CN211552023U

CN211552023U - In-line fluid heater

Info

Publication number: CN211552023U
Application number: CN201890000659.9U
Authority: CN
Inventors: B.福尔克纳; C.特纳; J.格克; B.斯潘塞
Original assignee: Edwards Vacuum LLC
Current assignee: Edwards Vacuum LLC
Priority date: 2017-03-23
Filing date: 2018-03-21
Publication date: 2020-09-22
Anticipated expiration: 2028-03-21
Also published as: US20180274817A1; WO2018172954A1; GB2561016A; GB201705946D0; EP3601898A1; KR20190002838U; TWI762604B; TW201901098A

Abstract

Disclosed is an in-line fluid heater comprising: an inlet operable to receive a fluid to be heated; a base defining at least one conduit fluidly coupled with the inlet to receive a fluid; a positive thermal coefficient heater thermally coupled to the substrate and operable to heat the substrate so as to provide a heated fluid by heating the fluid within the at least one conduit; and an outlet fluidly coupled with the at least one conduit and operable to provide a heated fluid, wherein the substrate defines a plurality of conduits fluidly coupled with the inlet and outlet, and wherein the plurality of conduits intersect. In this way, a compact, cost effective and efficient heater is provided which avoids the need for a safety device or safety circuit since positive thermal coefficient heaters are self limiting.

Description

In-line fluid heater

Technical Field

The utility model relates to a fluid heating.

Background

Fluid heating is well known in the industry. The fluid may need to be heated for many different purposes. One such purpose is to heat fluids for use in chemical processing. It is often desirable to increase the temperature of the fluid to make the fluid more effective during chemical processing. Although liquid heaters exist, they each have their own drawbacks. Accordingly, it is desirable to provide an improved fluid heater.

SUMMERY OF THE UTILITY MODEL

According to a first aspect, there is provided an in-line fluid heater having: an inlet operable to receive a fluid to be heated; a base defining at least one conduit fluidly coupled with the inlet to receive a fluid; a positive thermal coefficient heater thermally coupled to the substrate and operable to heat the substrate so as to provide a heated fluid by heating the fluid within the at least one conduit; and an outlet fluidly coupled with the at least one conduit and operable to provide a heated fluid, wherein the substrate defines a plurality of the conduits fluidly coupled with the inlet and the outlet, and wherein the plurality of conduits intersect.

The first aspect recognises that a problem with existing fluid heaters is that they tend to be space intensive, inefficient, lack cost effective and often require safety devices or circuits to ensure safe operation. Accordingly, a fluid heater is provided. The fluid heater may be configured as an inline device that heats the fluid as it flows from the source to the destination. The heater may include an inlet to receive fluid for heating. The heater may also include a substrate or body defining or providing one or more conduits or channels in fluid communication with the inlet such that fluid may flow from the inlet to the conduits. The heater may also comprise a positive thermal coefficient heater. The positive thermal coefficient heater may be in thermal contact with the substrate. The positive thermal coefficient heater may heat the substrate to heat the fluid flowing within the conduit. The heater may also include an outlet. The outlet may be in fluid communication with the conduit such that heated fluid may flow from the conduit to the outlet. The base may define a plurality of conduits. A plurality of conduits may be fluidly coupled with the inlet and the outlet. The plurality of conduits intersect, interconnect, or cross. Thus, some conduits may each carry fluid from an inlet to an outlet with fluid flowing between the conduits. In this way, a compact, cost effective and efficient heater is provided which avoids the need for a safety device or safety circuit since positive thermal coefficient heaters are self limiting. Increasing the number of conduits helps to reduce the pressure drop between the inlet and outlet and increase the heating efficiency.

In another embodiment, the conduit extends within the substrate. Providing a conduit within or enclosed by the substrate helps to contain the fluid and can provide a simplified outer envelope of the substrate.

In further embodiments, some of the conduits are parallel. Thus, some conduits may each carry fluid from the inlet to the outlet independently of each other.

