CN211262098U - Coplane measuring tool - Google Patents

Coplane measuring tool Download PDF

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Publication number
CN211262098U
CN211262098U CN201922067861.2U CN201922067861U CN211262098U CN 211262098 U CN211262098 U CN 211262098U CN 201922067861 U CN201922067861 U CN 201922067861U CN 211262098 U CN211262098 U CN 211262098U
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China
Prior art keywords
standard
coplanar
coplane
guide
measuring tool
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CN201922067861.2U
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Chinese (zh)
Inventor
黄健
秦永刚
严霁云
雷鑫
陈群
杨博
李进
钟慧芳
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Huaping Longi Silicon Materials Co Ltd
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Huaping Longi Silicon Materials Co Ltd
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Abstract

The utility model provides a pair of coplane measuring tool is applied to squaring machine guide pulley, include: the clamping groove is matched with the outer edge of the guide wheel; the side, which is far away from the clamping groove, of the coplanar measuring tool is provided with a first side surface; the first side surface is provided with a standard line and a plurality of measuring scale marks, and a preset distance is arranged between every two adjacent measuring scale marks; the plurality of measuring scale marks are parallel to the standard lines respectively; the direction of the standard wire is consistent with the standard wire outlet direction of the diamond wire. The utility model discloses a around establishing the buddha's warrior attendant line between the guide pulley, with the position relation who sets up standard line on first side and measurement scale mark to whether be in the coplane state between quick, accurate definite guide pulley, and the skew degree between the guide pulley, and then adjust the guide pulley position, be in the coplane state between the guide pulley until, thereby it is long consuming time to reduce the coplane adjustment process of squarer guide pulley, and improve testing process's accuracy.

