CN211291407U - Detection tool for detecting silicon wafer bearing flower basket - Google Patents
Detection tool for detecting silicon wafer bearing flower basket Download PDFInfo
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- CN211291407U CN211291407U CN201922146165.0U CN201922146165U CN211291407U CN 211291407 U CN211291407 U CN 211291407U CN 201922146165 U CN201922146165 U CN 201922146165U CN 211291407 U CN211291407 U CN 211291407U
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Abstract
The application provides an examine utensil for detecting bear silicon chip basket of flowers belongs to the mechanical manufacturing technology field. Examine utensil and include: each detection unit is provided with a detection part, and the detection parts are used for detecting corresponding positioning groove groups on the silicon wafer bearing flower basket; and the adjustable connecting piece is connected with the two detection units and can adjust the distance between the two detection parts of the detection part through the adjustable connecting piece. The application provides a checking fixture which is combined by two detection units, so that the checking fixture fully detects a positioning groove arranged on a silicon wafer bearing flower basket, and a support plate between the two detection units plays a role in guaranteeing the structural strength of the checking fixture; the adjustable connecting piece is adjustable, and the distance between the two detection units is adjusted by combining the strip-shaped through hole arranged on the fixing plate and the fastening bolt, so that the adjustable connecting piece is suitable for detecting silicon wafer bearing flower baskets with various sizes; the distance between two detection units is adjusted jointly to the adjustable connecting piece to guarantee its cooperation to the roll adjustment bolt that sets up.
Description
Technical Field
The utility model belongs to the technical field of the machine-building, concretely relates to detect adjustable edge distance that bears silicon chip basket of flowers and examine utensil.
Background
In the production and manufacturing process of the crystalline silicon solar cell, the silicon wafer basket used for production is deformed due to temperature, mechanical force, collision and other reasons in the using process, and a frequently-detected tool is required to detect technical indexes such as parallelism and symmetry of a silicon wafer positioning groove so as to judge whether the silicon wafer basket can be continuously used in a production process link.
Regarding the silicon wafer positioning slots, the parts of the basket apparatus having a plurality of groove valleys for positioning/supporting the silicon wafers are generally supported by using the rods or plates as the frame.
In the prior art, the used checking fixture can only detect the tooth socket parallelism and symmetry of the silicon wafer positioning grooves on the same plane, and can not simultaneously check all the positioning grooves on the silicon wafer flower basket. And the used checking fixture has the defects that the size is not adjustable after being changed due to abrasion or external force extrusion influence in the using process, so that the cost is wasted.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model aims at providing an examine utensil for detecting silicon chip bears basket of flowers to solve the constant head tank that examines among the prior art can not detect simultaneously on the silicon chip basket of flowers, and used size inedjustable scheduling problem of examining the utensil.
The utility model provides an examine utensil for detecting silicon chip bears basket of flowers, it includes to examine utensil:
each detection unit is provided with a detection part, and the detection parts are used for detecting corresponding positioning groove groups on the silicon wafer bearing flower basket;
and the adjustable connecting piece is connected with the two detection units and can adjust the distance between the two detection parts.
Preferably, a fixing plate is arranged on one opposite side of each detection unit, and the fixing plates of the two detection units are respectively connected with the adjustable connecting piece.
Preferably, two fixing plates are arranged on each detection unit.
Preferably, the detection parts of the two detection units are parallel to each other and are oppositely arranged away from each other;
and each detection unit is respectively used for detecting a corresponding positioning groove group, and each positioning groove group comprises two rows of positioning grooves which are parallel to each other and are arranged at a preset distance.
Preferably, a plurality of detection pieces are arranged on the detection part in an array manner, and each detection piece is respectively used for being clamped into a corresponding positioning groove on the positioning groove group to detect the parallelism and symmetry between the positioning grooves on the positioning groove group;
the length of each detection piece is larger than or equal to the spacing distance between two rows of positioning grooves in the positioning groove group, so that the detection pieces are clamped between two rows of positioning grooves in the corresponding positioning groove group at the same time.
Preferably, the adjustable connecting pieces are provided with two groups, and the two groups of adjustable connecting pieces are respectively arranged on two sides of the detection unit in the length direction.
Preferably, each set of said adjustable connections comprises:
the positioning plate is provided with at least two threaded holes and is arranged on the outer side surface of one side of the detection unit;
and the fastening bolt passes through the detection unit and is screwed in the threaded hole.
Preferably, the outer wall of each detection unit is respectively provided with a clamping groove for clamping the positioning plate, the bottom wall of each clamping groove is respectively provided with a strip-shaped through hole, and the through holes are used for the fastening bolts to pass through.
Preferably, each fastening bolt penetrates through the corresponding through hole from the inner side of each detection unit and is screwed on the positioning plate.
