CN211588901U - Conical circular seam friction stir welding device for aluminum alloy target - Google Patents
Conical circular seam friction stir welding device for aluminum alloy target Download PDFInfo
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- CN211588901U CN211588901U CN201922056727.2U CN201922056727U CN211588901U CN 211588901 U CN211588901 U CN 211588901U CN 201922056727 U CN201922056727 U CN 201922056727U CN 211588901 U CN211588901 U CN 211588901U
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Abstract
The utility model relates to the semiconductor field, in particular to a conical circumferential weld friction stir welding device of an aluminum alloy target, which comprises a fixed base, a rear pushing device, a front pushing device and a driving device, wherein the front side of the front pushing device is provided with a tensioning sleeve which can rotate and is used for installing the conical target, one end of the tensioning sleeve is provided with a flange plate for installing the conical target, the rear pushing device comprises a tailstock, a pressing component, a movable support and a connecting rod mechanism for forcing the movable support to translate, one side of the movable support, which is opposite to the tensioning sleeve, is provided with a pressing plate which can abut against the tensioning sleeve and rotate along with the tensioning sleeve, the pressing plate and the tensioning sleeve are coaxially arranged, and an angle is arranged between the bottom of the fixed base and the horizontal plane, the utility model can make the angles between a welding device and the horizontal plane more diversified and flexible through bases with different angles, thereby reducing the welding difficulty of the conical target, the welding quality of the conical target is improved.
Description
Technical Field
The utility model relates to a semiconductor field, concretely relates to toper circumferential weld friction stir welding device of aluminum alloy target.
Background
In all applications, the semiconductor industry is the most demanding quality requirements for sputtered target films, and silicon wafer manufacturers demand large size, high purity, low segregation and fine grain for targets, which requires the manufactured targets to have a better microstructure. The crystalline particle diameter and uniformity of the target material have been considered as key factors affecting the deposition rate of the thin film. In addition, the purity of the film is greatly related to the purity of the target, and the required target purity can reach 5N or even more than 6N in the future 0.18um process or even 0.13 mu m process, and the existing target with the purity can hardly meet the process requirements, so that the new target needs to weld the ultra-pure aluminum target with the purity of more than 5N with the conventional 6-series aluminum alloy flange.
Most of the prior welding targets are cylindrical circumferential welds, and the welding surfaces are parallel to the horizontal plane, so that most of the welding devices are horizontal. And the welding surface of the conical target is not parallel to the horizontal plane and forms a certain angle, and related results are not found in the field of welding of conical welding seams of the target.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a toper circumferential weld friction stir welding device of aluminum alloy target.
To achieve the purpose, the utility model adopts the following technical proposal:
the conical circumferential weld friction stir welding device comprises a fixed base, a backward pushing device, a forward pushing device and a driving device, wherein the backward pushing device and the forward pushing device are fixedly arranged at the top of the fixed base, a tensioning sleeve which can rotate and is used for mounting a conical target is arranged on the front side of the forward pushing device, one end of the tensioning sleeve is provided with a flange plate for mounting the conical target, the driving device is arranged on the rear side of the forward pushing device and is in transmission connection with the tensioning sleeve, the backward pushing device comprises a tailstock, a pressing component, a movable support and a connecting rod mechanism for forcing the movable support to translate, the bottom of the movable support is fixedly connected with the fixed base, the pressing component is fixedly arranged at the top of the tailstock, the movable support is positioned between the tailstock and the forward pushing device, the connecting rod mechanism is positioned between the tailstock and the movable base and is connected with the tailstock and the movable base, a pressing plate which can rotate along with the tensioning sleeve is arranged on one side of the movable support, which is opposite to the tensioning sleeve, the pressing plate and the tensioning sleeve are coaxially arranged, and the bottom of the fixed base is arranged at an angle with the horizontal plane.
As an optimal scheme of the conical circumferential weld friction stir welding device for the aluminum alloy target, the forward pushing device comprises a motor support, a abutting cylinder and a pushing plate, the motor support is fixedly arranged at the top of the fixed base, the abutting cylinder is arranged on the inner side of the motor support through an L-shaped angle seat, the pushing plate is positioned on the inner side of one end, close to the pressing plate, of the tensioning sleeve, and an output shaft of the abutting cylinder is fixedly connected with the pushing plate.
