CN211497770U

CN211497770U - Vertical film coating machine capable of quickly disassembling and assembling target core

Info

Publication number: CN211497770U
Application number: CN201921321944.3U
Authority: CN
Inventors: 罗立珍
Original assignee: Hunan Film Vacuum Equipment Co ltd
Current assignee: Hunan Film Vacuum Equipment Co ltd
Priority date: 2019-08-14
Filing date: 2019-08-14
Publication date: 2020-09-15
Anticipated expiration: 2029-08-14

Abstract

The utility model discloses a but vertical coating machine of quick assembly disassembly target core, it is provided with the vacuum coating room, the top of vacuum coating room is provided with the target head subassembly, the rotatory lock joint of lower extreme of target head subassembly has the target core subassembly, just the target head subassembly in the outside cover of target core subassembly is equipped with the target. The utility model provides a coating machine adopts the mode of rotatory lock joint to install the target core subassembly, and more traditional mounting means is more convenient, and is efficient, and the practicality is strong.

Description

Vertical film coating machine capable of quickly disassembling and assembling target core

Technical Field

The utility model belongs to the technical field of vacuum coating machine, concretely relates to but vertical coating machine of quick assembly disassembly target core.

Background

The sputtering type vacuum coating machine is generally of a vertical structure, a target material 200 and a workpiece are arranged in a vacuum coating chamber, sputtering is carried out by utilizing the target material 200, and sputtered materials are attached to the surface of the workpiece to form a film layer, namely coating is achieved. Referring to fig. 1 to 3, in the conventional structure, a target head assembly 100 is disposed at an upper end of a target 200, and a target core assembly 300 is mounted in a hollow interior of the target 200 in the target head assembly 100, wherein the specific mounting structure of the target core assembly 300 is as follows: the upper end of the target core assembly 300 is provided with a sleeve-type connector 400, the lower end of the target head assembly 100 is provided with a mounting column 500, two sides of the mounting column 500 are provided with first threaded holes, two sides of the connector 400 are provided with second threaded holes 402, the target core assembly 300 needs to be lifted up integrally during installation, the connector 400 is sleeved into the mounting column 500, the first threaded holes are aligned with the second threaded holes 402, and then the target core assembly 300 is installed by installing bolts in the connector 400. In such a conventional structure, the difficulty of aligning the first and second threaded holes 402 is high, and thus the installation process is very inconvenient and inefficient. And because the operating space in the vacuum coating chamber is smaller, the connecting part of the target core assembly 300 and the target head assembly 100 is usually positioned at the position which can not be seen directly at the upper end of the vacuum coating chamber, the screwing of the bolt needs to depend on the blind operation of workers by feeling, and the operation difficulty is high.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the utility model provides a but vertical coating machine of quick assembly disassembly target core, it is provided with the vacuum coating room, the top of vacuum coating room is provided with the target head subassembly, the rotatory lock joint of lower extreme of target head subassembly has the target core subassembly, just the target head subassembly in the outside cover of target core subassembly is equipped with the target.

Preferably, the lower extreme of target head subassembly is provided with the erection column, the side of erection column is provided with two at least protruding structures, the upper end of target core subassembly is provided with the connector, be provided with on the connector with the position is detained to the rotation type of protruding structure adaptation, the target core subassembly passes through the connector with the erection column cooperation and the lock joint in on the target head subassembly.

Preferably, threaded holes are formed in two opposite sides of the mounting column, bolts are mounted through the threaded holes, and two protruding structures are formed on the surface of the bolts through the heads of the bolts.

Preferably, the connector is of a sleeve type structure, the side wall of the upper section of the connector is provided with two open slots matched with the heads of the bolts, each open slot comprises an open section, a rotating section and a buckling section which are sequentially connected, the open section is arranged along the downward vertical opening of the upper end of the connector, the rotating section is arranged along the horizontal opening of the lower end of the open section towards one side, and the buckling section is arranged along the upward vertical opening of the tail end of the rotating section.

Preferably, the central angle corresponding to the rotating section is 90 degrees, so that the two opening sections and the two buckling-in sections are uniformly distributed around the circumference of the connector.

Preferably, the lower end of the connector is provided with a flange plate, and the target core assembly is installed through the flange plate.

