CN211514188U - Polishing solution stirring device - Google Patents
Polishing solution stirring device Download PDFInfo
- Publication number
- CN211514188U CN211514188U CN201921761461.5U CN201921761461U CN211514188U CN 211514188 U CN211514188 U CN 211514188U CN 201921761461 U CN201921761461 U CN 201921761461U CN 211514188 U CN211514188 U CN 211514188U
- Authority
- CN
- China
- Prior art keywords
- agitator tank
- puddler
- polishing solution
- shaft
- stirring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 title claims abstract description 44
- 238000003756 stirring Methods 0.000 title claims abstract description 43
- 238000002156 mixing Methods 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 8
- 238000012546 transfer Methods 0.000 claims abstract description 5
- 238000001802 infusion Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000002002 slurry Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 abstract description 3
- 239000002244 precipitate Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Images
Abstract
The utility model provides a polishing solution agitating unit relates to polishing solution equipment technical field, including agitator tank and rabbling mechanism, the agitator tank is including setting up the inlet on agitator tank top and setting up the liquid outlet in the agitator tank bottom, be provided with the transfer line rather than threaded connection on the liquid outlet, the rabbling mechanism includes the agitator motor of fixed mounting on the agitator tank top, (mixing) shaft and puddler, be equipped with a plurality of fixed orificess on the (mixing) shaft, the puddler include through the first puddler of bolt fastening on the fixed orifices and with agitator tank integrated into one piece and set up at the inboard second puddler of agitator tank, be provided with the filter screen on the liquid outlet. The utility model discloses an agitator motor drives (mixing) shaft and first puddler rotation to the polishing solution that drives in the agitator tank rotates, and the inboard puddler of agitator tank also has the stirring effect to the polishing solution, can carry out intensive mixing to each corner in the agitator tank, has guaranteed follow-up grinding and polishing quality to semiconductor material.
Description
Technical Field
The utility model relates to a polishing solution equipment technical field especially relates to a polishing solution agitating unit.
Background
In the preparation process of a semiconductor, a polishing solution and a polishing machine are needed to polish the semiconductor material, however, the polishing solution is a suspension, and precipitates are generated in a static state, so that the polishing solution needs to be stirred when in use, but the current stirrer cannot stir the polishing solution sufficiently when in stirring, so that the quality of polishing the semiconductor material is affected, and therefore, the design of a polishing solution stirring device capable of stirring sufficiently becomes a technical problem to be solved urgently by a person skilled in the art.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that overcome exist among the prior art not enough, provide a stirring abundant polishing solution agitating unit.
The utility model discloses a realize through following technical scheme: the utility model provides a polishing solution agitating unit, a serial communication port, including agitator tank and rabbling mechanism, the agitator tank is including setting up the inlet on agitator tank top and setting up the liquid outlet in the agitator tank bottom, be provided with the transfer line rather than threaded connection on the liquid outlet, the rabbling mechanism includes the agitator motor of fixed mounting on the agitator tank top, (mixing) shaft and puddler, shaft coupling and (mixing) shaft fixed connection are passed through to agitator motor's output, be equipped with a plurality of fixed orificess on the (mixing) shaft, the puddler include through the first puddler of bolt fastening on the fixed orifices and with agitator tank integrated into one piece and set up the second puddler at the agitator tank inboard, be provided with the filter screen on the liquid outlet.
According to the technical scheme, the second stirring rod on the edge of the stirring box is preferably arranged in an inclined mode.
According to the above technical solution, preferably, the first stirring rod is provided with an impeller.
According to the technical scheme, preferably, the stirring shaft is of a telescopic structure.
According to the technical scheme, preferably, the bottom end of the stirring box is provided with universal wheels.
According to the above technical solution, preferably, the infusion tube is provided with a valve.
The utility model has the advantages that: the utility model discloses a polishing solution agitating unit drives (mixing) shaft and first puddler rotation through agitator motor to it rotates to drive the polishing solution in the agitator tank, and the puddler that is located the agitator tank inboard at this moment also has the stirring effect to the polishing solution, can carry out intensive mixing to each corner in the agitator tank, and in addition, the filter screen of liquid outlet can carry out the filtration of going on again before the polishing solution uses, prevents that the material that deposits in the polishing solution from carrying away, has guaranteed follow-up grinding and polishing quality to semiconductor material.
Drawings
Fig. 1 shows a schematic structural diagram according to an embodiment of the present invention.
In the figure: 1. a stirring box; 2, a liquid inlet; 3. a liquid outlet; 4. a transfusion tube; 5. a stirring motor; 6. a stirring shaft; 7. a first stirring rod; 8. a second stirring rod; 9. a filter screen; 10. an impeller; 11. a universal wheel; 12. and (4) a valve.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
As shown in the figure, the utility model provides a polishing solution agitating unit, a serial communication port, including agitator tank 1 and rabbling mechanism, agitator tank 1 is including setting up at the inlet 2 on agitator tank top and setting up the liquid outlet 3 in the agitator tank bottom, be provided with the transfer line 4 rather than threaded connection on the liquid outlet 3, the rabbling mechanism includes fixed mounting at agitator tank 1 top agitator motor 5, (mixing) shaft 6 and puddler, shaft coupling and (mixing) shaft 6 fixed connection are passed through to agitator motor 5's output, be equipped with a plurality of fixed orificess on (mixing) shaft 6, the puddler includes through the first puddler 7 of bolt fastening on the fixed orifices and with agitator tank integrated into one piece and set up at the inboard second puddler 8 of agitator tank, be provided with filter screen 9 on liquid outlet 3. Stirring motor 5 opens the back and drives (mixing) shaft 6 and first puddler 7 rotatory, thereby make the polishing solution rotate along with it, consequently, rotatory polishing solution also can produce relative motion with static second puddler 8 in agitator tank 1 inboard, make first puddler 7 and second puddler 8 stir simultaneously, guaranteed each corner intensive mixing in agitator tank 1, prevent that the polishing solution from producing the precipitate, in addition, filter screen 9 of liquid outlet department has also played the filtering action to the precipitate, it does not have the precipitate in the polishing solution of carrying out through transfer line 4 to have also been guaranteed.
According to the technical scheme, the second stirring rod 8 at the edge of the stirring box 1 is preferably arranged obliquely, so that stirring can be more fully performed.
According to the technical scheme, the impeller 10 is preferably arranged on the first stirring rod 7, so that the contact area of the first stirring rod and the polishing solution is increased, and the stirring efficiency is improved.
According to the above technical solution, preferably, the stirring shaft 6 is of a telescopic structure, and the length of the stirring shaft 6 can be adjusted according to the situation to stir the polishing solution.
According to the above technical solution, preferably, the bottom end of the stirring box 1 is provided with the universal wheel 11, which is convenient for the stirring box 1 to move.
According to the above technical solution, preferably, the infusion tube 4 is provided with a valve 12, and when the polishing solution needs to be used, the valve 12 is opened to allow the polishing solution to flow out along the infusion tube 4.
The utility model has the advantages that: the utility model discloses a polishing solution agitating unit drives (mixing) shaft 6 and first puddler 7 rotation through agitator motor 5 to it rotates to drive the polishing solution in agitator tank 1, at this moment, the puddler that is located 1 inboard of agitator tank also has the stirring effect to the polishing solution, can carry out intensive mixing to each corner in agitator tank 1, in addition, filter screen 9 of liquid outlet 3 can carry out the filtration of going on again before the polishing solution uses, prevent that the material that deposits in the polishing solution from carrying out, follow-up grinding and polishing quality to semiconductor material has been guaranteed.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (6)
1. The utility model provides a polishing solution agitating unit, a serial communication port, including agitator tank and rabbling mechanism, the agitator tank is including setting up the inlet on agitator tank top and setting up the liquid outlet in the agitator tank bottom, be provided with the transfer line rather than threaded connection on the liquid outlet, the rabbling mechanism includes the agitator motor of fixed mounting on the agitator tank top, (mixing) shaft and puddler, shaft coupling and (mixing) shaft fixed connection are passed through to agitator motor's output, be equipped with a plurality of fixed orificess on the (mixing) shaft, the puddler include through the first puddler of bolt fastening on the fixed orifices and with agitator tank integrated into one piece and set up the second puddler at the agitator tank inboard, be provided with the filter screen on the liquid outlet.
2. The slurry stirring apparatus as claimed in claim 1, wherein the second stirring rod is disposed at an edge of the stirring tank in an inclined manner.
3. The polishing solution stirring apparatus as recited in claim 1, wherein the first stirring rod is provided with an impeller.
4. The polishing solution stirring apparatus as recited in claim 1, wherein the stirring shaft has a telescopic structure.
5. The polishing solution stirring device as recited in claim 1, wherein a universal wheel is provided at a bottom end of the stirring tank.
6. The polishing solution stirring device as recited in claim 1, wherein the infusion tube is provided with a valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921761461.5U CN211514188U (en) | 2019-10-21 | 2019-10-21 | Polishing solution stirring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921761461.5U CN211514188U (en) | 2019-10-21 | 2019-10-21 | Polishing solution stirring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211514188U true CN211514188U (en) | 2020-09-18 |
Family
ID=72461909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921761461.5U Active CN211514188U (en) | 2019-10-21 | 2019-10-21 | Polishing solution stirring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211514188U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113510620A (en) * | 2021-07-26 | 2021-10-19 | 长鑫存储技术有限公司 | Liquid feeding device and grinding equipment |
| CN113618563A (en) * | 2021-10-12 | 2021-11-09 | 徐州轻松机械科技有限公司 | Polishing and grinding equipment for glass pieces |
-
2019
- 2019-10-21 CN CN201921761461.5U patent/CN211514188U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113510620A (en) * | 2021-07-26 | 2021-10-19 | 长鑫存储技术有限公司 | Liquid feeding device and grinding equipment |
| CN113618563A (en) * | 2021-10-12 | 2021-11-09 | 徐州轻松机械科技有限公司 | Polishing and grinding equipment for glass pieces |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231129 Address after: 300382, Gate 101, Building 2, West District D6, Xuefu West Road, Jinxiqing Xuefu Industrial Park, Xiqing District, Tianjin Patentee after: TIANJIN ZHUNUO TECHNOLOGY Co.,Ltd. Address before: 300000 No.83, Qiwei Road, Dawangzhuang, Hedong District, Tianjin (room 212, area B, second floor) Patentee before: TIANJIN XIMEI TECHNOLOGY Corp.,Ltd. |