As an optimal scheme of the conical circular seam friction stir welding device for the aluminum alloy target, the driving device comprises two rotating motors, the two rotating motors are fixedly arranged on the inner side of a motor support and are symmetrical about a tightly-supporting air cylinder, a turntable bearing is arranged between a tensioning sleeve and the motor support, the inner ring of the turntable bearing is fixedly connected with the side wall of the motor support, the end part of the tensioning sleeve of the outer ring of the turntable bearing is fixedly connected, the outer ring of the turntable bearing is provided with circular teeth, the output shafts of the two rotating motors penetrate through the motor support from inside to outside and are respectively connected with driving gears, and the two driving gears are all meshed with the circular teeth.
As an optimal scheme of the conical circular seam friction stir welding device for the aluminum alloy target, the pressing assembly comprises two pressing cylinders arranged at the top of the tailstock, two parallel first slide rails are arranged on the side wall of the tailstock, a first slider is arranged on each first slide rail, the link mechanism comprises a first hinged seat, a second hinged seat and a connecting rod, the side wall of the first hinged seat is fixedly connected with the first slider, the output shaft of the pressing cylinder penetrates through the top of the tailstock and is connected with the first hinged seat corresponding to the lower side of the tailstock from top to bottom, the second hinged seat is fixedly arranged on one side, close to the tailstock, of the movable support, two ends of the connecting rod are respectively connected with the first hinged seat and the second hinged seat, two second sliders are arranged at the bottom of the movable support, and two second slide rails matched with the second sliders are arranged at the top of the fixed base.
As a preferred scheme of the conical circumferential weld friction stir welding device for the aluminum alloy target, a ball bearing is arranged between the movable support and the pressing plate, the inner ring of the ball bearing is fixedly connected with the side wall of the movable support, and the outer ring of the ball bearing is fixedly connected with the pressing plate.
As an optimal selection scheme of the conical circumferential weld friction stir welding device for the aluminum alloy target, the fixed base is composed of a bottom plate and two side plates, the two side plates are fixedly arranged at the bottom of the bottom plate and are perpendicular to the bottom plate, the two side plates are connected through a plurality of connecting columns, and an inclined plane structure of 5-60 degrees is arranged at one end of the bottom of each side plate.
A welding method of a conical circumferential seam friction stir welding device of an aluminum alloy target material comprises the following steps,
s1: assembling an end plate of the conical target material and a flange plate together, mounting the conical target material on the tensioning sleeve through the flange plate, and clamping the flange plate through an adjusting screw;
s2: compressed air is introduced into the two lower pressing cylinders, the movable support drives the pressing plate to move rightwards through the connecting rod mechanism to press the end plate of the conical target material, the stirring head is inserted into a welding seam between the end plate of the conical target material and the flange plate, and the two rotating motors are started to drive the conical target material to rotate;
s3: after welding is finished, the two rotating motors are stopped, and reverse compressed air is introduced into the two pressing cylinders, so that the pressing plate moves leftwards to loosen the end plate of the conical target;
s4: and loosening the adjusting screw on the tensioning sleeve, and introducing compressed air into the abutting air cylinder, so that the pushing plate moves leftwards to push out the conical target material.
The utility model has the advantages that: assembling an end plate of a conical target material and a flange plate together, installing the conical target material on a tensioning sleeve through the flange plate, clamping the flange plate by an adjusting screw, introducing compressed air into two downward pressing air cylinders, driving a pressing plate to move rightwards through a connecting rod mechanism to press the end plate of the conical target material tightly, inserting a stirring head into a welding seam between the end plate of the conical target material and the flange plate, starting two rotating motors to drive the conical target material to rotate, stopping the two rotating motors after welding is finished, introducing reverse compressed air into the two downward pressing air cylinders to enable the pressing plate to move leftwards to loosen the end plate of the conical target material, finally loosening the adjusting screw on the tensioning sleeve, introducing compressed air into a butting air cylinder to enable a pushing plate to move leftwards to push out the conical target material. The utility model discloses a toper circumferential weld friction stir welding device of aluminum alloy target can make the angle between welding set and the horizontal plane various more nimble through the base of different angles, has reduced the welding degree of difficulty of conical target, has improved the welding quality of conical target.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from these drawings without inventive effort.
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic perspective view of the present invention.
Fig. 3 is a schematic three-dimensional structure of the present invention.
Fig. 4 is a top view of the present invention.
Fig. 5 is a cross-sectional view taken along line C-C of fig. 4.
Fig. 6 is an enlarged view of a portion a in fig. 1.
Fig. 7 is an enlarged view of fig. 2 at B.
