CN211344781U - Nitrogen gas supply device - Google Patents
Nitrogen gas supply device Download PDFInfo
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- CN211344781U CN211344781U CN201922199706.6U CN201922199706U CN211344781U CN 211344781 U CN211344781 U CN 211344781U CN 201922199706 U CN201922199706 U CN 201922199706U CN 211344781 U CN211344781 U CN 211344781U
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- gas supply
- nitrogen gas
- pipeline structure
- supply device
- vaporizer
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model provides a nitrogen gas supply device, which comprises a liquid storage tank, a first gas supply pipeline structure, a second gas supply pipeline structure, a first electromagnetic valve, a first detector, a control cabinet and a first discharge pipeline structure; first air supply line structure is connected with the liquid storage pot and includes the power supply, the second solenoid valve, first vaporizer, second air supply line structure and first air supply line structural connection and include the second vaporizer of being connected with the power supply, first solenoid valve is connected between liquid storage pot and power supply and with switch board electric connection, the second solenoid valve is connected between power supply and second vaporizer and with switch board electric connection, first vaporizer is connected with the power supply, the second vaporizer is used for being connected with the gas appliance, power supply and switch board electric connection, first detector and first air supply line structural connection and with switch board electric connection, and be used for detecting the atmospheric pressure in the first air supply line structure, first exhaust pipeline structure and first air supply line connection.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a gas supply technical field especially relates to a nitrogen gas air feeder.
[ background of the invention ]
The existing nitrogen gas supply device has to be provided with two variable-frequency cryogenic liquid pumps (one for each), so that the investment budget is increased, and when the used variable-frequency cryogenic liquid pump fails, the standby variable-frequency cryogenic liquid pump cannot be automatically put into operation, so that the variable-frequency cryogenic liquid pump often has cavitation failure caused by excessive nitrogen (the pump idles, but does not work), the failure cannot be automatically eliminated, and manual operation is also needed.
In view of the above, it is desirable to provide a new nitrogen gas supply device to overcome the above-mentioned drawbacks.
[ Utility model ] content
The utility model aims at providing a nitrogen gas air feeder has reduced use cost, can discharge nitrogen gas and need not the fault that manual operation can remove the power supply automatically and do not do work, has reduced investment cost.
In order to achieve the above object, the present invention provides a nitrogen gas supply device 100, which comprises a liquid storage tank 1, a first gas supply pipeline structure 2, a second gas supply pipeline structure 3, a first solenoid valve 4, a first detector 5, a control cabinet 6 and a first discharge pipeline structure 7; the first air supply pipeline structure 2 is connected with the liquid storage tank 1 and comprises a power source 21, a second electromagnetic valve 22 and a first carburetor 23, the second air supply pipeline structure 3 is connected with the first air supply pipeline structure 2 and comprises a second carburetor 31 connected with the power source 21, the first electromagnetic valve 4 is connected between the liquid storage tank 1 and the power source 21 and electrically connected with the control cabinet 6, the second electromagnetic valve 22 is connected between the power source 21 and the second carburetor 31 and electrically connected with the control cabinet 6, the first carburetor 23 is connected with the power source 21 and used for being connected with an air using device 200, the second carburetor 31 is used for being connected with the air using device 200, the air pressure of the first air supply pipeline structure 2 is higher than that of the second air supply pipeline structure 3, the power source 21 is electrically connected with the control cabinet 6, the first detector 5 is connected to the first air supply pipeline structure 2, electrically connected to the control cabinet 6, and configured to detect air pressure in the first air supply pipeline structure 2, and the first exhaust pipeline structure 7 is connected to the first air supply pipeline structure 2.
In a preferred embodiment, the nitrogen gas supply device 100 further includes a first delivery pipe 300, and the second solenoid valve 22, the power source 21, and the first vaporizer 23 are connected in series to the first delivery pipe 300.
In a preferred embodiment, the nitrogen gas supply device 100 further includes a second conveying pipe 400, the second vaporizer 31 is connected in series to the second conveying pipe 400, and one end of the first conveying pipe 300 is connected to the second conveying pipe 400.
In a preferred embodiment, the nitrogen gas supply device 100 further comprises a first pressure reducer 8, and the first pressure reducer 8 is connected in series to the first conveying pipe 300.
In a preferred embodiment, the nitrogen gas supply device 100 further comprises a second pressure reducer 9, the second pressure reducer 9 being connected in series to the second delivery pipe 400.
In a preferred embodiment, the nitrogen gas supply device 100 further comprises two flow meters 10, wherein one flow meter 10 is connected in series to the first conveying pipeline 300 and electrically connected to the control cabinet 6, and the other flow meter 10 is connected in series to the second conveying pipeline 400 and electrically connected to the control cabinet 6.