In yet another embodiment, the conduit is at least one of an elongated conduit and a serpentine conduit. Providing a non-linear conduit between the inlet and outlet extends the residence or residence time of the fluid within the heater and provides a more compact arrangement.

In further embodiments, the matrix includes at least one of a mesh and a fiber defining the conduit and encapsulated within the matrix housing. Thus, the conduit may be provided by a mesh or fibres contained within the matrix housing. Again, this helps to maximise residence time and increases heat transfer between the heater and the fluid.

In one embodiment, the substrate defines an internal cavity having opposing major faces, the substrate having a plurality of posts extending between the opposing major faces to define the plurality of conduits. Thus, the base may be formed with an internal cavity. The posts, posts or protrusions may extend into the internal cavity. The presence of the posts divides the lumens to create intersecting conduits through which fluid flows. The posts provide an efficient way of transferring heat from the positive thermal coefficient heater to the fluid and aid in fluid mixing.

In one embodiment, the post has a cross-sectional shape of at least one of a circle, an ellipse, a crescent, and a polygon. The shape of the pillars affects the interface area with the fluid and helps to direct the fluid flow.

In one embodiment, the post has an elongated cross-sectional shape. Elongated or linear cross-section posts are particularly effective in directing fluid flow.

In one embodiment, the post is tapered. The tapered post is particularly suitable for additive manufacturing.

In one embodiment, the post is positioned to at least one of direct and oriented to direct the fluid flow within the lumen. The post may be positioned or rotated to affect the flow of fluid.

In one embodiment, the posts are equally spaced (evenly distributed) within the lumen. Thus, the pillars can be uniformly distributed with a constant inter-pillar spacing.

In another embodiment, the substrate defines at least one face that receives a positive thermal coefficient heater. Thus, the heater may be provided on one or more faces of the substrate. Further, more than one heater may be provided on each face.

In yet another embodiment, the substrate defines a plurality of faces that receive a plurality of positive thermal coefficient heaters. Thus, one or more heaters may be provided on multiple faces of the substrate.

In further embodiments, the substrate is elongated and planar and is received between a plurality of positive thermal coefficient heaters. Thus, the substrate may be sandwiched between several heaters.

In one embodiment, the substrate is non-planar. Thus, the substrate may deviate from a plane and may be castellated, curved or even folded. The substrate may be sandwiched between several heaters.

In another embodiment, the substrate receives at least one positive thermal coefficient heater between faces of the non-planar substrate. Thus, any one heater may be in contact with multiple faces of a non-planar substrate. Again, this helps to improve heat transfer between the heater and the substrate.

In further embodiments, the substrate is folded and at least one positive thermal coefficient heater is received between the folds.

In another embodiment, the at least one face is roughened to receive a thermal bonding material between the face and the positive thermal coefficient heater. Roughening the surface provides improved heat transfer through the bonding material.

In yet another embodiment, the positive thermal coefficient heater includes a positive thermal coefficient heater element contained within a thermally conductive housing.

In further embodiments, the inlet defines an inlet chamber fluidly coupling an inlet aperture operable to receive fluid with the at least one conduit.

In another embodiment, the outlet defines an outlet chamber fluidly coupling the at least one conduit with an outlet aperture operable to provide the heated fluid.

In yet another embodiment, the substrate is at least partially one of a 3D printed substrate and an extruded substrate. Thus, a portion may be either 3D printed or extruded, or both 3D printed and extruded.

In another embodiment, the in-line fluid heater comprises a plurality of said inlets, each inlet being fluidly coupled to an associated at least one conduit defined by said base, each associated at least one conduit being fluidly coupled to an associated outlet. Thus, the base body may be provided with more than one inlet. Each inlet may be connected to a separate set of conduits. In other words, the separate inlets may feed separate conduits such that the fluids provided by those separate inlets are isolated from each other and do not mix. Each of those separate sets of conduits may then be coupled with an associated outlet. Thus, different fluids may be provided to the inlets, through their own conduits, and different heated fluids provided at the respective outlets. This enables a single in-line fluid heater to heat multiple different fluids simultaneously.

