CN211491368U - High-precision micro-motion platform - Google Patents
High-precision micro-motion platform Download PDFInfo
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- CN211491368U CN211491368U CN201922461746.3U CN201922461746U CN211491368U CN 211491368 U CN211491368 U CN 211491368U CN 201922461746 U CN201922461746 U CN 201922461746U CN 211491368 U CN211491368 U CN 211491368U
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Abstract
The utility model relates to the control field, in particular to a high-precision micro-motion platform; comprises a mounting platform at the top and a base at the bottom, a RY-axis rotating platform, an RZ-axis rotating platform, a Z-axis lifting platform, a Y-axis translation platform and an X-axis translation platform are arranged between the mounting platform and the base, the RY-axis rotating platform is connected with the Z-axis lifting platform, the Z-axis lifting platform is connected with the Y-axis translation platform through the RZ-axis rotating platform, the Y-axis translation platform is connected with the X-axis translation platform, the RY-axis rotating platform can realize the rotation angle around the Y axis, the utility model belongs to a micro-motion platform with a pure mechanical structure, has strong environmental adaptability, the utility model has high reliability and high precision, belongs to a micro-motion platform with a pure mechanical structure, has strong environmental adaptability, the device has high reliability and high precision, and can accurately adjust the displacement in the three directions of the X axis, the Y axis and the Z axis and the change of the rotating angle around the Z axis direction and the Y axis direction.
Description
Technical Field
The utility model relates to a control field, concretely relates to high accuracy fine motion platform.
Background
With the continuous development of scientific technology, remote detection and positioning technology has been widely applied to various fields, which further raises the precision requirement of applied equipment. At present, most of high-precision micro-motion platforms in the market are mainly controlled by electricity, the defects and advantages of electric control equipment are clear, and the requirement on the used environment is high, so that the application range of the electric control equipment is restricted.
SUMMERY OF THE UTILITY MODEL
To the problem mentioned in the prior art, the utility model aims to provide a pure machinery, do not receive service environment factor to influence, it is high to have control accuracy, and the reliability is high to control stable high accuracy fine motion platform.
The utility model relates to a high accuracy fine motion platform, including the mounting platform at top and the base of bottom, be equipped with RY axle rotary platform, RZ axle rotary platform, Z axle lift platform, Y axle translation platform and X axle translation platform between mounting platform and the base, RY axle rotary platform links to each other with Z axle lift platform, and Z axle lift platform passes through RZ axle rotary platform and links to each other with Y axle translation platform, and Y axle translation platform links to each other with X axle translation platform, RY axle rotary platform can realize around Y axle rotation angle, and RZ axle rotary platform can realize around Z axle rotation angle, and X axle translation platform, Y axle translation platform, Z axle lift platform can realize respectively along X axle, Y axle, Z axle removal, thereby cooperate through a plurality of platforms and realize that mounting platform's displacement changes and angle change.
Preferably, the RY-axis rotating platform further comprises a RY-axis wedge block, a fixing block, a first fine adjustment lead screw, a first locking screw and a first return spring, a rotary adjusting seam is formed in the RY-axis rotating platform, a first dovetail groove is formed in the bottom of the rotary adjusting seam, a first guide rail is arranged at the bottom of the first dovetail groove, the fixing block is arranged at each of two ends of the first dovetail groove, the first dovetail groove is further connected with the RY-axis wedge block in a shape matching mode, the first fine adjustment lead screw is connected with the RY-axis wedge block through the first return spring when the first fine adjustment lead screw is connected with the RY-axis wedge block, and the first locking screw is connected with one end of the RY-axis rotating platform.
Preferably, the Z-axis lifting platform further comprises a Z-axis wedge block, a second locking screw, a second fine adjustment screw and a second reset spring, wherein a second dovetail groove is formed in the Z-axis lifting platform, first sinking grooves are further formed in two ends of the second dovetail groove, the second dovetail groove is matched and connected with the first guide rail, the Z-axis wedge block penetrates through the first sinking grooves to be matched with the first guide rail, the second fine adjustment screw is connected with the Z-axis wedge block, the second reset spring is arranged between the second dovetail groove and the first guide rail, and the second locking screw is connected with one end of the Z-axis lifting platform.
