CN211273603U - Electronic-grade hydrofluoric acid distillation heating system - Google Patents

Electronic-grade hydrofluoric acid distillation heating system Download PDF

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Publication number
CN211273603U
CN211273603U CN201921677459.XU CN201921677459U CN211273603U CN 211273603 U CN211273603 U CN 211273603U CN 201921677459 U CN201921677459 U CN 201921677459U CN 211273603 U CN211273603 U CN 211273603U
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pipe
tank body
water
tank
communicated
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CN201921677459.XU
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巫旭阳
朱博超
陈志建
章志成
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Zhejiang Morita New Materials Co ltd
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Zhejiang Morita New Materials Co ltd
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Abstract

The utility model discloses an electronic-grade hydrofluoric acid distillation heating system, which comprises a distillation tower, a hot water control tower and a cooler, wherein the distillation tower comprises a third tank body, a stainless steel tank body is arranged on the inner side of the third tank body, a first tank body is arranged on the inner side of the stainless steel tank body, a coil pipe is arranged in the first tank body, and an annular heating pipe is fixed at the bottom of an inner cavity of the first tank body; the system reduces the temperature difference between the heating medium and the medium by changing the design of the distillation liner and adopting a water bath mode, so that the heating temperature is easy to control, and the energy loss is reduced; the hot water control tower, the distillation tower and the cooler are connected by the steam inlet pipe, the first water inlet pipe and the return pipe to form cold and hot water circulation, so that energy loss is further reduced; the temperature sensor of the temperature detector and the annular heating pipe detect and adjust the water temperature, so that the constant temperature of a water bath cavity in the distillation tower is ensured, the distillation reaction is continued, and the distillation process can be sustainable.

