CN211348995U - Photoresist baking device - Google Patents

Abstract

The utility model discloses a photoresistance liquid baking equipment, including toasting the box, toast the box and openly seted up sealing door, the lower surface mounting who toasts the box has a plurality of supporting legs, toast the box including the lamina tecti that is located its top, the interior diapire that toasts the box leaks hopper-shaped for the slope type, the lower fixed surface of toasting the box is connected with its inside clearance pipe of intercommunication, the inside wall that toasts the box inlays and is equipped with the race ring. This photoresistance liquid baking equipment, adopt dehydration hot-blast machine to heat the air, and get rid of the hydrone in the air, carry steam to toasting the inside photoresistance liquid that comes to the product surface of box, make its solidification, adopt driving motor to drive whole reposition of redundant personnel ring pipe and rotate, make the even product to the rotating turret upper surface of steam dry, the benefit of adopting steam to dry lies in that hot medium air and product are the contact of parcel formula, make its outside-in uniform drying, avoid the production of photoresistance shortcoming.

Description

Photoresist baking device

Technical Field

The utility model relates to a semiconductor processing technology field specifically is photoresistance liquid baking equipment.

Background

Photoresist, also known as photoresist, is a photosensitive material used in many industrial processes. There are two types of photoresists, positive photoresists and negative photoresists. In the production process of a plurality of semiconductors, photoresist liquid needs to be uniformly sprayed on the surface of the semiconductor, and the photoresist liquid is dried to form a resistance layer.

Most of the existing photoresist ovens are electrically driven to generate heat, directly emit hot light to bake the surface of a product, an internal semiconductor element is easily affected, and the front surface and the back surface of the product often have defects of a surface resistance layer due to the difference of heating time and the difference of sequences during baking, so that a photoresist drying device taking dry hot air as a drying medium is developed. The surface of the product is synchronously baked and is uniformly baked at the same time.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a photoresist liquid baking equipment to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the photoresist liquid baking device comprises a baking box body, wherein a sealing door is arranged on the front surface of the baking box body, a plurality of supporting legs are arranged on the lower surface of the baking box body, the baking box body comprises a top cover plate positioned at the top of the baking box body, the inner bottom wall of the baking box body is in an inclined funnel shape, a cleaning pipe communicated with the baking box body is fixedly connected to the lower surface of the baking box body, a bearing ring is embedded in the inner side wall of the baking box body, the inner ring of the bearing ring is fixedly connected with a shunting circular pipe, the shunting circular pipe is in a tubular circular structure with a right trapezoid cross section, a plurality of shunting pipes communicated with the interior of the shunting circular pipe are fixedly connected to the inner arc surface of the shunting circular pipe, an external gear ring is fixedly connected to the upper end of the outer arc surface of the shunting circular pipe; the lower surface of the shunting circular pipe is provided with a plurality of air inlets, a heat source pipe is arranged under the air inlets, a bearing is embedded in the center of the top cover plate, a rotating frame is fixed on an inner ring of the bearing, a servo motor for driving the rotating frame to rotate is fixedly connected to the upper surface of the top cover plate, and an exhaust pipe communicated with the interior of the top cover plate is fixedly connected to the upper surface of the top cover plate.

Preferably, the sealing door is made of toughened transparent glass, and the outlet of the cleaning pipe is in threaded connection with a spiral sealing cover.

Preferably, the driving mechanism comprises a through hole formed in the side face of the baking box body and a driving motor fixedly connected to the right side face of the baking box body, a vertical rotating shaft is connected to the inside of the through hole in a rotating mode, a synchronizing wheel and a driving gear are fixedly connected to the surface of a shaft rod of the vertical rotating shaft, the driving gear is meshed with an outer gear ring, and the synchronizing wheel is in transmission connection with an output shaft of the driving motor through a synchronous belt.

Preferably, the heat source pipe is fixedly connected to the left side surface of the baking box body and extends to the lower surface of the shunting circular ring pipe to be provided with an airflow through hole, the distance between the airflow through hole and the air inlet hole is 0.1cm-0.2cm, and the other end, far away from the baking box body, of the heat source pipe is fixedly connected with a dewatering air heater.

Preferably, the rotating frame is composed of a plurality of annular net disks and a main shaft rod, and the top of the main shaft rod is fixedly connected with an output shaft of the servo motor.

Preferably, the inner bottom wall of the baking box body is fixedly connected with a support frame for supporting the rotating frame, and the upper surface of the support frame is fixedly connected with a bearing for connecting a main shaft of the rotating frame.

