CN211291374U - High-precision flatness detection device - Google Patents

High-precision flatness detection device Download PDF

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Publication number
CN211291374U
CN211291374U CN202020206817.5U CN202020206817U CN211291374U CN 211291374 U CN211291374 U CN 211291374U CN 202020206817 U CN202020206817 U CN 202020206817U CN 211291374 U CN211291374 U CN 211291374U
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CN
China
Prior art keywords
module
light source
flat crystal
light
instance
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Expired - Fee Related
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CN202020206817.5U
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Chinese (zh)
Inventor
伍玮
罗利娟
钟海
张云飞
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Chengdu Weiborn Technology Co ltd
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Chengdu Weiborn Technology Co ltd
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Priority to CN202020206817.5U priority Critical patent/CN211291374U/en
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Expired - Fee Related legal-status Critical Current
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Abstract

The utility model discloses a high accuracy flatness detection device, including detection box, flatness calculation module, even light module and getting for instance module, the detection box roof is opened there is the bayonet socket, and bayonet socket department card is equipped with the plane flat crystal, even light module and getting for instance module locate in the detection box, even light module includes the light source cover and locates the three-colour interference light source in the light source cover, and light source cover roof is even worn-out fur; the image capturing module comprises a plurality of CCD network cameras, and the CCD network cameras face to the bottom of the plane flat crystal and capture images of the bottom of the plane flat crystal; the CCD network camera is connected with the planeness calculating module. The utility model discloses when examining plane flat crystal bottom, even light module and get for instance the module and all be in the confined detection box in, get for instance through a plurality of CCD network cameras simultaneously, can effectively avoid external light environment to even light and the interference of getting for instance, make the appearance of interference fringe with get for instance more accurate, increase the detection precision of plane degree.