In a preferred embodiment, the nitrogen gas supply device 100 further includes a pipe 500, and the first solenoid valve 4 is connected between the liquid storage tank 1 and the power source 21 through the pipe 500.
In a preferred embodiment, the nitrogen gas supply device 100 further includes two second detectors 11, one of the second detectors 11 is connected in series to the first conveying pipeline 300, the other second detector 11 is connected to the pipeline 500 and located between the liquid storage tank 1 and the power source 21, and both of the two second detectors 11 are electrically connected to the control cabinet 6.
In a preferred embodiment, the first discharge pipeline structure 7 includes a first discharge pipeline 71 and a third solenoid valve 72 connected to the first discharge pipeline 71, the third solenoid valve 72 is electrically connected to the control cabinet 6, and the first discharge pipeline 71 is connected to the first air supply pipeline structure 2 through the third solenoid valve 72.
In a preferred embodiment, the nitrogen gas supply apparatus 100 further comprises a second discharge pipeline structure 600, the second discharge pipeline structure 600 comprises a second discharge pipeline 601 and a plurality of valves 602 connected to the second discharge pipeline 601, and the second discharge pipeline 601 is connected to the second gas supply pipeline structure 3 through the plurality of valves 602.
Compared with the prior art, the utility model provides a pair of nitrogen gas air feeder, beneficial effect lies in, only sets up a power supply, has reduced investment cost, and still is provided with first discharge pipeline structure and first air supply line structural connection, can discharge nitrogen gas through first discharge pipeline structure, does not need the manual operation can be relieved the trouble that the power supply did not do work automatically.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of the nitrogen gas supply device provided by the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantageous technical effects of the present invention more clearly understood, the present invention is further described in detail with reference to the accompanying drawings and the following detailed description. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration only and not by way of limitation.
It will be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present invention and simplicity in description, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
It is also noted that, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," "disposed," and the like are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The above terms may have the specific meanings given in the present invention to those skilled in the art according to the specific circumstances.
Furthermore, the terms "first", "second", and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second", may explicitly or implicitly include one or more of that feature. Further, the meaning of "a plurality" or "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1, the present invention provides a nitrogen gas supply device 100, which includes a liquid storage tank 1, a first gas supply pipeline structure 2, a second gas supply pipeline structure 3, a first solenoid valve 4, a first detector 5, a control cabinet 6 and a first discharge pipeline structure 7; the first air supply pipeline structure 2 is connected with the liquid storage tank 1 and comprises a power source 21, a second electromagnetic valve 22 and a first carburetor 23, the second air supply pipeline structure 3 is connected with the first air supply pipeline structure 2 and comprises a second carburetor 31 connected with the power source 21, the first electromagnetic valve 4 is connected between the liquid storage tank 1 and the power source 21 and electrically connected with the control cabinet 6, the second electromagnetic valve 22 is connected between the power source 21 and the second carburetor 31 and electrically connected with the control cabinet 6, the first carburetor 23 is connected with the power source 21 and used for being connected with the air using device 200, the second carburetor 31 is used for being connected with the air using device 200, liquid nitrogen is contained in the liquid storage tank 1, the air pressure of the first air supply pipeline structure 2 is higher than that of the second air supply pipeline structure 3, the power source 21 is used for providing power and electrically connected with the control cabinet 6, the first detector 5 is connected with the first air supply pipeline structure 2, electrically connected with the control cabinet 6, and used for detecting air pressure in the first air supply pipeline structure 2, and the first discharge pipeline structure 7 is connected with the first air supply pipeline structure 2 and used for discharging nitrogen.
In the present embodiment, the power source 21 is a cryogenic liquid pump; the first gasifier 23 and the second gasifier 31 are both used for heating liquid nitrogen, and the number of the second gasifiers 31 is two; the first detector 5 is a pressure sensor; the control cabinet 6 is a variable frequency control cabinet and is used for receiving the signal of the first detector 5 and sending a control signal to the first electromagnetic valve 4 and the second electromagnetic valve 22.
