CN211384889U - Configuration device of electronic grade mixed gas - Google Patents
Configuration device of electronic grade mixed gas Download PDFInfo
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- CN211384889U CN211384889U CN201922163871.6U CN201922163871U CN211384889U CN 211384889 U CN211384889 U CN 211384889U CN 201922163871 U CN201922163871 U CN 201922163871U CN 211384889 U CN211384889 U CN 211384889U
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- configuration
- air inlet
- inlet pipe
- air
- box
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- 238000004140 cleaning Methods 0.000 claims abstract description 46
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 42
- 238000003860 storage Methods 0.000 claims abstract description 35
- 238000002156 mixing Methods 0.000 claims abstract description 32
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 239000012295 chemical reaction liquid Substances 0.000 claims abstract description 10
- 239000003595 mist Substances 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000002955 isolation Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 51
- 239000012459 cleaning agent Substances 0.000 description 10
- 239000011261 inert gas Substances 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000011001 backwashing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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Abstract
The utility model belongs to the technical field of gaseous check out test set technique and specifically relates to a configuration device of electron level mist is related to. The technical scheme of the utility model is realized like this: the utility model provides a configuration device of electronic grade mist, includes the configuration case that is used for the configuration mist and a plurality of even installations at configuration case top and with the intake pipe of configuration case intercommunication which characterized in that: the connection part of each air inlet pipe and the configuration box is provided with an electromagnetic stop valve for controlling the connection and disconnection of the air inlet pipe and the connection port of the configuration box; and each air inlet pipe is provided with a first cleaning device; the first cleaning device comprises a water storage tank with an accommodating space, a water suction pump, a two-position three-way electromagnetic directional valve, a reaction liquid storage tank with an accommodating space, a cleaning liquid mixing tank, a controller and a proportional valve. The utility model discloses the practicality is strong, easily promotes.
Description
Technical Field
The utility model belongs to the technical field of gaseous check out test set technique and specifically relates to a configuration device of electron level mist is related to.
Background
In many chemical enterprises, especially chemical plants producing high-purity/ultra-pure gases, in the process of preparing gases, when the preparation of electronic grade mixed gases is involved, a configuration device is needed to control the content of each gas in the mixed gases to be prepared; after a period of use, it has been found that there are problems with existing configuration devices:
firstly, when a new mixed gas is configured in the existing preparation device, the quality of the mixed gas can be affected due to the fact that gas in the last gas inlet work can remain in a gas inlet pipeline;
second, when the prepared raw material contains an inert gas, the gas in the preparation tank is difficult to mix uniformly, resulting in a decrease in the quality of the finished product.
SUMMERY OF THE UTILITY MODEL
To the deficiency that prior art exists, the utility model aims to provide an electron level mist's configuration device.
The technical scheme of the utility model is realized like this: the utility model provides a configuration device of electronic grade mist, includes the configuration case that is used for the configuration mist and a plurality of even installations at configuration case top and with the intake pipe of configuration case intercommunication which characterized in that: the connection part of each air inlet pipe and the configuration box is provided with an electromagnetic stop valve for controlling the connection and disconnection of the air inlet pipe and the connection port of the configuration box; and each air inlet pipe is provided with a first cleaning device; the first cleaning device comprises a water storage tank with an accommodating space, a water suction pump, a two-position three-way electromagnetic directional valve, a reaction liquid storage tank with an accommodating space, a cleaning liquid mixing tank, a controller and a proportional valve; the water storage tank is arranged at the top of the configuration tank and is communicated with a first input port of the two-position three-way electromagnetic valve through a first pipeline; the reaction liquid storage tank is arranged on the water storage tank and is communicated with a second input port of the two-position three-way electromagnetic valve through a second pipeline; the input end of the water suction pump is communicated with the output port of the two-position three-way electromagnetic valve through a third pipeline; the reaction liquid storage tank is communicated with the output end of the water pump; the cleaning liquid mixing box is communicated with the inside of the air inlet pipe along the side wall of the upper end of the air inlet pipe through a fourth pipeline; the proportional valve is arranged at the output port of the fourth pipeline; a water outlet pipe is arranged on the side wall of the lower end of the air inlet pipe; and the two-position three-way electromagnetic valve, the water suction pump and the proportional valve are all electrically connected with the controller.
Preferably: the bottom of the configuration box is provided with a gas mixing component for fully mixing the mixed gas in the configuration box; the gas mixing component comprises a partition plate provided with a plurality of mounting grooves; a plurality of axial fans with downward output ports and a plurality of axial fans with upward output ports are arranged in the mounting groove of the isolation plate; each axial fan is electrically connected with the controller.
