CN211373493U - Laboratory is with electrolysis calibrator that can automatic centre gripping and remove sample wafer - Google Patents

Abstract

The utility model relates to a laboratory is with electrolysis calibrator that can automatic centre gripping and remove sample wafer mainly includes: erect support, base, electric drive device, spring test seat, positive pole clamp, negative pole clamp, test and glue head, electrolytic cell, stirring trachea, ball screw cross slip table, pressure sensor, wire, pressure display, slip table operation panel, L type fixation clamp, centre gripping operation panel, electrolysis calibrator, power, two use of erecting the support are avoided the electrolytic cell bottom to take place the slope, prevent that electrolyte from flowing, have guaranteed the measuring accuracy. The pressure sensor is convenient to use, the pressure applied to the coating can be monitored, the force applied to the coating on the surface of the sample wafer can be controlled manually, and the integrity of the surface form of the sample is protected. The use of ball screw cross slip table makes the point of choosing of appearance piece more accurate when measuring many times, and the record of experimenting is conveniently carried out more, has reduced the error of experiment.

Description

Laboratory is with electrolysis calibrator that can automatic centre gripping and remove sample wafer

Technical Field

The utility model relates to a laboratory is with DJH-G electrolysis calibrator design field, concretely relates to utilize two side support to support, utilize motor drive and pressure sensor to carry out automatic control centre gripping sample wafer, utilize ball screw cross slip table to remove the device of sample wafer.

Background

The electrolytic thickness gauge is a destructive detection method, and the process is similar to electroplating, but the direction of electrochemical reaction is opposite, namely electrolytic deplating. The electrolytic thickness measurement is to perform local anodic dissolution on the metal coating of the measured part, and the coating thickness is measured through the potential change and the required time when the anodic dissolution coating reaches the matrix. The clamping device and the sample wafer fixing device are indispensable components in the use process of the electrolytic thickness gauge. When the electrolytic thickness gauge is used, the traditional single-side clamping device is easy to cause the inclination of an electrolytic cell, if more electrolyte is dripped, part of the electrolyte is easy to flow out, and the full implementation of electrolytic reaction is not facilitated; when the sample is manually clamped, the force is random, and if the force is too strong, the surface of the sample is easily damaged, so that the subsequent measurement is not facilitated; during many times of experiments, the experimenter needs to take off the sample wafer and re-clamp, the operation is complicated, and the randomness is generated when the point to be measured is replaced artificially, so that the recording of the measuring point is inconvenient. In order to ensure that the electrolytic thickness measurement reaction is normally carried out, the plating of unmeasured points on the surface of the sample wafer is prevented from being damaged, an experimenter can conveniently carry out multiple times of measurement, the sample wafer to be measured is convenient to move for carrying out experimental recording, then a method for clamping samples on two sides is devised, the pressure is controlled by using a pressure sensor, the sample wafer is controlled to be clamped by controlling an electric driving device, and meanwhile, a method for automatically moving the sample wafer is carried out by using a ball screw cross sliding table, so that the plating of the unmeasured points on the surface of the sample wafer can be better protected from being damaged, the sample wafer can be more conveniently moved during multiple times of measurement, the coordinate change between the measurements can be conveniently recorded, and.

Disclosure of Invention

The utility model provides a laboratory is with electrolysis calibrator that can automatic centre gripping and remove sample wafer, mainly includes: the device comprises a vertical support, a base, an electric driving device, a spring testing seat, an anode clamp, a cathode clamp, a testing rubber head, an electrolytic cell, a stirring air pipe, a ball screw cross sliding table, a pressure sensor, a lead, a pressure display, a sliding table operating platform, an L-shaped fixing clamp, a clamping operating platform, an electrolytic thickness gauge and a power supply; the method is characterized in that: the base is positioned on the horizontal table-board; a power supply, a pressure display, a clamping operation table and a sliding table operation table are embedded in the base; the power supply is connected with the pressure display, the sliding table operating platform and the clamping operating platform through leads; the vertical bracket is fixedly connected with the base; the two electric driving devices are connected with the two vertical brackets; the two electric driving devices are respectively connected with the two ends of the electrolytic cell in a fixed phase manner; the two driving devices are connected with the clamping operation table through wires; the electrolytic cell is connected with a stirring gas pipe; the electrolytic thickness gauge is connected with the stirring gas pipe, the cathode clamp and the anode clamp through leads; the electrolytic cell is connected with the cathode clamp; the electrolytic cell is connected with the test rubber head; the pressure sensor is connected with the bottom of the testing rubber head in an embedded manner; the pressure sensor is connected with the pressure display through a lead; the pressure display is connected with the clamping operation table through a lead; the spring test seat is fixedly connected with the ball screw cross sliding table; the ball screw cross sliding table is fixedly connected with the base through four L-shaped fixing pieces; the ball screw cross sliding table is connected with the sliding table operating platform through a lead.