Preferably, each of the adjustable connections further comprises:
and the distance adjusting bolt is connected to one detection unit in a threaded manner, penetrates through the detection unit and abuts against the opposite detection unit.
The application has the following beneficial effects:
according to the detection tool for detecting the silicon wafer bearing flower basket, the two detection units are combined, and the detection parts are arranged on the side faces, deviating from each other, of the detection units, so that the detection tool can fully detect the positioning grooves formed in the silicon wafer bearing flower basket, and the support plate arranged between the two detection units can guarantee the structural strength of the detection tool; the adjustable connecting piece is adjustable, and the distance between the two detection units is adjusted by combining the strip-shaped through hole arranged on the fixing plate and the fastening bolt, so that the adjustable connecting piece is suitable for detecting silicon wafer bearing flower baskets with various sizes; the distance between two detecting elements is adjusted jointly to the adjustable connecting piece to the pitch adjustment bolt that sets up assurance its cooperation, and pitch adjustment bolt mainly plays spacing effect, guarantees the distance between two detecting element.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent from the following description of the embodiments of the present invention with reference to the accompanying drawings.
FIG. 1 is a schematic structural diagram of a silicon wafer carrying basket according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a detection tool for detecting a silicon wafer bearing flower basket, provided by the embodiment of the invention;
fig. 3 is an exploded view of an inspection device for inspecting a silicon wafer bearing flower basket according to an embodiment of the present invention.
The detection device comprises a side plate 1, a baffle 2, a positioning groove 3, a detection unit 4, an adjustable connecting piece 5, a support plate 6, a detection part 7, a positioning plate 8, a distance adjusting bolt 9, a fastening bolt 10, a clamping groove 11 and a through hole 12.
Detailed Description
Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by the same or similar reference numerals. For purposes of clarity, the various features in the drawings are not necessarily drawn to scale.
Fig. 1 shows a schematic structural diagram of a silicon wafer bearing flower basket according to an embodiment of the present invention. As shown in figure 1, the silicon wafer bearing flower basket comprises a side plate 1, a baffle plate 2 and rod-shaped positioning groove pieces 3, wherein a detection position of a detection tool applied at this time is formed in a groove formed in the middle, and the detection is performed by detecting positioning grooves in the rod-shaped positioning groove pieces 3 through the detection tool, so that the detection tool is aligned to the positioning grooves, and whether the silicon wafer bearing flower basket is qualified is judged according to the passing, stopping and stopping conditions of the detection tool.
As shown in fig. 2 and 3, the application provides a detection tool for detecting a silicon wafer bearing flower basket, which is used for detecting the parallelism and symmetry of a positioning groove on the silicon wafer bearing flower basket, and the detection tool comprises: each detection unit 4 is provided with a detection part 7, and the detection parts 7 are used for detecting the corresponding positioning groove groups of the silicon wafer bearing flower basket; an adjustable connector 5, which connects two of the detecting units 4 and can adjust the distance between the two detecting units 4 (for example, the size of A is marked in FIG. 2, and the size of A is changed by adjusting the adjustable connector 5); therefore, the checking fixture is adjusted in the direction marked by A in fig. 2, and is suitable for silicon wafer bearing flower baskets with different sizes in the direction A.
In this embodiment, as shown in fig. 2 and 3, a fixing plate is disposed on an opposite side of each of the detecting units 4, and the fixing plates of the two detecting units 4 are respectively connected to the adjustable connecting members 5. Preferably, each of the detecting units 4 includes a body plate and two fixing plates, the body plate is of a plate-shaped structure, the two fixing plates are respectively disposed at two opposite ends of the body plate along the length direction, and the detecting portion 7 is disposed on an outer side wall of the body plate. The adjustable connecting piece 5 is connected with the adjustable connecting piece 5 through the arranged fixing plate, so that the adjustable connecting piece 5 can adjust the distance between the two detection units 4. It should be understood that two fixing plates are provided on each detecting unit 4, so that the connection between the two detecting units 4 is more firm.
In this embodiment, a supporting plate 6 is disposed on an opposite side of each of the detecting units 4, and the supporting plates 6 of the two detecting units 4 can be abutted against each other to support the two detecting units 4. It will be appreciated that the fixing plate 6 acts as a stiffener or rib to reduce deformation of the two sensing units 4 by external forces. When the adjustable connecting piece 5 is not adjusted, the supporting plates 6 on the two detecting units 4 are abutted against each other, that is, the two detecting units 4 have a minimum distance therebetween, and the two supporting plates 6 abutted against each other play a supporting role. As shown in fig. 2 and 3, in the present embodiment, at least two support plates 6 are disposed on each detection unit 4, so as to further enhance the structural strength.
