CN211611685U - Close space sublimation equipment - Google Patents
Close space sublimation equipment Download PDFInfo
- Publication number
- CN211611685U CN211611685U CN201921520056.4U CN201921520056U CN211611685U CN 211611685 U CN211611685 U CN 211611685U CN 201921520056 U CN201921520056 U CN 201921520056U CN 211611685 U CN211611685 U CN 211611685U
- Authority
- CN
- China
- Prior art keywords
- assembled
- water
- cooling
- quartz tube
- space sublimation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a close space sublimation device, which comprises a workbench, wherein a support plate is assembled on the upper surface of the workbench, a movable support frame is assembled on the lower surface of the support plate in a sliding manner, a box body is assembled on the upper surface of the support plate, a quartz tube is assembled in the box body, a substrate and a source groove are assembled in the inner cavity of the quartz tube, a movable plate is assembled on the upper surface of the support plate in a sliding manner, heating devices are assembled on the upper surface of the movable plate and the inner cavity of the box body, cooling devices are assembled on the left surface and the right surface of the quartz tube, and are assembled at the left end and the right end of the quartz tube. The position of the lower end heating lamp group can be moved left and right to be changed into single-station, double-station and three-station close-space sublimation equipment.
Description
Technical Field
The utility model relates to a close space sublimation technology field specifically is a close space sublimation equipment.
Background
The existing near space sublimation equipment mostly adopts a vacuum chamber internal heating mode and a resistance heating mode. The method is not suitable for preparing films of selenium, antimony selenide and cadmium telluride solar cells, and near space equipment on the market at present, and in the deposition process, because the distance between the substrate and the source is very small, the temperature difference between the substrate and the source is difficult to reach 100 ℃, the heating rate is very slow, and the heating uniformity is not good.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a close space sublimation equipment to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a close space sublimation equipment, includes the workstation, the upper surface of workstation is equipped with the backup pad, the lower surface slip of backup pad is equipped with the removal support frame, the upper surface of backup pad is equipped with the box, assemble quartz capsule in the box, and the inner chamber of quartz capsule is equipped with substrate and source groove, the upper surface slip of backup pad is equipped with the movable plate, the upper surface of movable plate and the inner chamber of box all are equipped with heating device, the surface all is equipped with cooling device about the quartz capsule, cooling device assembles both ends about the quartz capsule.
Preferably, the substrate is provided with a thermocouple.
Preferably, the heating device comprises a heating lamp set, and the heating lamp set is assembled in the box body and assembled outside the quartz tube.
Preferably, the movable support frame comprises a sliding frame, a baffle is assembled on the upper surface of the sliding frame, the support frame is assembled on the inner side surface of the baffle, and the quartz tube is assembled on the upper surface of the support frame.
Preferably, the cooling device comprises a water-cooling cavity, the water-cooling cavity is assembled on the upper surface of the support frame, the inner cavity surface of the water-cooling cavity is attached to the outer surface of the quartz tube, and the water-cooling cavity is connected with the quartz tube through a water pipe.
Preferably, the water-cooling the end of intaking of water pipe is equipped with the circulating pump, and the circulating pump assembly is at the inner chamber of workstation, the lower surface of water-cooling cavity all is equipped with the outlet pipe, the inner chamber of workstation is equipped with the connector, the end and the play water piping connection of intaking of connector, and the play water end of connector is connected with the circulating pump.
Compared with the prior art, the beneficial effects of the utility model are that: the method provides a brand new mode for vacuum near-space deposition coating, can save a large amount of deposition coating time cost, greatly prolongs the service life of a heater, improves the temperature difference between a source and a substrate, and improves the heating speed of the substrate of the source.
Drawings
Fig. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a schematic view of the top view structure of the present invention.
Fig. 3 is a left side view structure diagram of the present invention.
Fig. 4 is a schematic diagram of the structure of the substrate and the source tank of the present invention.
