CN211371302U

CN211371302U - Butterfly valve driven by coupling

Info

Publication number: CN211371302U
Application number: CN201922296172.9U
Authority: CN
Inventors: 方亮
Original assignee: Wuxi Yubang Semiconductor Technology Co ltd
Current assignee: Wuxi Yubang Semiconductor Technology Co ltd
Priority date: 2019-12-19
Filing date: 2019-12-19
Publication date: 2020-08-28
Anticipated expiration: 2029-12-19

Abstract

The utility model discloses a, driven butterfly valve of shaft coupling, including ball, ball's lower extreme is provided with the valve butterfly, and ball passes through the bolt and constitutes with the valve butterfly and dismantle mounting structure, the bellows has been cup jointed in ball's the outside, the upper end of bellows passes through the bolt and constitutes with the valve top cap and dismantle mounting structure and sealed the processing, and the lower extreme of bellows passes through the bolt and constitute with ball's spiral shell and dismantle mounting structure and sealed the processing, the support is installed through the bolt in valve top cap's upper end, the axis of rotation of motor runs through the top of support, and the axis of rotation lower extreme fixedly connected with shaft coupling of motor, the lower extreme of shaft coupling and the top fixed connection of ball pole portion, the lower extreme of support is provided with the reaction chamber. This driven butterfly valve of shaft coupling utilizes the shaft coupling transmission to make the butterfly valve transmission more steady, and is accurate, and the wear is littleer, improves life, reduces the fault rate.

Description

Butterfly valve driven by coupling

Technical Field

The utility model relates to a semiconductor correlation equipment technical field specifically is a driven butterfly valve of coupling.

Background

The semiconductor equipment is provided with a plurality of motor rotation transmission devices, most of the motor rotation transmission devices are driven by gears and belts, and particularly, a butterfly valve applied to the semiconductor equipment is used. The butterfly valve of the traditional transmission mode has many defects in the semiconductor industry, firstly, semiconductor equipment usually works continuously for 24 hours every day without down time, so that the abrasion is larger, secondly, the belt transmission error is large and is not easy to monitor, thirdly, the supporting points of some belt transmission shaft rods are all arranged on a bearing, so that the bearing can bear a transverse force, the service life of the bearing is greatly reduced, and in the field of semiconductors, as a lead screw for driving the valve butterfly transmission does not have effective protective measures, the lead screw is easy to corrode, so that the butterfly valve of the coupling transmission mode is provided, and the problems are solved.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a driven butterfly valve of coupling to solve the butterfly valve that uses on semiconductor equipment at present that proposes in the above-mentioned background art and all pass through gear and belt drive, such transmission mode error is big, and reduces bearing life-span and lead screw easily and do not have effectual safeguard measure, makes the lead screw easily by the problem of corruption.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a driven butterfly valve of shaft coupling, includes ball, ball's lower extreme is provided with the valve butterfly, and ball passes through the bolt and constitutes with the valve butterfly and dismantle mounting structure, the bellows has been cup jointed in ball's the outside, the upper end of bellows passes through the bolt and constitutes dismantlement mounting structure and sealed processing with the valve top cap, and the lower extreme of bellows passes through the bolt and constitutes dismantlement mounting structure and sealed processing with ball's spiral shell, the support is installed through the bolt in valve top cap's upper end, and installs the motor through the bolt in the upper end of support, the axis of rotation of motor runs through the top of support, and the axis of rotation lower extreme fixedly connected with shaft coupling of motor, the lower extreme of shaft coupling and the top fixed connection of ball pole portion, the lower extreme of support is provided with reaction chamber.

Preferably, the rod part of the ball screw is sleeved with a bearing, the bearing is installed in a through hole reserved in the valve top cover, and the rod part of the ball screw penetrates through the valve top cover through the through hole.

Preferably, the lower part of the valve butterfly is designed to be circular, the size of the lower part of the valve butterfly is larger than the size of the opening reserved at the bottom of the reaction cavity, and a groove-shaped structure is reserved in the valve butterfly.

