CN211540878U

CN211540878U - Inner wall treatment device for bell jar of polycrystalline silicon reduction furnace

Info

Publication number: CN211540878U
Application number: CN201922374453.1U
Authority: CN
Inventors: 任长春; 张宝顺; 史正斌; 何乃栋; 王志权
Original assignee: Qinghai Asia Silicon Silicon Material Engineering Technology Co Ltd; Asia Silicon Qinghai Co Ltd
Current assignee: Qinghai Asia Silicon Materials Co.,Ltd.
Priority date: 2019-12-26
Filing date: 2019-12-26
Publication date: 2020-09-22
Anticipated expiration: 2029-12-26

Abstract

The utility model discloses a polycrystalline silicon reduction furnace bell jar inner wall processing apparatus, comprises a workbench, the upper end fixedly connected with backup pad of workstation, the upper end outside fixedly connected with of workstation keeps off the ring, the fixed grafting in outside lower part that keeps off the ring has the discharging pipe, the bell jar has been placed to the upper end of backup pad, it has the feed cylinder to peg graft through the bearing in the middle part of workstation, the fixed grafting in right side wall of feed cylinder has the shower nozzle, the outside lower part fixedly connected with gear ring of feed cylinder, the outside meshing of gear ring is connected with the gear, the fixed grafting in middle part of gear has driving motor, driving motor's lower extreme passes through the lower extreme left side of connecting plate fixed connection at the workstation. The device for treating the inner wall of the bell jar of the polycrystalline silicon reduction furnace has the advantages that the whole equipment is simple and convenient to operate, the process is simplified, and the treatment on the inner wall of the bell jar of the reduction furnace is quicker and more efficient through the integral structure of the equipment.

Description

Inner wall treatment device for bell jar of polycrystalline silicon reduction furnace

Technical Field

The utility model relates to the technical field of equipment surface treatment, in particular to a device for treating the inner wall of a bell jar of a polycrystalline silicon reduction furnace.

Background

The manufacturing industry is changed from high-speed development to high-quality fine and green development. In industrial production activities, the cleanliness of the inner walls of process equipment is generally used as an important process index and control point in order to ensure smooth material transportation, guarantee product quality and save energy consumption. Especially in the polysilicon manufacturing industry, the cleaning of the inner wall of the bell jar of the reduction furnace directly affects the quality of the final product, and meanwhile, as a thermal deposition reactor with the highest production power consumption and specific gravity of polysilicon, the inner wall of the thermal deposition reactor is smooth and clean, so that the reduction power consumption can be effectively reduced, while the common cleaning mode of the reduction furnace has slower processing speed and lower integral automation degree. Therefore, a device for treating the inner wall of the bell jar of the polycrystalline silicon reduction furnace is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a polycrystalline silicon reduction furnace bell jar inner wall processing apparatus to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a device for treating the inner wall of a bell jar of a polycrystalline silicon reduction furnace comprises a workbench, wherein a supporting plate is fixedly connected to the upper end of the workbench, a baffle ring is fixedly connected to the outer side of the upper end of the workbench, a discharging pipe is fixedly inserted and connected to the lower part of the outer side of the baffle ring, a bell jar is placed at the upper end of the supporting plate, a feeding pipe is inserted and connected to the middle part of the workbench through a bearing, a nozzle is fixedly inserted and connected to the right side wall of the feeding pipe, a gear ring is fixedly connected to the lower part of the outer side of the feeding pipe, a gear is engaged and connected to the outer side of the gear ring, a transmission motor is fixedly inserted and connected to the middle part of the gear, the lower end of the transmission motor is fixedly connected to the left side of the lower end of the workbench through a connecting plate, a feeding pipe is inserted and connected to the, the feed inlet is inserted and connected to the right side of the upper end of the storage shell, an arc groove is formed in the upper end of the feed pipe, an arc ring is movably inserted and connected inside the arc groove, and the upper end of the arc ring is fixedly connected to the lower portion of the inner cavity of the feed pipe.