In another embodiment, each inlet is coupled to one of the same and different at least one conduit. Thus, each set of ducts connected to the relative inlet may have its own configuration adapted to the requirements of the fluid to be heated. For example, a fluid that requires less heating and/or has a lower flow rate may have fewer conduits in its set than a fluid that requires more heating and/or has a higher flow rate; for those fluids, more conduits may be provided and/or the conduits may be longer to increase their residence time and/or the power of nearby heaters may be higher.

According to a second aspect, there is provided an in-line fluid heater having: an inlet operable to receive a fluid to be heated; a base defining at least one conduit fluidly coupled with the inlet to receive a fluid; a positive thermal coefficient heater thermally coupled to the substrate and operable to heat the substrate so as to provide a heated fluid by heating the fluid within the at least one conduit; and an outlet fluidly coupled with the at least one conduit and operable to provide heated fluid.

In an embodiment, the in-line fluid heater of the second aspect comprises the features of the first aspect set out above.

Further specific and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and with features other than those explicitly set out in the claims.

Where an apparatus feature is described as being operable to provide a function, it will be appreciated that this includes an apparatus feature that provides that function or that is adapted or configured to provide that function.

Other preferred and/or optional aspects of the invention are defined in the appended claims.

Drawings

For a better understanding of the present invention, embodiments thereof, given by way of example only, will now be described with reference to the accompanying drawings, in which:

figures 1A and 1B illustrate an in-line fluid heater according to one embodiment of the present invention;

fig. 2A to 2F show an inline fluid heater according to the related art;

FIGS. 3A and 3B illustrate an in-line fluid heater according to the related art;

figure 4 shows an in-line fluid heater according to another embodiment of the present invention; and

figure 5 shows an in-line fluid heater according to yet another embodiment of the present invention.

Detailed Description

Before discussing the embodiments in more detail, an overview will first be provided. Embodiments provide a fluid heater. Typically, a fluid heater is placed in-line between the fluid inlet and the fluid outlet to heat the fluid as it flows from the source or supply to the destination. Such fluid heaters may be used to heat various fluids (both liquids and gases), such as may be used, for example, to heat gases used in semiconductor process exhaust gas management. The fluid heater has an inlet that receives a fluid to be heated and an outlet that provides the heated fluid. The base, body or member is provided with one or more conduits, channels or bores fluidly coupling the inlet with the outlet. A heater, such as a positive thermal coefficient heater, is thermally coupled to and heats the member to heat the fluid as it flows through the conduit within the member. More than one inlet may be provided, coupled to its own set of conduits within the matrix, to provide heating of individual fluids within a single matrix. The sets of conduits may be common or of different configurations. The conduit sets may also share or have individual heaters. This provides a safe, efficient and compact way of conveniently heating the fluid.

Fluid heater

Fig. 1A and 1B illustrate an in-line fluid heater (generally 10) according to one embodiment. The in-line fluid heater 10 has an inlet port 20 and an outlet port 40 disposed on the body 30. In this embodiment, the body 30 has a generally box-like planar configuration. The body 30 is thin and elongated, having both rectangular faces and a cross section. The body 30 has a first major surface 30A and a second major surface 30B connected by

minor surfaces

30C, 30D. The inlet port 20 has a coupling 20A positioned coaxially and surrounding a tube 20B. The tube 20B defines a closed cylindrical lumen extending from the coupler 20A and terminating within the tube 20B. A similar arrangement exists on the outlet port 40-a cylindrical lumen 40C can be seen in fig. 1A.

A plurality of open cylindrical lumens (not shown) extend along the elongate length of the body 30 between the inlet port 20 and the outlet port 40. The catheter fluidly couples the cylindrical lumen within tube 20B with cylindrical lumen 40C within tube 40B.