Description

Electronic-grade hydrofluoric acid distillation heating system
Technical Field
The utility model relates to a firing equipment technical field specifically is electron level hydrofluoric acid distillation heating system.
Background
Electronic grade hydrofluoric acid (DHF) is one of the main chemical raw materials for producing integrated circuits, chips and photovoltaic cells, the application field of the DHF has very high requirements on the purity of products, and silicon and arsenic in common industrial grade hydrofluoric acid need to be removed by distillation after oxidation. At present, most domestic enterprises adopt a steam heating mode for distillation, the boiling point of hydrofluoric acid is low and is only 19.5 ℃ at normal pressure, the steam heating mode is adopted, the temperature difference between a heating medium and a medium is large, the control is not easy, the temperature of steam condensate water after heat switching is high, and energy waste is caused, so that an electronic-grade hydrofluoric acid distillation heating system is provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an electronic grade hydrofluoric acid distillation heating system reduces the temperature of heat transfer back steam condensate water through water bath mode heating and rivers circulating device, and it is extravagant to reduce the energy, has reduced the spending of company's daily production to solve the problem of proposing in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: an electronic-grade hydrofluoric acid distillation heating system comprises a distillation tower, a hot water control tower and a cooler, wherein the distillation tower comprises a third tank body, a stainless steel tank body is arranged on the inner side of the third tank body, a first tank body is arranged on the inner side of the stainless steel tank body, a coil pipe is arranged in the first tank body, an annular heating pipe is fixed at the bottom of an inner cavity of the first tank body, a first pipeline is arranged in the wall of the stainless steel tank body and communicated with the first tank body through a second pipeline, a circular groove is formed in the bottom of the first tank body, the hot water control tower comprises a fourth tank body, the bottom of the fourth tank body is communicated with a liquid inlet of a second conveying pump through a conveying pipe, a liquid outlet of the second conveying pump is communicated with one side of the annular heating pipe through a discharging pipe, a return pipe inserted into the fourth tank body is communicated with the other side of the annular heating pipe, the inboard of tube-shape dustcoat is fixed with the water tank, the bottom of water tank is linked together through the water inlet of third pipeline and first delivery pump, the delivery port of first delivery pump is linked together through the bottom of first inlet tube with the coil pipe, first delivery pump is fixed in the outside of tube-shape dustcoat, the top of coil pipe communicates in the top of water tank through first outlet pipe, the top and the upper portion one side of the fourth jar of body are equipped with gas vent and overflow mouth respectively, lower part one side of the fourth jar of body is equipped with the thermometer, the top of the fourth jar of body has inserted steam into the pipe, steam enters the mouth of pipe department of managing and is equipped with the solenoid valve, upper portion one side of the fourth jar of body is linked together with the discharge pipe through the circulating pipe, one side of circulating pipe is equipped with the manometer, upper portion one side intercommunication.
Preferably, a cylinder is fixed to the bottom of the cylindrical housing, a fan is fixed to the inside of the cylinder, a second water injection pipe is communicated with the top of the water tank, and fins inserted into the water tank are uniformly fixed to the inside of the cylindrical housing.
Preferably, a supporting seat is fixed at the bottom of the inner cavity of the first tank, the top of the supporting seat is fixed at the bottom of the second tank, and the annular heating pipe is fixed in the middle of the supporting seat.
Preferably, the bottom of the third tank body is fixed with a circulating pump, a liquid inlet of the circulating pump is communicated with a suction pipe inserted into the circular groove, and a liquid outlet of the circulating pump is communicated with the first pipeline.
Preferably, a temperature detector is fixed in the first tank.
Preferably, the bottom of the water tank is communicated with a fourth drain pipe, the bottom of the second tank body is communicated with a material pipe, one side of the upper portion of the first tank body is communicated with a first water injection pipe, and valves are arranged at pipe openings of the fourth drain pipe, the material pipe and the first water injection pipe.
Compared with the prior art, the beneficial effects of the utility model are that: the system reduces the temperature difference between the heating medium and the medium by changing the design of the distillation liner and adopting a water bath mode, so that the heating temperature is easy to control, and the energy loss is reduced; the hot water control tower, the distillation tower and the cooler are connected by the steam inlet pipe, the first water inlet pipe and the return pipe to form cold and hot water circulation, so that energy loss is further reduced; the temperature sensor of the temperature detector and the annular heating pipe detect and adjust the water temperature, so that the constant temperature of a water bath cavity in the distillation tower is ensured, the distillation reaction is continued, and the distillation process can be sustainable.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a distillation column according to the present invention;
FIG. 3 is a schematic view of the hot water control tower of the present invention;
fig. 4 is a schematic structural diagram of the cooler of the present invention.
In the figure: 1-a distillation column; 2-hot water control tower; 3-a cooler; 4-a stainless steel tank body; 5-a first tank; 6-a second tank body; 7-a support seat; 8-an annular heating pipe; 9-a discharge pipe; 10-circular groove; 11-a circulation pump; 12-a straw; 13-a coil pipe; 14-a first water inlet pipe; 15-a first water outlet pipe; 16-an overflow pipe; 17-temperature detector; 18-a first conduit; 19-a second conduit; 20-a material pipe; 21-a return pipe; 22-a first water injection pipe; 23-an exhaust port; 24-a thermometer; 25-a fin; 26-a water tank; 27-a second water injection pipe; 28-a fourth drain pipe; 29-cylinder; 30-a fan; 31-a first delivery pump; 32-a third conduit; 34-a third tank; 35-a fourth tank; 36-a cylindrical housing; 37-a steam inlet pipe; 38-a solenoid valve; 39-circulation pipe; 40-pressure gauge; 41-a second delivery pump; 42-a delivery pipe; 43-overflow.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