Preferably, the feeding pipe penetrates through the middle part of the support plate in a movable insertion mode.

Preferably, the number of the spray heads is at least 5, the spray heads are inserted into the side wall of the feeding pipe at equal intervals, an included angle of 45 degrees exists between the spray head at the upper end and the horizontal plane, and the spray heads are communicated with the inner cavity of the feeding pipe.

Preferably, at least 1 discharge pipe is arranged, and the discharge pipes are inserted in the lower part of the outer side of the baffle ring in an annular array.

Preferably, the upper end surface of the supporting plate is in a step shape, and at least 8 rectangular grooves are formed in the upper end surface of the supporting plate in an annular array.

Compared with the prior art, the beneficial effects of the utility model are that: the device for treating the inner wall of the bell jar of the polycrystalline silicon reduction furnace can realize high efficiency, high automation and pollution-free sand blasting of the bell jar of the reduction furnace through the integral structure of the equipment, has simple and convenient operation of the integral equipment, simple process, clean production, easy realization and high production practicability, and can treat the inner wall of the bell jar of the reduction furnace more cleanly, cleanly and uniformly; through the structure that is equipped with the backup pad, can satisfy placing of not unidimensional bell jar.

Drawings

Fig. 1 is a sectional view of the present invention;

fig. 2 is an enlarged view of the position M of the present invention.

