CN211529964U - Annealing furnace with auxiliary heating device - Google Patents
Annealing furnace with auxiliary heating device Download PDFInfo
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- CN211529964U CN211529964U CN202020528717.4U CN202020528717U CN211529964U CN 211529964 U CN211529964 U CN 211529964U CN 202020528717 U CN202020528717 U CN 202020528717U CN 211529964 U CN211529964 U CN 211529964U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses an annealing stove with auxiliary heating device, the induction cooker comprises a cooker bod, the quartz capsule, former heat source, auxiliary heat source and temperature control device, former heat source is the heating wire of spiral winding on the furnace inner wall, auxiliary heat source is located the reacting chamber, the quartz capsule is located the furnace body, the furnace body both ends are equipped with end cover and furnace gate respectively, the end cover, the closed area that furnace gate and quartz capsule enclose constitutes the reacting chamber, auxiliary heat source is a plurality of convex heating pipes, a plurality of convex heating pipes are arranged along reacting chamber axial interval, the opening of convex heating pipe is down. The utility model discloses increase auxiliary heat source in the reacting chamber, to the boat body close range heating in the reacting chamber, the heating power of heating furnace silk reduces, reduces the use amount of heating furnace silk, and auxiliary heat source is convex heating pipe or annular heating pipe, can require along the density difference of axial distribution according to the reacting chamber axial temperature, and the density through the heating pipe changes the temperature of the different warm areas of furnace body, is favorable to better accuse temperature, promotes the technology effect.
Description
Technical Field
The utility model relates to a photovoltaic cell production facility especially relates to an annealing stove with auxiliary heating device.
Background
Solar energy is inexhaustible clean energy in the nature, and the photovoltaic cell can convert the solar energy into electric energy, so that the photovoltaic cell has wide application prospect. In the production process of the photovoltaic cell, annealing (and diffusion) is an important process in the production process of the photovoltaic cell, and a reaction chamber is a reaction site of a process. Annealing is different from a surface coating process (performed in a PECVD reaction chamber), the temperature of the annealing process is generally 900 ℃, the temperature of the surface coating process is generally 450 ℃, the annealing has higher requirement on the temperature of a furnace wire, the furnace wire with larger diameter is selected, the same length has smaller resistance value to improve the power, so that more furnace wires are consumed, and the heat absorption capacity of the furnace wire in the temperature rising process is increased. The heat of the reaction chamber of the existing annealing furnace is derived from the heating of furnace wires, and the furnace wires with the diameter of 8mm are generally adopted, so that the quantity of the furnace wires is more, the furnace body is heavier, and the furnace wires absorb more heat in the temperature rise process.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome the not enough of prior art, provide a use amount that reduces the heating furnace silk, change the temperature of the different warm areas of furnace body, be favorable to better accuse temperature, promote the annealing stove that has auxiliary heating device of technology effect.
In order to solve the technical problem, the utility model discloses a following technical scheme:
the annealing furnace with the auxiliary heating device comprises a furnace body, a quartz tube, an original heat source, an auxiliary heat source and a temperature control device for controlling the original heat source and the auxiliary heat source, wherein the original heat source is a heating furnace wire spirally wound on the inner wall of the furnace body, the auxiliary heat source is positioned in a reaction chamber, the quartz tube is positioned in the furnace body, two ends of the furnace body are respectively provided with an end cover and a furnace door, a closed area formed by the end cover, the furnace door and the quartz tube forms the reaction chamber, the auxiliary heat source is a plurality of arc-shaped heating tubes, the arc-shaped heating tubes are arranged at intervals along the axial direction of the reaction chamber, and openings of the arc-shaped.
As a further improvement of the above technical solution:
the arc heating pipe is installed through at least two support bars, the support bars are provided with a plurality of clamping grooves along the axial direction of the reaction chamber, the arc heating pipe is clamped in the clamping grooves, and two ends of the support bars are respectively fixed on the end cover and the furnace door.
The arc heating pipe is provided with a condenser surface for condensing heat to the center of the arc.
The arc-shaped heating pipe comprises an outer pipe sleeve and a heating wire, the heating wire is positioned in the outer pipe sleeve, and the condenser lens is positioned in the outer pipe sleeve.