Heater elements

50A, 50B are thermally coupled to major faces 30A, 30B, respectively. The

heater elements

50A, 50B have

metal shells

55A, 55B, each shell holding a positive thermal coefficient heater (not shown). Each

heater element

50A, 50B has a heater coupler 60A, the heater couplers 60A being coupled with a pair of

power feed lines

65A, 66A and 65B, 66B, respectively, that supply power to the

heater elements

50A, 50B.

In operation, gas to be heated is provided at the inlet port 20 and passes through the cylindrical lumen within the tube 20B. The gas within the cylindrical cavity is then free to enter each conduit extending through the body 30.

Power is supplied via

power cables

65A, 66A and 65B, 66B via heater coupling 60A, and the temperature of

heater elements

50A, 50B increases. The

heater elements

50A, 50B are thermally coupled with the

metal cases

55A, 55B, and thus the temperature of the

metal cases

55A, 55B also increases. This in turn heats the main surfaces 30A, 30B, which heats the body 30. Thus, fluid passing through the conduit within the body is heated as it flows along the elongate length of the body from the inlet port 20 to the outlet port 40. The heated fluid then exits the outlet port 40.

It should be appreciated that thermal glue, surface finish, and/or thermal epoxy may be used to enhance the thermal coupling between the components of the in-line fluid heater 10. Further, it should be appreciated that heating may occur in both directions, and fluid may be supplied to the outlet port 40 and heated fluid exits the inlet 20.

3D prints heater

Figures 2A to 2F show an in-line fluid heater (generally 10') according to the related art (the heater element is omitted for clarity). Fig. 2A is a side view. Fig. 2B is an end view. Fig. 2C is a sectional view taken along line a-a of fig. 2B. Fig. 2D is a sectional view taken along line B-B of fig. 2B. Fig. 2E is an enlarged view of detail C of fig. 2C. Fig. 2F is an enlarged view of detail D of fig. 2C. The body 30 'is formed of 3D printed aluminum and has parallel extending conduits 35' along its elongate length. The tubes 20B ', 40B ' are elongated and are formed with the body 30 '. The body 30' has a roughened surface that is machined near the coupling (not shown).

Heater structure

Fig. 3A and 3B (section B-B through fig. 3A) show an inline fluid heater (generally 10 "') according to the related art (the heater element is omitted for clarity). The body 30 "'has parallel extending conduits 35"' along its elongate length. The tubes 20B ' ' ', 40B ' ' ' are elongated and are formed with the body 30' ' '.

In the test, an in-line heater having an elongated length of about 115 mm, a width between minor faces of about 16 mm and a distance between major faces of about 1.8mm, with 13 parallel conduits extending along the elongated length of the body of about 1 mm in diameter, and with 200 watt positive thermal coefficient heaters on each major face heated the gas flow from the environment to 210 ℃ when the gas is flowing at 10 standard liters per minute (SLM), to 180 ℃ when the gas is flowing at 50 standard liters per minute and to 155 ℃ when the gas is flowing at 90 standard liters per minute. When no flow occurs, the heating element is stabilized at 240 ℃.

Multi-fluid heater

FIG. 4 illustrates an in-line heater according to one embodiment. In this embodiment, a generally 10' ' ' inline heater is provided as part of the head assembly of the abatement device. A plurality of inlet ports 20 "'a-20"' C are provided, each coupled to a source of fluid to be heated. In this embodiment, the body 30' ″ is formed as part of the waterhead assembly from 3D printed aluminum and has a conduit (not shown) extending therethrough. Each inlet port 20 "'a-20"' C is coupled to its own conduit set. The size, number and configuration of conduits are selected based on the heating requirements of each fluid. A plurality of outlet ports 40 "'a-40"' C are provided which provide respective heated fluids. In this embodiment, separate heating elements are provided for each set of conduits, however, it should be appreciated that a common heating element may be provided.

