CN211612271U

CN211612271U - Environment-friendly semiconductor cutting grinding water microporous filtration system

Info

Publication number: CN211612271U
Application number: CN202020066490.6U
Authority: CN
Inventors: 袁小贵
Original assignee: Shenzhen Svision Science And Technology Co ltd
Current assignee: Shenzhen Svision Science And Technology Co ltd
Priority date: 2020-01-10
Filing date: 2020-01-10
Publication date: 2020-10-02
Anticipated expiration: 2030-01-10

Abstract

The utility model belongs to the technical field of the filterable technique of semiconductor cutting grinding water and specifically relates to an environment-friendly semiconductor cutting grinding water micro-porous filtration system is related to. The utility model provides an environment-friendly semiconductor cutting grinds water millipore filtration system, includes the stock solution jar, filter tank, filtering component, filters fluid reservoir and feedstock pump, when needs are cleared up the mud cake, can utilize the highly-compressed air in the compressed air gas holder earlier just to blow to the filter, on the one hand highly-compressed air can directly blow off partial mud cake, and on the other hand, highly-compressed air can take away the moisture in the mud cake rapidly to make the mud cake dry, reduce its adhesion to the filter, the fracture is broken even, more is favorable to the clearance of mud cake. After the filter is positively blown, back blowing is carried out, on one hand, high-pressure air can blow out mud residues blocked in the micropores, and on the other hand, back blowing can continuously blow off mud cakes remained on the filter so as to further blow off the mud cakes.

Description

Environment-friendly semiconductor cutting grinding water microporous filtration system

Technical Field

The utility model belongs to the technical field of the filterable technique of semiconductor cutting grinding water and specifically relates to an environment-friendly semiconductor cutting grinding water micro-porous filtration system is related to.

Background

With the continuous development of socioeconomic and the advancement of science and technology, electronic products are developed more and more rapidly, and semiconductor materials are indispensable raw materials in many electronic products. In the process of processing semiconductor materials into various parts, grinding and cutting treatment needs to be carried out according to product requirements and set sizes, and ultrapure water is used for washing in the grinding and cutting process, so that a large amount of cutting and grinding water is generated.

The main pollutants in the cutting and grinding water are suspended particles (silicon powder, copper powder and the like), the wastewater is characterized by high suspended matter concentration, light weight, extremely difficult precipitation and turbid appearance, and the contents of organic matters, nitrogen and phosphorus are very low and can be almost ignored under the condition of no additional chemicals. In the existing cutting and grinding water treatment system, a chemical coagulating sedimentation treatment mode is most widely adopted, the process equipment is complex, the occupied area is large, the investment and the operating cost are high, the operation is complex, and the treatment effect on extremely fine suspended matters is not good.

Therefore, in the prior art, the cutting and grinding water is filtered by adopting the microporous filtering technology, mud cakes can be generated on the surface of the filter element in the process of microporous filtering, and the mud cakes can gradually block micropores on the filter element, so that the filtering efficiency is gradually reduced, and the mud cakes need to be cleaned after a period of time.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing an environment-friendly semiconductor cutting grinds water millipore filtration system, its advantage lies in, can enough reduce the waste of clear water, also can promote the efficiency of clearance mud cake.

The above utility model discloses an above-mentioned utility model purpose can realize through following technical scheme:

an environment-friendly micropore filtering system for semiconductor cutting and grinding water comprises a raw liquid tank, a filtering tank communicated with the raw liquid tank, a filtering component arranged in the filtering tank, a filtering liquid tank communicated with the filtering component and a raw material pump for providing power for filtering, wherein the filtering component comprises a connecting pipe for communicating the filtering liquid tank with the filtering tank, the connecting pipe is suspended in the filtering tank, the connecting pipe is connected with a filter in the filtering tank, the micropore filtering system also comprises an air blowing component, the air blowing component comprises a compressed air storage tank, the compressed air storage tank is communicated into the filtering tank through a positive blowing pipe, the positive blowing pipe is over against the filter, a positive blowing valve is arranged on the positive blowing pipe, the compressed air storage tank is communicated to the connecting pipe through a back blowing pipe, and a back blowing valve is arranged on the back blowing pipe, and a slag discharge valve is arranged below the filtering tank.