Preferably, the RZ axis rotating platform is installed in the Y axis translating platform and further comprises an RZ axis wedge block, a third locking screw, a third fine tuning screw rod and a third return spring, one end of the RZ axis rotating platform is provided with a cylindrical pin, the cylindrical pin is matched with the RZ axis wedge block to work, the other end of the RZ axis rotating platform is connected with the third return spring, the third fine tuning screw rod penetrates through the Y axis translating platform to be connected with the RZ axis wedge block, and the third locking screw is connected with one end of the RZ axis rotating platform.
Preferably, the bottom of the Y-axis translation platform is provided with a second guide rail, the middle of the X-axis translation platform is provided with a third dovetail groove, two ends of the third dovetail groove are provided with a second sinking groove, the second guide rail is matched with the second sinking groove, the X-axis translation platform further comprises a Y-axis wedge block, a fourth locking screw, a fourth fine adjustment screw rod and a fourth reset spring, a first adjusting seam is further formed between the second guide rails, the Y-axis wedge block is arranged in the third dovetail groove, the fourth fine adjustment screw rod penetrates through the first adjusting seam and is connected with the Y-axis wedge block, the fourth reset spring is arranged on one side of the second guide rail, and the fourth locking screw is arranged between the Y-axis translation platform and the X-axis translation platform.
Preferably, a third guide rail is arranged at the bottom of the X-axis translation platform, a fourth dovetail groove is formed in the middle of the base, third sinking grooves are formed in two ends of the third dovetail groove, the third guide rail is matched with the third sinking grooves, the X-axis translation platform further comprises an X-axis wedge block, a fifth locking screw, a fifth fine adjustment screw rod and a fifth reset spring, a second adjusting seam is further formed in the third guide rail, the fifth fine adjustment screw rod penetrates through the second adjusting seam and is connected with the X-axis wedge block, the fifth reset spring is installed on one side of the third guide rail, and the fifth locking screw is arranged between the base and the X-axis translation platform.
Preferably, clearance eliminating grooves are formed in the RY-axis wedge block, the Z-axis wedge block, the RZ-axis wedge block, the Y-axis wedge block and the X-axis wedge block.
Preferably, the first fine tuning screw rod, the second fine tuning screw rod, the third fine tuning screw rod, the fourth fine tuning screw rod and the fifth fine tuning screw rod are all provided with graduated discs.
Compared with the prior art, the utility model, following technological effect has been gained:
the utility model discloses fine motion platform belongs to a pure mechanical structure's fine motion platform, environmental suitability is strong, and the reliability is high, and the precision is high, the displacement of regulation X axle, Y axle, the three direction of Z axle that can be accurate and around Z axle direction, around Y axle direction rotation angle change.
Drawings
Fig. 1 is a schematic view of the structure of the device of the present invention.
Fig. 2 is an exploded view of the device of the present invention.
Fig. 3 is a schematic cross-sectional view of the present invention.
Fig. 4 is a schematic structural view of the RY axis rotating platform of the present invention.
Fig. 5 is a schematic structural view of the RY-axis wedge of the present invention.
Fig. 6 is the structural schematic diagram of the Z-axis lifting platform of the present invention.
Fig. 7 is the schematic structural diagram of the Z-axis wedge of the present invention.
Fig. 8 is a schematic structural view of the RZ axial rotation platform of the present invention.
Fig. 9 is a schematic structural view of the RZ axial wedge of the present invention.
Fig. 10 is a schematic structural view of the Y-axis translation platform of the present invention.
Fig. 11 is a schematic structural view of the Y-axis wedge of the present invention.
Fig. 12 is a schematic structural view of the X-axis translation platform of the present invention.
Fig. 13 is a schematic structural view of the X-axis wedge of the present invention.
Fig. 14 is a schematic view of the base structure of the present invention.
Fig. 15 is a schematic view of the index plate of the present invention.