Preferably: a second cleaning device is arranged on the air inlet pipe; the second cleaning device comprises an air storage box, a first air pipe and a second air pipe which are arranged on the configuration box; the air storage box is communicated with the inside of the air inlet pipe along the side wall of the upper end of the air inlet pipe through a first air pipe; the second air pipe is arranged on the side wall of the lower end of the air inlet pipe.
Preferably: and the air storage box is provided with a heating plate and an air inlet which are communicated with the controller.
Preferably: the configuration box is characterized in that an air pressure sensor and an alarm electrically connected with the air pressure sensor are arranged on the inner wall of the configuration box, and the air pressure sensor is electrically connected with the controller.
Compared with the prior art, the utility model discloses the beneficial effect who brings does:
1. the first cleaning device can clean the inner wall of the air inlet pipe by clean water or a cleaning agent added with an additive capable of reacting with the air inlet pipe, and the cleaning can clean residues remained in the air inlet pipe in the last air inlet work so as to prevent the quality of the mixed gas from being influenced; the quality of the mixed gas is improved;
furthermore, the operating principle of the first cleaning device is: when residues in the air inlet pipe can be cleaned only by clean water, the controller can control the two-position three-way electromagnetic valve to conduct a loop of the first pipeline and a loop of the third pipeline, and the second pipe is closed to the loop of the third pipeline; at the moment, a water suction pump on the third pipeline operates to send clean water in the water storage tank into the cleaning liquid mixing tank, and then the controller controls the proportional valve to control the flow and the flow speed of the cleaning liquid mixing tank flowing into the air inlet pipe, so that the purpose of cleaning the air inlet pipe is achieved; when the residues in the air inlet pipe are difficult to clean and need cleaning agents for cleaning, the controller controls the two-position three-way electromagnetic valve to conduct the loop of the first pipeline and the third pipeline and the loop of the second pipe and the third pipeline in an intermittent alternating mode; the purpose of mixing the cleaning agent and the clean water in the cleaning agent mixing box is realized, then the cleaning agent flows to the air inlet pipe at a certain flow speed through the proportional valve and flows out along the water outlet at the lower end of the air inlet pipe, and the inner wall of the air inlet pipe is effectively cleaned;
2. the gas mixing assembly is arranged, so that the gas inside the configuration box can be circularly transported up and down by the gas mixing assembly, and the inert gas is prevented from being deposited at the bottom of the configuration box; the quality of the mixed gas is improved;
furthermore, the operating principle of the first cleaning device is: when gas mixing configuration is carried out, the controller controls the shaft fans with the downward outlets and the shaft fans with the upward outlets to intermittently and alternately operate, so that inert gas at the bottom is circularly and upwardly transported, the up-and-down mixed flow of air flow is realized, and the mixed gas is better configured;
3. the second cleaning device is arranged, the gas storage tank in the second cleaning device can use gas for next mixing and then circulate through the gas, and water stains remained by the first cleaning device in the gas inlet pipe can be dried more quickly; the cleaning efficiency is improved; the heating plate is arranged to heat the gas in the gas storage box, so that the gas inlet pipe is well dried, and new impurities cannot be brought in;
4. atmospheric pressure sensor and the alarm of being connected with the atmospheric pressure sensor electricity, this atmospheric pressure sensor is connected with the controller electricity, and when the inside atmospheric pressure of configuration case is higher than the predetermined value that the controller set for atmospheric pressure sensor, atmospheric pressure sensor can give the alarm signal of telecommunication, and the alarm is reported to the police, reminds the staff to fill up and has reached standard, guarantees the security of mist configuration process.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic structural view of an embodiment of the present invention;
FIG. 2 is a schematic structural view of a first cleaning apparatus;
FIG. 3 is a schematic diagram of a further optimization of FIG. 2;
fig. 4 is a schematic structural view of the second cleaning apparatus.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Example 1
As shown in fig. 1-2, the present invention discloses a configuration device for electronic grade mixed gas, comprising a configuration box 1 for configuring mixed gas and a plurality of intake pipes 2 uniformly installed on top of the configuration box 1 and communicated with the configuration box, in the specific embodiment of the present invention, the connection between each intake pipe 2 and the configuration box 1 is provided with an electromagnetic stop valve 3 for controlling the connection between the intake pipe 2 and the configuration box 1; and each air inlet pipe 2 is provided with a first cleaning device 4; the first cleaning device 4 comprises a water storage tank 41 with an accommodating space, a water suction pump 42, a two-position three-way electromagnetic directional valve 43, a reaction liquid storage tank 44 with an accommodating space, a cleaning liquid mixing tank 45, a controller 46 and a proportional valve 47; the water storage tank 41 is arranged at the top of the configuration tank 1 and is communicated with a first input port of the two-position three-way electromagnetic valve 43 through a first pipeline 411; the reaction liquid storage tank 44 is installed on the water storage tank 41 and is communicated with a second input port of the two-position three-way electromagnetic valve 43 through a second pipeline 441; the input end of the water pump 42 is communicated with the output port of the two-position three-way electromagnetic valve 43 through a third pipeline 421; the reaction liquid storage tank 44 is communicated with the output end of the water pump 42; the backwashing liquid mixing tank 45 is communicated with the inside of the air inlet pipe 2 along the side wall of the upper end of the air inlet pipe 2 through a fourth pipeline 451; the proportional valve 47 is installed at the output port of the fourth pipe 451; a water outlet pipe is arranged on the side wall of the lower end of the air inlet pipe; the two-position three-way solenoid valve 43, the water pump 42 and the proportional valve 47 are all electrically connected with the controller 46.
