CN211575176U - Ignition control system of semiconductor equipment - Google Patents
Ignition control system of semiconductor equipment Download PDFInfo
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- CN211575176U CN211575176U CN201922471404.XU CN201922471404U CN211575176U CN 211575176 U CN211575176 U CN 211575176U CN 201922471404 U CN201922471404 U CN 201922471404U CN 211575176 U CN211575176 U CN 211575176U
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- mass flow
- flow controller
- valve
- ignition
- combustion
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Abstract
The utility model discloses a semiconductor equipment ignition control system, including ignition, gas branch road and combustion-supporting thing branch road all are connected with ignition, the gas branch road includes filter, hand valve one, solenoid valve one and mass flow controller one, the filter connects gradually hand valve one, solenoid valve one and mass flow controller one, the combustion-supporting thing branch road includes hand valve two, solenoid valve three and mass flow controller two, hand valve two connects gradually solenoid valve three and mass flow controller two. The mass flow controller is used for precisely measuring and controlling the mass flow of the fuel gas and the combustion supporter, so that the fuel gas and the combustion supporter can enter the burner according to the proportion, the fuel gas can be fully combusted, and unnecessary consumption is reduced; the pressure sensor monitors the pressure state of the pipeline in real time, and prevents the leakage caused by overlarge pressure of a branch; the first electromagnetic valve and the second electromagnetic valve are connected in series to perform double isolation protection on the fuel gas loop.
Description
Technical Field
The utility model relates to a semiconductor production field, concretely relates to semiconductor device ignition control system.
Background
In the process of producing semiconductors, high temperature is needed to oxidize raw materials, so a gas combustion control system is used, the existing gas combustion control system is single in design and only monitors important parts, but the combustion condition of the combustion part is not detected and controlled, and if the gas and a comburent are not proportioned according to a proportion, fuel is wasted and combustion is insufficient.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a semiconductor equipment ignition control system to solve among the prior art gas burning insufficient, the problem of extravagant raw materials.
The ignition control system of the semiconductor equipment comprises an ignition device, a gas branch and a combustion-supporting object branch, wherein the gas branch and the combustion-supporting object branch are connected with the ignition device, the gas branch comprises a filter, a hand valve I, an electromagnetic valve I and a mass flow controller I, the filter is sequentially connected with the hand valve I, the electromagnetic valve I and the mass flow controller I, the combustion-supporting object branch comprises a hand valve II, an electromagnetic valve III and a mass flow controller II, and the hand valve II is sequentially connected with the electromagnetic valve III and the mass flow controller II.
Preferably, the ignition device comprises a burner, an ignition controller and an ignition transformer, and the burner is electrically connected with the ignition controller and the ignition transformer.
Preferably, the first mass flow controller is connected with an air inlet of the burner, and the second mass flow controller is connected with an air inlet of the burner.
Preferably, a second electromagnetic valve is connected between the first electromagnetic valve and the first mass flow controller.
Preferably, a first pressure sensor is installed on a pipeline between the filter and the first hand valve, and a second pressure sensor is installed on a pipeline between the second hand valve and the third electromagnetic valve.
The utility model has the advantages that: the mass flow controller is used for precisely measuring and controlling the mass flow of the fuel gas and the combustion supporter, so that the fuel gas and the combustion supporter can enter the burner according to the proportion, the fuel gas can be fully combusted, and unnecessary consumption is reduced; the filter filters impurities in the fuel gas to prevent other impurities from influencing the flame temperature of the burner; the pressure sensor monitors the pressure state of the pipeline in real time, and prevents the gas and the combustion supporter from leaking and exploding due to overlarge pressure of the gas and the combustion supporter branch, so that the personal safety is endangered; manually cutting off gas and comburent under tight conditions by using a hand valve; the first electromagnetic valve and the second electromagnetic valve are connected in series to perform double isolation protection on the fuel gas loop.
Drawings
Fig. 1 is a schematic diagram of the system of the present invention.
The system comprises a filter 1, a pressure sensor 2, a pressure sensor 3, a hand valve 4, an electromagnetic valve 5, an ignition controller 6, an ignition transformer 7, an electromagnetic valve II, a mass flow controller 8, a burner 9, a hand valve 10, a pressure sensor II, an electromagnetic valve III, and a mass flow controller 13.
Detailed Description
The following detailed description of the embodiments of the present invention will be provided to help those skilled in the art understand the concept and technical solutions of the present invention more completely, accurately and deeply.