Through adopting above-mentioned technical scheme, stoste passes through the filtration of filter under the effect of raw materials pump, and rethread connecting pipe enters into in the straining clear liquid jar to accomplish and filter. Through the setting of the subassembly of blowing, when needs are cleared up the mud cake, can utilize the highly-compressed air in the compressed air gas holder earlier just to blow to the filter, on the one hand highly-compressed air can directly blow off partial mud cake, and on the other hand, highly-compressed air can take away the moisture in the mud cake rapidly to make the mud cake dry, reduce its adhesion to the filter, the fracture is broken even, more is favorable to the clearance of mud cake. After the filter is positively blown, back blowing is carried out, on one hand, high-pressure air can blow out mud residues blocked in the micropores, and on the other hand, back blowing can continuously blow off mud cakes remained on the filter so as to further blow off the mud cakes.

Preferably, the top of the filtering tank is provided with an exhaust pipe communicated with the inside of the filtering tank, and the exhaust pipe is provided with an exhaust valve.

Through adopting above-mentioned technical scheme, through discharge valve's setting for when just blowing and blowback, filter jar carminative passageway, therefore need not to arrange the sediment valve and open constantly and exhaust, only need just open the sediment valve and discharge the waste residue after accumulating certain waste residue, be convenient for carry out centralized processing to the waste residue.

Preferably, the exhaust pipe is provided with a detection flow meter for detecting a flow rate of the liquid.

Through adopting above-mentioned technical scheme, through the setting that detects the flowmeter, can detect the water content in the combustion gas when blowing well, therefore after the water content reduces to zero, explain the mud cake and weather completely, carry out the blowback again this moment, can effectively promote the efficiency that the blowback blew off the mud cake.

Preferably, the connecting pipe is provided with a clear filtrate flowmeter.

Through adopting above-mentioned technical scheme, through the setting of straining the clear solution flowmeter, can change through the registration of straining the clear solution flowmeter and know filterable speed, when the registration of straining the clear solution flowmeter is less than a certain default, can explain the clearance that needs carry out the filter.

Preferably, the diameter of the lower part of the filter tank is gradually reduced to form a funnel shape.

Through adopting above-mentioned technical scheme, such setting of filter tank for the mud sediment that drops can be more concentrated on filter tank's bottommost, thereby after opening the slag discharging valve, the mud sediment can be smoothly discharged in the slag discharging valve and not remain in filter tank.

Preferably, the filter comprises a plurality of groups of filter elements arranged in parallel, and microporous membranes are filled in the filter elements.

Through adopting above-mentioned technical scheme, through the setting of the parallelly connected filter core of multiunit, improved the filtration efficiency of filter, simultaneously microporous membrane is for cotton core, long service life, and filter fineness is high.

Preferably, the pore diameter of the microporous membrane is 0.5 μm.

By adopting the technical scheme, most of the powder after cutting and grinding is larger than 0.5 mu m, so that the powder in the cutting and grinding water can be effectively intercepted through the microporous film with the pore diameter of 0.5 mu m, and the good filtering effect is ensured.

To sum up, the utility model discloses a beneficial technological effect does:

1. water resources are saved, and compressed air is used for cleaning mud cakes;

2. the mud cake cleaning speed is high, and higher filtering efficiency is guaranteed.

Drawings

FIG. 1 is a schematic view of an environment-friendly microporous filtration system for semiconductor cutting and polishing water.

In the figure, 1, a raw liquid tank; 2. a filter assembly; 21. a connecting pipe; 22. a filter; 23. a circulation valve; 24. a flow meter for the filtrate; 25. a circulation pipe; 3. a filtered liquid tank; 31. a water backwash pump; 32. a water backwash pipe; 4. a feedstock pump; 5. a slag discharge valve; 6. a filter tank; 61. a raffinate treatment pump; 62. a residual liquid pipe; 63. a residual liquid spray opening; 64. a raffinate flow meter; 65. an exhaust pipe; 66. an exhaust valve; 67. detecting a flow meter; 68. an auxiliary slag discharge pipe; 69. a waste liquid treatment tank; 7. a blowing assembly; 71 a compressed air storage tank; 72. a positive blowing pipe; 73. a positive blow valve; 74. a blowback pipe; 8. a filter aid tank; 81. a charge pump; 82. a charging circulation valve; 9. a medicine adding tank; 91. a dosing pump; 92. a medicine feeding pipe; a. vibrating the pump; b. and (4) an auxiliary slag discharge valve.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Referring to fig. 1, for the utility model discloses an environment-friendly semiconductor cutting grinding water micro-pore filtration system, including stock solution jar 1, filter tank 6, filtering component 2, filtration fluid jar 3 and feedstock pump 4. The filtering tank 6 is communicated with the filtered liquid tank 3 through the filtering component 2, the raw liquid tank 1 is communicated with the filtering tank 6, and the raw material pump 4 provides power for the raw liquid in the raw liquid tank 1 to flow to the filtered liquid tank 3.