Description

Coplane measuring tool
Technical Field
The utility model relates to a monocrystalline silicon manufacture equipment technical field especially relates to a coplane measuring tool.
Background
With continuous consumption of traditional energy and increasingly serious negative effects on the environment, the monocrystalline silicon wafer has wide market demands as a basic material for photovoltaic power generation, generally, the monocrystalline silicon wafer is obtained by squaring a pulled or cast silicon rod through a squaring machine, so that the silicon rod has a rectangular structure, and then slicing the silicon rod by using a slicing machine to obtain the monocrystalline silicon wafer.
When the cutting machine is used for cutting the silicon single crystal rod, the guide wheels of the cutting machine can deviate, coplanar deviation is generated between the two guide wheels which are matched with each other, so that the rubber ring grooves of the guide wheels are abraded and deviated, further, the diamond wires in the rubber ring grooves of the guide wheels are broken due to uneven stress, and the guide wheels need to be adjusted at the moment so as to ensure that the two guide wheels are in a coplanar state. At present, a method for detecting whether two guide wheels are in a coplanar state includes: the method comprises the steps of adopting a straight board ruler to carry out coplane detection, enabling the edge of the straight board ruler to be close to the side edges of two guide wheels, if the straight board ruler and the side edges of the guide wheels cannot be tightly attached, indicating that the guide wheels deviate, and the two guide wheels are not coplanar, so that the positions of the guide wheels need to be adjusted, and carrying out coplane detection on the adjusted guide wheels again to verify whether the two guide wheels are in a coplanar state after being adjusted.
However, in the current scheme, because the straight plate ruler is used for coplanar detection of the two guide wheels, an operator can only judge whether the two guide wheels are in a coplanar state and the deviation degree of the guide wheels by naked eyes, so that the accuracy of the coplanar adjustment process of the guide wheels of the squarer is low, and the time consumption of the detection process is long.
SUMMERY OF THE UTILITY MODEL
The utility model provides a coplane measuring tool to solve among the prior art because adopt the straight board chi to carry out coplane detection to two guide pulleys, the operator can only judge whether two guide pulleys are in coplane state through the naked eye, and the skew degree of guide pulley, thereby make the coplane adjustment process precision of squaring machine guide pulley lower, longer problem consuming time of testing process.
In order to solve the technical problem, the utility model provides a coplane measuring tool is applied to the squaring machine guide pulley, the squaring machine guide pulley includes two at least guide pulleys, around locating the diamond wire between two at least guide pulleys, coplane measuring tool includes:
the clamping groove is matched with the outer edge of the guide wheel;
the coplanar measuring tool is provided with a first side surface on one side, which is far away from the clamping groove;
the first side surface is provided with a standard line and a plurality of measuring scale marks, and a preset distance is arranged between every two adjacent measuring scale marks;
the plurality of measuring scale marks are parallel to the standard lines respectively;
and the direction of the standard wire is consistent with the standard wire outlet direction of the diamond wire.
Optionally, the number of the measurement scale marks is an odd number, the standard mark coincides with a middle scale mark, and the middle scale mark is a scale mark located in the middle of the measurement scale marks. Optionally, one side of the coplanar measuring tool, which deviates from the clamping groove, is provided with a second side surface, and a first preset included angle is formed between the first side surface and the second side surface.
Optionally, the first preset included angle is 90 degrees.
Optionally, the length of the standard line is the same as the length of the first side.
Optionally, a standard wire slot is provided at the position of the standard wire.
Optionally, the standard wire groove is matched with the diamond wire.
Optionally, a difference between the width of the clamping groove and the width of the guide wheel is less than or equal to 0.2 mm.
Optionally, an odd number of angle scale marks are arranged on the first side face, a second preset angle is arranged between every two adjacent angle scale marks, the angle scale marks located in the middle of the angle scale marks coincide with the standard line, and the angle scale marks are radially distributed around an end point, close to the guide wheel, on the standard line.
Optionally, a color coating is disposed on the inner surface of the standard wire slot.
The utility model provides a pair of coplane measuring tool is applied to the squaring machine guide pulley, the squaring machine guide pulley includes two at least guide pulleys, around locating the diamond wire between two at least guide pulleys, coplane measuring tool includes: the clamping groove is matched with the outer edge of the guide wheel; the side, which is far away from the clamping groove, of the coplanar measuring tool is provided with a first side surface; the first side surface is provided with a standard line and a plurality of measuring scale marks, and a preset distance is arranged between every two adjacent measuring scale marks; the plurality of measuring scale marks are parallel to the standard lines respectively; the direction of the standard wire is consistent with the standard wire outlet direction of the diamond wire. The utility model discloses a coplane measuring tool with joint groove and first side, coplane measuring tool passes through joint groove and squaring machine guide pulley interconnect, and through around establishing the buddha's warrior attendant line between the guide pulley, with the position relation of standard line and measurement scale mark that sets up on first side, thereby it is quick, whether be in the coplane state between the accurate definite guide pulley, and the skew degree between the guide pulley, and then adjust the guide pulley position, be in the coplane state between until the guide pulley, thereby it is long consuming time to reduce squaring machine guide pulley coplane adjustment process, and improve the accuracy of testing process.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is a schematic diagram of a coplanar measurement tool according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a coplanar measurement tool according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another view angle of a coplanar measurement tool according to an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating another view of a coplanar measurement tool according to an embodiment of the present invention;