In the figure: 1 workstation, 2 backup pads, 3 keep off the ring, 4 discharging pipes, 5 bell jars, 6 feed pipes, 7 shower nozzles, 8 gear rings, 9 gears, 10 driving motor, 11 inlet pipes, 12 storage casings, 13 feed inlets, 14 circular arc rings, 15 circular arc grooves.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a polycrystalline silicon reduction furnace bell jar inner wall processing apparatus, includes workstation 1, the lower extreme four corners fixedly connected with supporting leg of workstation 1, the upper end fixedly connected with backup pad 2 of workstation 1, the waste material of collection sandblast that backup pad 2 can be convenient, 2 upper ends of backup pad are the echelonment, 2 upper ends of backup pad are personally submitted the annular array and are opened 8 rectangular channels at least, and the rectangular channel can make the sandblast flow to the outside of bell jar 5. The utility model discloses a waste material storage device, including workstation 1, baffle ring 3, discharging pipe 4, the last ooff valve that is equipped with of discharging pipe 4, discharging pipe 4 is the export of waste material, and discharging pipe 4 is equipped with 1 at least, discharging pipe 4 is the annular array and pegs graft in the outside lower part that keeps off ring 3, keeps off the space that ring 3 encloses and can store the waste material, keep off the fixed grafting in the outside lower part of ring 3. A bell jar 5 is placed at the upper end of the supporting plate 2, after sand blasting and cleaning are conducted inside the bell jar 5, the smooth finish of the inner side wall of the bell jar 5 can be detected through an external smooth finish induction detection device, a feeding pipe 6 is inserted in the middle of the workbench 1 through a bearing, the feeding pipe 6 is used for being connected with a spray head 7, and the feeding pipe 6 penetrates through the middle of the supporting plate 2 in a movable insertion mode. The spray head 7 is fixedly inserted into the right side wall of the feeding pipe 6, the spray head 7 is used for firstly spraying sand to clean material residues and oxide layers on the inner surface of the bell jar through sand spraying, then cleaning water is sprayed out again, at least 5 spray heads are arranged, the spray heads 7 are inserted into the side wall of the feeding pipe 6 at equal intervals, the spray head 7 at the upper end and the horizontal plane form a 45-degree included angle, the spray head 7 and the horizontal plane form a 45-degree included angle to enable sand spraying to the upper end of the inner cavity of the bell jar 5, and the spray head 7 is communicated with the inner cavity of the feeding pipe 6. The lower part of the outer side of the feeding pipe 6 is fixedly connected with a gear ring 8, the outer side of the gear ring 8 is engaged and connected with a gear 9, the gear 9 can drive the gear ring 8 to rotate, so that the feeding pipe 6 rotates, the middle part of the gear 9 is fixedly inserted and connected with a transmission motor 10, the transmission motor 10 adopts a common servo motor in the market, the transmission motor 10 is externally connected with a power supply through a switch, the transmission motor 10 is used for driving the gear 9 to rotate, the lower end of the transmission motor 10 is fixedly connected to the left side of the lower end of the workbench 1 through a connecting plate, the lower end of the feeding pipe 6 is inserted and connected with a feeding pipe 11 through a bearing seal, the right end of the feeding pipe 11 is respectively connected with a storage shell 12 through two pipelines, the pipelines are respectively provided with a switch valve and a pressure pump, the storage shells 12 are provided with 2, the feed inlet 13 is inserted and connected to the right side of the upper end of the material storage shell 12, the feed inlet 13 is an adding port of materials, the upper end of the feed pipe 11 is provided with an arc groove 15, an arc ring 14 is inserted and connected to the inner portion of the arc groove 15 movably, the sealing degree of the joint of the feed pipe 6 and the feed pipe 11 can be increased due to the cooperation of the arc groove 15 and the arc ring 14, and the upper end of the arc ring 14 is fixedly connected to the lower portion of the inner cavity of the feed pipe 6.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a polycrystalline silicon reduction furnace bell jar inner wall processing apparatus, includes workstation (1), its characterized in that: the upper end of the workbench (1) is fixedly connected with a supporting plate (2), the outer side of the upper end of the workbench (1) is fixedly connected with a retaining ring (3), the lower part of the outer side of the retaining ring (3) is fixedly inserted with a discharging pipe (4), the upper end of the supporting plate (2) is placed with a bell jar (5), the middle part of the workbench (1) is inserted with a feeding pipe (6) through a bearing, the right side wall of the feeding pipe (6) is fixedly inserted with a spray head (7), the lower part of the outer side of the feeding pipe (6) is fixedly connected with a gear ring (8), the outer side of the gear ring (8) is engaged and connected with a gear (9), the middle part of the gear (9) is fixedly inserted with a transmission motor (10), the lower end of the transmission motor (10) is fixedly connected to the left side of the lower end of the workbench (1) through a connecting plate, the lower end of the, the right-hand member of inlet pipe (11) is connected with storage casing (12) respectively through two pipelines, and all is equipped with ooff valve and force (forcing) pump on the pipeline, the upper end right side of storage casing (12) is pegged graft and is had feed inlet (13), open the upper end of inlet pipe (11) has circular arc groove (15), the inside activity of circular arc groove (15) is pegged graft and is had circular arc ring (14), the upper end fixed connection of circular arc ring (14) is in the inner chamber lower part of feed pipe (6).

2. The inner wall treatment device for the bell jar of the polycrystalline silicon reduction furnace according to claim 1, which is characterized in that: the feeding pipe (6) penetrates through the middle part of the support plate (2) in a movable insertion mode.

3. The inner wall treatment device for the bell jar of the polycrystalline silicon reduction furnace according to claim 1, which is characterized in that: the spray heads (7) are at least 5, the spray heads (7) are inserted into the side wall of the feeding pipe (6) at equal intervals, an included angle of 45 degrees exists between the spray head (7) at the upper end and the horizontal plane, and the spray heads (7) are communicated with the inner cavity of the feeding pipe (6).

4. The inner wall treatment device for the bell jar of the polycrystalline silicon reduction furnace according to claim 1, which is characterized in that: the number of the discharge pipes (4) is at least 1, and the discharge pipes (4) are inserted into the lower part of the outer side of the baffle ring (3) in an annular array.

5. The inner wall treatment device for the bell jar of the polycrystalline silicon reduction furnace according to claim 1, which is characterized in that: the upper end surface of the supporting plate (2) is in a step shape, and the upper end surface of the supporting plate (2) is in an annular array and is at least provided with 8 rectangular grooves.