Advantageous effects

The utility model provides a photoresist liquid baking equipment possesses following beneficial effect:

1. this photoresistance liquid baking equipment, adopt dehydration hot-blast machine to heat the air, and get rid of the hydrone in the air, carry steam to baking the inside photoresistance liquid that comes to the product surface of box, make its solidification, this baking equipment's the box that toasts, the surface is provided with the sealing door of toughened glass material, be convenient for observe the inside condition, adopt driving motor to drive whole reposition of redundant personnel ring tube and rotate, make the even product to the revolving rack upper surface of steam dry, the benefit of adopting steam to dry lies in that hot medium and product are the contact of parcel formula, make its outside-in uniform drying, avoid the production of photoresistance shortcoming.

2. This photoresistance liquid baking equipment has still set up the blast pipe and has connected the fan, takes out hot-blast, and its surface is provided with temperature monitor, the inside temperature of observation that can be very straight tube, and the bottom of toasting the box is provided with the clearance pipe, makes the waste water that should toast the inside clearance of box and produce be convenient for flow.

Drawings

FIG. 1 is a schematic front view of the present invention;

FIG. 2 is a schematic view of the front cross-section structure of the present invention;

FIG. 3 is an enlarged view of the structure at A in FIG. 2;

FIG. 4 is an enlarged view of the structure at B in FIG. 2;

fig. 5 is a schematic structural view of the rotating frame of the present invention.

In the figure: 1 baking box body, 2 sealing doors, 3 supporting legs, 4 top cover plates, 5 cleaning pipes, 6 bearing rings, 7 shunt circular pipes, 8 shunt pipes, 9 external gear rings, 10 air inlet holes, 11 heat source pipes, 12 bearings, 13 rotating frames, 14 servo motors, 15 exhaust pipes, 16 driving motors, 17 vertical rotating shafts, 18 synchronizing wheels, 19 driving gears, 20 airflow through holes and 21 supporting frames.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: the photoresist liquid baking device comprises a baking box body 1, a sealing door 2 is arranged on the front surface of the baking box body 1, the sealing door 2 is made of toughened transparent glass, a plurality of supporting legs 3 are mounted on the lower surface of the baking box body 1, the baking box body 1 comprises a top cover plate 4 positioned at the top of the baking box body, the inner bottom wall of the baking box body 1 is in an inclined funnel shape, a cleaning pipe 5 communicated with the interior of the baking box body 1 is fixedly connected to the lower surface of the baking box body 1, a spiral sealing cover is in threaded connection with the outlet of the cleaning pipe 5, a bearing ring 6 is embedded in the inner side wall of the baking box body 1, a shunting circular pipe 7 is fixedly connected to the inner ring of the bearing ring 6, the shunting circular pipe 7 is in a tubular circular structure with a right trapezoid cross section, a plurality of shunting pipes 8 communicated with the interior of the shunting circular pipe 7 are fixedly connected to the inner arc surface of the shunting circular pipe 7, an outer gear ring 9 is; the driving mechanism comprises a through hole arranged on the side surface of the baking box body 1 and a driving motor 16 fixedly connected to the right side surface of the baking box body 1, the inside of the through hole is rotatably connected with a vertical rotating shaft 17, the surface of a shaft rod of the vertical rotating shaft 17 is fixedly connected with a synchronizing wheel 18 and a driving gear 19, the driving gear 19 is meshed with an outer gear ring 9, and the synchronizing wheel 18 is in transmission connection with an output shaft of the driving motor 16 through a synchronous belt.

The lower surface of the shunting circular pipe 7 is provided with a plurality of air inlets 10, a heat source pipe 11 is arranged under the air inlets 10, a bearing 12 is embedded in the center of the top cover plate 4, a rotating frame 13 is fixed on the inner ring of the bearing 12, a servo motor 14 for driving the rotating frame 13 to rotate is fixedly connected to the upper surface of the top cover plate 4, the rotating frame 13 consists of a plurality of circular net disks and a main shaft rod, the top of the main shaft rod is fixedly connected with an output shaft of the servo motor 14, an exhaust pipe 15 communicated with the upper surface of the top cover plate 4 is fixedly connected with the upper surface of the top cover plate 4, the heat source pipe 11 is fixedly connected to the left side surface of the baking box body 1 and extends to the lower surface of the shunting circular pipe 7, and is provided with an air flow through hole 20, the distance between the air flow through hole 20 and the air inlets 10 is 0.1 cm-0.2.