Column heater

FIG. 5 is a plan cross-section (generally 10' ' ') (with the heater element omitted for clarity) showing an inline heater according to one embodiment. The body 30 "'is formed of 3D printed aluminum and has a cavity 100"' formed therein. The chamber 100 "' fluidly couples the inlet port 20" ' with the outlet port 30 "'. The chamber 100 "' has side walls 110" ', 120 "' extending between major faces that receive the heater elements in a manner similar to that shown in figure 1. Posts 130 "' and 140" ' extend across the chamber 100 "' between the major faces. The posts 130 "'are distributed within the chamber 100"'. In this example, the posts 130 "'are arranged in rows and have offset or staggered columns to provide equal spacing between the posts 130"'. The post 130'' '' is cylindrical (typically conical) having a circular cross-section. The post 140 "'is elongated and is located within the chamber 100"' at a location where it is desired to block or redirect fluid flow. The orientation of the posts 140'' '' is selected to provide a desired direction of fluid flow. The posts 130 "', 140"' define a plurality of intersecting conduits 35 "'extending through the chamber 1000"'.

In operation, fluid is introduced through inlet port 20' ' ' ' '. Fluid enters the chamber 100 "'and is directed along intersecting conduits 35"', by the posts 130 "', 140"'. Heat is transferred from the heating element through the major face into the posts 130 "'and 140"' to heat the fluid. The residence time of the fluid within the chamber 100 "' is affected by the shape, size, location and orientation of the posts 130" ' and 140 "'. In one embodiment, only one type of column is used within the chamber. In other embodiments, more than one type of column is used within the chamber. The heated fluid exits through the outlet port 30'' '' ''. It should be appreciated that the location and orientation of the inlet port 20 "'and outlet port 30"' may be selected to suit the requirements. It has been found that this embodiment has significantly reduced pressure losses and significantly increased heat transfer. It will be appreciated that a hybrid approach combining the individual conduits shown in figures 2 and 3 with the intersecting conduits shown in figure 5 is possible.

In an embodiment, the inline heater is 3D metal printed. Other embodiments have non-linear conduits, such as serpentine conduits. Furthermore, the conduits need not be parallel, but may intersect. Further, the body may not be provided with a different conduit, but may have a porous member, such as a mesh or fabric, sealed within a non-porous shell. In embodiments, the body itself may be non-planar and may be folded or deflected with the heating element sandwiched or held by the change in direction of the body.

Embodiments use a multiport extrusion (MPE) to maximize heat transfer area and provide a low cost heat transfer device to heat gas/fluid using a Positive Thermal Coefficient (PTC) heater.

Existing heating solutions tend to be too large, require many safety devices/circuits, and are too expensive. Embodiments provide a small, compact and intrinsically safe apparatus for heating a gas. The embodiments are only a small fraction of the cost and have a very significant increase in safety over existing in-line arrangements of resistive heating elements.

Embodiments use MPE attached to a manifold to which tubes or pipes can be attached to flow gas and/or liquid through ports and heat the gas/fluid as it passes through. Thermal epoxy or other methods are used to secure the PTC heater to both sides or one side of the MPE to serve as a heat source for heating the gas/fluid. One example would be N for heating 50 SLM₂The apparatus of (1). In one embodiment this is achieved by a device with parallel extending 12 ports, each 1 mm in diameter, extruded or 3D printed, with slotted ¼ "aluminium tubes on both ends and MPE soldered/welded/fixed into the slots to allow gas/fluid to easily enter and exit the manifold.

The use of MPE from the HVAC industry coupled with PTC provides an intrinsically safe and efficient method for heating gas/fluids. Unexpectedly, these devices are low cost and have very low pressure drops.

Embodiments may be used in a controlled or uncontrolled manner for any gas/fluid heating needs. Embodiments may be used in laboratories and any industry that needs or may need an in-line heating solution. Depending on the fluid or gas used, some material changes may be required to the multiport tube, but this approach will still work.