fig. 5 is a schematic view of a first side of a coplanar measurement tool provided by an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another view angle of a coplanar measurement tool according to an embodiment of the present invention;
fig. 7 is a schematic side view of a coplanar measurement tool according to an embodiment of the present invention;
fig. 8 is a schematic view of a second side of a coplanar measurement tool provided by an embodiment of the present invention;
fig. 9 is a schematic view of another first side of a coplanarity measuring tool according to an embodiment of the present invention.
Description of reference numerals:
10-guide wheel, 20-diamond wire, 30-coplanar measuring tool, 301-clamping groove, 302-first side surface, 303-second side surface, 304-standard line, 305-measuring scale mark, 306-standard line groove and 307-angle scale mark.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The present invention provides a coplanar measurement tool, which is described in detail below by exemplifying several specific embodiments.
Referring to fig. 1, which shows a schematic usage of a coplanar measuring tool provided by an embodiment of the present invention, the coplanar measuring tool 30 is applied to a squarer guide wheel, which includes at least two guide wheels 10, and a diamond wire 20 wound around the outer edges of the at least two guide wheels 10.
Specifically, referring to fig. 2, a schematic structural diagram of a coplane measuring tool provided by the embodiment of the present invention is shown, and referring to fig. 3, a schematic structural diagram of another view angle of a coplane measuring tool provided by the embodiment of the present invention is shown, and the coplane measuring tool 30 includes a clamping groove 301 for clamping with the guide wheel 10. The clamping groove 301 is matched with the outer edge of the guide wheel 10, so that the coplanar measuring tool 30 and the guide wheel 10 can be clamped according to the position relation shown in fig. 1 through the clamping groove 301, connection between the coplanar measuring tool 30 and the guide wheel 10 is achieved, and the coplanar measuring tool 30 can be conveniently, quickly and accurately installed on the guide wheel 10 or detached from the guide wheel 10.
The embodiment of the utility model provides an in, the squarer guide pulley can include a plurality of guide pulleys, and the diamond wire is drawn forth the back from the line wheel, lays between a plurality of guide pulleys to the cutting of silicon rod can be accomplished to the squarer. Therefore, the coplane measuring tool with the clamping groove structure matched with the outer edges of the guide wheels can sequentially measure the coplane states of the two adjacent guide wheels, and after the group of guide wheels are in the coplane state by adjusting the positions of the two adjacent guide wheels, the coplane measuring tool is detached from the guide wheels and is installed on other guide wheels, so that the coplane states of the other guide wheels can be continuously measured, the coplane state measurement adjustment of all the guide wheels in the squarer is finally completed, and the machining precision of a machine table of the squarer is ensured.
Further, referring to fig. 1, on the coplanar measuring tool 30, on a side facing away from the snap groove 301, there is a first side 302. Referring to fig. 4, which illustrates a schematic view of another view angle of the coplanar measurement tool provided in an embodiment of the present invention, as shown in fig. 4, a standard line 304 and a plurality of measurement scale lines 305 are disposed on the first side surface 302, wherein the direction of the standard line 304 is consistent with the standard outgoing direction of the diamond wire 20, the plurality of measurement scale lines 305 are respectively parallel to the standard line 304, and a preset distance is spaced between adjacent measurement scale lines 305.
In an embodiment of the present invention, the preset distance may be a fixed distance value, for example, 0.5 mm.
Specifically, referring to fig. 4, the coplanar measuring tool 30 is mounted on any one guide wheel 10 of two adjacent guide wheels 10, and the diamond wire 20 led out from the guide wheel 10 is disposed in the first side face 302 of the coplanar measuring tool 30. If the diamond wire 20 is overlapped with the standard wire 304 on the coplanar measuring tool 30, it indicates that the two guide wheels 10 are in a coplanar state, the diamond wire 20 connecting the two guide wheels 10 is uniformly stressed, and the operation of cutting the single crystal silicon rod can be normally performed; if the diamond wire 20 is not coincident with the standard line 304 on the coplanar measurement tool 30, i.e. the diamond wire 20 is coincident with or intersects the measurement scale line 305, it indicates that the two guide wheels 10 are in a non-coplanar state, i.e. an offset occurs between the two guide wheels 10. At this time, the guide wheel rubber ring groove may be abraded, and the diamond wire in the guide wheel rubber ring groove is broken due to uneven stress, so that the squaring machine needs to be stopped to handle abnormity.
Further, if the two guide wheels 10 are in a non-coplanar state, the positions of the two guide wheels 10 are adjusted until the diamond wire 20 is overlapped with the standard line 304 on the coplanar measuring tool 30, that is, the two guide wheels 10 are adjusted to be in a coplanar state.
To sum up, the embodiment of the utility model provides a coplane measuring tool is applied to the squaring machine guide pulley, the squaring machine guide pulley includes two at least guide pulleys, around locating the diamond wire between two at least guide pulleys, coplane measuring tool includes: the clamping groove is matched with the outer edge of the guide wheel; the side, which is far away from the clamping groove, of the coplanar measuring tool is provided with a first side surface; the first side surface is provided with a standard line and a plurality of measuring scale marks, and a preset distance is arranged between every two adjacent measuring scale marks; the plurality of measuring scale marks are parallel to the standard lines respectively; the direction of the standard wire is consistent with the standard wire outlet direction of the diamond wire. The utility model discloses a coplane measuring tool with joint groove and first side, coplane measuring tool passes through joint groove and squaring machine guide pulley interconnect, and through around establishing the buddha's warrior attendant line between the guide pulley, with the position relation of standard line and measurement scale mark that sets up on first side, thereby it is quick, whether be in the coplane state between the accurate definite guide pulley, and the skew degree between the guide pulley, and then adjust the guide pulley position, be in the coplane state between until the guide pulley, thereby it is long consuming time to reduce squaring machine guide pulley coplane adjustment process, and improve the accuracy of testing process.
