CN211522375U - Auxiliary heating device of single crystal furnace - Google Patents

Abstract

The utility model relates to a single crystal growing furnace technical field just discloses a single crystal growing furnace auxiliary heating device, which comprises an outer shell, the left side fixed mounting of shell has left wiring end, the right side fixed mounting of shell has right wiring end, the equal fixedly connected with copper cable in inside of left side wiring end and right wiring end, the equal fixedly connected with guide arm in inboard of left side wiring end and right wiring end, two the equal fixedly connected with contact piece in inboard of guide arm. This single crystal growing furnace auxiliary heating device, through passing through the water-cooled cable at original IGBT direct current power distribution cabinet, the copper electrode is electrically conductive to make graphite heater A be heated and to be changed to increasing a set of supplementary IGBT direct current power distribution cabinet and electrically conducting through the copper cable and to make heater B be heated, can make quartz crucible be heated more balanced like this, quartz crucible is around and the bottom difference in temperature is controllable when changing the material, temperature gradient is more steady, avoid floating the collision that arouses because of being heated uneven leading to the inside raw materials of crucible.

Description

Auxiliary heating device of single crystal furnace

Technical Field

The utility model relates to a single crystal growing furnace technical field specifically is a single crystal growing furnace auxiliary heating device.

Background

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by a Czochralski method, the diameter of the single crystal can be influenced by factors such as temperature, pulling speed and rotating speed, crucible tracking speed and rotating speed, flow rate of protective gas and the like in the growing process, wherein the temperature mainly determines whether the crystal can be formed, the speed directly influences the intrinsic quality of the crystal, and the influence can only be known by detection after the single crystal is pulled out.

In the actual operation of the single crystal furnace, accidents such as silicon leakage, silicon infiltration, poor crystallization and the like are easily caused due to improper charging operation, untimely control of the material melting power, unreasonable raw material proportion and the like, so that the auxiliary heating device of the single crystal furnace is provided to solve the problems.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides a single crystal growing furnace auxiliary heating device possesses the even heating, and the controllable advantage of heat has solved the single crystal growing furnace in actual operation, because of the improper operation of feeding, material power control untimely, raw materials ratio is unreasonable etc. very easily causes hourglass silicon, siliconizing and the bad problem of crystalization.

(II) technical scheme

For realizing above-mentioned even heating, the controllable purpose of heat, the utility model provides a following technical scheme: a single crystal furnace auxiliary heating device comprises a shell, wherein a left wiring end is fixedly arranged on the left side of the shell, a right wiring end is fixedly arranged on the right side of the shell, copper cables are fixedly connected inside the left wiring end and the right wiring end, guide rods are fixedly connected on the inner sides of the left wiring end and the right wiring end, contact pieces are fixedly connected on the inner sides of the two guide rods, a right conductive ring is fixedly connected on the outer portion of the guide rod at the right end, a left conductive ring is fixedly connected on the outer portion of the guide rod at the left end, a protective shell is fixedly connected on the back surface of the shell, a driving motor positioned inside the protective shell is fixedly arranged on the back surface of the shell, a movable rod is fixedly connected on the outer portion of a driving shaft of the driving motor, an insulating ring is sleeved on the outer portion of the movable rod, a lantern, the outside fixedly connected with of movable rod is located the outside turning handle of shell, the positive fixedly connected with enclosing cover of shell, the positive threaded connection of enclosing cover has the set screw, the positive top fixed mounting of enclosing cover has the controller, the positive bottom fixed mounting of enclosing cover has display module.

Preferably, the front of shell has seted up the opening, and four screw holes have been seted up to the front equidistance of shell, and circular through-hole has all been seted up to the left and right sides of shell.

Preferably, the two contact pieces are arc-shaped, a gap exists between the two contact pieces, and the inner sides of the two contact pieces are in contact with the outer part of the contact rod.

Preferably, the protective casing is box-shaped, and the lantern ring and the contact rod are integrated.

Preferably, the rotating handle comprises an insulating ring and two shifting blocks, and the two shifting blocks are fixedly connected to the outer portion of the insulating ring.