Fig. 16 is a schematic view of the RZ axis rotation principle of the present invention.
Fig. 17 is a schematic view of the X-axis translation principle of the present invention.
Fig. 18 is a schematic view of the Z-axis lifting principle of the present invention.
Reference numerals: 1-mounting a platform; 2-RY axis rotating platform; 2.1-RY shaft wedge-shaped block; 2.2-fixed block; 2.3-a first fine tuning screw; 2.5-rotating the adjusting seam; 2.6-first dovetail groove; 2.7-a first guide rail; 3-Z axis lifting platform; 3.1-Z axis wedge block; 3.2-second fine tuning screw rod; 3.3-a second return spring; 3.4-second locking screw; 3.5-second dovetail groove; 3.6-first sink tank; 4-RZ axis rotating platforms; 4.1-RZ axis wedge block; 4.2-third fine tuning screw rod; 4.3-third locking screw; 4.4-a third return spring; 5-Y axis translation stage; 5.1-Y-axis wedge-shaped blocks; 5.2-fourth fine tuning screw rod; 5.3-a second guide rail; 6-X axis translation stage; 6.1-X axis wedge block; 6.2-fifth fine tuning screw rod; 6.3-third dovetail groove; 6.4-second sink tank; 6.5-third guide rail; 6.6-fifth return spring; 6.7-fifth locking screw; 7-a base; 7.1-fourth dovetail groove; 7.2-the third settling tank; 8-eliminating a gap groove; 9-an index plate; 10-gap eliminating sheet.
Detailed Description
Examples
The utility model relates to a high-precision micro-motion platform, which comprises a top mounting platform 1 and a bottom base 7, wherein a RY-axis rotary platform 2, an RZ-axis rotary platform 4, a Z-axis lifting platform 3, a Y-axis translational platform 5 and an X-axis translational platform 6 are arranged between the mounting platform 1 and the base 7, the RY-axis rotary platform 2 is connected with the Z-axis lifting platform 3, the Z-axis lifting platform 3 is connected with the Y-axis translational platform 5 through the RZ-axis rotary platform 4, the Y-axis translational platform 5 is connected with the X-axis translational platform 6, the RY-axis rotating platform 2 can rotate around a Y axis, the RZ-axis rotating platform 4 can rotate around a Z axis, the X-axis translation platform 6, the Y-axis translation platform 5 and the Z-axis lifting platform 3 can respectively move along the X axis, the Y axis and the Z axis, and displacement change and angle change of the mounting platform 1 are realized through cooperation of the platforms.
In this embodiment, it has the carrier to settle on the mounting platform 1, through the RY axle rotary platform 2, Z axle lift platform 3, RZ axle rotary platform 4, Y axle translation platform 5, the X axle translation platform 6 that set gradually that set up can realize the translation of mounting platform 1 along X axle, Y axle, Z axle and around Y and around the rotation of Z axle.
The RY-shaft rotating platform 2 further comprises a RY-shaft wedge block 2.1, a fixing block 2.2, a first fine-adjustment lead screw 2.3, a first locking screw and a first reset spring, a rotating adjusting seam 2.5 is formed in the RY-shaft rotating platform 2, a first dovetail groove 2.6 is arranged at the bottom of the rotating adjusting seam 2.5, a first guide rail 2.7 is arranged at the bottom of the first dovetail groove 2.6, the fixing blocks 2.2 are arranged at two ends of the first dovetail groove, the first dovetail groove is further connected with the RY-shaft wedge block 2.1 matched in shape, the first fine-adjustment lead screw 2.3 is connected with the RY-shaft wedge block 2.1 through the first reset spring, and the first locking screw is connected with one end of the RY-shaft rotating platform 2.