Alternatively, referring to fig. 5, the number of the measurement scale marks 305 may be an odd number, and the standard line 304 coincides with a middle scale mark, where the middle scale mark is a scale mark located in the middle of the measurement scale marks 305, that is, the measurement scale marks 305 except for the middle scale mark are symmetrically distributed on both sides of the standard line 304 with reference to the standard line 304.
The embodiment of the utility model provides an in, when measuring the coplane state between the adjacent guide pulley, if be in non-coplane state between the adjacent guide pulley, further, can confirm the deviation degree between the adjacent guide pulley.
Specifically, the deviation degree between the diamond wire and the plurality of measurement scale lines and the standard line is the deviation degree between the adjacent guide wheels, and the deviation degree comprises a deviation distance and a deviation direction, wherein the deviation distance is the distance between the diamond wire and the standard line, and the deviation direction is the side of the diamond wire on two sides of the standard line.
Therefore, under the condition that the deviation distance and the deviation direction between the guide wheels are determined, the adjustment direction and the adjustment size of the guide wheels can be determined in the process of adjusting the guide wheels, and the time consumption and the time duration of the coplanarity adjustment process of the guide wheels of the squarer are further reduced.
Optionally, referring to fig. 6, a schematic structural diagram of another view angle of the coplanar measuring tool according to an embodiment of the present invention is shown, where the coplanar measuring tool 30 deviates from the clamping groove and has a second side surface 303, and a first preset included angle a is formed between the first side surface 302 and the second side surface 303.
Optionally, referring to fig. 7, a schematic side view of a coplanar measuring tool according to an embodiment of the present invention is shown, as shown in fig. 7, the first preset included angle a may be 90 degrees, that is, the first side 302 and the second side 303 are perpendicular to each other, so that after the coplanar measuring tool 30 is installed on the guide wheel, the diamond wire may be more stably disposed in the first side 302 of the coplanar measuring tool, so that the process of measuring the coplanar state of the guide wheel is more accurate.
The embodiment of the present invention provides a first preset included angle a can be other angles, but need to guarantee that under the stable installation of coplane measuring tool on the guide pulley, the diamond wire is located coplane measuring tool's first side.
Optionally, the length of the standard line is the same as the length of the first side surface, that is, the standard line is arranged to penetrate along the length direction of the first side surface, and under the same other conditions, the longer the standard line is, the higher the detection precision is, and therefore, the standard line having the same length as the first side surface is arranged, so that the measurement accuracy can be further improved.
Optionally, referring to fig. 8, showing a schematic diagram of a second side of the coplane measuring tool provided by the embodiment of the present invention, a standard wire slot 306 is provided at the position of the standard wire, so that when the position relationship between the diamond wire and the standard wire slot 306 is used to determine whether the guide wheel is coplanar, whether the diamond wire is located in the standard wire slot 306 or not can be determined by observing whether the diamond wire is coincident with the standard wire.
Specifically, if the diamond wire is accurately and completely positioned in the standard wire groove 306, it is indicated that the diamond wire is overlapped with the standard wire groove 306 at the moment, the two guide wheels are in a coplanar state, the diamond wire connecting the two guide wheels is uniformly stressed, and the operation of cutting the single crystal silicon rod can be normally performed; if the diamond wire is not accurately and completely positioned in the standard wire slot 306, it indicates that the diamond wire is not coincident with the standard wire slot 306 at this time, and the two guide wheels are in a non-coplanar state, that is, the two guide wheels are offset.
Further, if the two guide wheels are in a non-coplanar state, the positions of the two guide wheels are adjusted until the diamond wire is located in the standard wire slot 306 on the coplanar measurement tool, that is, the two guide wheels are adjusted to be in a coplanar state.
Optionally, the standard wire groove is matched with the diamond wire, so that the diamond wire can be positioned in the standard wire groove when the two guide wheels are in a coplanar state.
Furthermore, the width of the standard wire slot can be slightly larger than or equal to the diameter of the diamond wire, and the standard wire outgoing direction of the diamond wire is completely consistent with the radial direction of the standard wire slot, so that the process of measuring the coplanar state of the guide wheel is more accurate.
Optionally, the difference between the width of the clamping groove and the width of the guide wheel is smaller than or equal to 0.2 mm, so that the coplane measuring tool can be conveniently and quickly installed on the guide wheel through the clamping groove, and the process of measuring the coplane state of the guide wheel can be more accurate.