Preferably, one end of the fixing screw penetrates through the outer cover and extends into a threaded hole formed in the front face of the shell, and heat dissipation ports are formed in the outer portion of the protective shell at equal intervals.

(III) advantageous effects

Compared with the prior art, the utility model provides a single crystal growing furnace auxiliary heating device possesses following beneficial effect:

the auxiliary heating device of the single crystal furnace is characterized in that one end of each of two copper cables is connected with the left wiring end and the right wiring end respectively, the driving motor is started to drive the movable rod and the contact rod outside the movable rod to rotate, so that the copper cables, the left wiring end, the guide rod, the contact piece, the contact rod, the right wiring end, the right conductive ring, the left conductive ring and the display module form a complete circuit, the graphite heater A is heated and melted by the conduction of the copper electrodes through the water-cooled cables in the original IGBT direct current power distribution cabinet, the heater B is heated by increasing one group of auxiliary IGBT direct current power distribution cabinets through the conduction of the copper cables, the quartz crucible is heated more uniformly, the temperature difference around and at the bottom of the quartz crucible is controllable during melting, the temperature gradient is more stable, collision caused by floating of raw materials in the crucible due to uneven heating is avoided, the quartz crucible, And (5) siliconizing.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic structural diagram of the present invention.

In the figure: the device comprises a shell 1, a left terminal 2, a right terminal 3, a copper cable 4, a guide rod 5, a contact piece 6, a right conductive ring 7, a display module 8, a left conductive ring 9, a protective shell 10, a driving motor 11, a movable rod 12, an insulating ring 13, a lantern ring 14, a contact rod 15, a rotating handle 16, a controller 17, an outer cover 18 and a fixing screw 19.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for purposes of illustration and explanation only and are not intended to limit the invention.

It should be noted that these drawings are simplified schematic views, and the basic structure of the present invention is described only in a schematic manner, and therefore, only the configuration related to the present invention is shown.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-2, an auxiliary heating device for a single crystal furnace comprises a housing 1, an opening is formed in the front of the housing 1, four threaded holes are equidistantly formed in the front of the housing 1, circular through holes are formed in both the left and right sides of the housing 1, a left terminal 2 is fixedly installed on the left side of the housing 1, a right terminal 3 is fixedly installed on the right side of the housing 1, copper cables 4 are fixedly connected to the insides of the left terminal 2 and the right terminal 3, guide rods 5 are fixedly connected to the insides of the left terminal 2 and the right terminal 3, contact pieces 6 are fixedly connected to the insides of the two guide rods 5, the two contact pieces 6 are arc-shaped, a gap is formed between the two contact pieces 6, the insides of the two contact pieces 6 are in contact with the outside of a contact rod 15, a right conductive ring 7 is fixedly connected to the outside of the, the back fixedly connected with protecting sheathing 10 of shell 1, protecting sheathing 10 is box-like, the thermovent has been seted up to protecting sheathing 10's outside equidistance, the back fixed mounting of shell 1 has the CD-ROM drive motor 11 that is located protecting sheathing 10 inside, the outside fixedly connected with movable rod 12 of CD-ROM drive motor 11 drive shaft, insulating ring 13 has been cup jointed to the outside of movable rod 12, lantern ring 14 has been cup jointed to the outside of insulating ring 13, lantern ring 14 and contact rod 15 are a whole, the outside fixedly connected with contact rod 15 of lantern ring 14, the outside fixedly connected with turning handle 16 that is located the shell 1 outside of movable rod 12, turning handle 16 includes insulating ring and two shifting blocks, two shifting blocks fixed connection are in the outside of insulating ring, the front fixedly connected with enclosing cover 18 of shell 1, the front threaded connection of enclosing cover 18 has set screw 19, the one end of set screw 19 runs through enclosing cover 18 and extends to the threaded hole that, the controller 17 is fixedly installed at the top end of the front face of the outer cover 18, the display module 8 is fixedly installed at the bottom end of the front face of the outer cover 18, the left conductive ring 9 and the right conductive ring 7 guide currents conducted on the guide rod 5 into the display module 8, current values are visually displayed, and when the driving motor 11 breaks down, the rotating handle 16 can be manually rotated, so that the purposes of uniform heating and controllable heat are achieved.

