 12, ensure the normal use of outside keeping low temperature state and accessory, guarantee inside heating warm area temperature stability, be equipped with first insulating part 22 between graphite adapter sleeve 2 and the molybdenum rear end connecting piece 8, guarantee to be in the difficult electric leakage of insulating environment between electrode 4 and the graphite heat preservation 12, the whole dismouting maintenance convenience of this prefabricated excellent vacuum sintering stove electrode insulation sealing device.
The above-mentioned embodiment is right the utility model discloses an explanation, it is not right the utility model discloses a limited, any right the scheme after the simple transform of the utility model all belongs to the protection scope of the utility model.

Claims (8)

1. The utility model provides an easy prefabricated excellent vacuum sintering stove electrode insulation sealing device of dismouting, includes vacuum sintering stove (1), and vacuum sintering stove (1) is including oven (11), graphite heat preservation spare (12), stove core pipe (13), its characterized in that: the heating furnace is characterized by further comprising an electrode (4), a graphite connecting piece (5), a water inlet pipe (6) and a second flange (9), wherein a first flange (15) is fixedly installed on the furnace wall (11), a graphite connecting sleeve (2) is installed on the graphite heat-insulating piece (12), the electrode (4) is installed on the power supply copper plate (3) in a matched mode, the left end of the electrode (4) penetrates through the second flange (9) and the first flange (15) and then is connected with the graphite connecting piece (5) through a conductive connecting piece, a plurality of electrode insulating pieces are arranged between the electrode (4) and the second flange (9) and are compressed and sealed through a sealing nut (92) and a fixing nut (93), the left end of the graphite connecting piece (5) is connected with a heater connecting piece (14), the sealing nut (92) is separated from the power supply copper plate (3) through an insulating piece, a first insulating piece (22) is arranged between the inner wall of the graphite connecting sleeve, graphite adapter sleeve (2) outer edge has been met radiation isolation piece (21) and supports graphite heat preservation (12) inner wall, electrode (4) right-hand member sealing connection has the condenser tube connecting device who links to each other with outlet pipe (7), insert electrode (4) inside behind inlet tube (6) left end passing condenser tube connecting device and make inlet tube (6), condenser tube connecting device, electrode (4) and outlet pipe (7) between be formed with the cooling water flow passageway, second flange (9) and first flange (15) are sealed continuous, all be equipped with O type sealing washer between condenser tube connecting device and inlet tube (6), between condenser tube connecting device and electrode (4), between electrode (4) and the electrode insulation piece, between electrode insulation piece and second flange (9).
2. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to claim 1, wherein: the conductive connecting piece is formed by connecting a molybdenum rear end connecting piece (8) and a molybdenum front end connecting piece (81) in a matched mode, the left end of the electrode (4) and the molybdenum front end connecting piece (81) are detachably connected, and the molybdenum rear end connecting piece (8) and the graphite connecting piece (5) are detachably connected.
3. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to claim 1, wherein: be equipped with semi-circular notch on power copper (3), electrode (4) cooperation is installed by two power copper (3) on semi-circular notch correspond the circular notch that the amalgamation formed and in and fix with the screw, use screw fixed mounting to have power copper nose (31) that are connected with the cable on electrode (4) left power copper (3).
4. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to claim 1, wherein: the cooling water pipe connecting device comprises a water outlet pipe connecting piece (71) and a water inlet pipe fixing cover (61), a water outlet pipe (7) is communicated with the water outlet pipe connecting piece (71), the water inlet pipe fixing cover (61) is fixedly arranged at the right end of the water outlet pipe connecting piece (71), and O-shaped sealing rings are arranged between the water outlet pipe connecting piece (71) and the electrode (4) and between the water pipe connecting piece (71) and the water inlet pipe (6) in a matched mode.
5. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to claim 1, wherein: the number of the electrode insulators is 2, the electrode insulators are respectively a first electrode insulator (91) and a second electrode insulator (96), and a plurality of O-shaped sealing rings are arranged between the first electrode insulator (91) and the electrode (4) and between the first electrode insulator (91) and the second flange (9) in a matched mode.
6. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to claim 5, wherein: and a third electrode insulating part (95) is arranged between the left side of the fixing nut (93) and the right end of the second flange (9), and a fourth electrode insulating part (94) is arranged between the right side of the fixing nut (93) and the inner wall of the sealing nut (92).
7. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to any one of claims 1 to 6, wherein: the inlet pipe (6) is formed by connecting a water inlet hose, a water inlet connecting pipe fitting and a water inlet pipeline in a left-turning mode from the right side in a detachable mode.
8. The easy-to-assemble/disassemble preform vacuum sintering furnace electrode insulation sealing device according to any one of claims 1 to 6, wherein: the water outlet pipe (7) is formed by sequentially detachably connecting a first water outlet pipe, a second water outlet pipe, a third water outlet pipe and a water outlet hose from top to bottom.
CN202020094294.XU 2020-01-16 2020-01-16 Prefabricated excellent vacuum sintering stove electrode insulation sealing device of easy dismouting Active CN211620370U (en)

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Application Number Priority Date Filing Date Title
CN202020094294.XU CN211620370U (en) 2020-01-16 2020-01-16 Prefabricated excellent vacuum sintering stove electrode insulation sealing device of easy dismouting

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Application Number Priority Date Filing Date Title
CN202020094294.XU CN211620370U (en) 2020-01-16 2020-01-16 Prefabricated excellent vacuum sintering stove electrode insulation sealing device of easy dismouting

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023174323A1 (en) * 2022-03-15 2023-09-21 眉山博雅新材料股份有限公司 Sealing structure and vacuum furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023174323A1 (en) * 2022-03-15 2023-09-21 眉山博雅新材料股份有限公司 Sealing structure and vacuum furnace

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