When part of liquid nitrogen in the liquid storage tank 1 flows to the power source 21 through the second electromagnetic valve 22, the power source 21 starts to deliver the liquid nitrogen into the first vaporizer 23, the first vaporizer 23 heats the liquid nitrogen and provides the liquid nitrogen for the gas utilization device, and the first detector 5 detects the gas pressure in the first gas supply pipeline structure 2;
when the first air supply pipeline structure 2 starts to supply air and the first air supply pipeline structure 2 stops supplying air for a long time and then supplies air, the control cabinet transmits signals to the second electromagnetic valve 22 and the first electromagnetic valve 4 to open the second electromagnetic valve 22 and the first electromagnetic valve 4, after liquid nitrogen precools the power source 21 for a few seconds through the power source 21, the first electromagnetic valve 4 is closed, and then air supply is started;
if the first detector 5 detects that the air pressure at the first detector 5 is equal to the preset air pressure value of the control cabinet 6 (normal air supply), at this time, the first electromagnetic valve 4 is in a closed state, and the first air supply pipeline structure 2 normally provides liquid nitrogen for the air using device 200;
if the first detector 5 detects that the air pressure at the first detector 5 is lower than the preset air pressure value of the control cabinet 6, at this time, the first electromagnetic valve 4 is precooled, the control cabinet 6 sends a signal to the first electromagnetic valve 4 to open the first electromagnetic valve 4, and the control cabinet 6 sends a signal to enable the power source 21 to accelerate the rotating speed so as to increase the pressure, so that the purpose of providing liquid nitrogen for the gas using device 200 is achieved;
if the first detector 5 detects that the air pressure at the first detector 5 is higher than the preset air pressure value of the control cabinet 6, the control cabinet 6 sends a signal to enable the power source 21 to reduce the rotating speed or stop the operation of the power source 21 so as to increase the pressure, so that the purpose of providing liquid nitrogen for the gas-using device 200 is achieved; if the first detector 5 detects that the air pressure at the first detector 5 is higher than the preset air pressure value of the control cabinet 6 and the rotating speed of the power source 21 is lower than the lowest rotating speed of the power source 21, it indicates that the amount of nitrogen used by the user is small or the air is temporarily not used, and the power source 21 automatically stops running;
meanwhile, part of the liquid nitrogen in the liquid storage tank 1 flows into the second vaporizer 31, and the second vaporizer 31 heats the liquid nitrogen and supplies the liquid nitrogen to the gas using device 400. By adopting a cryogenic liquid pump, the investment cost is reduced.
In one embodiment, the nitrogen gas supply device 100 further includes a first conveying pipeline 300, and the second solenoid valve 22, the power source 21, and the first vaporizer 23 are connected in series to the first conveying pipeline 300 in sequence.
In one embodiment, the nitrogen gas supply device 100 further includes a second conveying pipe 400, the second vaporizer 31 is connected in series to the second conveying pipe 400, and one end of the first conveying pipe 300 is connected to the second conveying pipe 400.
In one embodiment, the nitrogen gas supply device 100 further includes a pipe 500, and the first solenoid valve 4 is connected between the liquid storage tank 1 and the power source 21 through the pipe 500.
In one embodiment, the first discharge pipeline structure 7 includes a first discharge pipeline 71 and a third solenoid valve 72 connected to the first discharge pipeline 71, the third solenoid valve 72 is electrically connected to the control cabinet 6, and the first discharge pipeline 71 is connected to the first air supply pipeline structure 2 through the third solenoid valve 72. If the power source 21 is running, and the first detector 5 detects that the air pressure value in the first air supply pipeline structure 2 is not changed (indicating that cavitation failure occurs, the pump is idling, but the pump does not work), the third electromagnetic valve 72 is opened for a few seconds and then closed, the first exhaust pipeline 71 exhausts nitrogen to enable the power source 21 to work, at this time, the cavitation failure is automatically relieved, and the power source 21 runs normally to work; if the power source 21 is running and the first detector 5 detects a change in the air pressure in the first air supply line structure 2, the third electromagnetic valve 72 is closed.
In one embodiment, the nitrogen gas supply apparatus 100 further includes a second discharge line structure 600, the second discharge line structure 600 includes a second discharge line 601 and a plurality of valves 602 connected to the second discharge line 601, and the second discharge line 601 is connected to the second line structure 3 through the plurality of valves 602. The second exhaust line 601 may exhaust nitrogen by opening a valve 602.
In one embodiment, the nitrogen gas supply device 100 further comprises a first pressure reducer 8, and the first pressure reducer 8 is connected in series to the first conveying pipe 300 and is used for reducing the air pressure in the first conveying pipe 300.
In one embodiment, the nitrogen gas supply device 100 further comprises a second pressure reducer 9, and the second pressure reducer 9 is connected in series to the second conveying pipe 400 and is used for reducing the air pressure in the second conveying pipe 400.
In one embodiment, the nitrogen gas supply device 100 further comprises two flow meters 10, wherein one flow meter 10 is connected in series to the first conveying pipeline 300 and electrically connected to the control cabinet 6, and the other flow meter 10 is connected in series to the second conveying pipeline 400 and electrically connected to the control cabinet 6.
In one embodiment, the nitrogen gas supply device 100 further includes two second detectors 11, one of the second detectors 11 is connected in series to the first conveying pipeline 300, the other second detector 11 is connected to the pipeline 500 and located between the liquid storage tank 1 and the power source 21, and both of the two second detectors 11 are electrically connected to the control cabinet 6. In the present embodiment, both of the two second detectors 11 are temperature sensors.