In summary, in the auxiliary heating device for the single crystal furnace, one end of two copper cables 4 is respectively connected with the left terminal 2 and the right terminal 3, and the driving motor 11 is started to drive the movable rod 12 and the contact rod 15 outside the movable rod 12 to rotate, so that the copper cables 4, the left terminal 2, the guide rod 5, the contact piece 6, the contact rod 15, the right terminal 3, the right conductive ring 7, the left conductive ring 9 and the display module 8 form a complete circuit, the graphite heater A is heated by the original IGBT direct current power distribution cabinet through the water-cooling cables and the copper electrode conduction, the heating of the heater B is changed into the heating of the heater B through the copper cables 4 by adding a group of auxiliary IGBT direct current power distribution cabinets, and thus the quartz crucible is heated more uniformly, the temperature difference around and at the bottom of the quartz crucible is controllable during material melting, the temperature gradient is more stable, and the collision caused by floating of raw materials in, and further, the quartz crucible cannot be damaged, silicon leakage and silicon infiltration cannot be caused, and the problems of silicon leakage, silicon infiltration and poor crystal formation caused by improper charging operation, untimely material melting power control, unreasonable raw material proportion and the like in the actual operation of the single crystal furnace are solved.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a single crystal growing furnace auxiliary heating device, includes shell (1), its characterized in that: the left side of the shell (1) is fixedly provided with a left wiring end (2), the right side of the shell (1) is fixedly provided with a right wiring end (3), the insides of the left wiring end (2) and the right wiring end (3) are fixedly connected with copper cables (4), the insides of the left wiring end (2) and the right wiring end (3) are fixedly connected with guide rods (5), the insides of the two guide rods (5) are fixedly connected with contact pieces (6), the right end of the guide rod (5) is fixedly connected with a right conductive ring (7), the left end of the guide rod (5) is fixedly connected with a left conductive ring (9), the back of the shell (1) is fixedly connected with a protective shell (10), the back of the shell (1) is fixedly provided with a driving motor (11) positioned inside the protective shell (10), and the outside of the driving motor (11) is fixedly connected with a movable rod (, insulating ring (13) have been cup jointed to the outside of movable rod (12), the lantern ring (14) has been cup jointed to the outside of insulating ring (13), the outside fixedly connected with contact lever (15) of lantern ring (14), the outside fixedly connected with of movable rod (12) is located outside turning handle (16) of shell (1), the positive fixedly connected with enclosing cover (18) of shell (1), the front threaded connection of enclosing cover (18) has set screw (19), the positive top fixed mounting of enclosing cover (18) has controller (17), the positive bottom fixed mounting of enclosing cover (18) has display module (8).

2. The auxiliary heating device of the single crystal furnace according to claim 1, wherein: the front of shell (1) has seted up the opening, and four screw holes have been seted up to the front equidistance of shell (1), and circular through-hole has all been seted up to the left and right sides of shell (1).

3. The auxiliary heating device of the single crystal furnace according to claim 1, wherein: the two contact pieces (6) are arc-shaped, a gap exists between the two contact pieces (6), and the inner sides of the two contact pieces (6) are in contact with the outer part of the contact rod (15).

4. The auxiliary heating device of the single crystal furnace according to claim 1, wherein: the protective shell (10) is box-shaped, and the lantern ring (14) and the contact rod (15) are integrated.

5. The auxiliary heating device of the single crystal furnace according to claim 1, wherein: the rotating handle (16) comprises an insulating ring and two shifting blocks, and the two shifting blocks are fixedly connected to the outer portion of the insulating ring.

6. The auxiliary heating device of the single crystal furnace according to claim 2, wherein: one end of the fixing screw (19) penetrates through the outer cover (18) and extends into a threaded hole formed in the front face of the shell (1), and heat dissipation ports are formed in the outer portion of the protective shell (10) at equal intervals.

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