Preferably, the inner diameter of the connector is matched with the outer diameter of the mounting column, and the mounting column is of a hollow pipeline structure, so that when the connector is mounted on the mounting column, the connector and the mounting column are communicated with each other.

Preferably, the erection column extends in the length of bolt below is greater than the length of opening section, the connector with between the erection column in the below of open slot is provided with the sealing washer.

Preferably, the two bolts have different sizes, and correspondingly, the widths of the two open grooves are different.

The utility model has the advantages that:

the utility model provides a coating machine adopts the mode of rotatory lock joint to install the target core subassembly, and more traditional mounting means is more convenient, and is efficient, and the practicality is strong.

Drawings

The invention will be further described with reference to the following figures and examples:

FIG. 1 is a schematic view of the installation of a target assembly in a conventional configuration;

FIG. 2 is an enlarged partial schematic view of FIG. 1;

FIG. 3 is a schematic structural view of a connecting head in a conventional structure;

FIG. 4 is a schematic view of the installation of the improved target core assembly;

FIG. 5 is an enlarged schematic view of area A of FIG. 4;

fig. 6 is a schematic structural diagram of the improved connecting head.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.

Referring to fig. 1-6, the utility model discloses a but vertical coating machine of quick assembly disassembly target core, it is provided with the vacuum coating room, and the top of vacuum coating room is provided with target head subassembly 100, and the rotatory lock joint of lower extreme of target head subassembly 100 has target core subassembly 300, and target head subassembly 100 overlaps in the outside of target core subassembly 300 and is equipped with target 200.

The utility model provides a coating machine adopts the mode of rotatory lock joint to install target core subassembly 300, and more traditional mounting means is more convenient, and is efficient, and the practicality is strong.

In order to reduce the cost and avoid more structural changes to the coating machine, as shown in fig. 1, fig. 4 and fig. 5, preferably, the lower end of the target head assembly 100 is provided with a mounting column 500, the mounting column 500 is identical to the conventional structure, only the side surface of the mounting column 500 is provided with at least two protruding structures, the upper end of the target core assembly 300 is provided with a connector 400, the connector 400 is provided with a rotary fastening position adapted to the protruding structures, and the target core assembly 300 is fastened on the target head assembly 100 through the matching of the connector 400 and the mounting column 500.

Set up like this, more traditional structure, only need appropriate modification erection column 500 partial structure, connector 400 the structure can, need not to carry out big structural change to the coating machine, the product transformation on the market of both having been convenient for also can not lead to the fact great improvement to manufacturing cost yet, the practicality is strong.

It is further contemplated that in conventional configurations, the mounting post 500 may be provided with a first threaded aperture that may be utilized in actual production to provide a raised structure. Preferably, two opposite sides of the mounting post 500 are provided with a threaded hole (when a coating machine produced on the market is modified, the threaded hole is identical to a first threaded hole in a traditional structure), a bolt 501 is mounted through the threaded hole, and two protruding structures are formed on the surface through the head of the bolt 501.

Correspondingly, as shown in fig. 6, the connector 400 is of a sleeve-type structure, the upper-section side wall of the connector 400 is provided with two open slots 600 adapted to the head of the bolt 501, each open slot 600 includes an open section 601, a rotating section 602 and a buckling section 603 which are sequentially connected, the open section 601 is vertically arranged downwards along the upper end of the connector 400, the rotating section 602 is horizontally arranged towards one side along the lower end of the open section 601, the buckling section 603 is vertically arranged upwards along the tail end of the rotating section 602, and each bending part is provided with a fillet transition. While the rotation sections 602 of the two open slots 600 rotate in the same direction, i.e. both extend to the left or to the right with respect to the opening section 601 to which they are connected.

In order to ensure the connection strength of the connection head 400, it is preferable that the central angle corresponding to the rotation section 602 is 90 °, so that the two opening sections 601 and the two snap-in sections 603 are uniformly distributed around the circumference of the connection head 400.

As shown in fig. 3 and 6, the lower end of the adapter 400 is provided with a flange 401 and the target assembly 300 is mounted through the flange 401, as in the conventional structure.