In the figure: 1. the device comprises a workbench, 11, a connector, 2, a support plate, 3, a movable support frame, 31, a sliding frame, 31, a baffle, 33, a support frame, 4, a box body, 5, a quartz tube, 51, a substrate, 52, a source groove, 6, an automatic plate, 7, a heating device, 71, a heating lamp group, 8, a cooling device, 81, a water-cooling cavity, 82, a water pipe, 83, a circulating pump, 84 and a water outlet pipe.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a close space sublimation device comprises a workbench 1, a support plate 2 is assembled on the upper surface of the workbench 1, a movable support frame 3 is assembled on the lower surface of the support plate 2 in a sliding manner, a box body 4 is assembled on the upper surface of the support plate 2, a quartz tube 5 is assembled in the box body 4, a substrate 51 and a source groove 52 are assembled in the inner cavity of the quartz tube 5, a movable plate 6 is assembled on the upper surface of the support plate 2 in a sliding manner, heating devices 7 are assembled on the upper surface of the movable plate 6 and the inner cavity of the box body 4, cooling devices 8 are assembled on the left surface and the right surface of the quartz tube 5, the cooling devices 8 are assembled at the left end and the right end of the quartz tube 5, the utility model adopts a vacuum cavity of the quartz tube 5, the cavity can be cylindrical or rectangular, the substrate 51 and the source groove 52 heated by graphite are installed in the cavity, the heater is a special heating lamp bank, install various thermocouples on the substrate 51, one set of substrate is a station with the source groove, the utility model discloses an equipment can be through controlling the position of lower extreme heating banks 71 about, comes the transform to single-position, duplex position, the close space sublimation equipment of three stations.
Specifically, the thermocouple is mounted on the substrate 51, and is a passive sensor, so that no external power supply is needed during measurement, and the use is very convenient.
Specifically, the heating device 7 includes a heating lamp group 71, the heating lamp group 71 is assembled in the cabinet 4 and outside the quartz tube 5, the temperature difference between the substrate and the source, the heating rate, and the uniformity can be achieved by the arrangement of the heating lamp group 71, and the life of the heating member can be greatly extended.
Specifically, the movable support frame 3 comprises a sliding frame 31, a baffle 32 is assembled on the upper surface of the sliding frame 31, a support frame 33 is assembled on the inner side surface of the baffle 32, the quartz tube 5 is assembled on the upper surface of the support frame 33, and the sliding frame 31 is arranged to enable the quartz tube 5 to move left and right so as to change stations conveniently.
Specifically, cooling device 8 includes water-cooling cavity 81, and water-cooling cavity 81 assembles the upper surface at support frame 33, and the inner chamber surface of two water-cooling cavities 81 all laminates with the surface of quartz capsule 5, and two water-cooling cavities 81 are connected through water pipe 82, links together two water-cooling cavities 81 through using water pipe 82, reduces the water supply accessory.
Particularly, the end of intaking of water-cooling water pipe 82 is equipped with circulating pump 83, and circulating pump 83 assembles the inner chamber at workstation 1, and the lower surface of water-cooling cavity 81 all is equipped with outlet pipe 84, and the inner chamber of workstation 1 is equipped with connector 11, and the end of intaking of connector 11 is connected with outlet pipe 84, and the play water end of connector 11 is connected with circulating pump 83, makes cold water circulation through circulating pump 83, reaches the effect of cooling.
The working principle is as follows: the utility model discloses a 5 vacuum chamber on quartz capsule, cavity are the drum type also can be the rectangle, and the substrate 51 and the source groove 52 of installation graphite heating in the cavity, heater are special heating banks 71, and special heating banks 71 is installed outside the vacuum chamber, see through quartz capsule 5 and heat, install various thermocouples on the substrate 51, and one set of substrate is a station with the source groove, the utility model discloses an equipment can be through controlling the position that lower extreme heated banks 71, comes the transform to the simplex position, duplex position, three-station near space sublimation equipment.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. The close-space sublimation equipment comprises a workbench (1) and is characterized in that a supporting plate (2) is assembled on the upper surface of the workbench (1), a movable supporting frame (3) is assembled on the lower surface of the supporting plate (2) in a sliding mode, a box body (4) is assembled on the upper surface of the supporting plate (2), a quartz tube (5) is assembled in the box body (4), a substrate (51) and a source groove (52) are assembled in an inner cavity of the quartz tube (5), a movable plate (6) is assembled on the upper surface of the supporting plate (2) in a sliding mode, heating devices (7) are assembled on the upper surface of the movable plate (6) and the inner cavity of the box body (4), cooling devices (8) are assembled on the left surface and the right surface of the quartz tube (5), and the cooling devices (8) are assembled at the left end and the right end of the.