In the figure: the device comprises a conical target 1, a fixed base 2, a tensioning sleeve 3, a flange plate 4, a tailstock 5, an inclined plane structure 6, a movable support 7, a pressing plate 8, a motor support 9, a butting cylinder 10, a push-out plate 11, an L-shaped angle seat 12, a rotating motor 13, a turntable bearing 14, a ring gear 15, a driving gear 16, a pressing cylinder 17, a first slide rail 18, a first slide block 19, a first hinging seat 20, a second hinging seat 21, a connecting rod 22, a second slide block 23, a second slide rail 24, a ball bearing 25, a bottom plate 26, a side plate 27 and a connecting column 28.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
Wherein the showings are for the purpose of illustration only and are shown by way of illustration only and not in actual form, and are not to be construed as limiting the present patent; for a better understanding of the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "inner", "outer", etc. are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, it is only for convenience of description and simplification of description, but it is not indicated or implied that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are used only for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms will be understood by those skilled in the art according to the specific circumstances.
In the description of the present invention, unless otherwise explicitly specified or limited, the term "connected" or the like, if appearing to indicate a connection relationship between the components, is to be understood broadly, for example, as being either a fixed connection, a detachable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through one or more other components or may be in an interactive relationship with one another. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 7, the conical circumferential weld friction stir welding device for the aluminum alloy target comprises a fixed base 2, a backward pushing device, a forward pushing device and a driving device, wherein the backward pushing device and the forward pushing device are both fixedly arranged at the top of the fixed base 2, a tensioning sleeve 3 capable of rotating and used for mounting the conical target 1 is arranged at the front side of the forward pushing device, one end of the tensioning sleeve 3 is provided with a flange 4 used for mounting the conical target 1, the driving device is arranged at the rear side of the forward pushing device and is in transmission connection with the tensioning sleeve 3, the backward pushing device comprises a tailstock 5, a downward pressing component, a movable support 7 and a connecting rod 22 mechanism used for forcing the movable support 7 to translate, the bottom of the movable support 7 is fixedly connected with the fixed base 2, the downward pressing component is fixedly arranged at the top of the tailstock 5, the movable support 7 is arranged between the tailstock 5 and the forward pushing device, the connecting rod 22 mechanism is arranged between the tailstock 5 and the movable base and is connected with the tailstock 5, the movable support 7 is provided with a pressing plate 8 which can abut against the tensioning sleeve 3 and rotate along with the tensioning sleeve 3 just at one side of the tensioning sleeve 3, the pressing plate 8 and the tensioning sleeve 3 are coaxially arranged, and the bottom of the fixed base 2 is arranged at an angle with the horizontal plane.
The forward pushing device comprises a motor support 9, a pushing cylinder 10 and a pushing plate 11, wherein the motor support 9 is fixedly arranged at the top of the fixed base 2, the pushing cylinder 10 is arranged on the inner side of the motor support 9 through an L-shaped angle seat 12, the pushing plate 11 is arranged at the inner side of one end, close to the pressing plate 8, of the tensioning sleeve 3, and the output shaft of the pushing cylinder 10 is fixedly connected with the pushing plate 11. After welding is completed, a screw for connecting the conical target 1 is loosened, and the pushing plate 11 is driven to move by the abutting cylinder 10, so that the conical target 1 is pushed out from the tensioning sleeve 3.
The driving device is two rotating electrical machines 13, the two rotating electrical machines 13 are fixedly arranged on the inner side of the motor support 9 and are symmetrical about the abutting cylinder 10, a turntable bearing 14 is arranged between the tensioning sleeve 3 and the motor support 9, the inner ring of the turntable bearing 14 is fixedly connected with the side wall of the motor support 9, the outer ring of the turntable bearing 14 is fixedly connected with the end part of the tensioning sleeve 3, the outer ring of the turntable bearing 14 is provided with ring teeth 15, the output shafts of the two rotating electrical machines 13 penetrate through the motor support 9 from inside to outside and are respectively connected with driving gears 16, and the two driving gears 16 are all meshed with the ring teeth 15. The two driving motors drive the two driving gears 16 to rotate, and the two driving gears drive the outer ring of the turntable bearing 14 engaged with the driving gears to rotate, so as to drive the tensioning sleeve 3 connected with the outer ring of the turntable bearing 14 to rotate.