Embodiments are particularly beneficial for emission reduction, as space constraints are often very tight. Embodiments may also be used in pumps for heat seal cleaning and other such situations. Embodiments may be used anywhere a heated gas or fluid is required.

Although illustrative embodiments of the present invention have been disclosed in detail herein with reference to the accompanying drawings, it is to be understood that the invention is not limited to those precise embodiments, and that various changes and modifications can be effected therein by one skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

Claims

1. An in-line fluid heater comprising:

(a) an inlet operable to receive a fluid to be heated;

(b) a base defining at least one conduit fluidly coupled with the inlet to receive the fluid;

(c) a positive thermal coefficient heater thermally coupled to the substrate and operable to heat the substrate so as to provide a heated fluid by heating the fluid within the at least one conduit; and

(d) an outlet fluidly coupled with the at least one conduit and operable to provide the heated fluid, wherein the substrate defines a plurality of the conduits fluidly coupled with the inlet and the outlet, and wherein the plurality of conduits intersect.

2. The in-line fluid heater of claim 1, wherein the conduit extends within the base.

3. The in-line fluid heater of claim 1, wherein the conduits are parallel.

4. The in-line fluid heater of claim 1, wherein the conduit is at least one of an elongated conduit and a serpentine conduit.

5. The in-line fluid heater of claim 1, wherein the matrix comprises at least one of a mesh and fibers defining the conduit and encapsulated within a matrix housing.

6. The in-line fluid heater of claim 1, wherein the substrate defines an internal cavity having opposing major faces, the substrate having a plurality of posts extending between the opposing major faces to define the plurality of conduits.

7. The in-line fluid heater of claim 6, wherein the post has a cross-sectional shape of at least one of a circle, an ellipse, a crescent, and a polygon.

8. The in-line fluid heater of claim 6, wherein the post has an elongated cross-sectional shape.

9. The in-line fluid heater of claim 6, wherein the post is tapered.

10. The in-line fluid heater of claim 6, wherein the post is at least one of positioned and oriented to direct the flow of the fluid within the internal cavity.

11. The in-line fluid heater of claim 6, wherein the posts are equally spaced within the internal cavity.

12. The in-line fluid heater of claim 1, wherein the base defines at least one face that receives the positive thermal coefficient heater.

13. The in-line fluid heater of claim 1 wherein said substrate defines a plurality of faces that receive a plurality of said positive thermal coefficient heaters.

14. The in-line fluid heater of claim 1, wherein the substrate is elongated and flat and is received between a plurality of the positive thermal coefficient heaters.

15. The in-line fluid heater of claim 1, wherein the substrate is non-planar.

16. The in-line fluid heater of claim 15, wherein the substrate receives at least one of the positive thermal coefficient heaters between faces of the non-planar substrate.

17. The in-line fluid heater of claim 10, wherein the base is folded and at least one of the positive thermal coefficient heaters is received between folds.

18. The in-line fluid heater of claim 1, wherein the at least one face is roughened to receive a thermal bonding material between the face and the positive thermal coefficient heater.

19. The in-line fluid heater of claim 1, wherein the positive thermal coefficient heater comprises a positive thermal coefficient heater element contained within a thermally conductive housing.

20. The in-line fluid heater of claim 1, wherein the inlet defines an inlet chamber fluidly coupling an inlet aperture operable to receive the fluid with the at least one conduit.

21. The in-line fluid heater of claim 1, wherein the outlet defines an outlet chamber fluidly coupling the at least one conduit with an outlet aperture operable to provide the heated fluid.

22. The in-line fluid heater of claim 1, wherein the substrate is at least partially one of a 3D printed substrate and an extruded substrate.

23. The in-line fluid heater of claim 1, comprising a plurality of said inlets, each inlet fluidly coupled with an associated at least one conduit defined by the substrate, each associated at least one conduit fluidly coupled with an associated outlet.

24. The in-line fluid heater of claim 18, wherein each inlet is coupled to one of the same and different at least one conduit.