The filter assembly 2 includes a connection pipe 21 and a filter 22, the connection pipe 21 is used for communicating the filtrate tank 3 and the filter tank 6, the connection pipe 21 is suspended on the upper portion of the filter tank 6, and the filter 22 is installed on the lower side of the connection pipe 21 in the filter tank 6. The filter 22 comprises a plurality of groups of filter elements which are arranged in parallel, wherein microporous films are filled in the filter elements, and micropores with the aperture of 0.5 mu m are uniformly distributed on the microporous films.

The connecting pipe 21 is provided with the clear liquid filtering flowmeter 24, the filtering speed can be known through the number indication change of the clear liquid filtering flowmeter 24 through the setting of the clear liquid filtering flowmeter 24, and when the number indication of the clear liquid filtering flowmeter 24 is smaller than a certain preset value, the cleaning of the filter 22 can be indicated.

The diameter of the lower part of the filtering tank 6 is gradually reduced to form a funnel shape, the bottom of the filtering tank 6 is provided with a slag discharge valve 5, and the slag discharge valve 5 is used for discharging waste slag. The filter liquid tank 3 is connected with a water backwashing pump 31, and the water backwashing pump 31 is communicated to the connecting pipe 21 through a water backwashing pipe 32. The filter 22 is backwashed by the water backwashing pump 31, so that sludge in small holes on the filter 22 is flushed out, and simultaneously, mud cakes are flushed from the filter 22, so that the filter assembly 2 can filter smoothly. Meanwhile, the water for backwashing the filter 22 comes from the filter liquor tank 3, so that a water source is not required to be additionally provided, on one hand, the waste of the water is reduced, and on the other hand, the structure of the filtering system is compact, and the use is convenient.

The bottom of the filtering tank 6 is provided with a residual liquid treatment pump 61, the residual liquid treatment pump 61 is communicated to the top of the filtering tank 6 through a residual liquid pipe 62, the end part of the residual liquid pipe 62 is provided with a residual liquid spraying port 63, and the residual liquid spraying port 63 is positioned right above the filter 22. Therefore, the residual liquid can be transported to the upper side of the filter 22 by the residual liquid treating pump 61, the residual liquid pipe 62 and the residual liquid spraying port 63, and the filter 22 is sprayed, so that the surface of the filter 22 is further cleaned, and the residue of the mud cake is reduced. The sprayed residual liquid continuously flows to the bottom of the filter tank 6, and the residual liquid is continuously pumped by the residual liquid treatment pump 61 to circularly spray the filter 22.

The raffinate pipe 62 is provided with a raffinate flowmeter 64, the rate of pumping raffinate by the raffinate treatment pump 61 can be known through the raffinate flowmeter 64 to judge the water content in the raffinate, and when the water content of the raffinate is higher than 80%, the raffinate can be mixed with the stock solution to directly participate in filtration. When the water content of the raffinate is less than 80%, the raffinate needs to be discharged.

The microporous filtering system also comprises an air blowing assembly 7, wherein the air blowing assembly 7 comprises a compressed air storage tank 71, and the compressed air storage tank 71 is communicated into the filtering tank 6 through a positive blowing pipe 72. The positive blowing pipe 72 faces the filter 22, and the positive blowing valve 73 is provided on the positive blowing pipe 72. During forward blowing, the forward blowing pipe 72 faces the filter 22, so that the mud cake on the filter 22 can be dried more quickly, and part of the mud cake is blown off.