The push-down assembly comprises two push-down cylinders 17 arranged at the top of the tailstock 5, two parallel first sliding rails 18 are arranged on the side wall of the tailstock 5, each first sliding rail 18 is provided with a first sliding block 19, a connecting rod 22 mechanism comprises a first hinged seat 20, a second hinged seat 21 and a connecting rod 22, the side wall of the first hinged seat 20 is fixedly connected with the first sliding block 19, the output shaft of the push-down cylinder 17 penetrates through the top of the tailstock 5 from top to bottom and is connected with the first hinged seat 20 corresponding to the lower side, the second hinged seat 21 is fixedly arranged on one side, close to the tailstock 5, of the movable support 7, two ends of the connecting rod 22 are respectively connected with the first hinged seat 20 and the second hinged seat 21, the bottom of the movable support 7 is provided with two second sliding blocks 23, and the top of the fixed base 2 is provided with two second sliding rails 24 matched with the second sliding blocks 23. The two push-down cylinders 17 act to drive the first sliding block 19 to move down along the first sliding rail 18, and at the same time, the first hinge base 20 moves down along with the first sliding block 19, and in this process, as the first hinge base 20 moves down, the connecting rod 22 pushes the second hinge base 21, so that the movable support 7 moves horizontally along the second sliding rail 24.
A ball bearing 25 is arranged between the movable support 7 and the pressing plate 8, the inner ring of the ball bearing 25 is fixedly connected with the side wall of the movable support 7, and the outer ring of the ball bearing is fixedly connected with the pressing plate 8. The ball bearing 25 ensures that the pressing plate 8 can rotate along with the conical target 1 after abutting against the conical target 1.
A welding method of a conical circumferential seam friction stir welding device of an aluminum alloy target material comprises the following steps,
s1: assembling an end plate of the conical target material and a flange plate 4 together, mounting the conical target material on the tensioning sleeve 3 through the flange plate 4, and clamping the flange plate 4 by an adjusting screw;
s2: compressed air is introduced into the two downward-pressing air cylinders 17, the movable support 7 drives the pressing plate 8 to move rightwards through the connecting rod 22 mechanism to press the end plate of the conical target material tightly, the stirring head is inserted into a welding line between the end plate of the conical target material and the flange plate 4, and the two rotating motors 13 are started to drive the conical target material to rotate;
s3: after welding is finished, the two rotating motors 13 are stopped, and reverse compressed air is introduced into the two pressing cylinders 17, so that the pressing plate 8 moves leftwards to loosen the end plate of the conical target;
s4: and loosening the adjusting screw on the tensioning sleeve 3, and introducing compressed air into the abutting air cylinder 10, so that the pushing plate 11 moves leftwards to push out the conical target material.
The working principle is as follows: assembling an end plate of a conical target material and a flange plate 4 together, installing the conical target material on a tensioning sleeve 3 through the flange plate 4, clamping the flange plate 4 by an adjusting screw, introducing compressed air to two downward-pressing air cylinders 17, driving a pressing plate 8 to move rightwards through a connecting rod 22 mechanism to tightly press the end plate of the conical target material by a stirring head, inserting the stirring head into a welding seam between the end plate of the conical target material and the flange plate 4, starting two rotating motors 13 to drive the conical target material to rotate, stopping the two rotating motors 13 after welding is finished, introducing reverse compressed air to the two downward-pressing air cylinders 17, so that the pressing plate 8 moves leftwards to loosen the end plate of the conical target material, finally loosening the adjusting screw on the tensioning sleeve 3, introducing compressed air to a abutting air cylinder 10, so that a pushing plate 11 moves leftwards to push out the conical target material.
It should be understood that the above-described embodiments are merely illustrative of the preferred embodiments of the present invention and the technical principles thereof. It will be understood by those skilled in the art that various modifications, equivalents, changes, and the like can be made to the present invention. However, these modifications are within the scope of the present invention as long as they do not depart from the spirit of the present invention. In addition, certain terms used in the specification and claims of the present application are not limiting, but are used merely for convenience of description.
Claims (6)
1. A conical circumferential weld friction stir welding device for aluminum alloy targets is characterized by comprising a fixed base (2), a backward pushing device, a forward pushing device and a driving device, wherein the backward pushing device and the forward pushing device are fixedly arranged at the top of the fixed base (2), the front side of the forward pushing device is provided with a tensioning sleeve (3) which can rotate and is used for mounting a conical target (1), one end of the tensioning sleeve (3) is provided with a flange plate (4) for mounting the conical target (1), the driving device is arranged at the rear side of the forward pushing device and is in transmission connection with the tensioning sleeve (3), the backward pushing device comprises a tailstock (5), a pressing component, a movable support (7) and a connecting rod (22) mechanism for forcing the movable support (7) to translate, the bottom of the movable support (7) is fixedly connected with the fixed base (2), the pressing component is fixedly arranged at the top of the tailstock (5), remove support (7) and be located tailstock (5) and preceding between the pushing away device, connecting rod (22) mechanism is located tailstock (5) and removes between the base and be connected with the two, remove support (7) just to rise one side of tight cover (3) be equipped with can contradict and rise tight cover (3) and along with rising tight cover (3) pivoted pressure strip (8), pressure strip (8) and rise tight cover (3) coaxial line setting, be the angle setting between the bottom of unable adjustment base (2) and the horizontal plane.
