CN211427048U - Leak-proof screw rod cooling system of photoetching machine - Google Patents
Leak-proof screw rod cooling system of photoetching machine Download PDFInfo
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- CN211427048U CN211427048U CN201922407832.6U CN201922407832U CN211427048U CN 211427048 U CN211427048 U CN 211427048U CN 201922407832 U CN201922407832 U CN 201922407832U CN 211427048 U CN211427048 U CN 211427048U
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Abstract
The utility model discloses a but leak protection photoetching machine lead screw cooling system belongs to lathe accessory technical field, including a closed loop circulation system, its characterized in that, be equipped with the solenoid valve among the closed loop circulation system, the solenoid valve even has the weeping sensor, the position of weeping sensor is less than closed loop circulation system. The utility model discloses can in time effectively examine and examine the weeping, the alarm cuts off out the liquid pipeline, avoids the weeping more and more, and then damages the condition emergence of the inside important part of board, has improved equipment security greatly.
Description
Technical Field
The utility model belongs to the technical field of the lathe accessory, especially, relate to a photoetching machine lead screw cooling system that can leak protection.
Background
In the semiconductor production process, the photoetching machine is used as a key machine table, the precision requirement is extremely high, the positioning and the movement of the workbench need extremely high accuracy, and the screw rod is used as a main transmission part and is provided with an internal cooling circulation system to ensure the constancy of the temperature, thereby ensuring the stability of the movement precision of the screw rod.
The existing cooling system comprises a liquid outlet valve, a liquid inlet valve, a cooling liquid storage tank, a screw rod connecting piece, cooling liquid and the like, a closed-loop circulating system is formed by the whole set of pipelines, liquid leakage occurs to any node in the system, the cooling liquid has the risk of flowing to the inside of the workbench body, and then the precision parts in the workbench are damaged.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem that the leakage phenomenon of a screw rod cooling system of a photoetching machine cannot be found in time in the prior art, and the cooling liquid is led to have the risk of flowing to a workbench body.
The utility model provides a technical scheme as follows:
a leak-proof photoetching machine screw rod cooling system comprises a closed loop circulating system and is characterized in that an electromagnetic valve is arranged in the closed loop circulating system, the electromagnetic valve is connected with a leakage sensor, and the position of the leakage sensor is lower than that of the closed loop circulating system. The liquid leakage sensor is arranged at a lower position, so that the liquid leakage phenomenon can be detected at the first time, and the risk is reduced to the maximum extent.
Preferably, closed loop circulation system still includes feed liquor valve, coolant liquid storage tank, goes out liquid valve and lead screw connecting piece, the entry of coolant liquid storage tank with the feed liquor valve is connected, the export of coolant liquid storage tank with it is connected to go out the liquid valve, lead screw connecting piece one end is connected with the feed liquor valve, and the other end passes through the solenoid valve is connected with a liquid valve. The solenoid valve is connected in the closed loop system, with each part UNICOM, can in time cut off the liquid way.
Preferably, the circulation direction of the closed-loop circulation system is from the cooling liquid storage tank, through the liquid outlet valve and the electromagnetic valve, to the cooling rod connecting piece, and then back to the cooling liquid storage tank through the liquid inlet valve.
Preferably, a float sensor is further arranged in the cooling liquid storage tank. The liquid level monitoring device is used for monitoring the liquid level position of cooling liquid in the cooling liquid storage tank and reminding the outside to add liquid or stop according to the liquid level height.
By adopting the technical means, the technical effects are as follows:
the utility model discloses can in time effectively examine and examine the weeping, the alarm cuts off out the liquid pipeline, avoids the weeping more and more, and then damages the condition emergence of the inside important part of board, has improved equipment security greatly.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
The utility model provides a but leak protection photoetching machine lead screw cooling system, includes a closed loop circulation system, its characterized in that, be equipped with solenoid valve 1 in the closed loop circulation system, closed loop circulation system still includes feed liquor valve 4, coolant liquid storage tank 5, goes out liquid valve 6 and lead screw connecting piece 3, still be equipped with float sensor 7 in the coolant liquid storage tank 5. All parts are connected through pipelines in the following mode: the entry of coolant liquid storage tank 5 with feed liquor valve 4 is connected, the export of coolant liquid storage tank 5 with go out liquid valve 6 and connect, 3 one end of lead screw connecting piece are connected with feed liquor valve 4, and the other end passes through solenoid valve 1 is connected with play liquid valve 6. The electromagnetic valve 1 is connected with a leakage sensor 2, and the position of the leakage sensor 2 is lower than that of the closed loop circulating system. The liquid leakage sensor is arranged at a lower position, so that the liquid leakage phenomenon can be detected at the first time, and the risk is reduced to the maximum extent.
And a driving pump is arranged outside the cooling liquid storage tank and used for controlling the cooling liquid to circulate in the closed-loop circulation system.
The working method of the utility model is as follows:
when the cooling device works, under the driving of the driving pump, the cooling liquid in the cooling liquid storage tank flows from the cooling liquid storage tank 5 to the cooling rod connecting piece 3 through the liquid outlet valve 6 and the electromagnetic valve 1, and then flows back to the cooling liquid storage tank 5 through the liquid inlet valve 4. When leakage occurs at any position in the whole closed-loop circulating system, the leakage sensor 2 is triggered, the leakage sensor 2 transmits a sensing signal to the electromagnetic valve 1, the electromagnetic valve 1 is cut off and closed at the moment, the whole closed-loop circulating system is cut off, the cooling liquid stops circulating, the effects of prompting and leakage prevention are achieved, and the safety of equipment is guaranteed.
And a floater sensor is also arranged in the cooling liquid storage tank. The liquid level monitoring device is used for monitoring the liquid level position of cooling liquid in the cooling liquid storage tank and reminding the outside to add liquid or stop according to the liquid level height.
Claims (3)
1. The leak-proof screw rod cooling system of the photoetching machine comprises a closed loop circulating system and is characterized in that an electromagnetic valve (1) is arranged in the closed loop circulating system, the electromagnetic valve (1) is connected with a leakage sensor (2), and the position of the leakage sensor (2) is lower than that of the closed loop circulating system.
2. A leak-proof lead screw cooling system of a lithography machine according to claim 1, wherein the closed loop circulation system further comprises a liquid inlet valve (4), a cooling liquid storage tank (5), a liquid outlet valve (6) and a lead screw connector (3), wherein the inlet of the cooling liquid storage tank (5) is connected with the liquid inlet valve (4), the outlet of the cooling liquid storage tank (5) is connected with the liquid outlet valve (6), one end of the lead screw connector (3) is connected with the liquid inlet valve (4), and the other end is connected with the liquid outlet valve (6) through the electromagnetic valve (1).
3. Leak-proof cooling system for a lead screw of a lithography machine according to claim 2, characterized in that a float sensor (7) is further provided in the cooling liquid tank (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922407832.6U CN211427048U (en) | 2019-12-28 | 2019-12-28 | Leak-proof screw rod cooling system of photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922407832.6U CN211427048U (en) | 2019-12-28 | 2019-12-28 | Leak-proof screw rod cooling system of photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211427048U true CN211427048U (en) | 2020-09-04 |
Family
ID=72254558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922407832.6U Active CN211427048U (en) | 2019-12-28 | 2019-12-28 | Leak-proof screw rod cooling system of photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211427048U (en) |
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2019
- 2019-12-28 CN CN201922407832.6U patent/CN211427048U/en active Active
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