Description

High-precision flatness detection device
Technical Field
The utility model relates to a flatness detection area specifically is a high accuracy flatness detection device.
Background
The flat crystal interference method is a flatness detecting method used for measuring the plane error of high-smoothness surface. During measurement, a measured surface is placed on a plane flat crystal, the plane flat crystal is irradiated by a light source, light is reflected on the plane flat crystal surface and forms an interference phenomenon with light reflected by the measured surface, and interference fringes are formed due to the fact that the optical path difference of the interference light is different under the influence of the flatness of the measured surface. The interference fringes reflect the flatness of the measured surface, and the flatness of the measured sample can be calculated through the interference fringes.
Chinese patent document 201811427991.6 discloses an ultrahigh-precision end face flatness detection imaging device and detection method for an aerial part, which includes a solid wood main body box, a flat crystal tray, a flat crystal, an interference light source, a CCD sensor, a universal adjusting bracket and a computer. A plane mirror is arranged on a base of the solid wood main body box, frosted glass is arranged on a rear side plate, black shading layers are arranged on the inner surfaces of a left side plate, a right side plate and an upper plate, and a slotted hole for mounting a flat crystal tray is formed in the upper plate; the optical flat is placed on the optical flat tray, the interference light source is installed in the solid wood main body box, and the CCD sensor is connected with the universal adjusting support, shoots and sends an interference fringe image to the computer. According to the invention, interference fringes are clearly displayed on a computer through the CCD sensor and the universal adjusting bracket, the defect that a measurement result is difficult to read efficiently and accurately when flatness is detected by a flat crystal is overcome, and the detection efficiency and accuracy of parts are improved; the black shading layer is arranged in the solid wood main box, so that the gathering performance of a light source is improved, the influence of reflected light on the measurement effect is reduced to the minimum, and the accuracy of the measurement result is improved.
This prior art comes reflection interference fringe image through the level crossing, but actual level crossing does not reach ideal state, and reflection imaging exists certain aberration, and outside light environment probably shines the plane flat crystal through the plane mirror reflection, causes the influence to the presentation of interference fringe, and outside light environment also probably disturbs the CCD sensor simultaneously, gets for instance and causes the influence to the clear of interference fringe. In addition, in the prior art, a single CCD camera is used for image capture, and aberration exists in lens imaging, so that the flatness detection accuracy is affected.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to solve prior art's above-mentioned problem, provide a high accuracy plane degree detection device.
The purpose of the utility model is mainly realized through the following technical scheme:
a high-precision flatness detection device comprises a detection box body, a flatness calculation module, a light homogenizing module and an image capturing module, wherein a bayonet is arranged on the top wall of the detection box body, a flat crystal is clamped at the bayonet, the light homogenizing module and the image capturing module are arranged in the detection box body, the light homogenizing module comprises a light source cover and a three-color interference light source arranged in the light source cover, and the top wall of the light source cover is a light homogenizing plate; the image capturing module comprises a plurality of CCD network cameras, and the CCD network cameras face to the bottom surface of the plane flat crystal and capture images of the bottom of the plane flat crystal; the CCD network camera is connected with the planeness calculating module.
Preferably, detect the box right side wall and cover the right side wall as the light source, detect the box right side wall and can open outward soon down, the three-colour interferes the light source and locates on the one side that detects the box right side wall inwards.
Preferably, the flatness calculating module is a touch screen computer, and the touch screen computer is mounted on the front wall of the detection box body.
Preferably, the front wall of the detection box body comprises a partition plate and a clamping frame which are sequentially arranged from inside to outside, and the touch screen computer is arranged in the clamping frame.
To sum up, the utility model discloses following beneficial effect has: when in detection, the plane flat crystal bottom, the light homogenizing module and the image capturing module are all arranged in the closed detection box body, so that the interference of the external light environment on the light homogenizing and the image capturing can be effectively avoided, and the presentation and the image capturing of interference fringes are more accurate. In addition, the CCD network camera is used for directly taking images of the planar flat crystal, so that the image taking accuracy of the interference fringes is improved. Meanwhile, a plurality of CCD network cameras are used for image capture, the flatness calculation module is used for processing interference fringe images of the CCD network cameras, aberration is compensated, and more accurate interference fringe images are obtained through combination and calculated, so that the flatness detection precision is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a second schematic structural diagram of an embodiment of the present invention.
Fig. 3 is a third schematic structural diagram of an embodiment of the present invention.
In the figure: the method comprises the following steps of 1-detecting a box body, 2-plane flat crystal, 3-light source cover, 4-three-color interference light source, 5-light homogenizing plate, 6-CCD network camera, 7-touch screen computer, 8-partition plate, 9-clamping frame, 10-mounting frame and 11-limiting frame.
Detailed Description
In the following description, numerous implementation details are set forth in order to provide a more thorough understanding of the present invention. It should be understood, however, that these implementation details should not be used to limit the invention. That is, in some embodiments of the invention, details of these implementations are not necessary. In addition, some conventional structures and components are shown in simplified schematic form in the drawings.
It should be noted that all the directional indicators in the embodiments of the present invention, such as upper, lower, left, right, front and rear … …, are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture as shown in the drawings, and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, unless expressly stated or limited otherwise, the terms "disposed," "mounted," "connected," and "coupled" are intended to be inclusive and mean, for example, that is, fixedly coupled, removably coupled, or integrally coupled; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example (b):
the utility model provides a high accuracy plane degree detection device, as shown in fig. 1 and 2, including detecting box 1, plane degree calculation module, even light module and getting for the image module, it has the bayonet socket to detect 1 roof of box, and bayonet socket department card is equipped with plane flat crystal 2, even light module with get for the image module all locate in detecting box 1, even light module includes light source cover 3 and locates the three-colour interference light source 4 in the light source cover 3, the three-colour interference light source 4 all towards plane flat crystal 2. The top wall of the light source cover 3 is a light homogenizing plate 5 (the light source cover 3 only has the light homogenizing plate 5 for transmitting light); the image capturing module comprises a plurality of CCD network cameras 6, the CCD network cameras 6 face the bottom of the plane flat crystal 2, and the plane flat crystal 2 is captured by the image capturing module; the CCD network camera 2 is connected with the planeness calculating module.
The three-color interference light source 4 can be selected as a sodium lamp, and the dodging plate 5 can be selected as a diffuse scattering plate. During detection, a detected object is placed on the top surface of the planar flat crystal 2, the three-color interference light source 4 emits light which is uniformly emitted to the bottom surface of the planar flat crystal 2 through the light uniformizing plate 5, and simultaneously emitted to the detected object through the planar flat crystal 2, light reflected by the bottom surface of the planar flat crystal 2 and light reflected by the surface of the detected object form an interference phenomenon, and interference fringes are formed on the bottom surface of the planar flat crystal 2. The CCD network camera 6 images the bottom surface of the plane flat crystal 2, and sends the obtained interference fringe image to the flatness calculating module for processing, and the flatness of the measured object is measured.
During detection, the bottom of the plane flat crystal 2, the light homogenizing module and the image capturing module are all arranged in the closed detection box body 1, so that the interference of the external light environment on the light homogenizing and the image capturing can be effectively avoided, and the presentation and the image capturing of interference fringes are more accurate. In addition, the CCD network camera 6 is used for directly imaging the plane flat crystal 2, so that the imaging accuracy of the interference fringes is improved. Meanwhile, a plurality of CCD network cameras 6 are used for image capture, the flatness calculation module is used for processing interference fringe images of the CCD network cameras 2, aberration is compensated, and more accurate interference fringe images are obtained through combination and calculated, so that the flatness detection precision is improved.
Further, as shown in fig. 1 and 2, detect 1 right side wall of box as 3 right side walls of light source cover, detect 1 right side wall of box and be connected with 1 diapire of detection box through the hinge, detect 1 right side wall of box and can revolve down and open outwards, three-colour interference light source 4 can dismantle through mounting bracket 10 and locate on detecting 1 right side wall of box one side inwards. The lower rotation is opened and is detected 1 right side wall of box, and the mounted position of adjustment tristimulus interference light source 4 on mounting bracket 10 can adjust the position and the distance of tristimulus interference light source 4 to make light evenly shine on even worn-out fur 5. In the invention, the detachable mode is a conventional mode and is not particularly limited.
The flatness calculation module can be a touch screen computer 7 and is matched with processing software to calculate the flatness. In order to improve the integration of the device and facilitate the overall carrying, as shown in fig. 2 and 3, a touch screen computer 7 is mounted on the front wall of the detection box 1. Preferably, in order to detect the beauty and flatness of the exterior of the case 2, the installation method of the touch screen computer is as follows: the front wall of the detection box body 1 comprises a partition plate 8 and a clamping frame 9 which are sequentially arranged from inside to outside, the partition plate 8 plays a role in safety isolation, and the touch screen computer 7 is separated from the CCD network camera 2 and the light source cover 3 in the detection box body 1. The touch screen computer 7 is mounted in the card frame 9. The installation mode of the touch screen computer 7 and the card frame 9 can be as follows: the touch screen computer 7 is clamped at the middle part of the clamping frame 9 through the limiting frame 11 from the inward surface of the clamping frame 9, the clamping frame 9 is connected with the left side wall of the detection box body 1 through a hinge, and the clamping frame 9 can be laterally screwed open to disassemble and assemble the touch screen computer 7.
Parts not described in the above modes can be realized by adopting or referring to the prior art.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments thereof. To the utility model belongs to the technical field of the ordinary skilled person say, do not deviate from the utility model discloses a other embodiments that reach under the technical scheme all should be contained the utility model discloses a within the scope of protection.