When the test bed works, the power supply is turned on, the sample wafer is arranged on the spring test seat, and the switches of the pressure display, the clamping operation table and the sliding table operation table are turned on, so that the test bed is in a normal working state. Through controlling the slip table operation panel, set up the slip table guide rail position and make the test point of sample wafer be located the test and glue under the head. The digital keyboard on the operation centre gripping operation panel sets up the size of the required tight pressure of sample, presses the start button of centre gripping operation panel for electric drive device carries the electrolysis trough and moves down simultaneously, and when the registration of pressure sensor display screen and the stiction registration that the experimenter set up were the same, electric drive device automatic stop motion simultaneously, and the clamp was tight on the perpendicular support of rubber simultaneously. And manually inserting the cathode clamp into a fixing screw of the electrolytic cup, clamping the anode clamp on a sample to be tested, and dropwise adding a proper amount of electrolyte into the electrolytic cup. Then, by controlling a computer, selecting a substrate, a layer number, a plating seed, setting the maximum thickness, selecting the area size, setting a workpiece batch number, inputting a name of a test person, and measuring. After the measurement is finished, a stop button in a keyboard of the clamping operation table is pressed, the two electric driving devices are simultaneously and automatically released, the electrolytic cell is carried to be restored to the initial position, the waste liquid is sucked out by a dropper, and the electrolytic cell is cleaned. When the next experiment is carried out, the coordinate difference between the next measuring point and the first measuring point is calculated in advance, the change difference value is recorded, the keyboard of the sliding table operating platform is operated through addition and subtraction of the change difference value and the initial recorded value, the transverse dimension and the longitudinal dimension are changed respectively, the position of the measuring point is changed, and then the measuring steps are repeated again to carry out measurement for multiple times.

The utility model discloses a device of centre gripping and automatic removal sample wafer for laboratory DJH-G electrolysis calibrator possesses the function that prevents that electrolyte from flowing out, protection sample wafer surface not damaged and convenient experiment selection point record simultaneously. The use of two vertical supports avoids the bottom of the electrolytic cell to incline, prevents the electrolyte from flowing out, and ensures the accuracy of measurement. The pressure sensor is convenient to use, the pressure applied to the coating can be monitored, the force applied to the coating on the surface of the sample wafer can be controlled manually, and the integrity of the surface form of the sample is protected. The use of ball screw cross slip table makes the point of choosing of appearance piece more accurate when measuring many times, and the record of experimenting is conveniently carried out more, has reduced the error of experiment. More preferably, the operation keyboard on the operation panel is provided with multifunctional buttons, so that the experiment operation is convenient.

Drawings

FIG. 1 is a structural diagram of an electrolytic thickness gauge for a laboratory, which can automatically hold and move a sample wafer.

FIG. 2 is a schematic diagram showing the position fixing of an electrolytic thickness gauge which can automatically clamp and move a sample wafer for a laboratory.

In fig. 1, 1 is a vertical support, 2 is a base, 3 is an electric driving device, 4 is a spring testing seat, 5 is an anode clamp, 6 is a cathode clamp, 7 is an electrolytic thickness gauge, 8 is a testing rubber head, 9 is an electrolytic cell, 10 is a stirring air pipe, 11 is a ball screw cross sliding table, 12 is a lead, and 14 is a pressure display; in fig. 2, 1 is a vertical support, 3 is an electric driving device, 4 is a spring test seat, 11 is a ball screw cross sliding table, 12 is a lead wire, 13 is a pressure sensor, 14 is a pressure display, 15 is a sliding table operating platform, 16 is an L-shaped fixing clamp, 17 is a clamping operating platform, and 18 is a power supply.