The surface of the arc heating pipe facing the inner wall of the quartz tube is a cylindrical surface, and the cylindrical surface can be attached to the inner wall surface of the quartz tube in a surface-to-surface contact mode.
The plurality of circular arc-shaped heating pipes are arranged at intervals along the axial direction of the reaction chamber.
The anode of each circular heating pipe is connected with one lamp tube lead wire, and the cathode of each circular heating pipe is connected with the other lamp tube lead wire.
The furnace body is characterized in that an outer thermocouple is arranged on the outer wall of the furnace body, an inner thermocouple is arranged in the reaction chamber, the inner thermocouple is arranged in parallel along the axial direction of the reaction chamber, and the inner thermocouple and the outer thermocouple are both connected with a temperature control device.
The annealing furnace with the auxiliary heating device comprises a furnace body, a quartz tube, a primary heat source, an auxiliary heat source and a temperature control device for controlling the primary heat source and the auxiliary heat source, wherein the primary heat source is a heating furnace wire spirally wound on the inner wall of the furnace body, the auxiliary heat source is positioned in a reaction chamber, the quartz tube is positioned in the furnace body, two ends of the furnace body are respectively provided with an end cover and a furnace door, a closed area defined by the end cover, the furnace door and the quartz tube forms the reaction chamber, the auxiliary heat source is a plurality of annular heating tubes, and the annular heating tubes are axially arranged at intervals along the reaction chamber.
As a further improvement of the above technical solution:
the annular heating pipe is provided with a condenser surface for condensing heat to the center of the arc.
Compared with the prior art, the utility model has the advantages of:
(1) the utility model discloses an annealing stove with auxiliary heating device, increase the auxiliary heat source in the reacting chamber, to the boat body close range heating in the reacting chamber, the inner wall of furnace body is equipped with the heating furnace silk simultaneously, heat the reacting chamber jointly, increase the auxiliary heat source, the heating power of heating furnace silk reduces, thereby reduce the use amount of heating furnace silk, reduce the heat absorption of furnace silk, promote the rate of heating up, improve energy utilization, thereby realize the promotion of productivity, specific auxiliary heat source is convex heating pipe or annular heating pipe, the heating pipe can be the equipartition in the axial, can also be according to the reacting chamber axial temperature requirement, the density that the convex heating pipe distributes along the axial can be different, the part that the temperature requirement is high is arranged densely, the part that the temperature requirement is low is arranged sparsely, the temperature of the different warm districts of furnace body is changed through placing the density of heating pipe, the process effect is improved.
(2) The utility model discloses an annealing stove with auxiliary heating device sets up the condenser mirror surface in the heating pipe, concentrates the heat of heating pipe to the boat body that is located the center, and the heating utilizes the height, improves heating efficiency.
Drawings
FIG. 1 is a front view of an annealing furnace according to embodiment 1 of the present invention.
Fig. 2 is a right side view (opening of the door) of the annealing furnace of embodiment 1 of the present invention.
Fig. 3 is a schematic structural view of a circular arc-shaped heating pipe and a supporting bar in example 1 of the present invention.
Fig. 4 is a schematic structural view of a single circular arc heating pipe in embodiment 1 of the present invention.
Fig. 5 is a schematic view of the internal structure of a circular arc heating pipe in example 1 of the present invention.
Fig. 6 is a schematic diagram showing the operation of the condenser lens in embodiment 1 of the present invention.
Fig. 7 is a schematic structural view of a circular arc-shaped heating pipe and a supporting bar in example 2 of the present invention.
Fig. 8 is a schematic view of the internal structure of a circular arc heating pipe in example 2 of the present invention.
FIG. 9 is a schematic structural diagram of the annular heating tube and the supporting bar in example 3 of the present invention.
FIG. 10 is a schematic view showing the structure of the annular heating tube and the supporting bar in example 4 of the present invention.
The reference numerals in the figures denote:
1. a primary heat source; 2. an auxiliary heat source; 201. an opening; 202. a condenser mirror surface; 203. a lamp tube lead; 204. a cylindrical surface; 21. a circular heating pipe; 211. sleeving a pipe sleeve; 212. heating wires; 22. an annular heating pipe; 3. a furnace body; 31. a furnace door; 32. an end cap; 4. a reaction chamber; 5. a boat body; 6. a quartz tube; 7. a supporting strip; 71. a card slot; 81. an external thermocouple; 82. an internal thermocouple.
Detailed Description
The invention is described in further detail below with reference to the drawings and specific examples.
As shown in fig. 1 to 6, the annealing furnace with the auxiliary heating device of the present embodiment includes a furnace body 3, a quartz tube 6, a primary heat source 1, an auxiliary heat source 2, and a temperature control device for controlling the primary heat source 1 and the auxiliary heat source 2, wherein the primary heat source 1 is a heating wire spirally wound on an inner wall of the furnace body 3, the quartz tube 6 is located in the furnace body 3, two ends of the furnace body 3 are respectively provided with an end cover 32 and a furnace door 31, a reaction chamber 4 is formed by a closed region surrounded by the end cover 32, the furnace door 31, and the quartz tube 6, and the auxiliary heat source 2 is located in the reaction chamber 4.
In this embodiment, the auxiliary heat source 2 is 11 circular heating pipes 21, and the circular heating pipes 21 are infrared heating pipes. 11 circular heating pipes 21 are arranged at intervals along the axial direction of the reaction chamber 4, and the openings 201 of the circular heating pipes 21 are downward. The circular arc heating pipes 21 are installed through 6 support bars 7, the support bars 7 are provided with a plurality of clamping grooves 71 along the axial direction of the reaction chamber 4, the circular arc heating pipes 21 are clamped in the clamping grooves 71, and two ends of each support bar 7 are respectively fixed on the end cover 32 and the furnace door 31. When the furnace is used, the furnace door 31 is opened, the supporting bar 7 close to the end of the furnace door 31 is stabilized, the preheated boat body 5 passes through the circular heating pipe 21 and is placed into the reaction chamber 4, the circular heating pipe 21 is sleeved on the periphery of the boat body 5, then the furnace door 31 is closed, and the supporting bar 7 is fixed on the furnace door 31 while the furnace door 31 is closed. The number of the circular arc heating pipes 21 is not limited, and may be less than 11 or more than 11 in other embodiments, specifically designed according to the size of the reaction chamber 4 and the size of the boat 5. The number of the supporting strips 7 is not limited, and in other embodiments, there may be less than 6 or more than 6.
The opening 201 of the circular heating tube 21 is disposed downward (the opening 201 is substantially downward, and may be downward or obliquely downward), the bottom of the reaction chamber 4 is provided with an electrode holder (not shown), the boat 5 is supported on the electrode holder, and the opening 201 is disposed to avoid interference with the electrode holder. The auxiliary heat source 2 is the structure of the arc-shaped heating pipes 21, the arc-shaped heating pipes 2 can be uniformly distributed in the axial direction, the density of the arc-shaped heating pipes 21 in the axial direction can be different according to the axial temperature requirement of the reaction chamber 4, the part with high temperature requirement is densely distributed, the part with low temperature requirement is sparsely distributed, the distribution of the heating pipes at the furnace opening can be more dense, on one hand, the compensation furnace door 31 is opened for heat dissipation, on the other hand, the process gas enters the end and is preheated in advance for the process gas, the temperature in the reaction chamber is controlled more accurately, and the process effect is improved. The temperature of different temperature areas of the furnace body is changed by placing the density of the heating pipes, so that better temperature control is facilitated, and the process effect is improved. This is because the linear lamp tube in example 5 described below cannot be controlled in the axial direction with precision.
In this embodiment, the circular arc heating tube 21 includes an outer tube cover 211 and a heating wire 212, the heating wire 212 is located in the outer tube cover 211, and the condenser lens 202 is located in the outer tube cover 211. The circular arc heating pipe 21 is provided with a condenser lens 202 for condensing heat toward the center of the circular arc, and as shown in fig. 6, the condenser lens 202 condenses heat toward the focal point P at the center, and the boat 5 is disposed at the focal point P, so that the condenser lens 202 is positioned in the pipe outer cover 211 for easy installation and installation, and the heat of the heating wire 212 is condensed toward the boat 5, thereby improving heating efficiency. It should be noted that in other embodiments, the condenser lens 202 may be disposed outside the tube jacket 211 and fixed to the supporting bar 7. In order to facilitate the installation of the circular arc heating tube 21, the surface of the circular arc heating tube 21 facing the inner wall of the quartz tube 6 is set to be a cylindrical surface 204, and the cylindrical surface 204 can be attached to the inner wall surface of the quartz tube 6 in a surface-to-surface contact manner (the cross section of the circular arc heating tube 21 has a straight line segment), so that the installation stability is improved. With this structure, the supporting strip 7 is located inside the circular heating tube 21, i.e. the locking groove 71 faces outwards.