2. A near space sublimation apparatus according to claim 1, wherein: the substrate (51) is provided with a thermocouple.
3. A near space sublimation apparatus according to claim 1, wherein: the heating device (7) comprises a heating lamp set (71), wherein the heating lamp set (71) is assembled in the box body (4), and the heating lamp set is assembled on the outer side of the quartz tube (5).
4. A near space sublimation apparatus according to claim 1, wherein: remove support frame (3) and include carriage (31), the upper surface of carriage (31) is equipped with baffle (32), the inboard surface of baffle (32) is equipped with support frame (33), and quartz capsule (5) assemble the upper surface at support frame (33).
5. A near space sublimation apparatus according to claim 1, wherein: cooling device (8) include water-cooling cavity (81), water-cooling cavity (81) assemble the upper surface at support frame (33), and two the inner chamber surface of water-cooling cavity (81) all laminates with the surface of quartz capsule (5), two water-cooling cavity (81) is connected through water pipe (82).
6. The close-space sublimation equipment of claim 5, wherein the water-cooling water inlet end of the water pipe (82) is equipped with a circulating pump (83), the circulating pump (83) is assembled in the inner cavity of the workbench (1), the lower surface of the water-cooling cavity (81) is equipped with a water outlet pipe (84), the inner cavity of the workbench (1) is equipped with the connector (11), the water inlet end of the connector (11) is connected with the water outlet pipe (84), and the water outlet end of the connector (11) is connected with the circulating pump (83).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921520056.4U CN211611685U (en) | 2019-09-12 | 2019-09-12 | Close space sublimation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921520056.4U CN211611685U (en) | 2019-09-12 | 2019-09-12 | Close space sublimation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211611685U true CN211611685U (en) | 2020-10-02 |
Family
ID=72617193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921520056.4U Active CN211611685U (en) | 2019-09-12 | 2019-09-12 | Close space sublimation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211611685U (en) |
-
2019
- 2019-09-12 CN CN201921520056.4U patent/CN211611685U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8302554B2 (en) | Apparatus and method for rapid cooling of large area substrates in vacuum | |
| US20190189473A1 (en) | Cooling Member and Vacuum Coating Device | |
| CN211611685U (en) | Close space sublimation equipment | |
| CN103898448B (en) | Chamber and semiconductor processing equipment for adjusting tray temperature | |
| CN212270280U (en) | Annealing furnace cooling device | |
| CN202543323U (en) | Low pressure chemical vapor deposition (LPCVD) preheating cavity temperature control system | |
| CN202380087U (en) | Thermal insulation system for heating cavity | |
| CN204304839U (en) | A kind of temperature difference electricity generation device utilizing solar energy | |
| CN109695061A (en) | Lamp box apparatus, attemperator and annealing furnace apparatus | |
| CN211695451U (en) | Immersion type coil pipe heat exchange solar water heating system | |
| CN103204636B (en) | A kind of transparent conductive oxide coated glass coating wire heating-cooling system | |
| KR101138209B1 (en) | Substrate heating apparatus with cooling device | |
| CN210534302U (en) | Photovoltaic module wet leakage current test water tank | |
| CN107462019B (en) | One-room double-temperature vacuum drying oven and drying method | |
| CN211112099U (en) | Temperature control humidifying device of continuous decarburization annealing furnace | |
| CN209149874U (en) | A kind of cable processing unit (plant) | |
| CN213652267U (en) | Annealing furnace for camera glass lens | |
| CN208462277U (en) | Novel heat pipe type intelligent heat dissipation system | |
| CN109049933A (en) | Photovoltaic solar cell component laminator and laminating machine composite electric heating piece | |
| CN207351011U (en) | A kind of ground air cooling equipment of high temperature melting salt cellar | |
| CN104964557A (en) | Temperature control mechanism of solar drying room | |
| CN217004913U (en) | Novel energy storage type electric module furnace | |
| CN116495365B (en) | Triethyl phosphate production equipment | |
| CN220763463U (en) | Extremely cold and hot mould temperature machine | |
| CN214891874U (en) | Maintenance equipment for electric boiler |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |