CN211393874U - Polycrystalline silicon reduction furnace - Google Patents
Polycrystalline silicon reduction furnace Download PDFInfo
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- CN211393874U CN211393874U CN201921358452.1U CN201921358452U CN211393874U CN 211393874 U CN211393874 U CN 211393874U CN 201921358452 U CN201921358452 U CN 201921358452U CN 211393874 U CN211393874 U CN 211393874U
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Abstract
The utility model relates to a polysilicon reduction furnace, which is provided with a chassis and a furnace bell jar matched and connected with the chassis; a plurality of electrodes which can be connected with the silicon rods are arranged on the chassis; a cooling interlayer is arranged inside the chassis; a water inlet and a water outlet which are communicated with the cooling interlayer are arranged on the chassis; meanwhile, the device also comprises a gas cooling device; the gas cooling device comprises a main air inlet pipe, an air compression pump and an air heating device; the air inlet main pipe is rotatably arranged on the chassis and is positioned on the central axis of the chassis; the air inlet main pipe can rotate under the driving of the driving device; an air outlet of the air compression pump is connected with an air inlet of the air heating device, and an air outlet of the air heating device is connected with an air inlet of the air inlet main pipe; the side wall of the air inlet main pipe is evenly provided with air nozzles communicated with the inside of the air inlet main pipe. The utility model discloses can carry out all-round cooling to the silicon rod, effectively improve cooling efficiency.
Description
Technical Field
The utility model relates to a polycrystalline silicon reduction furnace.
Background
The polysilicon reduction furnace is a key device for producing a final product in polysilicon production, and is also a key link for determining the capacity and energy consumption of a system. Therefore, the energy consumption of the polycrystalline silicon reduction furnace is effectively reduced and the production efficiency is improved while the product quality and the productivity are ensured.
At present, after a polycrystalline silicon reduction furnace is stopped, nitrogen is required to replace gas in a furnace bell jar of the reduction furnace, then the furnace bell jar is opened, and a silicon rod is exposed in an indoor environment and naturally cooled to a certain temperature for unloading and subsequent work. The static cooling has poor heat convection effect and low cooling efficiency, and greatly influences the production efficiency.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a polycrystalline silicon reduction furnace with good cooling effect and high cooling efficiency.
Realize the utility model discloses the technical scheme of purpose is: the utility model is provided with a chassis and a furnace bell jar matched and connected with the chassis; a plurality of electrodes which can be connected with the silicon rods are arranged on the chassis; a cooling interlayer is arranged inside the chassis; a water inlet and a water outlet which are communicated with the cooling interlayer are arranged on the chassis; meanwhile, the device also comprises a gas cooling device; the gas cooling device comprises a main air inlet pipe, an air compression pump and an air heating device; the air inlet main pipe is rotatably arranged on the chassis and is positioned on the central axis of the chassis; the air inlet main pipe can rotate under the driving of the driving device; an air outlet of the air compression pump is connected with an air inlet of the air heating device, and an air outlet of the air heating device is connected with an air inlet of the air inlet main pipe; the side wall of the air inlet main pipe is evenly provided with air nozzles communicated with the inside of the air inlet main pipe. The air temperature after being heated by the air heating device is about 60 ℃.
The driving device comprises a driving motor, a driving gear and a driving gear ring; the driving gear ring is fixedly connected to the circumferential surface of the upper part of the air inlet main pipe; the driving motor is connected with the upper beam frame connected with the upper end of the silicon rod, an output shaft of the driving motor is in transmission connection with the driving gear, and the driving gear is in transmission fit with the driving gear ring.
A gas interlayer is arranged in the chassis; air nozzles are uniformly distributed between the electrodes on the chassis; the gas injection port is communicated with the gas interlayer; the lower end of the gas inlet main pipe is provided with a gas outlet which is communicated with the gas interlayer.
The air nozzles are spirally distributed on the side wall of the air inlet main pipe along the central axis of the air inlet main pipe.
The gas cooling device further comprises an air filter; the air outlet of the air compressor pump is connected with the air inlet of the air filter, the air outlet of the air filter is connected with the air inlet of the air heating device, and the air outlet of the air heating device is connected with the air inlet of the air inlet main pipe.
The utility model discloses has positive effect: (1) the silicon rod cooling device can blow air to cool the silicon rod through the air inlet main pipe, and meanwhile, the air inlet main pipe can realize rotary air blowing under the driving of the driving device, so that the cooling efficiency is further improved;
(2) the utility model can ensure that the temperature of the gas sprayed out by the gas nozzle is higher than the indoor temperature but lower than the temperature of the silicon rod through the air heating device, and ensure the safety (preventing burst and the like) during cooling;
(3) the silicon rod cooling device can further blow and cool the silicon rod through the air nozzle, so that the cooling efficiency is further improved;
(4) the distribution mode of the air nozzles in the utility model can effectively improve the heat convection efficiency and the cooling effect;
(5) the utility model discloses an air cleaner can guarantee the cleanliness factor of cooling gas, guarantees product quality.
Drawings
In order that the present invention may be more readily and clearly understood, the following detailed description of the present invention is given in conjunction with the accompanying drawings, in which
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural diagram of the middle chassis of the present invention.