Detailed Description

As shown in the figure: the utility model provides a laboratory is with electrolysis calibrator that can automatic centre gripping and remove sample wafer, mainly includes: the device comprises a vertical support, a base, an electric driving device, a spring testing seat, an anode clamp, a cathode clamp, a testing rubber head, an electrolytic cell, a stirring air pipe, a ball screw cross sliding table, a pressure sensor, a lead, a pressure display, a sliding table operating platform, an L-shaped fixing clamp, a clamping operating platform, an electrolytic thickness gauge and a power supply; the method is characterized in that: the base is positioned on the horizontal table-board; a power supply, a pressure display, a clamping operation table and a sliding table operation table are embedded in the base; the power supply is connected with the pressure display, the sliding table operating platform and the clamping operating platform through leads; the vertical bracket is fixedly connected with the base; the two electric driving devices are connected with the two vertical brackets; the two electric driving devices are respectively connected with the two ends of the electrolytic cell in a fixed phase manner; the two driving devices are connected with the clamping operation table through wires; the electrolytic cell is connected with a stirring gas pipe; the electrolytic thickness gauge is connected with the stirring gas pipe, the cathode clamp and the anode clamp through leads; the electrolytic cell is connected with the cathode clamp; the electrolytic cell is connected with the test rubber head; the pressure sensor is connected with the bottom of the testing rubber head in an embedded manner; the pressure sensor is connected with the pressure display through a lead; the pressure display is connected with the clamping operation table through a lead; the spring test seat is fixedly connected with the ball screw cross sliding table; the ball screw cross sliding table is fixedly connected with the base through four L-shaped fixing pieces; the ball screw cross sliding table is connected with the sliding table operating platform through a lead.

When the test bed works, the power supply is turned on, the sample wafer is arranged on the spring test seat, and the switches of the pressure display, the clamping operation table and the sliding table operation table are turned on, so that the test bed is in a normal working state. Through controlling the slip table operation panel, set up the slip table guide rail position and make the test point of sample wafer be located the test and glue under the head. The digital keyboard on the operation centre gripping operation panel sets up the size of the required tight pressure of sample, presses the start button of centre gripping operation panel for electric drive device carries the electrolysis trough and moves down simultaneously, and when the registration of pressure sensor display screen and the stiction registration that the experimenter set up were the same, electric drive device automatic stop motion simultaneously, and the clamp was tight on the perpendicular support of rubber simultaneously. And manually inserting the cathode clamp into a fixing screw of the electrolytic cup, clamping the anode clamp on a sample to be tested, and dropwise adding a proper amount of electrolyte into the electrolytic cup. Then, by controlling a computer, selecting a substrate, a layer number, a plating seed, setting the maximum thickness, selecting the area size, setting a workpiece batch number, inputting a name of a test person, and measuring. After the measurement is finished, a stop button in a keyboard of the clamping operation table is pressed, the two electric driving devices are simultaneously and automatically released, the electrolytic cell is carried to be restored to the initial position, the waste liquid is sucked out by a dropper, and the electrolytic cell is cleaned. When the next experiment is carried out, the coordinate difference between the next measuring point and the first measuring point is calculated in advance, the change difference value is recorded, the keyboard of the sliding table operating platform is operated through addition and subtraction of the change difference value and the initial recorded value, the transverse dimension and the longitudinal dimension are changed respectively, the position of the measuring point is changed, and then the measuring steps are repeated again to carry out measurement for multiple times.

Claims (1)

1. The utility model provides a laboratory is with electrolysis calibrator that can automatic centre gripping and remove sample wafer, mainly includes: the device comprises a vertical support, a base, an electric driving device, a spring testing seat, an anode clamp, a cathode clamp, a testing rubber head, an electrolytic cell, a stirring air pipe, a ball screw cross sliding table, a pressure sensor, a lead, a pressure display, a sliding table operating platform, an L-shaped fixing clamp, a clamping operating platform, an electrolytic thickness gauge and a power supply; the method is characterized in that: the base is positioned on the horizontal table-board; a power supply, a pressure display, a clamping operation table and a sliding table operation table are embedded in the base; the power supply is connected with the pressure display, the sliding table operating platform and the clamping operating platform through leads; the vertical bracket is fixedly connected with the base; the two electric driving devices are connected with the two vertical brackets; the two electric driving devices are respectively connected with the two ends of the electrolytic cell in a fixed phase manner; the two driving devices are connected with the clamping operation table through wires; the electrolytic cell is connected with a stirring gas pipe; the electrolytic thickness gauge is connected with the stirring gas pipe, the cathode clamp and the anode clamp through leads; the electrolytic cell is connected with the cathode clamp; the electrolytic cell is connected with the test rubber head; the pressure sensor is connected with the bottom of the testing rubber head in an embedded manner; the pressure sensor is connected with the pressure display through a lead; the pressure display is connected with the clamping operation table through a lead; the spring test seat is fixedly connected with the ball screw cross sliding table; the ball screw cross sliding table is fixedly connected with the base through four L-shaped fixing pieces; the ball screw cross sliding table is connected with the sliding table operating platform through a lead.

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