CN211514024U - Ozone tail gas dewatering and demisting device - Google Patents

Ozone tail gas dewatering and demisting device Download PDF

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Publication number
CN211514024U
CN211514024U CN201922271410.0U CN201922271410U CN211514024U CN 211514024 U CN211514024 U CN 211514024U CN 201922271410 U CN201922271410 U CN 201922271410U CN 211514024 U CN211514024 U CN 211514024U
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water
tail gas
wall
tank
dewatering
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CN201922271410.0U
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Chinese (zh)
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陈林兴
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Suzhou Jinao Industrial Co ltd
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Suzhou Jinao Industrial Co ltd
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Abstract

The utility model discloses an ozone tail gas dewatering and demisting device in the technical field of ozone tail gas treatment equipment, which comprises a demisting tank and a dewatering tank, wherein semiconductor refrigeration sheets are staggered from top to bottom on the inner walls of the left side and the right side of the dewatering tank, a water collecting tank is arranged on the left side of the inner wall of the bottom of the dewatering tank, the water collecting tank is positioned below the semiconductor refrigeration sheets at the bottom, the introduced tail gas flows through the gap of a partition plate, the time of the tail gas staying below the water surface can be prolonged, demisting is fully carried out, then the tail gas rises to the position above the liquid level, a water inlet pipe supplies water through a water pump, then water is sprayed through a spray head at the bottom of a water pipe, the tail gas is completely removed, then the gas enters the inner cavity of the dewatering tank through a pipeline, the semiconductor refrigeration sheets cool the tail gas in the inner cavity of the, and (4) finishing dewatering, and discharging tail gas through the exhaust pipe at the moment.

Description

Ozone tail gas dewatering and demisting device
Technical Field
The utility model relates to an ozone tail gas treatment facility technical field specifically is an ozone tail gas dewatering defogging device.
Background
Ozone tail gas does not directly get into ozone tail gas decomposition device through dewatering and defogging link, causes the equipment device part damage of follow-up decomposition processing ozone easily and unable normal work, consequently needs frequently to maintain it, wastes time and energy, has increased the maintenance cost, for this reason, we provide an ozone tail gas dewatering defogging device.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an ozone tail gas dewatering defogging device to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: an ozone tail gas water and mist removing device comprises a mist removing box and a water removing box, wherein through holes are formed in the top of the outer wall of one side, opposite to the water removing box, of the mist removing box, flange seats are fixedly arranged on the outer side of the joint of the outer wall of one side, opposite to the water removing box, of the water removing box and the water removing box, two groups of flange seats are provided with flange plates on the outer wall of one side, the two groups of flange plates are connected through a pipeline, two ends of the pipeline extend to an inner cavity of the through holes, an air inlet pipe and a water changing pipe are respectively arranged at the bottoms of the outer walls of the left side and the right side of the mist removing box, an exhaust pipe is arranged at the bottom of the outer wall of the right side of the water removing box, a water inlet pipe is inserted in the center of the outer wall of the top of the mist removing box, spray nozzles are uniformly arranged on the outer wall of, the heat dissipation end of semiconductor refrigeration piece is located the dewatering case outside, dewatering case bottom inner wall left side is equipped with the water catch bowl, the water catch bowl is located the below of bottom semiconductor refrigeration piece.
Further, the water catch bowl includes the screw that the bottom of the water tank inner wall left side was equipped with, is equipped with the drain pipe in the screw, the drain pipe top is equipped with the funnel that catchments, the middle part of the funnel left and right sides inner wall all is equipped with the tray, and is two sets of the tray top is equipped with the filter screen, funnel hoop outer wall bottom annular array that catchments is equipped with three group's landing legs, landing leg bottom and the laminating of bottom of the water tank inner wall.
Furthermore, pipeline ring all is equipped with cyclic annular elasticity rand to both ends about the outer wall, just the through-hole inner wall is equipped with the chamfer with cyclic annular elasticity rand matched with.
Furthermore, the semiconductor refrigeration pieces are obliquely arranged, and the height of the opposite ends of the two groups of semiconductor refrigeration pieces is lower than that of the opposite ends of the two groups of semiconductor refrigeration pieces.
Furthermore, the inner walls of the left side and the right side of the defogging box are provided with partition plates in a vertically staggered manner, and the partition plates are positioned below the liquid level.
Furthermore, three to four groups of water pipes are arranged in front of and behind the water pipes at equal intervals.
Compared with the prior art, the beneficial effects of the utility model are that: the tail gas that lets in passes through the clearance of baffle and flows through, can prolong its stay time below the surface of water, fully carry out the defogging, then tail gas rises to the liquid level top, the inlet tube supplies water through the water pump, then the shower nozzle of lead to pipe bottom sprays water, drench tail gas, detach fog completely, then gaseous gets into dewatering tank inner chamber through the pipeline, semiconductor refrigeration piece cools down the tail gas of dewatering tank inner chamber, make the water condense into the drop of water, then the drop of water prolongs semiconductor refrigeration piece and flows in the water catch bowl, accomplish the dewatering, tail gas passes through the blast pipe discharge this moment.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is the schematic view of the connection between the water tank and the water collecting funnel of the present invention.
In the figure: 1. a demisting box; 2. removing the water tank; 3. a through hole; 4. a flange seat; 5. a flange plate; 6. a pipeline; 7. a partition plate; 8. an air inlet pipe; 9. changing a water pipe; 10. an exhaust pipe; 11. a water inlet pipe; 12. a water pipe; 13. a spray head; 14. a semiconductor refrigeration sheet; 15. a water collection tank; 16. a drain pipe; 17. a water collection funnel; 18. a support block; 19. a filter screen; 20. and (7) supporting legs.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a technical scheme: an ozone tail gas water and mist removing device, please refer to fig. 1, which comprises a mist removing box 1 and a water removing box 2, wherein the top of the outer wall of one side of the mist removing box 1 opposite to the water removing box 2 is provided with a through hole 3, the outer side of the joint of the outer wall of one side of the mist removing box 1 opposite to the water removing box 2 and the through hole 3 is fixedly provided with a flange seat 4, the outer wall of one side of two groups of flange seats 4 opposite to each other is provided with a flange 5, the flange 5 and the flange seat 4 are fixed through screws, the two groups of flange 5 are connected through a pipeline 6, two ends of the pipeline 6 extend to the inner cavity of the through hole 3, the bottom of the outer wall of the left side and the right side of the mist removing box 1 is respectively provided with an air inlet pipe 8 and a water changing pipe 9, the air inlet pipe 8 is a one-way air inlet pipe to prevent water from flowing back into the inner cavity of, the bottom of a water inlet pipe 11 extends to an inner cavity of a demisting tank 1 and is provided with a water pipe 12, the outer wall of the bottom of the water pipe 12 is uniformly provided with a spray head 13, the inner cavity of the demisting tank 1 is filled with water, the spray head 13 and a pipeline 6 are both positioned above the liquid level, the inner walls of the left side and the right side of the dewatering tank 2 are provided with semiconductor refrigerating sheets 14 in an up-and-down staggered manner, the heat dissipation ends of the semiconductor refrigerating sheets 14 are positioned outside the dewatering tank 2, the left side of the inner wall of the bottom of the dewatering tank 2 is provided with a water collection tank 15, the water collection tank 15 is positioned below the semiconductor refrigerating sheets 14 at the bottom, ozone tail gas is introduced into the demisting tank 1 through an air inlet pipe 8 to be soaked in water, then the tail gas rises above the liquid level, the water inlet pipe 11 is supplied with water through a water pump, then the spray head, the water is condensed into water drops, then the water drops flow into the water collecting tank 15 along the semiconductor refrigerating sheet 14 to finish the water removal, and at the moment, the tail gas is discharged through the exhaust pipe 10;