As shown in the figure, in the embodiment, the surface of the RY shaft wedge-shaped block 2.1 is arranged in an inclined plane, the inclined angle of the inclined plane is adapted to two rotation adjusting slots 2.5 formed in the RY shaft rotating platform 2, the RY shaft wedge-shaped block 2.1 is matched with the first dovetail groove 2.6, a through hole is formed in the side surface of the RY shaft wedge-shaped block 2.1, the first fine adjustment lead screw 2.3 penetrates through the through hole to be connected with the RY shaft wedge-shaped block 2.1, wherein a gap eliminating sheet 10 is further arranged at one end, far away from the first fine adjustment lead screw 2.3, of the RY shaft wedge-shaped block 2.1, and errors in machining and manufacturing can be reduced by the gap eliminating; when adjusting, the first fine adjustment screw rod 2.3 can be rotated to enable the RY-axis wedge block 2.1 to move left and right, the first reset spring is installed to play a role in rotary reset, and after the adjustment is carried out to a specified angle, the first locking screw is screwed up to lock the RY-axis rotary platform 2 in a rotating mode, so that the installation platform 1 can change around the rotation angle of the Y axis, and the rotation angle range around the Y axis in the embodiment is 0-10 degrees.
Z axle lift platform 3 still includes Z axle wedge 3.1, second locking screw 3.4, second fine setting lead screw 3.2 and second reset spring 3.3, Z axle lift platform 3 is last to have seted up second dovetail 3.5, and second dovetail 3.5 both ends still are equipped with first heavy groove 3.6, and wherein, second dovetail 3.5 matches with first guide rail 2.7 and links to each other, and Z axle wedge 3.1 passes first heavy groove 3.6 and cooperatees with first guide rail 2.7, and second fine setting lead screw 3.2 links to each other with Z axle wedge 3.1, second reset spring 3.3 sets up between second dovetail 3.5 and first guide rail 2.7, and second locking screw 3.4 links to each other with Z axle lift platform 3 one end.
As shown in the figure, in this embodiment, when the RY-axis rotating platform 2 is connected with the Z-axis lifting platform 3, the first guide rail 2.7 at the bottom of the RY-axis rotating platform 2 is connected with the second dovetail groove 3.5 on the Z-axis lifting platform 3 through the Z-axis wedge 3.1, so as to connect the two platforms, the two ends of the second dovetail groove 3.5 are provided with the first sinking grooves 3.6 with the same shape and size, so as to facilitate the movement of the Z-axis wedge 3.1, the Z-axis wedge 3.1 is provided with a through hole, the through hole through which the second fine tuning screw 3.2 passes is connected with the Z-axis wedge 3.1, wherein the Z-axis wedge 3.1 is further provided with a gap eliminating groove 8, the gap between the second fine tuning screw 3.2 and the Z-axis wedge 3.1 can be eliminated by adjusting a screw of the gap eliminating groove 8, the end of the Z-axis wedge 3.1 far from the second fine tuning screw 3.2 is also provided with a gap eliminating piece 10, so as to reduce errors in manufacturing, and when adjusting, the second return spring 3.3, thereby make mounting platform 1 rise, second reset spring 3.3 can play Z axle reset effect, adjusts to the assigned position after, screws up second locking screw 3.4 and locks its Z axle lift, realizes mounting platform 1 along Z axle translation certain distance, and the distance scope of Z axle translation is between 0~30mm in this embodiment.
The RZ axis rotary platform 4 is arranged in the Y axis translation platform 5 and further comprises an RZ axis wedge block 4.1, a third locking screw 4.3, a third fine adjustment screw rod 4.2 and a third reset spring 4.4, one end of the RZ axis rotary platform 4 is provided with a cylindrical pin, the cylindrical pin is matched with the RZ axis wedge block 4.1 to work, the other end of the RZ axis rotary platform is connected with the third reset spring 4.4, the third fine adjustment screw rod 4.2 penetrates through the Y axis translation platform 5 to be connected with the RZ axis wedge block 4.1, and the third locking screw 4.3 is connected with one end of the RZ axis rotary platform 4.