As shown in fig. 1, the ignition control system for the semiconductor equipment comprises an ignition device, a gas branch and a comburent branch, wherein the gas branch and the comburent branch are connected with the ignition device, the gas branch comprises a filter 1, a hand valve I3, an electromagnetic valve I4 and a mass flow controller I8, the filter 1 is sequentially connected with the hand valve I3, the electromagnetic valve I4 and the mass flow controller I8, the comburent branch comprises a hand valve II 10, an electromagnetic valve III 12 and a mass flow controller II 13, and the hand valve II 10 is sequentially connected with the electromagnetic valve III 12 and the mass flow controller II 13.
The ignition device comprises a burner 9, an ignition controller 5 and an ignition transformer 6, wherein the burner 9 is electrically connected with the ignition controller 5 and the ignition transformer 6.
The first mass flow controller 8 is connected with an air inlet of the burner 9, and the second mass flow controller 13 is connected with an air inlet of the burner 9.
And a second electromagnetic valve 7 is connected between the first electromagnetic valve 4 and the first mass flow controller 8.
And a first pressure sensor 2 is arranged on a pipeline between the filter 1 and the first hand valve 3, and a second pressure sensor 11 is arranged on a pipeline between the second hand valve 10 and the third electromagnetic valve 12.
The utility model discloses a theory of operation and process are as follows:
respectively setting flow values of a first mass flow controller 8 and a second mass flow controller 13 according to a proportion, enabling gas to sequentially pass through a filter 1, a first hand valve 3, a first electromagnetic valve 4, a second electromagnetic valve 7 and a first mass flow controller 8 from a pipeline and enter a burner 9, enabling comburent to sequentially pass through a second hand valve 10, a third electromagnetic valve 12 and a second mass flow controller 13 from the pipeline and enter the burner 9, respectively monitoring pressure conditions of a gas branch and a comburent branch by a first pressure sensor 2 and a second pressure sensor 11, when the fuel gas and the comburent respectively pass through the first mass flow controller 8 and the second mass flow controller 13, the mass flow controller detects the flow and compares it with a set value to adjust a valve in the mass flow controller, thereby controlling the flow rate of the gas flowing through the pipeline to be equal to the set flow rate, mixing and burning the gas and the comburent in the burner 9, and spraying the fire by the burner 9 under the control of the ignition controller 5 and the ignition transformer 6.
The above description is made for the exemplary purposes with reference to the accompanying drawings, and it is obvious that the present invention is not limited by the above embodiments, and various insubstantial improvements can be made without modification to the present invention.
Claims (5)
1. A semiconductor device ignition control system characterized by: including ignition, gas branch road and combustion-supporting thing branch road all are connected with ignition, the gas branch road includes filter (1), hand valve (3), solenoid valve (4) and mass flow controller (8), filter (1) connects gradually hand valve (3), solenoid valve (4) and mass flow controller (8), the combustion-supporting thing branch road includes hand valve two (10), solenoid valve three (12) and mass flow controller two (13) are connected gradually in hand valve two (10).
2. The semiconductor device ignition control system according to claim 1, characterized in that: the ignition device comprises a burner (9), an ignition controller (5) and an ignition transformer (6), wherein the burner (9) is electrically connected with the ignition controller (5) and the ignition transformer (6).
3. The semiconductor device ignition control system according to claim 1, characterized in that: the first mass flow controller (8) is connected with an air inlet of the burner (9), and the second mass flow controller (13) is connected with an air inlet of the burner (9).
4. The semiconductor device ignition control system according to claim 1, characterized in that: and a second electromagnetic valve (7) is connected between the first electromagnetic valve (4) and the first mass flow controller (8).
5. The semiconductor device ignition control system according to claim 1, characterized in that: a first pressure sensor (2) is installed on a pipeline between the filter (1) and the first hand valve (3), and a second pressure sensor (11) is installed on a pipeline between the second hand valve (10) and the third electromagnetic valve (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922471404.XU CN211575176U (en) | 2019-12-31 | 2019-12-31 | Ignition control system of semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922471404.XU CN211575176U (en) | 2019-12-31 | 2019-12-31 | Ignition control system of semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211575176U true CN211575176U (en) | 2020-09-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922471404.XU Active CN211575176U (en) | 2019-12-31 | 2019-12-31 | Ignition control system of semiconductor equipment |
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| CN (1) | CN211575176U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113464975A (en) * | 2021-07-19 | 2021-10-01 | 中国石油天然气股份有限公司 | Ignition gun |
-
2019
- 2019-12-31 CN CN201922471404.XU patent/CN211575176U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113464975A (en) * | 2021-07-19 | 2021-10-01 | 中国石油天然气股份有限公司 | Ignition gun |
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| CP03 | Change of name, title or address |
Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd. Address before: 100000 block a, 14 / F, courtyard 8, Liangshuihe Second Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd. |