The compressed air storage tank 71 is connected to the connecting pipe 21 via a blowback pipe 74, so that blowback of the filter 22 can be performed. On the one hand, the high-pressure air can blow out the sludge blocked in the micropores, and on the other hand, the back blowing can continuously blow off the sludge cake remained on the filter 22.

The top of the filter tank 6 is provided with an exhaust pipe 65 communicated with the filter tank 6, and the exhaust pipe 65 is provided with an exhaust valve 66 and a detection flowmeter 67 for detecting the liquid flow. Through the setting that detects flowmeter 67, can detect the water content in the combustion gas when blowing, therefore after the water content reduces to zero, explain the mud cake and weather completely, carry out the blowback again this moment, can effectively promote the efficiency that the blowback blown off the mud cake.

The micro-pore filtration system also comprises a filter aid tank 8, wherein the filter aid tank 8 is filled with leavening agents, the filter aid tank 8 is connected with a feeding pump 81, and the feeding pump 81 is communicated to the inside of the filtration tank 6. The feed pump 81 is capable of pumping the leavening agent into the filtration tank 6. The swelling agent can block the sludge in the micropores to be quickly dissolved or quickly react to generate soluble substances or be quickly degraded, so that the sludge becomes fine particles with small adhesiveness with the micropores, and the sludge is conveniently taken out of the micropores during back flushing and water back flushing.

The connecting pipe 21 is communicated with a circulating pipe 25, the circulating pipe 25 is communicated to the raw liquid tank 1, and a circulating valve 23 is arranged on one side of the circulating pipe 25 close to the raw liquid tank 1. The filter aid tank 8 is also communicated to the circulating pipe 25, and a feeding circulating valve 82 is arranged between the filter aid tank 8 and the circulating pipe 25.

The connecting pipe 21 is also communicated with a dosing pump 91, and the dosing pump 91 is connected with a dosing tank 9 through a dosing pipe 92. The medicine adding tank 9 is filled with a cosolvent, the cosolvent is acid/alkali/sodium hypochlorite, and the concentration of the acid/alkali/sodium hypochlorite is 1%. The lower part of the filter tank 6 is also provided with an auxiliary slag discharge valve b.

The microporous filtering process for the semiconductor cutting and grinding water comprises the following specific steps:

s1: the stock solution in the stock solution tank 1 enters a filter tank 6, and the stock solution is filtered by a filter 22 and enters a filtered solution tank 3 through a connecting pipe 21;

s2: when mud cakes on the filter 22 need to be cleaned, the vibration pump a is started, the leavening agent in the filter aid tank 8 is added into the filter tank 6 for filtering, and all liquid is discharged into the filter liquor tank 3;

s3: opening a forward blowing valve 73 and an exhaust valve 66, and forward blowing the outside of the filter 22 by using high-pressure air in an air storage tank of a compressed air pipe until the detection flow meter 67 cannot detect that liquid in the exhaust pipe 65 is discharged;

s4: closing the forward blowing valve 73, opening the back blowing valve, and performing back blowing on the filter 22;

s5: the slag discharge valve 5 is opened to discharge slag.

S6: closing the blowback valve and the exhaust valve 66, and performing water backwashing on the filter 22 by using the water backwashing pump 31;

s7: conveying the residual liquid to the upper part of the filter 22 by using a residual liquid treatment pump 61 for spraying;

s8: the residual liquid is sent into the raw liquid tank 1 through a circulating pipe 25 to continuously participate in the normal filtration circulation.

By adopting the above technical scheme, through S1, the stock solution can be filtered, and the filtered liquid is stored in the filtrate tank 3.

Through S2, the leavening agent and the stock solution are added into the filter 22 together, and the leavening agent can block the sludge in the micropores to be quickly dissolved or quickly react to generate soluble substances or be quickly degraded, so that the sludge becomes fine particles with small adhesiveness with the micropores. After the vibration pump a is started, the filter tank 6 and the filter 22 are vibrated, so that the mud cake falls off from the filter 22 after being acted by the leavening agent.

Through S3, utilize the highly-compressed air in the compressed air gas holder 71 to just blow filter 22, highly-compressed air can directly blow off partial mud cake on the one hand, and on the other hand, highly-compressed air can take away the moisture in the mud cake rapidly to make the mud cake dry, reduce its adhesion to filter 22, the fracture is broken even, more is favorable to the clearance of mud cake.