Referring to fig. 1-4, the present invention provides a technical solution: an electronic-grade hydrofluoric acid distillation heating system comprises a distillation tower 1, a hot water control tower 2 and a cooler 3, wherein the distillation tower 1 comprises a third tank 34, a stainless steel tank 4 is arranged on the inner side of the third tank 34, a first tank 5 is arranged on the inner side of the stainless steel tank 4, a coil 13 is arranged in the first tank 5, an annular heating pipe 8 is fixed at the bottom of an inner cavity of the first tank 5, a first pipeline 18 is arranged in the wall of the stainless steel tank 4, the first pipeline 18 is communicated with the first tank 5 through a second pipeline 19, a circular groove 10 is formed in the bottom of the first tank 5, the hot water control tower 2 comprises a fourth tank 35, the bottom of the fourth tank 35 is communicated with a liquid inlet of a second conveying pump 41 through a conveying pipe 42, a liquid outlet of the second conveying pump 41 is communicated with one side of the annular heating pipe 8 through a discharging pipe 9, the other side of the annular heating pipe 8 is communicated with a return pipe 21 inserted into the fourth tank 35, the cooler 3 comprises a cylindrical outer cover 36, a water tank 26 is fixed on the inner side of the cylindrical outer cover 36, the bottom of the water tank 26 is communicated with a water inlet of a first conveying pump 31 through a third pipeline 32, a water outlet of the first conveying pump 31 is communicated with the bottom end of a coil pipe 13 through a first water inlet pipe 14, the first conveying pump 31 is fixed on the outer side of the cylindrical outer cover 36, the top end of the coil pipe 13 is communicated with the top of the water tank 26 through a first water outlet pipe 15, an exhaust port 23 and an overflow port 43 are respectively arranged on one side of the top and the upper part of a fourth tank body 35, a thermometer 24 is arranged on one side of the lower part of the fourth tank body, a steam inlet pipe 37 is inserted into the top of the fourth tank body 35, an electromagnetic valve 38 is arranged at the pipe orifice of the steam inlet pipe 37, one side of the upper part of the fourth tank body 35 is communicated with a discharge pipe 9, an overflow pipe 16 is communicated with one side of the upper part of the first tank body 5.
A cylinder 29 is fixed at the bottom of the cylindrical outer cover 36, a fan 30 is fixed at the inner side of the cylinder 29, a second water injection pipe 27 is communicated with the top of the water tank 26, and fins 25 inserted into the water tank 26 are uniformly fixed at the inner side of the cylindrical outer cover 36; the heat dissipation speed to water can be improved.
A supporting seat 7 is fixed at the bottom of the inner cavity of the first tank body 5, the top of the supporting seat 7 is fixed at the bottom of the second tank body 6, and the annular heating pipe 8 is fixed in the middle of the supporting seat 7; the support base 7 is used for supporting the first tank 5.
A circulating pump 11 is fixed at the bottom of the third tank 34, a liquid inlet of the circulating pump 11 is communicated with a suction pipe 12 inserted into the circular groove 10, and a liquid outlet of the circulating pump 11 is communicated with the first pipeline 18; the suction pipe 12 is used for pumping liquid, and the pumped liquid is conveyed into the first pipeline 18 through the circulating pump 11 and flows back to the first tank 5 again to form circulating stirring of the liquid.
A temperature detector 17 is fixed in the first tank 5; the temperature detector 17 detects the temperature of the water.
The bottom of the water tank 26 is communicated with a fourth water drainage pipe 28, the bottom of the second tank body 6 is communicated with a material pipe 20, one side of the upper part of the first tank body 5 is communicated with a first water injection pipe 22, and the pipe orifices of the fourth water drainage pipe 28, the material pipe 20 and the first water injection pipe 22 are all provided with valves; the valve is convenient for controlling the opening and closing of each pipeline.
Working principle or structural principle, when in use, water is injected into a water bath cavity formed by an interlayer between a first tank body 5 and a second tank body 6 through a first water injection pipe 22, the water bath cavity overflows from an overflow pipe 16 after being full of water, quantitative water can be injected into a fourth tank body 35 through an overflow port 43, the water in the fourth tank body 35 is heated through a steam inlet pipe 37, the temperature of the water is detected through a thermometer 24, when the temperature is overhigh, an electromagnetic valve 38 is closed to stop steam injection, hot water is conveyed into a discharge pipe 9 through a conveying pipe 42 by a second conveying pump 41 and enters an annular heating pipe 8, then the water flows back to a hot water control tower 2 from a return pipe 21 to form circulating water, a valve is arranged on a circulating pipe 39, the pressure value of the hot water input into the annular heating pipe 8 can be reduced after the valve is opened, the water in the water bath cavity is heated through the annular heating pipe 8, the water in the first tank body 5 is detected through, when the temperature in the water bath cavity reaches the preset temperature, the first delivery pump 31 starts to discharge cold water into the coil pipe 13 for cooling; the number of the material pipes 20 is 2, wherein one material pipe 20 is used for injecting materials into the second tank body 6, and the other material pipe 20 is used for discharging materials, and the materials are injected into the second tank body 6 through the material pipes 20; when the annular heating pipe 8 heats the water bath cavity, the circulating pump 11 is started to suck liquid through the suction pipe 12 and convey the liquid into the first pipeline 18, and the liquid flows back to the first tank body 5 through the second pipeline 19 to form circulating flow, so that a stirring effect is achieved, and the heat of the annular heating pipe 8 can quickly heat water; when the temperature detector 17 detects that the temperature of water in the water bath cavity is higher than a set value, the water is injected into the water tank 26 through the