As shown in the figure, in the embodiment, the RZ-axis rotary platform 4 is installed on the Y-axis translation platform 5, the RZ-axis rotary platform 4 is connected with the Y-axis translation platform 5 through a rotating shaft, the rotating shaft is installed at the center of the RZ-axis rotary platform 4, wherein one side of the Y-axis translation platform 5 is provided with a through hole for a third fine tuning screw rod 4.2 to penetrate, an anti-backlash spring is further arranged between the third fine tuning screw rod 4.2 and the Y-axis translation platform 5 to reduce errors, the third fine tuning screw rod 4.2 penetrates through the through hole and penetrates through the RZ-axis wedge block 4.1 to be connected with the RZ-axis rotary platform 4, a third return spring 4.4 is installed between the Y-axis translation platform 5 and a cylindrical pin to return the RZ-axis rotary platform 4, when in adjustment, the third fine tuning screw rod 4.2 is rotated to move the RZ-axis wedge block 4.1 and push the cylindrical pin on the RZ-axis rotary platform 4 to rotate the RZ-axis rotary platform 4, and the RY-axis rotary platform 4.3 is screwed to lock the RY-axis rotary platform 2 to rotate, the change of the rotation angle of the mounting platform 1 around the Z axis is realized, and the rotation angle around the Z axis in the embodiment ranges from 0 degree to 90 degrees.
The bottom of the Y-axis translation platform 5 is provided with a second guide rail 5.3, the middle of the X-axis translation platform 6 is provided with a third dovetail groove 6.3, two ends of the third dovetail groove 6.3 are provided with second sinking grooves 6.4, the second guide rail 5.3 is matched with the second sinking grooves 6.4 and further comprises a Y-axis wedge block 5.1, a fourth locking screw, a fourth fine adjustment screw rod 5.2 and a fourth reset spring, a first adjusting seam is further arranged between the second guide rails 5.3, the Y-axis wedge block 5.1 is arranged in the third dovetail groove 6.3, the fourth fine adjustment screw rod 5.2 penetrates through the first adjusting seam and is connected with the Y-axis wedge block 5.1, the fourth reset spring is arranged on one side of the second guide rails 5.3, and the fourth locking screw is arranged between the Y-axis translation platform 5 and the X-axis translation platform 6.
As shown in the figure, in this embodiment, the shape and size of the second guide rail 5.3 are matched with the second sinking groove 6.4, when the connection is made, the second guide rail 5.3 is connected with the second sinking groove 6.4, the X-axis translation platform 6 is connected with the third dovetail groove 6.3 and the Y-axis translation platform 5 through the Y-axis wedge 5.1, the fourth fine adjustment screw 5.2 passes through the X-axis translation platform 6 and is connected with the Y-axis wedge 5.1, wherein the Y-axis wedge 5.1 is further provided with a gap eliminating groove 8, the gap eliminating groove 8 is provided with a gap eliminating screw which can eliminate the gap between the fourth fine adjustment screw 5.2 and the Y-axis wedge 5.1, when the adjustment is made, the fourth fine adjustment screw 5.2 is rotated to move the Y-axis wedge 5.1 and the second guide rail 5.3 along the Y-axis, so as to realize the translation of the mounting platform 1 along the Y-axis, and also can be reversed, and the Y-axis translation screw is locked by screwing the fourth translation screw under the action of the reset spring, realize mounting platform 1 along Y axle translation certain distance, the distance scope of Y axle translation is between 0~30mm in this embodiment.
The X-axis translation platform is characterized in that a third guide rail 6.5 is arranged at the bottom of the X-axis translation platform 6, a fourth dovetail groove 7.1 is formed in the middle of the base 7, third sinking grooves 7.2 are further formed in two ends of the fourth dovetail groove 7.1, the third guide rail 6.5 is matched with the third sinking grooves 7.2, the X-axis translation platform further comprises an X-axis wedge block 6.1, a fifth locking screw 6.7, a fifth fine adjustment screw 6.2 and a fifth reset spring 6.6, a second adjustment slit is further formed in the third guide rail 6.5, the fifth fine adjustment screw 6.2 penetrates through the second adjustment slit to be connected with the X-axis wedge block 6.1, the fifth reset spring 6.6 is installed on one side of the third guide rail 6.5, and the fifth locking screw 6.7 is arranged between the base 7 and the X-axis translation platform 6.
As shown in the figure, in this embodiment, the shape and size of the third guide rail 6.5 are matched with those of the second sinking groove 6.4, when the third guide rail 6.5 is connected with the third sinking groove 7.2, the base 7 is connected with the X-axis translation platform 6 through the X-axis wedge 6.1, the fifth fine adjustment screw 6.2 passes through the base 7 and is connected with the Y-axis wedge 5.1, wherein the X-axis wedge 6.1 is further provided with a gap eliminating groove 8, the gap eliminating screw is installed in the gap eliminating groove 8, which can eliminate the gap between the fifth screw fine adjustment 6.2 and the X-axis wedge 6.1, during adjustment, the fifth fine adjustment screw 6.2 is rotated to move the X-axis wedge 6.1 and the third guide rail 6.5 along the X-axis, so as to realize translation of the mounting platform 1 along the X-axis, and also can be reversed, under the action of the reset spring, the Y-axis translation platform 5 is reset, after being adjusted to the designated position, the fifth guide rail 6.7 is screwed to lock the Y-axis translation platform 5, realize mounting platform 1 along X axle translation certain distance, the distance scope of X axle translation is between 0~30mm in this embodiment.
And clearance elimination grooves 8 are respectively arranged on the RY-axis wedge block 2.1, the Z-axis wedge block 3.1, the RZ-axis wedge block 4.1, the Y-axis wedge block 5.1 and the X-axis wedge block 6.1. In the embodiment, the gap eliminating grooves 8 arranged on the wedge-shaped blocks are matched with gap eliminating screws, so that gaps in connection can be eliminated, and errors are reduced.
The first fine adjustment screw rod 2.3, the second fine adjustment screw rod 3.2, the third fine adjustment screw rod, the fourth fine adjustment screw rod and the fifth fine adjustment screw rod are all provided with index plates 9 in an engraved mode, and the index plates 9 can be accurately controlled during adjustment.
During the use, place the bearing thing on mounting platform 1, adjust RY axle rotary platform 2, Z axle lift platform 3, RZ axle rotary platform 4, Y axle translation platform 5, X axle translation platform 6 respectively according to the demand, realize along X, Y, Z axle translation changes with around Y axle, around Z axle angular rotation change.
Claims (8)
1. The utility model provides a high accuracy fine motion platform, its characterized in that, including the mounting platform at top and the base of bottom, be equipped with RY axle rotary platform, RZ axle rotary platform, Z axle lift platform, Y axle translation platform and X axle translation platform between mounting platform and the base, RY axle rotary platform links to each other with Z axle lift platform, and Z axle lift platform passes through RZ axle rotary platform and links to each other with Y axle translation platform, and Y axle translation platform links to each other with X axle translation platform, RY axle rotary platform can realize around Y axle rotation angle, and RZ axle rotary platform can realize around Z axle rotation angle, and X axle translation platform, Y axle translation platform, Z axle lift platform can realize respectively along X axle, Y axle, Z axle removal, thereby realize mounting platform's displacement change and angle variation through a plurality of platforms cooperate.
2. The high-precision micro-motion platform is characterized in that the RY-shaft rotating platform further comprises a RY-shaft wedge block, a fixing block, a first micro-tuning lead screw, a first locking screw and a first return spring, a rotating adjusting seam is formed in the RY-shaft rotating platform, a first dovetail groove is formed in the bottom of the rotating adjusting seam, a first guide rail is arranged at the bottom of the first dovetail groove, the fixing block is arranged at each of two ends of the first dovetail groove, the first dovetail groove is further connected with the RY-shaft wedge block in a matched shape, the first micro-tuning lead screw is connected with the RY-shaft wedge block through the first return spring when the first micro-tuning lead screw is connected with the RY-shaft wedge block, and the first locking screw is connected with one end of the RY-shaft rotating platform.