The invention is not limited solely to that described in the specification and the embodiments, and additional advantages and modifications will readily occur to those skilled in the art, and it is not intended to be limited to the specific details, representative apparatus, and illustrative examples shown and described herein, without departing from the spirit and scope of the general concept as defined by the appended claims and their equivalents.
Claims (10)
1. A nitrogen gas supply device (100) is characterized by comprising a liquid storage tank (1), a first gas supply pipeline structure (2), a second gas supply pipeline structure (3), a first electromagnetic valve (4), a first detector (5), a control cabinet (6) and a first discharge pipeline structure (7); first air supply pipeline structure (2) with liquid storage pot (1) is connected and is included power supply (21), second solenoid valve (22), first vaporizer (23), second air supply pipeline structure (3) with first air supply pipeline structure (2) are connected and include with second vaporizer (31) that power supply (21) are connected, first solenoid valve (4) connect in between liquid storage pot (1) and power supply (21) and with switch board (6) electric connection, second solenoid valve (22) connect in between power supply (21) and second vaporizer (31) and with switch board (6) electric connection, first vaporizer (23) with power supply (21) are connected and are used for being connected with gas using device (200), second vaporizer (31) are used for being connected with gas using device (200), the atmospheric pressure of first air supply pipeline structure (2) is higher than the atmospheric pressure of second air supply pipeline structure (3) The power source (21) and the control cabinet (6) are electrically connected, the first detector (5) is connected with the first air supply pipeline structure (2) and electrically connected with the control cabinet (6) and used for detecting air pressure in the first air supply pipeline structure (2), and the first discharge pipeline structure (7) is connected with the first air supply pipeline structure (2).
2. The nitrogen gas supply device (100) according to claim 1, wherein the nitrogen gas supply device (100) further comprises a first delivery pipe (300), and the second solenoid valve (22), the power source (21), and the first vaporizer (23) are connected in series to the first delivery pipe (300).
3. The nitrogen gas supply device (100) according to claim 2, wherein the nitrogen gas supply device (100) further comprises a second delivery pipe (400), the second vaporizer (31) is connected in series to the second delivery pipe (400), and one end of the first delivery pipe (300) is connected to the second delivery pipe (400).
4. The nitrogen gas supply device (100) according to claim 2, wherein the nitrogen gas supply device (100) further comprises a first pressure reducer (8), the first pressure reducer (8) being connected in series to the first delivery duct (300).
5. The nitrogen gas supply device (100) according to claim 3, wherein the nitrogen gas supply device (100) further comprises a second pressure reducer (9), the second pressure reducer (9) being connected in series to the second delivery duct (400).
6. The nitrogen gas supply device (100) according to claim 3, wherein the nitrogen gas supply device (100) further comprises two flow meters (10), one of the flow meters (10) being connected in series to the first delivery duct (300) and electrically connected to the control cabinet (6), and the other flow meter (10) being connected in series to the second delivery duct (400) and electrically connected to the control cabinet (6).
7. The nitrogen gas supply device (100) according to claim 2, wherein the nitrogen gas supply device (100) further comprises a pipe (500), and the first solenoid valve (4) is connected between the liquid storage tank (1) and the power source (21) through the pipe (500).
8. The nitrogen gas supply device (100) according to claim 7, wherein the nitrogen gas supply device (100) further comprises two second detectors (11), one of the second detectors (11) is connected in series to the first conveying pipe (300), the other second detector (11) is connected to the pipe (500) and located between the liquid storage tank (1) and the power source (21), and the two second detectors (11) are electrically connected to the control cabinet (6).
9. The nitrogen gas supply device (100) according to claim 1, wherein the first discharge line structure (7) comprises a first discharge line (71) and a third solenoid valve (72) connected to the first discharge line (71), the third solenoid valve (72) being electrically connected to the control cabinet (6), the first discharge line (71) being connected to the first gas supply line structure (2) through the third solenoid valve (72).
10. The nitrogen gas supply apparatus (100) of claim 1, wherein the nitrogen gas supply apparatus (100) further comprises a second discharge line structure (600), the second discharge line structure (600) comprising a second discharge line (601) and a plurality of valves (602) connected to the second discharge line (601), the second discharge line (601) being connected to the second gas supply line structure (3) through the plurality of valves (602).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922199706.6U CN211344781U (en) | 2019-12-10 | 2019-12-10 | Nitrogen gas supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922199706.6U CN211344781U (en) | 2019-12-10 | 2019-12-10 | Nitrogen gas supply device |
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| Publication Number | Publication Date |
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| CN211344781U true CN211344781U (en) | 2020-08-25 |
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| CN201922199706.6U Active CN211344781U (en) | 2019-12-10 | 2019-12-10 | Nitrogen gas supply device |
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| CN (1) | CN211344781U (en) |
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- 2019-12-10 CN CN201922199706.6U patent/CN211344781U/en active Active
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