second water injection pipe 27, the first conveying pump 31 is started to pump the water in the water tank 26 out and discharge the water into the coil pipe 13, the water in the coil pipe 13 is discharged into the water tank 26 from the first water outlet pipe 15 after absorbing heat in the water bath cavity to form circulating water, the coil pipe 13 cools the water in the water bath cavity in the process, the water bath cavity is guaranteed to be constant in temperature, the second tank body 6 is heated through the water heat in the water bath cavity, and the heating temperature can be controlled; blow out after starting fan 30 and dispel the heat to water tank 26 and fin 25 for the hydroenergy in the water tank 26 fast cooling provides the cold water of preferred, can cool down to water bath intracavity water fast. The distillation tower 1, the hot water control tower 2, the cooler 3, the stainless steel tank body 4, the first tank body 5, the second tank body 6, the supporting seat 7, the annular heating pipe 8, the discharge pipe 9, the coil pipe 13, the first water inlet pipe 14, the first water outlet pipe 15, the overflow pipe 16, the first pipeline 18, the second pipeline 19, the material pipe 20, the return pipe 21, the first water injection pipe 22, the fin 25, the water tank 26, the second water injection pipe 27, the fourth water discharge pipe 28, the cylinder 29, the third pipeline 32, the third tank body 34, the fourth tank body 35, the cylindrical outer cover 36, the steam inlet pipe 37, the circulating pipe 39, the conveying pipe 42 and the overflow port 43 are all made of stainless steel materials.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. Electronic grade hydrofluoric acid distillation heating system, including distillation column, hot water control tower and cooler, its characterized in that: the distillation tower comprises a third tank body, a stainless steel tank body is arranged on the inner side of the third tank body, a first tank body is arranged on the inner side of the stainless steel tank body, a coil pipe is arranged in the first tank body, an annular heating pipe is fixed at the bottom of an inner cavity of the first tank body, a first pipeline is arranged in the wall of the stainless steel tank body and communicated with the first tank body through a second pipeline, a circular groove is formed in the bottom of the first tank body, the hot water control tower comprises a fourth tank body, the bottom of the fourth tank body is communicated with a liquid inlet of a second conveying pump through a conveying pipe, a liquid outlet of the second conveying pump is communicated with one side of the annular heating pipe through a discharging pipe, a return pipe inserted into the fourth tank body is communicated with the other side of the annular heating pipe, the cooler comprises a cylindrical outer cover, a water tank is fixed on the inner side of the cylindrical outer cover, and the bottom of the water tank is communicated, the delivery port of first delivery pump is linked together through the bottom of first inlet tube with the coil pipe, first delivery pump is fixed in the outside of tube-shape dustcoat, the top of coil pipe communicates in the top of water tank through first outlet pipe, the top of the fourth jar of body and upper portion one side are equipped with gas vent and overflow mouth respectively, lower part one side of the fourth jar of body is equipped with the thermometer, the top of the fourth jar of body has inserted steam and has advanced the pipe, steam advances the mouth of pipe department of pipe and is equipped with the solenoid valve, upper portion one side of the fourth jar of body is linked together through circulating pipe and discharge pipe, one side of circulating pipe is equipped with the manometer, upper portion one side intercommunication of the first jar of body has the overflow pipe.
2. The electronic grade hydrofluoric acid distillation heating system of claim 1, wherein: the bottom of tube-shape dustcoat is fixed with the barrel, the barrel inboard is fixed with the fan, the top intercommunication of water tank has the second water injection pipe, the inboard of tube-shape dustcoat evenly is fixed with the fin that inserts in the water tank.
3. The electronic grade hydrofluoric acid distillation heating system of claim 1, wherein: the bottom of the inner cavity of the first tank body is fixedly provided with a supporting seat, the top of the supporting seat is fixedly arranged at the bottom of the second tank body, and the annular heating pipe is fixedly arranged in the middle of the supporting seat.
4. The electronic grade hydrofluoric acid distillation heating system of claim 1, wherein: the bottom of the third tank body is fixed with a circulating pump, a liquid inlet of the circulating pump is communicated with a suction pipe inserted into the circular groove, and a liquid outlet of the circulating pump is communicated with the first pipeline.
5. The electronic grade hydrofluoric acid distillation heating system of claim 1, wherein: a temperature detector is fixed in the first tank body.
6. An electronic grade hydrofluoric acid distillation heating system according to claim 3, wherein: the bottom intercommunication of water tank has the fourth drain pipe, the bottom intercommunication of the second jar of body has the material pipe, upper portion one side intercommunication of the first jar of body has first water injection pipe, the mouth of pipe department of fourth drain pipe, material pipe and first water injection pipe all is equipped with the valve.
CN201921677459.XU 2019-10-09 2019-10-09 Electronic-grade hydrofluoric acid distillation heating system Active CN211273603U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921677459.XU CN211273603U (en) 2019-10-09 2019-10-09 Electronic-grade hydrofluoric acid distillation heating system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921677459.XU CN211273603U (en) 2019-10-09 2019-10-09 Electronic-grade hydrofluoric acid distillation heating system

Publications (1)

Publication Number Publication Date
CN211273603U true CN211273603U (en) 2020-08-18

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CN201921677459.XU Active CN211273603U (en) 2019-10-09 2019-10-09 Electronic-grade hydrofluoric acid distillation heating system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024021244A1 (en) * 2022-07-29 2024-02-01 福建省龙氟新材料有限公司 Reboiler for producing electronic-grade hydrogen fluoride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024021244A1 (en) * 2022-07-29 2024-02-01 福建省龙氟新材料有限公司 Reboiler for producing electronic-grade hydrogen fluoride

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