In the specific embodiment of the present invention, a gas mixing component 5 for fully mixing the mixed gas in the configuration box 1 is installed at the bottom of the configuration box 1; the gas mixing component 5 comprises a partition plate 51 provided with a plurality of mounting grooves 52; a plurality of axial fans 53 with downward output ports and a plurality of axial fans with upward output ports are arranged in the mounting groove 52 of the isolation plate 51; each shaft fan 53 is electrically connected to the controller 46.
In the embodiment of the present invention, the air pressure sensor 6 and the alarm 7 electrically connected to the air pressure sensor 6 are installed on the inner wall of the configuration box 1, and the air pressure sensor 6 is electrically connected to the controller 46.
By adopting the technical scheme, the first cleaning device can clean the inner wall of the air inlet pipe by clean water or a cleaning agent added with an additive capable of reacting with the air inlet pipe, so that residues remained in the air inlet pipe in the last air inlet work can be cleaned by the cleaning, the quality of mixed gas is prevented from being influenced, and the quality of the mixed gas is improved;
furthermore, the operating principle of the first cleaning device is: when residues in the air inlet pipe can be cleaned only by clean water, the controller can control the two-position three-way electromagnetic valve to conduct a loop of the first pipeline and a loop of the third pipeline, and the second pipe is closed to the loop of the third pipeline; at the moment, a water suction pump on the third pipeline operates to send clean water in the water storage tank into the cleaning liquid mixing tank, and then the controller controls the proportional valve to control the flow and the flow speed of the cleaning liquid mixing tank flowing into the air inlet pipe, so that the purpose of cleaning the air inlet pipe is achieved; when the residues in the air inlet pipe are difficult to clean and need cleaning agents for cleaning, the controller controls the two-position three-way electromagnetic valve to conduct the loop of the first pipeline and the third pipeline and the loop of the second pipe and the third pipeline in an intermittent alternating mode; the purpose of mixing the cleaning agent and the clean water in the cleaning agent mixing box is realized, then the cleaning agent flows to the air inlet pipe at a certain flow speed through the proportional valve and flows out along the water outlet at the lower end of the air inlet pipe, and the inner wall of the air inlet pipe is effectively cleaned;
secondly, the gas mixing component is arranged, so that the gas inside the configuration box can be circularly transported up and down by the gas mixing component, and the inert gas is prevented from being deposited at the bottom of the configuration box; the quality of the mixed gas is improved;
furthermore, the operating principle of the first cleaning device is: when gas mixing configuration is carried out, the controller controls the shaft fans with the downward outlets and the shaft fans with the upward outlets to intermittently and alternately operate, so that inert gas at the bottom is circularly and upwardly transported, the up-and-down mixed flow of air flow is realized, and the mixed gas is better configured;
and thirdly, the air pressure sensor is electrically connected with the controller, when the air pressure inside the configuration box is higher than a preset value set for the air pressure sensor by the controller, the air pressure sensor gives an electric signal to the alarm, the alarm gives an alarm to remind a worker that the filling reaches the standard, and the safety of the mixed gas configuration process is ensured.