In addition, since water needs to be passed through the inside of the target core assembly 300, in order to achieve the water passing, it is preferable that the inner diameter of the connecting head 400 is adapted to the outer diameter of the mounting post 500, and the mounting post 500 has a hollow pipe structure, so that the insides of the connecting head 400 and the mounting post 500 are communicated with each other. And the length of the mounting column 500 extending below the bolt 501 is greater than the length of the opening section 601, and a sealing ring 700 is disposed between the connector 400 and the mounting column 500 below the opening groove 600.

Because the specific structure of the target head assembly 100, the target material 200, the target core assembly 300 and other constituent structures of the coating machine are not the improvement point of the present invention, the present structure on the market can be directly referred to, and detailed description is not given here.

And in some embodiments, the two bolts 501 may be designed to have different sizes, and correspondingly, the two opening grooves 600 have different widths, so as to achieve the direction limitation during installation.

When the installation, the worker only needs to lift up target core assembly 300 to enable the lower end of mounting column 500 to be inserted into connector 400 to achieve pre-positioning, and then the angle is adjusted through rotation, so that open slot 600 is aligned with the head of bolt 501 and smoothly clamped, when the head of bolt 501 is lifted upwards and slides into the bottom of open section 601, target core assembly 300 is rotated, the head of bolt 501 is positioned at the tail end of rotating section 602, the connector 400 moves downwards under the action of gravity, so that the head of bolt 501 is automatically clamped into the tail end of buckling section 603, and the installation is completed. Compared with the traditional bullseye component 300, the installation process is simpler and more convenient, the difficulty is low, the efficiency is high, and the practicability is strong.

The above embodiments are merely preferred embodiments of the present invention, and other embodiments are also possible. Equivalent modifications or substitutions may be made by those skilled in the art without departing from the spirit of the invention, and such equivalent modifications or substitutions are intended to be included within the scope of the claims set forth herein.

Claims

1. The utility model provides a but vertical coating machine of quick assembly disassembly target core which characterized in that is provided with the vacuum coating room, the top of vacuum coating room is provided with the target head subassembly, the rotatory lock joint of lower extreme of target head subassembly has the target core subassembly, just the target head subassembly in the outside cover of target core subassembly is equipped with the target.

2. The vertical coater capable of fast assembling and disassembling target cores according to claim 1, wherein the lower end of the target head assembly is provided with a mounting column, the side surface of the mounting column is provided with at least two protruding structures, the upper end of the target core assembly is provided with a connector, the connector is provided with a rotary buckle position matched with the protruding structures, and the target core assembly is buckled on the target head assembly through the matching of the connector and the mounting column.

3. The vertical coater capable of quickly assembling and disassembling a target core according to claim 2, wherein the opposite sides of the mounting column are provided with threaded holes and bolts are installed through the threaded holes, and two convex structures are formed on the surface through the heads of the bolts.

4. The vertical coater capable of fast assembling and disassembling the target core according to claim 3, wherein the connecting head is of a sleeve type structure, the side wall of the upper section of the connecting head is provided with two open slots adapted to the head of the bolt, the open slots comprise an open section, a rotating section and a buckling section which are connected in sequence, the open section is vertically opened downwards along the upper end of the connecting head, the rotating section is horizontally opened towards one side along the lower end of the open section, and the buckling section is vertically opened upwards along the tail end of the rotating section.

5. The vertical coater capable of quickly assembling and disassembling a target core according to claim 4, wherein the central angle corresponding to the rotating section is 90 degrees, so that the two opening sections and the two buckling-in sections are uniformly distributed around the circumference of the connector.

6. The vertical coater capable of quickly assembling and disassembling a target core according to claim 4, wherein a flange is provided at the lower end of the connector and the target core assembly is installed through the flange.

7. The vertical coater of claim 4 wherein the inside diameter of the adapter is adapted to the outside diameter of the mounting post, and the mounting post is hollow so that the adapter is connected to the mounting post when mounted thereon.

8. The vertical coater of claim 7 wherein the length of the mounting post extending below the bolt is greater than the length of the opening section, and a seal ring is disposed between the connector and the mounting post below the opening slot.

9. The vertical coater of claim 4 wherein the two bolts are of different sizes and the width of the two slots is different.