Detailed Description
Referring to fig. 1 and 2, the utility model has a chassis 1 and a furnace bell jar 2 which is matched and connected with the chassis 1; a plurality of electrodes which can be connected with the silicon rods 3 are arranged on the chassis 1; a cooling interlayer 11 is arranged in the chassis 1; a water inlet and a water outlet which are communicated with the cooling interlayer 11 are arranged on the chassis 1; also comprises a gas cooling device 4; the gas cooling device 4 comprises an air inlet main pipe 41, an air compression pump 42 and an air heating device 43; the air inlet main pipe 41 is rotatably arranged on the chassis 1 and is positioned on the central axis of the chassis 1; the main air inlet pipe 41 can rotate under the drive of the drive device 5; the air outlet of the air compression pump 42 is connected with the air inlet of the air heating device 43, and the air outlet of the air heating device 43 is connected with the air inlet of the air inlet main pipe 41; the side wall of the main air inlet pipe 41 is uniformly provided with air nozzles 411 communicated with the inside of the main air inlet pipe. The air heated by the air heater 43 has a temperature of about 60 ℃.
The driving device 5 comprises a driving motor, a driving gear and a driving gear ring; the driving gear ring is fixedly connected to the circumferential surface of the upper part of the air inlet main pipe 41; the driving motor is connected with an upper beam frame 6 connected with the upper end of the silicon rod 3, an output shaft of the driving motor is in transmission connection with a driving gear, and the driving gear is in transmission fit with the driving gear ring.
A gas interlayer 12 is arranged in the chassis 1; air nozzles 13 are uniformly distributed between the electrodes on the base plate 1; the gas injection port 13 is communicated with the gas interlayer 12; the lower end of the gas inlet main pipe 41 is provided with a gas outlet which is communicated with the gas interlayer 12.
The air nozzles 411 are spirally arranged along the central axis of the main air inlet pipe 41 on the side wall of the main air inlet pipe 41.
The gas cooling device 4 further includes an air filter 44; the air outlet of the air compressor pump 42 is connected with the air inlet of an air filter 44, the air outlet of the air filter 44 is connected with the air inlet of an air heating device 43, and the air outlet of the air heating device 43 is connected with the air inlet of the air inlet main pipe 41.
The working principle of the utility model is as follows:
after the furnace is stopped, the furnace bell is opened, the cooling gas is introduced into the main gas inlet pipe 41 by the air compressor pump 42, and the cooling gas is ejected from the gas nozzle 411 and the gas ejection port 13. The driving device 5 drives the main intake pipe 41 to rotate, and the air nozzle 411 performs rotary air injection.
The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A polysilicon reduction furnace is provided with a base plate and a furnace bell jar matched and connected with the base plate; a plurality of electrodes which can be connected with the silicon rods are arranged on the chassis; a cooling interlayer is arranged inside the chassis; a water inlet and a water outlet which are communicated with the cooling interlayer are arranged on the chassis; the method is characterized in that: also comprises a gas cooling device; the gas cooling device comprises a main air inlet pipe, an air compression pump and an air heating device; the air inlet main pipe is rotatably arranged on the chassis and is positioned on the central axis of the chassis; the air inlet main pipe can rotate under the driving of the driving device; an air outlet of the air compression pump is connected with an air inlet of the air heating device, and an air outlet of the air heating device is connected with an air inlet of the air inlet main pipe; the side wall of the air inlet main pipe is evenly provided with air nozzles communicated with the inside of the air inlet main pipe.
2. The polycrystalline silicon reduction furnace according to claim 1, characterized in that: the driving device comprises a driving motor, a driving gear and a driving gear ring; the driving gear ring is fixedly connected to the circumferential surface of the upper part of the air inlet main pipe; the driving motor is connected with the upper beam frame connected with the upper end of the silicon rod, an output shaft of the driving motor is in transmission connection with the driving gear, and the driving gear is in transmission fit with the driving gear ring.
3. The polycrystalline silicon reduction furnace according to claim 1 or 2, characterized in that: a gas interlayer is arranged in the chassis; air nozzles are uniformly distributed between the electrodes on the chassis; the gas injection port is communicated with the gas interlayer; the lower end of the gas inlet main pipe is provided with a gas outlet which is communicated with the gas interlayer.
4. The polycrystalline silicon reduction furnace according to claim 1, characterized in that: the air nozzles are spirally distributed on the side wall of the air inlet main pipe along the central axis of the air inlet main pipe.
5. The polycrystalline silicon reduction furnace according to claim 1, characterized in that: the gas cooling device further comprises an air filter; and an air outlet of the air filter is connected with an air inlet of the air heating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921358452.1U CN211393874U (en) | 2019-08-21 | 2019-08-21 | Polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921358452.1U CN211393874U (en) | 2019-08-21 | 2019-08-21 | Polycrystalline silicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211393874U true CN211393874U (en) | 2020-09-01 |
Family
ID=72222989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921358452.1U Active CN211393874U (en) | 2019-08-21 | 2019-08-21 | Polycrystalline silicon reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211393874U (en) |
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2019
- 2019-08-21 CN CN201921358452.1U patent/CN211393874U/en active Active
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