Preferably, the upper end and the lower end of the corrugated pipe respectively form a sealing structure with the valve top cover and the turnplate part of the ball screw, the corrugated pipe is made of stainless steel, the corrugated cross section of the corrugated pipe is 40mm, and meanwhile the vertical stretching length of the corrugated pipe is larger than the vertical downward maximum displacement distance of the valve butterfly.

Preferably, an axis of the rotating shaft of the motor is collinear with an axis of the rod portion of the ball screw.

Compared with the prior art, the beneficial effects of the utility model are that: this driven butterfly valve of shaft coupling, use the shaft coupling to replace belt transmission, the wearing and tearing that have not had the belt make control more accurate, the shaft coupling transmission has not had belt transmission to the horizontal pulling force of bearing simultaneously, the wearing and tearing to the bearing have been reduced, the life of bearing has been prolonged, install the bellows in the lead screw position simultaneously, and carry out sealed processing, the bellows can be when not influencing ball screw and valve butterfly work, can be fine again protect the lead screw, avoid the lead screw to be corroded, seal processing to the bellows simultaneously, can effectively guarantee the vacuum in the reaction chamber, the practicality has been increased.

Drawings

Fig. 1 is the overall internal structure diagram of the present invention.

In the figure: 1. a ball screw; 2. a valve butterfly; 3. a bellows; 4. a valve top cover; 5. a support; 6. a motor; 7. a coupling; 8. a bearing; 9. a reaction chamber.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, the present invention provides a technical solution: a butterfly valve driven by a coupler comprises a ball screw 1, a valve butterfly 2, a corrugated pipe 3, a valve top cover 4, a support 5, a motor 6, a coupler 7, a bearing 8 and a reaction cavity 9, wherein the valve butterfly 2 is arranged at the lower end of the ball screw 1, the ball screw 1 and the valve butterfly 2 form a disassembly and assembly structure through bolts, the corrugated pipe 3 is sleeved outside the ball screw 1, the upper end of the corrugated pipe 3 and the valve top cover 4 form a disassembly and assembly structure through bolts and sealing treatment, the lower end of the corrugated pipe 3 and a turnbuckle of the ball screw 1 form a disassembly and assembly structure through bolts and sealing treatment, the support 5 is installed at the upper end of the valve top cover 4 through bolts, the motor 6 is installed at the upper end of the support 5 through bolts, a rotating shaft of the motor 6 penetrates through the top of the support 5, the coupler 7 is fixedly connected with the lower end of the rotating shaft of the motor 6, the lower end of the coupler 7 is fixedly connected, the lower end of the bracket 5 is provided with a reaction chamber 9.

The bearing 8 is sleeved on the rod portion of the ball screw 1, the bearing 8 is installed in a through hole reserved in the valve top cover 4, the rod portion of the ball screw 1 penetrates through the valve top cover 4 through the through hole, the ball screw 1 rotates positively and negatively, the force applied to the side face of the bearing 8 is far smaller than the force applied to the belt in transmission, the friction of the ball screw 1 on the bearing 8 can be reduced, and the service life of the bearing 8 is prolonged.

The valve butterfly 2 below is established to circular, and the size of valve butterfly 2 below is greater than the opening size that reaction chamber 9 bottom was reserved, and the inside reservation of valve butterfly 2 has recess column structure, reciprocates through valve butterfly 2 and realizes opening and closing the opening that reaction chamber 9 bottom was reserved, and the recess of reserving in the middle of the valve butterfly 2 can move on ball 1 for valve butterfly 2 and provide the space.

The upper end and the lower end of the corrugated pipe 3 respectively form a sealing structure with the valve top cover 4 and the turnplate part of the ball screw 1, the corrugated pipe 3 is made of stainless steel, the corrugated cross section of the corrugated pipe 3 is 40mm, the vertical stretching length of the corrugated pipe 3 is greater than the vertical downward maximum displacement distance of the valve butterfly 2, and the corrugated pipe 3 is guaranteed to be capable of sealing and protecting the ball screw 1 and cannot influence the valve butterfly 2 to move up and down.