2. The conical circumferential weld friction stir welding device of the aluminum alloy target material according to claim 1, wherein the forward pushing device comprises a motor support (9), a pressing cylinder (10) and a pushing plate (11), the motor support (9) is fixedly arranged at the top of the fixed base (2), the pressing cylinder (10) is arranged at the inner side of the motor support (9) through an L-shaped angle seat (12), the pushing plate (11) is arranged at the inner side of one end, close to the pressing plate (8), of the tensioning sleeve (3), and an output shaft of the pressing cylinder (10) is fixedly connected with the pushing plate (11).
3. The conical circumferential weld friction stir welding device of the aluminum alloy target according to claim 2, wherein the driving device is two rotating electrical machines (13), the two rotating electrical machines (13) are fixedly arranged at the inner side of the motor support (9) and are symmetrical with respect to the tightening cylinder (10), a turntable bearing (14) is arranged between the tightening sleeve (3) and the motor support (9), the inner ring of the turntable bearing (14) is fixedly connected with the side wall of the motor support (9), the outer ring of the turntable bearing (14) is fixedly connected with the end of the tightening sleeve (3), the outer ring of the turntable bearing (14) is provided with a ring gear (15), the output shafts of the two rotating electrical machines (13) penetrate through the motor support (9) from inside to outside and are respectively connected with a driving gear (16), and the two driving gears (16) are both meshed with the ring gear (15).
4. The conical circumferential weld friction stir welding device of the aluminum alloy target according to claim 1, wherein the pressing assembly comprises two pressing cylinders (17) disposed at the top of the tail seat (5), the side wall of the tail seat (5) is provided with two parallel first slide rails (18), each first slide rail (18) is provided with a first slider (19), the connecting rod (22) mechanism comprises a first hinge seat (20), a second hinge seat (21) and a connecting rod (22), the side wall of the first hinge seat (20) is fixedly connected with the first slider (19), the output shaft of the pressing cylinder (17) passes through the top of the tail seat (5) from top to bottom and is connected with the corresponding first hinge seat (20) below, the second hinge seat (21) is fixedly disposed at one side of the movable support (7) close to the tail seat (5), and two ends of the connecting rod (22) are respectively connected with the first hinge seat (20) and the second hinge seat (21), two second sliding blocks (23) are arranged at the bottom of the movable support (7), and two second sliding rails (24) matched with the second sliding blocks (23) are arranged at the top of the fixed base (2).
5. The conical circumferential seam friction stir welding device of the aluminum alloy target material according to claim 1, wherein a ball bearing (25) is arranged between the movable support (7) and the pressing plate (8), an inner ring of the ball bearing (25) is fixedly connected with a side wall of the movable support (7), and an outer ring of the ball bearing is fixedly connected with the pressing plate (8).
6. The conical circumferential weld friction stir welding device of the aluminum alloy target material according to claim 1, wherein the fixed base (2) is composed of a bottom plate (26) and two side plates (27), both the two side plates (27) are fixedly arranged at the bottom of the bottom plate (26) and are perpendicular to the bottom plate (26), the two side plates (27) are connected through a plurality of connecting columns (28), and one end of the bottom of each side plate (27) is provided with a 5-60-degree inclined surface structure (6).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922056727.2U CN211588901U (en) | 2019-11-25 | 2019-11-25 | Conical circular seam friction stir welding device for aluminum alloy target |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922056727.2U CN211588901U (en) | 2019-11-25 | 2019-11-25 | Conical circular seam friction stir welding device for aluminum alloy target |
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| CN211588901U true CN211588901U (en) | 2020-09-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115229324A (en) * | 2022-08-31 | 2022-10-25 | 宁波江丰电子材料股份有限公司 | Repair welding method for aluminum alloy back plate |
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2019
- 2019-11-25 CN CN201922056727.2U patent/CN211588901U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115229324A (en) * | 2022-08-31 | 2022-10-25 | 宁波江丰电子材料股份有限公司 | Repair welding method for aluminum alloy back plate |
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Effective date of registration: 20230420 Address after: Room 3, No. 99, Shaojing Road, Kunshan Development Zone, Suzhou City, Jiangsu Province, 215333 Patentee after: Suzhou Wanzhi New Energy Technology Co.,Ltd. Address before: 215300 room 10, 188 Xijiang Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee before: KUNSHAN WORLD-WIDE SPECIAL WELDING CO.,LTD. |
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