Optionally, referring to fig. 9, which shows a schematic view of another first side of the coplanar measurement tool provided in the embodiment of the present invention, as shown in fig. 9, the measurement scale marks may be odd angle scale marks 307 disposed on the first side 302, and a second preset angle is spaced between adjacent angle scale marks 307. The direction of the standard line 304 is consistent with the standard outgoing direction of the diamond wire 20, the scale line positioned in the middle of the angle scale lines 307 is overlapped with the standard line 304, that is, the angle scale lines 307 except the angle scale line in the middle are symmetrically distributed on two sides of the standard line 304 by taking the standard line 304 as a reference, and the angle scale lines 307 are radially distributed by taking an end point on the standard line 304 close to the guide wheel as a center.
In an embodiment of the present invention, the second preset angle may be a fixed angle value, for example, 5 degrees.
The embodiment of the utility model provides an in, when measuring the coplane state between the adjacent guide pulley, if be in non-coplane state between the adjacent guide pulley, further, can confirm the deviation angle between the adjacent guide pulley.
Specifically, the deviation angle between the diamond wire and the standard wire is the deviation angle between the adjacent guide wheels, and the deviation angle can be determined by judging the position relationship between the diamond wire and the angle scale mark. In the case that the deviation angle between the guide wheels is determined, the adjustment size of the guide wheels can be determined in the process of adjusting the guide wheels, so that the time and the time for the coplanarity adjustment process of the guide wheels of the squarer are reduced.
Optionally, the color coating can be arranged on the inner surface of the standard wire slot, so that an operator can judge whether the diamond wire is overlapped with the standard wire by observing whether the diamond wire is positioned in the standard wire slot, and the process of judging whether the adjacent guide wheel is in a coplanar state is more accurate and quicker.
To sum up, the embodiment of the utility model provides a coplane measuring tool is applied to the squaring machine guide pulley, the squaring machine guide pulley includes two at least guide pulleys, around locating the diamond wire between two at least guide pulleys, coplane measuring tool includes: the clamping groove is matched with the outer edge of the guide wheel; the side, which is far away from the clamping groove, of the coplanar measuring tool is provided with a first side surface; the first side surface is provided with a standard line and a plurality of measuring scale marks, and a preset distance is arranged between every two adjacent measuring scale marks; the plurality of measuring scale marks are parallel to the standard lines respectively; the direction of the standard wire is consistent with the standard wire outlet direction of the diamond wire. The utility model discloses a coplane measuring tool with joint groove and first side, coplane measuring tool passes through joint groove and squaring machine guide pulley interconnect, and through around establishing the buddha's warrior attendant line between the guide pulley, with the position relation of standard line and measurement scale mark that sets up on first side, thereby it is quick, whether be in the coplane state between the accurate definite guide pulley, and the skew degree between the guide pulley, and then adjust the guide pulley position, be in the coplane state between until the guide pulley, thereby it is long consuming time to reduce squaring machine guide pulley coplane adjustment process, and improve the accuracy of testing process.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A coplanarity measuring tool for a squarer guide wheel, said squarer guide wheel comprising at least two guide wheels, a diamond wire wound between said at least two guide wheels, characterized in that it comprises:
the clamping groove is matched with the outer edge of the guide wheel;
the coplanar measuring tool is provided with a first side surface on one side, which is far away from the clamping groove;
the first side surface is provided with a standard line and a plurality of measuring scale marks, and a preset distance is arranged between every two adjacent measuring scale marks;
the plurality of measuring scale marks are parallel to the standard lines respectively;
and the direction of the standard wire is consistent with the standard wire outlet direction of the diamond wire.
2. Coplanar measurement tool as claimed in claim 1 wherein the number of measurement graduations is odd, the standard line coincides with a middle graduation, the middle graduation being a graduation located in the middle of the plurality of measurement graduations.
3. Coplanar measuring tool as set forth in claim 1 wherein the coplanar measuring tool has a second side surface on a side thereof facing away from the snap-in groove, the first side surface and the second side surface forming a first predetermined included angle therebetween.
4. A coplanar measurement tool as set forth in claim 3 wherein said first predetermined included angle is 90 degrees.
5. Coplanar measurement tool as set forth in claim 1 wherein the length of the gauge line is the same as the length of the first side.
6. Coplanar measurement tool as claimed in claim 1, characterized in that a standard wire slot is provided at the location of the standard wire.
7. Coplanar measurement tool as claimed in claim 6 wherein the standard wire grooves are matched to the diamond wires.
8. Coplanar measuring tool as set forth in claim 1 wherein the difference between the width of the snap groove and the width of the guide wheel is less than or equal to 0.2 mm.
9. Coplanar measuring tool as set forth in claim 1 wherein an odd number of angular graduations are provided on the first side, adjacent angular graduations are spaced apart by a second predetermined angle, the angular graduations located in the middle of the angular graduations coincide with the standard graduations, and the angular graduations are radially disposed about the end point of the standard graduations adjacent the guide wheel.
10. Coplanar measurement tool as claimed in claim 6 wherein the inner surface of the standard wire slot is provided with a colour coating.
CN201922067861.2U 2019-11-26 2019-11-26 Coplane measuring tool Active CN211262098U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922067861.2U CN211262098U (en) 2019-11-26 2019-11-26 Coplane measuring tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922067861.2U CN211262098U (en) 2019-11-26 2019-11-26 Coplane measuring tool

Publications (1)

Publication Number Publication Date
CN211262098U true CN211262098U (en) 2020-08-14

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CN (1) CN211262098U (en)

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