Claims (4)

1. The utility model provides a high accuracy plane degree detection device, is including detecting box (1), plane degree calculation module, even light module and getting for instance the module, and it has the bayonet socket to detect box (1) roof and open, and bayonet socket department card is equipped with plane flat crystal (2), its characterized in that: the light homogenizing module and the image capturing module are both arranged in the detection box body (1), the light homogenizing module comprises a light source cover (3) and a three-color interference light source (4) arranged in the light source cover (3), and the top wall of the light source cover (3) is a light homogenizing plate (5); the image capturing module comprises a plurality of CCD network cameras (6), and the CCD network cameras (6) face the bottom surface of the planar flat crystal (2) and capture images of the planar flat crystal (2); the CCD network camera (6) is connected with the flatness calculation module.
2. A high-precision flatness detecting apparatus according to claim 1, wherein: detect box (1) right side wall as light source cover (3) right side wall, detect box (1) right side wall and can open outward by the lower spin, three-colour interference light source (4) are located and are detected box (1) right side wall on the one side inwards.
3. A high-precision flatness detecting apparatus according to claim 1 or 2, wherein: the flatness calculation module is a touch screen computer (7), and the touch screen computer (7) is installed on the front wall of the detection box body (1).
4. A high-precision flatness detecting apparatus according to claim 3, wherein: the front wall of the detection box body (1) comprises a partition plate (8) and a clamping frame (9) which are sequentially arranged from inside to outside, and the touch screen computer (7) is installed in the clamping frame (9).
CN202020206817.5U 2020-02-25 2020-02-25 High-precision flatness detection device Expired - Fee Related CN211291374U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020206817.5U CN211291374U (en) 2020-02-25 2020-02-25 High-precision flatness detection device

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Application Number Priority Date Filing Date Title
CN202020206817.5U CN211291374U (en) 2020-02-25 2020-02-25 High-precision flatness detection device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111156931A (en) * 2020-02-25 2020-05-15 成都威博恩科技有限公司 High-precision flatness detection device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111156931A (en) * 2020-02-25 2020-05-15 成都威博恩科技有限公司 High-precision flatness detection device and method

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Granted publication date: 20200818

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