In S4, after the filter 22 is blown forward, the back blowing is performed, so that the high-pressure air can blow out the sludge blocked in the pores, and the back blowing can continuously blow off the sludge cake remaining on the filter 22.

By S5, the residue discharge valve 5 is opened, and most of the cake is already fallen by the forward blowing and the reverse blowing, and most of the cake is discharged out of the filter tank 6.

At S6, the filter 22 is backwashed by the water backwash pump 31, so that sludge in the pores of the filter 22 is flushed out, and the residual sludge cake is flushed from the filter 22, so that the filter assembly 2 can smoothly filter.

Through S7, the residual liquid can be transported to the top of the filter 22 by the arrangement of the residual liquid treating pump 61, the residual liquid pipe 62, and the spray opening, and the filter 22 is sprayed, so that the surface of the filter 22 is further cleaned, and the residue of the mud cake is reduced.

Through S8, the residual liquid only contains a small amount of sludge, so that the residual liquid can be directly added into the raw liquid tank 1 for continuous filtration, thereby recovering the water in the residual liquid and reducing the waste of the water.

When the filtration is still not smooth through multiple forward blowing, reverse blowing and water backwashing, the cosolvent is added into the filter 22 by the dosing pump 91 for backwashing, and acid/alkali/sodium hypochlorite is used for reacting with sludge in the micropores to generate easily-dissolved small particles. In order to avoid the corrosion of acid/alkali/sodium hypochlorite to the filtering system, after the backwashing is finished, the waste liquid is discharged into the waste liquid treatment tank 69 through the auxiliary slag discharge valve b, and then is discharged into a sewage collection pipe network after the neutralization treatment.

The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. An environment-friendly semiconductor cutting and grinding water microporous filtering system comprises a raw liquid tank (1), a filtering tank (6) communicated with the raw liquid tank (1), a filtering component (2) installed in the filtering tank (6), a filtered liquid tank (3) communicated with the filtering component (2) and a raw material pump (4) for providing power for filtering, and is characterized in that the filtering component (2) comprises a connecting pipe (21) for communicating the filtered liquid tank (3) with the filtering tank (6), the connecting pipe (21) is suspended into the filtering tank (6), the connecting pipe (21) is connected with a filter (22) in the filtering tank (6), the microporous filtering system further comprises an air blowing component (7), the air blowing component (7) comprises a compressed air storage tank (71), and the compressed air storage tank (71) is communicated into the filtering tank (6) through a positive blowing pipe (72), the positive blowing pipe (72) is over against the filter (22), a positive blowing valve (73) is arranged on the positive blowing pipe (72), the compressed air storage tank (71) is communicated to the connecting pipe (21) through a back blowing pipe (74), a back blowing valve is arranged on the back blowing pipe (74), and a slag discharging valve (5) is arranged below the filter tank (6).

2. The environment-friendly semiconductor cutting and grinding water microporous filtering system as claimed in claim 1, wherein: the top of the filtering tank (6) is provided with an exhaust pipe (65) communicated with the inside of the filtering tank (6), and the exhaust pipe (65) is provided with an exhaust valve (66).

3. The environment-friendly semiconductor cutting and grinding water microporous filtering system as claimed in claim 2, wherein: and a detection flow meter (67) for detecting the liquid flow is arranged on the exhaust pipe (65).

4. The environment-friendly semiconductor cutting and grinding water microporous filtering system as claimed in claim 1, wherein: and a clear filtrate flowmeter (24) is arranged on the connecting pipe (21).

5. The environment-friendly semiconductor cutting and grinding water microporous filtering system as claimed in claim 1, wherein: the diameter of the lower part of the filtering tank (6) is gradually reduced to form a funnel shape.

6. The environment-friendly semiconductor cutting and grinding water microporous filtering system as claimed in claim 1, wherein: the filter (22) comprises a plurality of groups of filter elements arranged in parallel, and microporous membranes are filled in the filter elements.

7. The environment-friendly semiconductor cutting and grinding water microporous filtering system as claimed in claim 6, wherein: the pore diameter of the microporous membrane is 0.5 mu m.