In this embodiment, the positive electrode of each circular heating tube 21 is connected to one lamp lead 203, and the negative electrode of each circular heating tube 21 is connected to the other lamp lead 203. The arc heating pipes 21 are connected in parallel, so that the heating power is high and the heating effect is better.
In this embodiment, an outer thermocouple 81 is disposed on the outer wall of the furnace body 3, an inner thermocouple 82 is disposed in the reaction chamber 4, the inner thermocouple 82 is disposed in parallel along the axial direction of the reaction chamber 4, and both the inner thermocouple 82 and the outer thermocouple 81 are connected to a temperature control device. The temperature of the outer thermocouple 81, which is inserted into the furnace body 3 from the thermocouple seat along the radius direction, is measured at the position close to the outer wall of the quartz tube 6, while the temperature of the inner thermocouple 82, which is inserted from the furnace door 31 and is lifted into the quartz tube 6 and close to the lower part of the boat body 5, is closer to the real temperature of the reaction chamber 4, either mode or simultaneous working can be selected, but the temperature measurement function of the inner thermocouple 82 is mainly the inner thermocouple 82, the inner thermocouple 82 is a linear type, and temperature measurement sensors are distributed on the upper surface of the inner thermocouple, so that the temperature at different points can be.
Example 2
As shown in fig. 7 and 8, the annealing furnace of the present embodiment is different from embodiment 1 in that:
in this embodiment, the supporting bar 7 is located outside the circular heating pipe 21, the locking groove 71 faces inward, and the cross section of the circular heating pipe 21 is circular without the cylindrical surface 204 in embodiment 1. Collector mirror 202 is also disposed within tube jacket 211.
The annealing furnace of this example also employs the heating control method of example 1, and the rest of the parts which are not described are basically the same as example 1, and are not described again here.
Example 3
As shown in fig. 9, the annealing furnace of the present embodiment is different from embodiment 1 in that:
in this embodiment, the auxiliary heat source 2 is 10 closed annular heating pipes 22, and the structure of the annular heating pipe 22 is identical to that of the circular arc heating pipe 21, and only the difference between closed and non-closed is included. The condenser mirror 202 is also disposed within the jacket of the annular heating tube 22. In other embodiments, the condenser lens 202 may be disposed outside the tube jacket
The rest parts which are not described are the same as the annealing furnace structure of the embodiment 1, and the description is omitted.
Example 4
As shown in fig. 10, the present embodiment is different from embodiment 3 in that:
in this embodiment, the supporting bars are located outside the annular heating pipe 22, and the locking grooves 71 face inward.
The rest parts which are not described are the same as the annealing furnace structure of the embodiment 3, and the description is omitted.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention. The technical solution of the present invention can be used by anyone skilled in the art to make many possible variations and modifications, or to modify equivalent embodiments, without departing from the scope of the technical solution of the present invention, using the technical content disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments by the technical entity of the present invention should fall within the protection scope of the technical solution of the present invention.
Claims (10)
1. An annealing furnace with an auxiliary heating device is characterized in that: the furnace comprises a furnace body (3), a quartz tube (6), a primary heat source (1), an auxiliary heat source (2) and a temperature control device for controlling the primary heat source (1) and the auxiliary heat source (2), wherein the primary heat source (1) is a heating furnace wire spirally wound on the inner wall of the furnace body (3), the auxiliary heat source (2) is positioned in a reaction chamber (4), the quartz tube (6) is positioned in the furnace body (3), two ends of the furnace body (3) are respectively provided with an end cover (32) and a furnace door (31), a closed area defined by the end cover (32), the furnace door (31) and the quartz tube (6) forms the reaction chamber (4), the auxiliary heat source (2) is a plurality of arc-shaped heating tubes (21), the arc-shaped heating tubes (21) are axially arranged at intervals along the reaction chamber (4), and openings (201) of the arc-shaped heating tubes (21) face downwards.