In the present embodiment, the detecting portions 7 of the two detecting units 4 are arranged in parallel and oppositely away from each other; each detection unit 4 is configured to detect a corresponding positioning groove group, and each positioning groove group includes two rows of positioning grooves that are parallel to each other and are spaced apart by a predetermined distance.
In an alternative embodiment, each of the detecting portions 7 can be detachably connected to the detecting unit 4, so that the detecting portions 7 with different sizes can be replaced to be suitable for detecting positioning grooves with different sizes. It should be understood that the detection portion 7 may be connected to the detection unit 4 by a fixing manner using a bolt screw connection.
In this embodiment, a plurality of detection pieces are arranged on the detection portion 7 in an array, and each detection piece is respectively used for being clamped into a corresponding positioning groove on the positioning groove group to detect parallelism and symmetry between the positioning grooves on the positioning groove group; the length of each detection piece is larger than or equal to the spacing distance between two rows of positioning grooves of the positioning groove group, so that the detection pieces are simultaneously clamped into the two rows of positioning grooves of the corresponding positioning groove group. As shown in fig. 1 to 3, the detection pieces on each detection unit 7 are distributed along the length direction of the detection unit 7 (as shown in fig. 2), and each detection piece detects two rows of positioning grooves on the same side surface by the length in the direction B. It should be understood that the length of the detecting piece B in the direction is greater than the depth of the groove of the flower basket in fig. 1, so that the detecting piece can simultaneously detect two positioning grooves on the same side of the flower basket.
In this embodiment, the adjustable connecting pieces 5 are provided in two sets, and the two sets of adjustable connecting pieces 5 are respectively disposed on two sides of the detecting units 4 in the length direction, so that the two detecting units 4 are fixed, and the distance between the two detecting units 4 on the checking fixture is adjusted.
In this embodiment, the adjustable connector 5 comprises: the positioning plate 8 is provided with at least two threaded holes, the positioning plate 8 is arranged on the outer side surface of one side of the detection unit 4 in the length direction, namely the positioning plate 8 is arranged on the fixing plate; and a fastening bolt 10 passing through the detection unit 4 and screwed into the threaded hole.
In this embodiment, the outer wall of each detection unit 4 is respectively provided with a clamping groove 11, the clamping groove 11 is used for clamping the positioning plate 8, the bottom wall of each clamping groove 11 is respectively provided with a strip-shaped through hole 12, and the through hole 12 is used for the fastening bolt to pass through.
As will be understood by those skilled in the art, the strip-shaped through hole 12 provided on the fixing plate is used for realizing that the fastening bolt 10 can be adjusted thereon, one end of the fastening bolt 10 penetrates through the fixing plate and is screwed onto the positioning plate 8, and the fixing plate and the positioning plate 8 are clamped and fixed by screwing the fastening bolt 10, so that the adjusting use of the gauge is met.
At least one clamping groove 11 is formed in the outer side of each fixing plate, in the embodiment, two clamping grooves 11 are preferably formed, so that the two detection units 4 are connected more firmly, and the clamping grooves 11 on the fixing plates at the same ends of the two detection units 4 are in butt joint to form a combined groove; a strip-shaped through hole 12 is formed in each clamping groove 11, and the positioning plate 8 is clamped in the combined groove in a matching manner; wherein the relative position of the fastening bolt 10 in the strip-shaped through hole 12 can be adjusted. Do benefit to fixedly more in setting up the combination groove through with locating plate 8, form like the spacing of the up-and-down direction of locating plate 8 shown in figure 2 or figure 3, also make the terminal surface of examining utensil upper fixed plate outside side more parallel and level simultaneously.
In the present embodiment, each of the fastening bolts 10 passes through the corresponding strip-shaped through hole 12 from the inner side of the fixing plate of each of the detecting units 4, and is screwed to the positioning plate 8. The effect of clamping and fixing the fixing plate through the connection of the fastening bolt 10 and the positioning plate 8 is realized.
In this embodiment, each of the adjustable connectors 5 further includes: and the distance adjusting bolt 9 is in threaded connection with a fixing plate on the detection unit 4, penetrates through the fixing plate and can be abutted against the fixing plate of the opposite detection unit 4. It should be understood that at least one fixing plate on an adjustable connecting piece 5 is provided with a threaded hole for connecting the distance bolt 9. In order to better adjust the distance between the two detection units 4 and prevent the distance adjusting bolt 9 from having the problem of position interference such as protrusion of a bolt cap part, the distance adjusting bolt 9 is a full-thread bolt or a stud bolt, and a cross groove or a straight groove is formed in the end part of the bolt, so that the bolt is convenient to screw. In addition, the through hole at one end of the adjustable connecting piece 5, which is provided with the bolt cap, can be provided with a larger diameter and a space in which the bolt cap can axially move, so that the requirement of adjusting the distance between the two detection units 4 is met.
According to the detection tool for detecting the silicon wafer bearing flower basket, the two detection units 4 are combined, and the detection parts are arranged on the side faces, which are opposite to each other, of the detection units 4, so that the detection tool can fully detect the positioning grooves formed in the silicon wafer bearing flower basket, and the support plate 6 arranged between the two detection units 4 can guarantee the structural strength of the detection tool; the distance of the arranged adjustable connecting piece 5 in the direction A is adjustable, and the distance between the two detection units 4 is adjusted through the strip-shaped through holes 12 arranged on the fixing plate and the fastening bolts 10, so that the adjustable connecting piece is suitable for detecting silicon wafer bearing flower baskets with various sizes; the distance between two detecting element 4 is adjusted jointly to adjustable connecting piece 5 to the cooperation of roll adjustment bolt 9 that sets up, and roll adjustment bolt 9 mainly plays spacing effect, guarantees the distance between two detecting element 4.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Finally, it should be noted that: it should be understood that the above examples are only for clearly illustrating the present invention and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious changes and modifications may be made without departing from the scope of the present invention.
Claims (10)
1. The utility model provides an examine utensil for detecting silicon chip bears basket of flowers which characterized in that, examine utensil and include:
each detection unit is provided with a detection part, and the detection parts are used for detecting corresponding positioning groove groups on the silicon wafer bearing flower basket;
and the adjustable connecting piece is connected with the two detection units and can adjust the distance between the two detection parts.
2. The tool according to claim 1, wherein a fixing plate is disposed on one side of each of the detecting units, and the fixing plates of the two detecting units are respectively connected to the adjustable connecting member.
3. The tool according to claim 2, wherein two fixing plates are arranged on each detection unit.
4. The tool according to claim 1, 2 or 3, wherein the detecting parts of the two detecting units are parallel to each other and are oppositely arranged;
and each detection unit is respectively used for detecting a corresponding positioning groove group, and each positioning groove group comprises two rows of positioning grooves which are parallel to each other and are arranged at a preset distance.
5. The inspection tool for inspecting silicon wafer bearing baskets of claim 1, wherein a plurality of inspection pieces are arranged on the inspection portion in an array, and each inspection piece is respectively used for being clamped into a corresponding positioning slot on the positioning slot group to inspect parallelism and symmetry between the positioning slots on the positioning slot group;
the length of each detection piece is larger than or equal to the spacing distance between two rows of positioning grooves of the positioning groove group, so that the detection pieces are simultaneously clamped into the two rows of positioning grooves of the corresponding positioning groove group.
6. The tool according to claim 1, wherein there are two sets of the adjustable connectors, and the two sets of the adjustable connectors are respectively disposed on two sides of the two detection units in the length direction.
7. The fixture for detecting a silicon wafer-bearing flower basket according to claim 6, wherein each set of the adjustable connectors comprises:
the positioning plate is provided with at least two threaded holes and is arranged on the outer side surface of one side of the detection unit;
and the fastening bolt passes through the detection unit and is screwed in the threaded hole.
8. The tool for detecting the silicon wafer bearing flower basket according to claim 7, wherein the outer wall of each detection unit is provided with a clamping groove for clamping a positioning plate, the bottom wall of each clamping groove is provided with a strip-shaped through hole for the fastening bolt to pass through.
9. The tool according to claim 8, wherein each fastening bolt penetrates through the corresponding through hole from the inner side of each detection unit and is screwed to the positioning plate.
10. The fixture for detecting a silicon wafer-bearing flower basket according to any one of claims 7 to 9, wherein each adjustable connector further comprises:
and the distance adjusting bolt is connected to one detection unit in a threaded manner, penetrates through the detection unit and abuts against the opposite detection unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922146165.0U CN211291407U (en) | 2019-12-04 | 2019-12-04 | Detection tool for detecting silicon wafer bearing flower basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922146165.0U CN211291407U (en) | 2019-12-04 | 2019-12-04 | Detection tool for detecting silicon wafer bearing flower basket |
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| CN211291407U true CN211291407U (en) | 2020-08-18 |
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| CN201922146165.0U Active CN211291407U (en) | 2019-12-04 | 2019-12-04 | Detection tool for detecting silicon wafer bearing flower basket |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116581063A (en) * | 2023-05-29 | 2023-08-11 | 宁夏中欣晶圆半导体科技有限公司 | Silicon wafer etching tool and silicon wafer etching method |
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2019
- 2019-12-04 CN CN201922146165.0U patent/CN211291407U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116581063A (en) * | 2023-05-29 | 2023-08-11 | 宁夏中欣晶圆半导体科技有限公司 | Silicon wafer etching tool and silicon wafer etching method |
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