CN211497768U

CN211497768U - Vertical film plating machine convenient to dismouting target baffle

Info

Publication number: CN211497768U
Application number: CN201921319833.9U
Authority: CN
Inventors: 华冬辉
Original assignee: Hunan Film Vacuum Equipment Co ltd
Current assignee: Hunan Film Vacuum Equipment Co ltd
Priority date: 2019-08-14
Filing date: 2019-08-14
Publication date: 2020-09-15
Anticipated expiration: 2029-08-14

Abstract

The utility model discloses a vertical coating machine convenient to dismouting target baffle, it is provided with the vacuum coating room, the indoor hanging of vacuum coating has the baffle. The utility model provides a baffle passes through the mode realization installation of carry, only through the mode of bolt installation, adjusts well more easily, accomplishes the installation, can improve dismouting efficiency, and then improves production efficiency to can reduce workman's the operation degree of difficulty, manipulation strength, the practicality is strong.

Description

Vertical film plating machine convenient to dismouting target baffle

Technical Field

The utility model belongs to the technical field of vacuum coating machine, concretely relates to vertical coating machine convenient to dismouting target baffle.

Background

The sputtering vacuum coating machine in the market at present is generally of a vertical structure, and when a plurality of sputtering targets are arranged, a partition board 100 is usually arranged in a vacuum coating chamber to form a plurality of sputtering areas corresponding to the sputtering targets, so that a workpiece corresponds to the current sputtering target. As shown in fig. 1, in the conventional vertical vacuum coating machine, bolts are installed at the upper end of a partition plate 100 and fixed on a turntable or the top wall of a vacuum coating chamber through the bolts, so that at least two workers are required to operate during installation, one worker holds the partition plate 100, and the other worker installs the bolts, which is inconvenient to disassemble and assemble and affects the production efficiency, and in some cases, the weight of the partition plate 100 is large, the working strength of the worker holding the partition plate 100 is too high, and it is difficult to align the bolts with the installation holes.

SUMMERY OF THE UTILITY MODEL

In order to solve the problems, the utility model provides a vertical coating machine convenient to dismouting target baffle, it is provided with the vacuum coating room, the indoor hanging of vacuum coating has the baffle.

Preferably, the upper end of the partition plate is provided with a fastener or a hook, the top of the vacuum coating chamber is provided with a top plate, the top plate is provided with the hook or the fastener, and the partition plate is mounted on the top plate through the cooperation of the fastener and the hook.

Preferably, the couple set up in on the roof and set up to bottom open-ended tubular structure, set up on the lateral wall of couple and let a mouthful, and on the couple with set up the open slot that the downward sloping extends on the adjacent both sides wall of the mouth of stepping down, the fastener set up in the upper end of baffle and specifically set up to be located two cross bolts of the both sides of baffle upper end, the cross bolt with the open slot adaptation can be followed it detains to let a mouthful department in the open slot.

Preferably, a rotary table frame is rotatably arranged in the vacuum coating chamber and used for mounting a workpiece, and the partition plate is hung at the upper end of the rotary table frame.

Preferably, the upper end of baffle is provided with fastener or couple, the upper end of revolving rack is provided with couple or fastener, the baffle pass through the fastener with the couple cooperation and carry in the upper end of revolving rack.

Preferably, the couple set up in the upper end of revolving rack sets up to bottom open-ended tubular structure, set up on the lateral wall of couple and let a mouthful, and on the couple with set up the open slot that the downward sloping extends on the adjacent both sides wall of the mouth of stepping down, the fastener set up in the upper end of baffle specifically sets up to be located two cross bolts of the both sides of baffle upper end, cross bolt with open slot adaptation can follow it detains to let a mouthful department in the open slot.

Preferably, a first positioning hole is formed in the side wall, opposite to the abdicating opening, of the hook, a second positioning hole is correspondingly formed in the partition plate, the second positioning hole is a threaded hole, and the hook and the partition plate are fixed through the locking bolt installed in the first positioning hole and the second positioning hole.

Preferably, the hook is fixedly installed through a first bolt, and a raised positioning column is arranged on the upper end face of the hook.

Preferably, the first bolt is provided with a plurality of positioning columns which are evenly distributed around the positioning columns.

Preferably, the partition plate comprises an installation column and a plurality of partition plate bodies, and the plurality of partition plate bodies are installed on the cylindrical surface of the installation column.