2. The annealing furnace with the auxiliary heating apparatus according to claim 1, wherein: the arc heating pipe (21) is installed through at least two support bars (7), the support bars (7) are axially provided with a plurality of clamping grooves (71) along the reaction chamber (4), the arc heating pipe (21) is clamped in the clamping grooves (71), and two ends of the support bars (7) are respectively fixed on the end cover (32) and the furnace door (31).
3. The annealing furnace with the auxiliary heating apparatus according to claim 1, wherein: the arc heating pipe (21) is provided with a condenser surface (202) which condenses heat to the center of the arc.
4. The annealing furnace with the auxiliary heating apparatus according to claim 3, characterized in that: the arc-shaped heating pipe (21) comprises an outer pipe sleeve (211) and a heating wire (212), the heating wire (212) is positioned in the outer pipe sleeve (211), and the condenser lens surface (202) is positioned in the outer pipe sleeve (211).
5. The annealing furnace with the auxiliary heating apparatus according to any one of claims 1 to 4, wherein: the surface of the arc heating pipe (21) facing the inner wall of the quartz tube (6) is a cylindrical surface (204), and the cylindrical surface (204) can be attached to the inner wall surface of the quartz tube (6) in a surface-to-surface contact mode.
6. The annealing furnace with the auxiliary heating apparatus according to any one of claims 1 to 4, wherein: the plurality of circular arc heating pipes (21) are arranged at intervals along the axial direction of the reaction chamber (4).
7. The annealing furnace with the auxiliary heating apparatus according to any one of claims 1 to 4, wherein: the anode of each circular heating tube (21) is connected with one lamp tube lead wire (203), and the cathode of each circular heating tube (21) is connected with the other lamp tube lead wire (203).
8. The annealing furnace with the auxiliary heating apparatus according to any one of claims 1 to 4, wherein: the outer thermocouple (81) is arranged on the outer wall of the furnace body (3), the inner thermocouple (82) is arranged in the reaction chamber (4), the inner thermocouple (82) is axially and parallelly arranged along the reaction chamber (4), and the inner thermocouple (82) and the outer thermocouple (81) are both connected with the temperature control device.
9. An annealing furnace with an auxiliary heating device is characterized in that: the furnace comprises a furnace body (3), a quartz tube (6), a primary heat source (1), an auxiliary heat source (2) and a temperature control device for controlling the primary heat source (1) and the auxiliary heat source (2), wherein the primary heat source (1) is a heating furnace wire spirally wound on the inner wall of the furnace body (3), the auxiliary heat source (2) is positioned in a reaction chamber (4), the quartz tube (6) is positioned in the furnace body (3), two ends of the furnace body (3) are respectively provided with an end cover (32) and a furnace door (31), a closed area enclosed by the end cover (32), the furnace door (31) and the quartz tube (6) forms the reaction chamber (4), the auxiliary heat source (2) is a plurality of annular heating tubes (22), and the annular heating tubes (22) are axially arranged at intervals along the reaction chamber (4).
10. The annealing furnace with the auxiliary heating apparatus according to claim 9, wherein: the annular heating pipe (22) is provided with a condenser surface (202) which condenses heat to the center of the arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020528717.4U CN211529964U (en) | 2020-04-08 | 2020-04-08 | Annealing furnace with auxiliary heating device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020528717.4U CN211529964U (en) | 2020-04-08 | 2020-04-08 | Annealing furnace with auxiliary heating device |
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| CN211529964U true CN211529964U (en) | 2020-09-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111354839A (en) * | 2020-04-08 | 2020-06-30 | 湖南红太阳光电科技有限公司 | Heating control method of annealing furnace and annealing furnace |
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2020
- 2020-04-08 CN CN202020528717.4U patent/CN211529964U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111354839A (en) * | 2020-04-08 | 2020-06-30 | 湖南红太阳光电科技有限公司 | Heating control method of annealing furnace and annealing furnace |
| CN111354839B (en) * | 2020-04-08 | 2021-09-10 | 湖南红太阳光电科技有限公司 | Heating control method of annealing furnace and annealing furnace |
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