The axis of the rotating shaft of the motor 6 is collinear with the axis of the rod portion of the ball screw 1, ensuring that the bearing 8 can be subjected to minimal forces while the ball screw 1 is rotating.

The working principle is as follows: connect motor 6 with external controller electricity before using, the vacuum of inspection reaction chamber 9, guarantee that the reaction chamber all is vacuum state, when using, the axis of rotation through motor 6 drives shaft coupling 7 and rotates, and then shaft coupling 7 drives ball 1 and rotates, because ball 1 and motor 6's axis of rotation collineation, consequently when rotating, cup joint on ball 1, and the bearing 8 that is located valve top cover 4 can receive minimum side stress, thereby reduce ball 1 to the injury of bearing 8, increase bearing 8's life.

And ball 1 is when rotating, and the lead screw cooperation helicoidal for can reciprocate with helicoidal fixed connection's valve butterfly 2, and then can play the opening and the closed effect to the opening of reaction chamber 9 below, realize the pressure of setting for through the aperture of adjustment butterfly valve 2, whole transmission process is steady, and is accurate, connects through shaft coupling 7 and replaces the belt to connect, can make the wear littleer, improves life, reduces the fault rate.

And bellows 3's setting can be effectual seal protection to ball 1, avoids ball 1 to be corroded, and bellows 3 has the contractility simultaneously, can not influence reciprocating of valve butterfly 2, for the butterfly valve that semiconductor utilization was used to the tradition, this butterfly valve life is longer, has reduced practical cost.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a butterfly valve of shaft coupling transmission, includes ball (1), its characterized in that: the valve butterfly (2) is arranged at the lower end of the ball screw (1), the ball screw (1) and the valve butterfly (2) form a disassembly and assembly structure through bolts, the corrugated pipe (3) is sleeved at the outer side of the ball screw (1), the upper end of the corrugated pipe (3) and the valve top cover (4) form a disassembly and assembly structure through bolts and seal treatment, the lower end of the corrugated pipe (3) and the spiral disc of the ball screw (1) form a disassembly and assembly structure through bolts and seal treatment, the upper end of the valve top cover (4) is provided with a support (5) through bolts, the upper end of the support (5) is provided with a motor (6) through bolts, the rotating shaft of the motor (6) penetrates through the top of the support (5), the lower end of the rotating shaft of the motor (6) is fixedly connected with a coupler (7), the lower end of the coupler (7) is fixedly connected with the top end of the rod part of the ball, the lower end of the bracket (5) is provided with a reaction cavity (9).

2. A coupling-driven butterfly valve according to claim 1, wherein: the rod part of the ball screw (1) is sleeved with a bearing (8), the bearing (8) is installed in a through hole reserved in the valve top cover (4), and the rod part of the ball screw (1) penetrates through the valve top cover (4) through the through hole.

3. A coupling-driven butterfly valve according to claim 1, wherein: the lower portion of the valve butterfly (2) is round, the size of the lower portion of the valve butterfly (2) is larger than the size of an opening reserved at the bottom of the reaction cavity (9), and a groove-shaped structure is reserved in the valve butterfly (2).

4. A coupling-driven butterfly valve according to claim 1, wherein: the upper end and the lower end of the corrugated pipe (3) respectively form a sealing structure with the valve top cover (4) and the turnplate part of the ball screw (1), the corrugated pipe (3) is made of stainless steel, the corrugated cross section of the corrugated pipe (3) is 40mm, and meanwhile the vertical stretching length of the corrugated pipe (3) is larger than the vertical downward maximum displacement distance of the valve butterfly (2).

5. A coupling-driven butterfly valve according to claim 1, wherein: the axis of the rotating shaft of the motor (6) is collinear with the axis of the rod part of the ball screw (1).