3. The high-precision micro-motion platform according to claim 2, wherein the Z-axis lifting platform further comprises a Z-axis wedge block, a second locking screw, a second micro-tuning screw and a second reset spring, a second dovetail groove is formed in the Z-axis lifting platform, first sinking grooves are further formed in two ends of the second dovetail groove, the second dovetail groove is connected with the first guide rail in a matched mode, the Z-axis wedge block penetrates through the first sinking grooves to be matched with the first guide rail, the second micro-tuning screw is connected with the Z-axis wedge block, the second reset spring is arranged between the second dovetail groove and the first guide rail, and the second locking screw is connected with one end of the Z-axis lifting platform.
4. The high-precision micro-motion platform according to claim 3, wherein the RZ axis rotation platform is installed in the Y axis translation platform, and further comprises a RZ axis wedge block, a third locking screw, a third fine tuning screw and a third return spring, one end of the RZ axis rotation platform is provided with a cylindrical pin, the cylindrical pin is matched with the RZ axis wedge block to work, the other end of the RZ axis rotation platform is connected with the third return spring, the third fine tuning screw penetrates through the Y axis translation platform to be connected with the RZ axis wedge block, and the third locking screw is connected with one end of the RZ axis rotation platform.
5. A high-precision micro-motion platform according to claim 4, wherein a second guide rail is arranged at the bottom of the Y-axis translation platform, a third dovetail groove is formed in the middle of the X-axis translation platform, second sinking grooves are further formed in two ends of the third dovetail groove, the second guide rail is matched with the second sinking grooves, the high-precision micro-motion platform further comprises a Y-axis wedge block, a fourth locking screw, a fourth fine tuning screw rod and a fourth reset spring, a first adjusting seam is further formed between the second guide rails, the Y-axis wedge block is arranged in the third dovetail groove, the fourth fine tuning screw rod penetrates through the first adjusting seam and is connected with the Y-axis wedge block, the fourth reset spring is installed on one side of the second guide rails, and the fourth locking screw is arranged between the Y-axis translation platform and the X-axis translation platform.
6. A high-precision micro-motion platform according to claim 5, wherein a third guide rail is arranged at the bottom of the X-axis translation platform, a fourth dovetail groove is formed in the middle of the base, third sinking grooves are further formed in two ends of the third dovetail groove, the third guide rail is matched with the third sinking grooves, the high-precision micro-motion platform further comprises an X-axis wedge block, a fifth locking screw, a fifth micro-tuning screw rod and a fifth reset spring, a second adjusting slit is further formed in the third guide rail, the fifth micro-tuning screw rod penetrates through the second adjusting slit and is connected with the X-axis wedge block, the fifth reset spring is installed on one side of the third guide rail, and the fifth locking screw is arranged between the base and the X-axis translation platform.
7. The high-precision micro-motion platform according to claim 6, wherein clearance elimination grooves are formed in the RY-axis wedge block, the Z-axis wedge block, the RZ-axis wedge block, the Y-axis wedge block and the X-axis wedge block.
8. A high-precision micro-motion platform according to claim 7, wherein the first, second, third, fourth and fifth micro-motion screws are all engraved with index plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922461746.3U CN211491368U (en) | 2019-12-31 | 2019-12-31 | High-precision micro-motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922461746.3U CN211491368U (en) | 2019-12-31 | 2019-12-31 | High-precision micro-motion platform |
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| CN211491368U true CN211491368U (en) | 2020-09-15 |
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| CN201922461746.3U Active CN211491368U (en) | 2019-12-31 | 2019-12-31 | High-precision micro-motion platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110962086A (en) * | 2019-12-31 | 2020-04-07 | 西安轻工业钟表研究所有限公司 | High-precision micro-motion platform |
| CN113603006A (en) * | 2021-08-10 | 2021-11-05 | 中国航发沈阳黎明航空发动机有限责任公司 | Mechanical structure bearing lifting platform and use method |
-
2019
- 2019-12-31 CN CN201922461746.3U patent/CN211491368U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110962086A (en) * | 2019-12-31 | 2020-04-07 | 西安轻工业钟表研究所有限公司 | High-precision micro-motion platform |
| CN113603006A (en) * | 2021-08-10 | 2021-11-05 | 中国航发沈阳黎明航空发动机有限责任公司 | Mechanical structure bearing lifting platform and use method |
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