The inner bottom wall of the baking box body 1 is fixedly connected with a support frame 21 used for supporting the rotating frame 13, and the upper surface of the support frame 21 is fixedly connected with a bearing used for connecting a main shaft rod of the rotating frame 13.

The working principle is as follows: when the device is used for drying and solidifying the photoresist liquid, firstly, the sealing door 2 is opened, a product with the surface sprayed with the resistor liquid is placed on the rotating frame 13, then the sealing door 2 is closed, the dehydration heat blower is opened to convey hot air to the inside of the shunting circular tube 7 through the air inlet hole 10 and the air circulation hole 20 which are arranged on the upper surface of the heat source tube 11, the hot air is uniformly conveyed to each position inside the baking box body 1 through the plurality of shunting tubes 8 which are positioned on the inner arc surface of the shunting circular tube 7, meanwhile, the shunting circular tube 7 is driven to rotate through the servo motor 14, the conveying of the hot air is uniform, meanwhile, the phenomenon that the impact force of the air flow is too large can be avoided while baking, the rotating frame 13 is driven to drive the product to rotate by using the driving motor 16, the impact force of the air flow is reduced, the photoresist liquid on the surface of the product is prevented from flowing, through setting up clearance pipe 5, make the inside of toasting box 1 be convenient for clear up and maintain the discharge sewage.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. Photoresist liquid baking equipment, including toasting box (1), its characterized in that: the utility model discloses a baking box, including toast box (1), openly seted up sealing door (2), the lower surface mounting who toasts box (1) has a plurality of supporting legs (3), toast box (1) including the lamina tecti (4) that is located its top, the interior diapire that toasts box (1) leaks hopper-shaped for the slope type, the lower fixed surface of toasting box (1) is connected with its inside clearance pipe (5) of intercommunication, the inside wall of toasting box (1) inlays and is equipped with race ring (6), the inner ring fixedly connected with reposition of redundant personnel ring pipe (7) of race ring (6), reposition of redundant personnel ring pipe (7) are right trapezoid's tubulose circular structure of cross section, a plurality of shunt tubes (8) rather than inside intercommunication of intrados fixed connection of reposition of redundant personnel ring pipe (7), the extrados cambered surface upper end fixedly connected with external gear, the right side surface of the baking box body (1) is provided with a driving mechanism which drives the shunt circular ring pipe (7) to rotate through an external gear ring (9); a plurality of air inlets (10) have been seted up to the lower surface of reposition of redundant personnel ring pipe (7), be provided with heat source pipe (11) under air inlet (10), bearing (12) are inlayed at the central point of lamina tecti (4), the inner ring of bearing (12) is fixed with rotating turret (13), the last fixed surface of lamina tecti (4) is connected with rotatory servo motor (14) of drive rotating turret (13), the last fixed surface of lamina tecti (4) is connected with blast pipe (15) rather than inside intercommunication.

2. The photoresist baking apparatus of claim 1, wherein: the sealing door (2) is made of toughened transparent glass, and the outlet of the cleaning pipe (5) is in threaded connection with a spiral sealing cover.

3. The photoresist baking apparatus of claim 1, wherein: the driving mechanism comprises a through hole and a driving motor (16), wherein the through hole is formed in the side face of the baking box body (1), the driving motor is fixedly connected to the right side face of the baking box body (1), a vertical rotating shaft (17) is connected to the inner rotation of the through hole, a synchronizing wheel (18) and a driving gear (19) are fixedly connected to the surface of a shaft rod of the vertical rotating shaft (17), the driving gear (19) is meshed with an outer gear ring (9), and the synchronizing wheel (18) is in transmission connection with an output shaft of the driving motor (16) through a synchronous belt.

4. The photoresist baking apparatus of claim 1, wherein: the heat source pipe (11) is fixedly connected to the left side face of the baking box body (1) and extends to the lower surface of the shunting circular ring pipe (7) to be provided with an airflow through hole (20), the distance between the airflow through hole (20) and the air inlet hole (10) is 0.1cm-0.2cm, and the other end, far away from the baking box body (1), of the heat source pipe (11) is fixedly connected with a dewatering air heater.

5. The photoresist baking apparatus of claim 1, wherein: the rotating frame (13) is composed of a plurality of annular net disks and a main shaft rod, and the top of the main shaft rod is fixedly connected with an output shaft of the servo motor (14).

6. The photoresist baking apparatus of claim 1, wherein: the inner bottom wall of the baking box body (1) is fixedly connected with a support frame (21) used for supporting the rotating frame (13), and the upper surface of the support frame (21) is fixedly connected with a bearing used for connecting a main shaft rod of the rotating frame (13).

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