The utility model has the advantages that:

the utility model provides a baffle passes through the mode realization installation of carry, only through the mode of bolt installation, adjusts well more easily, accomplishes the installation, can improve dismouting efficiency, and then improves production efficiency to can reduce workman's the operation degree of difficulty, manipulation strength, the practicality is strong.

Drawings

The invention will be further described with reference to the following figures and examples:

FIG. 1 is a schematic view of a conventional installation structure of a partition;

FIG. 2 is a schematic view of the mounting structure of the improved rear bulkhead;

FIG. 3 is a schematic view of the hook construction;

FIG. 4 is a cross-sectional view of the hanger;

fig. 5 is a schematic view of the arrangement of the separator body.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.

Referring to fig. 1 to 5, the utility model discloses a vertical coating machine convenient for dismounting a target partition, which is provided with a vacuum coating chamber, wherein a partition 100 is hung in the vacuum coating chamber.

The utility model provides a baffle 100 realizes the installation through the mode of carry, and the mode that only passes through the bolt installation that is shown in FIG. 1 is adjusted well more easily, is accomplished the installation, can improve dismouting efficiency, and then improves production efficiency to can reduce workman's the operation degree of difficulty, manipulation strength, the practicality is strong.

In a vertical film plating machine, a turntable frame is generally arranged in a vacuum film plating chamber to mount a workpiece, but the arrangement of the target material and the workpiece in the vacuum film plating chamber is divided into two structural forms, wherein the first structure is that the workpiece is arranged around the target material, namely the target material is arranged in the middle and the workpiece is arranged at the periphery, and the second structure is that the target material is arranged around the workpiece, namely the workpiece is arranged in the middle and the target material is arranged at the periphery.

In the first configuration, the partition 100 is arranged to separate different targets, so that the partition 100 is installed on the top of the vacuum coating chamber. Preferably, the upper end of the partition board 100 is provided with a fastener or a hook 300, the top of the vacuum coating chamber is provided with a top board 200, the top board 200 is provided with the hook 300 or the fastener, and the partition board 100 is mounted on the top board 200 by the cooperation of the fastener and the hook 300.

When the second structure is adopted, the partition plate 100 is arranged to separate the workpieces, so that when the turntable is rotated to a certain angle, the workpieces in a certain area separated by the partition plate 100 are only acted by a single outer target, and therefore the partition plate 100 is mounted on the turntable. Preferably, the partition plate 100 is mounted on the upper end of the turret. The upper end of the partition board 100 is provided with a fastener or a hook 300, the upper end of the rotary table frame is provided with a hook 300 or a fastener, and the partition board 100 is matched with the hook 300 through the fastener and is hung on the upper end of the rotary table frame.

For convenience of installation, it is preferable that the fastening member is provided at the upper end of the partition 100, that is, the hook 300 is provided at the lower end of the top plate 200 in the case of the first configuration, and the hook 300 is provided at the upper end of the turret in the case of the second configuration.

As shown in fig. 3 and 4, the hook 300 is a cylindrical structure with an opening at the bottom, the side wall of the hook 300 is provided with a yielding opening 302, the two side walls of the hook 300 adjacent to the yielding opening 302 are provided with an opening groove 301 extending downwards, the fastening member is provided with two cross bolts 400 at two sides of the upper end of the partition board 100, and the cross bolts 400 are adapted to the opening groove 301 and can be fastened into the opening groove 301 from the yielding opening 302.

Therefore, when the partition board 100 is installed, a worker only needs to lift the partition board 100, the transverse bolt 400 slides into the open slot 301 to complete installation of the partition board 100, and the open slot 301 is inclined downwards, so that the partition board can be automatically installed in place under the action of gravity only by sliding into the open end of the open slot 301, and the partition board is simple, convenient and labor-saving.

Further, in order to fix the partition board 100, preferably, at least one first positioning hole 304 is formed in a side wall of the hook 300 opposite to the abdicating opening 302, at least one second positioning hole is correspondingly formed in the partition board 100, the second positioning hole is a threaded hole, and the hook 300 and the partition board 100 are fixed by installing locking bolts in the first positioning hole 304 and the second positioning hole.

Of course, the first positioning hole 304 may be a threaded hole, and a locking bolt may be inserted into the first positioning hole 304 on the partition board 100 to achieve the fixing.

Because the partition board 100 is assembled and positioned with the open slot 301 through the cross bolt 400, the first positioning hole 304 and the second positioning hole are automatically positioned and aligned, a worker can directly install a locking bolt in the partition board during installation, and the assembly and disassembly efficiency is high.