referring to fig. 2, the water collecting tank 15 includes a screw hole formed in the left side of the inner wall of the bottom of the water removing tank 2, a water discharging pipe 16 is arranged in the screw hole, a water collecting funnel 17 is arranged at the top of the water discharging pipe 16, support blocks 18 are arranged in the middle of the inner walls of the left side and the right side of the water collecting funnel 17, filter screens 19 are arranged at the tops of the two groups of support blocks 18, the filter screens 19 can filter condensed water drops and filter out impurities, and then water is discharged out of the water removing tank 2 through the water discharging pipe 16 (the water discharging pipe 16 is provided with a valve which does not cause gas leakage, and after the water is collected for a period of time, the valve of the air inlet pipe 8 is closed and then can be opened), three groups of;
referring to fig. 1, the annular elastic collars are respectively arranged at the left end and the right end of the annular outer wall of the pipeline 6, the inner wall of the through hole 3 is provided with a chamfer matched with the annular elastic collars, and the annular elastic collars are in interference fit with the chamfers, so that the tightness of the connection of the pipeline 6 with the demisting tank 1 and the dewatering tank 2 can be improved, and the gas is prevented from leaking;
referring to fig. 1, the semiconductor chilling plates 14 are arranged obliquely, and the heights of the opposite ends of the two groups of semiconductor chilling plates 14 are lower than the opposite ends of the two groups of semiconductor chilling plates 14, so that condensed water drops flow down along the inclined surfaces of the condensed water drops;
referring to fig. 1, the inner walls of the left and right sides of the defogging box 1 are provided with partition plates 7 in a vertically staggered manner, the partition plates 7 are positioned below the liquid level, and the introduced tail gas flows through the gaps of the partition plates 7, so that the time of staying below the water level can be prolonged, and defogging can be fully performed;
referring to fig. 1, three to four groups of water pipes 12 are equidistantly arranged in front of and behind the water pipes, and are uniformly distributed to fully spray the tail gas.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides an ozone tail gas dewatering defogging device, includes defogging case (1) and dewatering case (2), its characterized in that: the top of the outer wall of one side, opposite to the water removing tank (2), of the fog removing tank (1) is provided with a through hole (3), the outer side of the joint of the outer wall of one side, opposite to the water removing tank (2), of the fog removing tank (1) and the through hole (3) is fixedly provided with a flange seat (4), the outer wall of one side, opposite to the flange seats (4), of the two groups is provided with a flange plate (5), the two groups of flange plates (5) are connected through a pipeline (6), two ends of the pipeline (6) extend to the inner cavity of the through hole (3), the bottoms of the outer walls of the left side and the right side of the fog removing tank (1) are respectively provided with an air inlet pipe (8) and a water changing pipe (9), the bottom of the outer wall of the right side of the water removing tank (2) is provided with an exhaust pipe (10), the center of the outer wall of the top of the fog removing tank (1) is spliced with a water, remove fog box (1) inner chamber and establish to be filled and have water, shower nozzle (13) and pipeline (6) all are located the liquid level top, it is equipped with semiconductor refrigeration piece (14) to remove crisscross from top to bottom water tank (2) left and right sides inner wall, the heat dissipation end of semiconductor refrigeration piece (14) is located and removes water tank (2) outside, it is equipped with water catch bowl (15) to remove water tank (2) bottom inner wall left side, water catch bowl (15) are located the below of bottom semiconductor refrigeration piece (14).
2. The ozone tail gas water and mist removal device as claimed in claim 1, wherein: water catch bowl (15) are equipped with drain pipe (16) in the screw including removing the screw that water tank (2) bottom inner wall left side was equipped with, drain pipe (16) top is equipped with catchment funnel (17), the middle part of catchment funnel (17) left and right sides inner wall all is equipped with tray (18), and is two sets of tray (18) top is equipped with filter screen (19), catchment funnel (17) hoop outer wall bottom annular array is equipped with three group's landing legs (20), landing leg (20) bottom with remove water tank (2) bottom inner wall laminating.
3. The ozone tail gas water and mist removal device as claimed in claim 1, wherein: pipeline (6) ring all is equipped with cyclic annular elasticity rand to both ends about the outer wall, just through-hole (3) inner wall is equipped with the chamfer with cyclic annular elasticity rand matched with.
4. The ozone tail gas water and mist removal device as claimed in claim 1, wherein: the semiconductor refrigerating pieces (14) are obliquely arranged, and the height of one end, opposite to the two groups of semiconductor refrigerating pieces (14), of each group is lower than that of the other end, opposite to the two groups of semiconductor refrigerating pieces (14).
5. The ozone tail gas water and mist removal device as claimed in claim 1, wherein: the inner walls of the left side and the right side of the demisting tank (1) are provided with partition plates (7) in a vertically staggered manner, and the partition plates (7) are positioned below the liquid level.
6. The ozone tail gas water and mist removal device as claimed in claim 1, wherein: three to four groups of water pipes (12) are arranged in the front and the back of the water pipes at equal intervals.
CN201922271410.0U 2019-12-17 2019-12-17 Ozone tail gas dewatering and demisting device Active CN211514024U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922271410.0U CN211514024U (en) 2019-12-17 2019-12-17 Ozone tail gas dewatering and demisting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922271410.0U CN211514024U (en) 2019-12-17 2019-12-17 Ozone tail gas dewatering and demisting device

Publications (1)

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CN211514024U true CN211514024U (en) 2020-09-18

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114471037A (en) * 2022-04-15 2022-05-13 智程半导体设备科技(昆山)有限公司 Gas-liquid separation device for multi-station single-wafer cleaning machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114471037A (en) * 2022-04-15 2022-05-13 智程半导体设备科技(昆山)有限公司 Gas-liquid separation device for multi-station single-wafer cleaning machine

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