CN211489122U

CN211489122U - Concave processing apparatus in gas shower nozzle

Info

Publication number: CN211489122U
Application number: CN201921526974.8U
Authority: CN
Inventors: 陈保栋
Original assignee: Warship Chip Manufacturing Suzhou Ltd By Share Ltd
Current assignee: Warship Chip Manufacturing Suzhou Ltd By Share Ltd; Hejian Technology Suzhou Co Ltd
Priority date: 2019-09-12
Filing date: 2019-09-12
Publication date: 2020-09-15
Anticipated expiration: 2029-09-12

Abstract

The utility model discloses a concave processing apparatus in gas shower nozzle, include: a support; the downward pressing jig comprises a rod part and a hammer head, and is supported by the bracket; the cylinder is supported by the bracket, and a piston rod of the cylinder is connected with the rod part; and the control device controls the pressure and the acting time of the gas communicated with the cylinder and controls the pressing jig to reciprocate up and down. The utility model provides a technical scheme utilizes atmospheric pressure control hydraulic pressure, conveniently and accurately carries out the fovea processing to gas shower nozzle.

Description

Concave processing apparatus in gas shower nozzle

Technical Field

The utility model belongs to the technical field of concave processing apparatus and specifically relates to a concave processing apparatus in gas shower nozzle.

Background

In the production of semiconductor wafers, a gas nozzle of a vapor phase deposition machine is arranged in a reaction cavity and used for enabling reaction gas to be uniformly dispersed on the surface of a wafer and uniformly depositing a film. The uniformity of the film deposited on the wafer is related to the concave-convex degree of the middle of the gas nozzle, and the convex degree of the gas nozzle can cause the thickness of the middle film of the wafer; on the contrary, the center of the gas nozzle is concave, and the uniformity of the wafer is better.

The prior art does not have a similar device, and in order to achieve a similar technical effect, a gas spray head is generally manually hammered by a hammer, and the method has the advantages of low efficiency, easy damage to parts, low precision and incapability of controlling the degree of concavity.

For solving artifical hammer pound gas shower nozzle inefficiency with the hammer, destroy spare part and precision easily and low, the concave degree scheduling problem in uncontrollable, the utility model provides a concave processing apparatus in gas shower nozzle utilizes atmospheric pressure control hydraulic pressure through using concave processing apparatus in the gas shower nozzle, conveniently and accurately carries out concave processing to gas shower nozzle.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a concave processing apparatus in gas shower nozzle utilizes atmospheric pressure control hydraulic pressure, conveniently and accurately carries out the concave processing to gas shower nozzle.

Based on the above purpose, the utility model provides a concave treatment device of a gas nozzle, which comprises a bracket; the downward pressing jig comprises a rod part and a hammer head, and is supported by the bracket; the cylinder is supported by the bracket, and a piston rod of the cylinder is connected with the rod part; and the control device controls the pressure and the acting time of the gas communicated with the cylinder and controls the pressing jig to reciprocate up and down.

Further, the device also comprises a base, a stand column and a fastening device.

Further, a column is mounted on the base, and the bracket is adjustably supported by the column.

Further, the support is connected with the upright post through a sliding device, and the sliding device can fixedly slide up and down along the upright post.

Further, the fastening device is fixedly arranged above the base.

Further, the hammer head is longitudinally aligned with the central portion of the fastening device.

Further, the control device controls the gas generator and is connected with the cylinder through a gas pipe of the gas generator.

Further, the controller includes a solenoid valve.

Further, the device also comprises an adjusting device which is an adjusting nut and a screw rod.

Furthermore, the device also comprises a surface measuring meter which is arranged on the measuring bracket.

The utility model discloses following beneficial technological effect has: the utility model provides a concave processing apparatus in gas shower nozzle utilizes atmospheric pressure control hydraulic pressure, conveniently and accurately carries out concave processing to gas shower nozzle.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other embodiments can be obtained according to the drawings without creative efforts.

Fig. 1 is a diagram illustrating an apparatus structure according to an embodiment of the present invention.

Wherein: 1-a scaffold; 2-a rod part; 3-a hammer head; 4-a cylinder; 5-a control device; 6-a base; 7-upright post; 8-a fastening device; 9-a gas generator; 10-trachea; 11-an adjustment device; 12-surface measuring meter; 13-measuring the support.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the embodiments of the present invention are further described in detail below with reference to the accompanying drawings.

Based on the above purpose, the utility model provides a concave treatment device of a gas nozzle, which comprises a bracket 1; the downward pressing jig comprises a rod part 2 and a hammer 3 and is supported by the bracket 1; a cylinder 4, the cylinder 4 is supported by the bracket 1 and a piston rod of the cylinder 4 is connected with the rod part 2; and the control device 5 controls the pressure and the acting time of the gas communicated to the cylinder 4, and controls the pressing jig to reciprocate up and down.

In some embodiments, the device further comprises a base 6, a post 7 and a fastening device 8. The base 6 is provided with a post 7, and the bracket 1 is adjustably supported by the post 7. The bracket 1 is connected with the upright post 7 through a sliding device which can fixedly slide up and down along the upright post. A fastening device 8 is fixedly arranged above the base 6, the fastening device 8 being used for fixing the gas shower to be treated. The hammer head 3 is longitudinally aligned with the center of the fastening device 8.

In some embodiments, the device further comprises an adjustment device 11, the adjustment device 11 being an adjustment nut and a screw rod. The nut can be adjusted by a wrench, and the length of the downward extension of the rotating rod 2 can be adjusted by measuring the length of the screw rod, so that the adjustment of the concave size is realized.

In some embodiments, the control device 5 is a controller, which comprises a solenoid valve. The controller controls the gas generator 9 and is connected with the cylinder 4 through a gas pipe 10 of the gas generator 9. The gas is dry gas CDA, and the pressure and the acting time of the device are controlled by controlling the air input and the air input of the dry gas CDA, so that the size of the concavity is adjusted.

In some embodiments, the apparatus further comprises a surface gauge 12, the surface gauge 12 being placed on the metrology frame 13. The surface measuring gauge 12 includes a display screen, a switch button, a zero point button, a unit switching button, and a level probe. The display screen is used for displaying the measured numerical value, and the numerical value represents the number of units higher or lower than the horizontal plane; the zero point button is used for zero setting; the unit switching button is used for switching different units, such as switching between millimeter and inch; a horizontal probe was used for the measurement. During measurement, the surface measuring meter 12 is placed on the measuring support 13, the probe extends into a small hole at the upper end of the measuring support 13, the surface measuring meter 12 and the measuring support 13 are placed on a horizontal desktop together, a zero point button is pressed to zero, and the meter returns to zero at the moment. The surface measuring meter 12 and the measuring support 13 are placed on the surface of the gas nozzle, the instrument is moved to the center of the gas nozzle, and the instrument displays the numerical value of the concavity of the gas nozzle.

The foregoing is an exemplary embodiment of the present disclosure, but it should be noted that various changes and modifications could be made herein without departing from the scope of the disclosure as defined by the appended claims. Although elements disclosed in the embodiments of the invention may be described or claimed in the singular, the plural is contemplated unless limitation to the singular is explicitly stated.

Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to suggest that the scope of the disclosure of embodiments of the present invention (including the claims) is limited to these examples; within the idea of embodiments of the invention, also combinations between technical features in the above embodiments or in different embodiments are possible, and there are many other variations of different aspects of embodiments of the invention as described above, which are not provided in detail for the sake of brevity. Therefore, any omission, modification, equivalent replacement, improvement, etc. within the spirit and principle of the embodiments of the present invention should be included in the protection scope of the embodiments of the present invention.

Claims

1. A gas shower head concavity processing device is characterized by comprising:

a support;

the downward pressing jig comprises a rod part and a hammer head, and is supported by the bracket;

a cylinder supported by the bracket and having a piston rod connected to the rod portion;

and the control device controls the pressure and the acting time of the gas communicated with the cylinder and controls the pressing jig to reciprocate up and down.

2. The gas showerhead concavity processing device of claim 1, further comprising a base, a post, and a fastening device.

3. The gas showerhead concavity processing device of claim 2, wherein the pedestal has the upright mounted thereon, and the support is adjustably supported by the upright.

4. The gas shower head dishing apparatus of claim 3, wherein said bracket is coupled to said stud by a sliding means, said sliding means fixably sliding up and down said stud.

5. The gas showerhead concavity processing device of claim 2, wherein the fastening means is fixedly disposed above the base.

6. The gas shower recess treatment device of claim 5, wherein the hammer head is longitudinally aligned with a central portion of the fastening device.

7. The apparatus of claim 1, wherein the control unit controls a gas generator and is connected to the gas cylinder by a gas pipe of the gas generator.

8. The gas shower recess treatment device of claim 7, wherein the control device comprises a solenoid valve.

9. The gas shower head dishing apparatus of claim 1, further comprising an adjustment device, said adjustment device being an adjustment nut and a screw rod.

10. The gas showerhead concavity processing device of claim 1, further comprising a surface gauge placed on the metrology frame.