As shown in fig. 3 and 4, in order to simplify the installation of the hook 300, it is preferable that the hook 300 is installed and fixed by a first bolt, and a protruded positioning column 303 is provided on an upper end surface of the hook 300. Correspondingly, the upper end of the top plate 200 or the turntable is provided with hole sites adapted to the positioning columns 303, and the first bolts are provided with a plurality of bolts and are uniformly distributed around the positioning columns 303. Therefore, when the hook 300 is installed, pre-positioning can be achieved through the positioning column 303, and then the first bolt is installed, so that the assembling efficiency is improved.

As shown in fig. 2 and 5, in some embodiments, the partition 100 includes a mounting post 102 and a plurality of partition bodies 101, the plurality of partition bodies 101 being mounted on a cylindrical surface of the mounting post 102. When the partition 100 is arranged in such a structure, the height of the upper end of the mounting column 102 is higher than that of the partition body 101, the cross bolt 400 is arranged at the upper end of the mounting column 102, and the inner diameter of the cylindrical hook 300 is matched with that of the mounting column 102, so that the mounting column 102 is limited through the inner wall.

The above embodiments are merely preferred embodiments of the present invention, and other embodiments are also possible. Equivalent modifications or substitutions may be made by those skilled in the art without departing from the spirit of the invention, and such equivalent modifications or substitutions are intended to be included within the scope of the claims set forth herein.

Claims

1. The vertical coating machine is characterized in that a vacuum coating chamber is arranged, a partition plate is hung in the vacuum coating chamber, fasteners or hooks are arranged at the upper end of the partition plate, a top plate is arranged at the top of the vacuum coating chamber, hooks or fasteners are arranged on the top plate, and the partition plate is hung on the top plate through the cooperation of the fasteners and the hooks.

2. The vertical coating machine convenient for dismounting and mounting a target separation plate according to claim 1, wherein the hook is arranged on the top plate and is provided with a cylindrical structure with an opening at the bottom, a yielding port is arranged on the side wall of the hook, open slots extending downwards are arranged on two side walls of the hook adjacent to the yielding port, the fastener is arranged at the upper end of the separation plate and is specifically provided with two cross bolts positioned at two sides of the upper end of the separation plate, and the cross bolts are adapted to the open slots and can be buckled into the open slots from the yielding port.

3. The vertical coating machine capable of conveniently dismounting and mounting the target partition plate according to claim 1, wherein a rotary table frame is rotatably arranged in the vacuum coating chamber, the rotary table frame is used for mounting a workpiece, and the partition plate is hung on the upper end of the rotary table frame.

4. The vertical coating machine convenient for dismounting and mounting a target partition plate as claimed in claim 3, wherein a fastener or a hook is arranged at the upper end of the partition plate, a hook or a fastener is arranged at the upper end of the rotating platform frame, and the partition plate is mounted at the upper end of the rotating platform frame through the cooperation of the fastener and the hook.

5. The vertical coating machine convenient for dismounting and mounting a target separation plate according to claim 4, wherein the hook is arranged at the upper end of the turntable frame and is arranged in a cylinder structure with an opening at the bottom, a yielding port is arranged on the side wall of the hook, open grooves extending downwards are arranged on two side walls of the hook adjacent to the yielding port, the fastener is arranged at the upper end of the separation plate and is specifically arranged into two cross bolts at two sides of the upper end of the separation plate, and the cross bolts are adapted to the open grooves and can be buckled into the open grooves from the yielding port.

6. The vertical film plating machine convenient for dismounting and mounting a target separator as claimed in claim 2 or 5, wherein a first positioning hole is formed on a side wall of the hook opposite to the abdicating opening, a second positioning hole is correspondingly formed on the separator, the second positioning hole is a threaded hole, and the hook and the separator are fixed by installing locking bolts in the first positioning hole and the second positioning hole.

7. The vertical film plating machine convenient for dismounting and mounting a target separator as claimed in claim 2 or 5, wherein the hook is fixedly mounted through a first bolt, and a raised positioning column is arranged on the upper end surface of the hook.

8. The vertical coater of claim 7 wherein the first bolts are provided in a plurality and are evenly distributed around the location posts.

9. The vertical coating machine for conveniently dismounting and mounting a target separator according to any one of claims 1-5, wherein the separator comprises a mounting column and a plurality of separator bodies, and the plurality of separator bodies are mounted on a cylindrical surface of the mounting column.