Example 2 differs from example 1 in that
As shown in fig. 3 to 4, in the embodiment of the present invention, a second cleaning device 8 is installed on the air inlet pipe 2; the second cleaning device 8 comprises an air storage tank 81, a first air pipe 82 and a second air pipe 83 which are arranged on a configuration tank; the air storage tank 81 is communicated with the inside of the air inlet pipe 2 along the side wall of the upper end of the air inlet pipe 2 through a first air pipe 82; the second air pipe 83 is installed on a side wall of a lower end of the air inlet pipe 2.
In the embodiment of the present invention, the air storage tank 81 is provided with a heating plate 84 and an air inlet 85 which are communicated with the controller 46.
By adopting the technical scheme, the second cleaning device is arranged, the gas storage tank in the second cleaning device can use the gas for next mixing and then can dry the water stain remained in the first cleaning device in the gas inlet pipe more quickly through gas circulation; the cleaning efficiency is improved; and the heating plate is arranged to heat the gas in the gas storage box, so that the good dry gas inlet pipe can not bring new impurities.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a configuration device of electronic grade mist, includes the configuration case that is used for the configuration mist and a plurality of even installations at configuration case top and with the intake pipe of configuration case intercommunication which characterized in that: the connection part of each air inlet pipe and the configuration box is provided with an electromagnetic stop valve for controlling the connection and disconnection of the air inlet pipe and the connection port of the configuration box; and each air inlet pipe is provided with a first cleaning device; the first cleaning device comprises a water storage tank with an accommodating space, a water suction pump, a two-position three-way electromagnetic directional valve, a reaction liquid storage tank with an accommodating space, a cleaning liquid mixing tank, a controller and a proportional valve; the water storage tank is arranged at the top of the configuration tank and is communicated with a first input port of the two-position three-way electromagnetic valve through a first pipeline; the reaction liquid storage tank is arranged on the water storage tank and is communicated with a second input port of the two-position three-way electromagnetic valve through a second pipeline; the input end of the water suction pump is communicated with the output port of the two-position three-way electromagnetic valve through a third pipeline; the reaction liquid storage tank is communicated with the output end of the water pump; the cleaning liquid mixing box is communicated with the inside of the air inlet pipe along the side wall of the upper end of the air inlet pipe through a fourth pipeline; the proportional valve is arranged at the output port of the fourth pipeline; a water outlet pipe is arranged on the side wall of the lower end of the air inlet pipe; and the two-position three-way electromagnetic valve, the water suction pump and the proportional valve are all electrically connected with the controller.
2. An electronic grade mixed gas distribution device according to claim 1, wherein: the bottom of the configuration box is provided with a gas mixing component for fully mixing the mixed gas in the configuration box; the gas mixing component comprises a partition plate provided with a plurality of mounting grooves; a plurality of axial fans with downward output ports and a plurality of axial fans with upward output ports are arranged in the mounting groove of the isolation plate; each axial fan is electrically connected with the controller.
3. An electronic grade mixed gas distribution device according to claim 1, wherein: a second cleaning device is arranged on the air inlet pipe; the second cleaning device comprises an air storage box, a first air pipe and a second air pipe which are arranged on the configuration box; the air storage box is communicated with the inside of the air inlet pipe along the side wall of the upper end of the air inlet pipe through a first air pipe; the second air pipe is arranged on the side wall of the lower end of the air inlet pipe.
4. An electronic grade mixed gas distribution device according to claim 3, wherein: and the air storage box is provided with a heating plate and an air inlet which are communicated with the controller.
5. An electronic grade mixed gas distribution device according to claim 1, wherein: the configuration box is characterized in that an air pressure sensor and an alarm electrically connected with the air pressure sensor are arranged on the inner wall of the configuration box, and the air pressure sensor is electrically connected with the controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922163871.6U CN211384889U (en) | 2019-12-06 | 2019-12-06 | Configuration device of electronic grade mixed gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922163871.6U CN211384889U (en) | 2019-12-06 | 2019-12-06 | Configuration device of electronic grade mixed gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211384889U true CN211384889U (en) | 2020-09-01 |
Family
ID=72220422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922163871.6U Active CN211384889U (en) | 2019-12-06 | 2019-12-06 | Configuration device of electronic grade mixed gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211384889U (en) |
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2019
- 2019-12-06 CN CN201922163871.6U patent/CN211384889U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A configuration device for electronic grade mixed gas Effective date of registration: 20231017 Granted publication date: 20200901 Pledgee: Zhejiang Tailong commercial bank Limited by Share Ltd. Quzhou Kecheng branch Pledgor: Zhejiang Xite Electronic Materials Co.,Ltd. Registration number: Y2023980061412 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |