CN211261791U - A hold fever board for sintering tubulose rotatory ceramic target - Google Patents
A hold fever board for sintering tubulose rotatory ceramic target Download PDFInfo
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- CN211261791U CN211261791U CN201922493276.9U CN201922493276U CN211261791U CN 211261791 U CN211261791 U CN 211261791U CN 201922493276 U CN201922493276 U CN 201922493276U CN 211261791 U CN211261791 U CN 211261791U
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Abstract
The utility model discloses a burning bearing plate for sintering tubular rotary ceramic target materials. The burning bearing plate comprises a fixed part and a sliding part, wherein the sliding part is positioned above the fixed part, the upper part of the fixed part is provided with an inclined surface, the bottom of the sliding part is provided with an inclined surface matched with the inclined surface of the fixed part, a sliding surface is formed between the fixed part and the sliding part, the inclined angle of the sliding surface relative to the horizontal plane is 10-50 degrees, and the roughness of the sliding surface is 0.5-16 mu m. The utility model discloses frictional force when can reducing the shrinkage of target densification, effectively avoid producing the deformation with the target end that holds the contact of fever board, perhaps more serious fracture, and the slip plane that holds the fever board is 10-50 for the angle of inclination of horizontal plane, reduction target unburned bricks that can be very big lead to and hold the frictional force of fever board because of the shrinkage when the sintering, be favorable to target densification and prevent that the target from producing defects such as deformation, fracture, very big improvement the yield of target.
Description
Technical Field
The utility model relates to a ceramic target sintering technical field, concretely relates to hold fever board for sintering tubulose rotatory ceramic target.
Background
Ceramic targets are a very important class of vacuum coating materials, such as ZnO, AZO, GZO, IZO, IGZO, ITO, TiO2、Nb2O5And the like. The ceramic target is a ceramic material formed by mixing, granulating, molding and sintering one or more oxide powders. Through development for many years, at present, although the production of ceramic target materials uses a traditional ceramic preparation process for reference, the problems of insufficient sintering density, cracking, holes and the like still exist, and the sintering process has a great promotion space.
In the traditional process, when the tubular rotary ceramic target material is sintered, the green body is mainly placed on a sintering bearing plate such as alumina, and then the green body and the sintering bearing plate are placed in a sintering furnace for sintering. However, as the length of the tubular rotary target material is gradually required to be lengthened to reduce the number of splicing gaps, the weight of the target material is remarkably increased, the frictional resistance during shrinkage is large, the target material end in contact with the burning bearing plate is deformed and cracked, and the yield and material taking are influenced.
CN201580073047.3 discloses a method for manufacturing a cylindrical target, wherein an outer peripheral surface of a ceramic compact is supported by a receiving surface of a holder along a longitudinal direction, and the compact is fired in a posture inclined with respect to a horizontal plane, and an inclination angle of the compact with respect to the horizontal plane is 30 ° to 85 ° to reduce deformation of the target. CN107459345A discloses a method for sintering a tubular rotary indium tin oxide target in a flat lying manner, the method is an oval tubular shape, two rows of stoppers are arranged on a burning bearing plate, the distance between the two rows of stoppers is 20-100 mm larger than the outer oval minor axis of a green body, the green body is laid flat between the two rows of stoppers, the oval major axis is vertical to the burning bearing plate, and then alumina sand is filled between the two sides of the green body and the stoppers. The method can ensure that the length of the rotary target is not limited by the height of the sintering furnace, and the oval biscuit structure ensures that the sintering deformation is small. CN206369474U discloses a rotary ceramic target sintering device for preventing sintering deformation, which comprises a cylindrical ceramic green body, a backing burning block backing under the ceramic green body, and a furnace bottom plate for sintering. The ceramic green body, the pad burning block and the furnace bottom plate are provided with 2 layers of ball layers, sliding friction is changed into rolling friction, friction force is greatly reduced, and the ceramic green body can freely shrink in the shrinkage process of sintering and heating.
The method proposed by CN201580073047.3 needs additional inclined supporting plates, and occupies a larger sintering furnace space; the method proposed by CN107459345A requires pressing the target green compact into an oval shape; in the method proposed in CN206369474U, when the target material has a high specific gravity and the sliding part shrinks, the balls will change irregularly and the sliding effect will be poor. Therefore, better solutions need to be proposed for long pitch rotating targets.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's weak point and provide a hold fever board for sintering tubulose rotatory ceramic target, should hold fever board can greatly reduce target unburned bricks when the sintering because of the shrink lead to with hold the frictional force that burns the board, be favorable to target densification, prevent that the target from producing defects such as deformation, fracture, very big improvement the yield of target.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a burning bearing plate for sintering a tubular rotary ceramic target comprises a fixed part and a sliding part, wherein the sliding part is positioned above the fixed part, the upper part of the fixed part is provided with an inclined surface, the bottom of the sliding part is provided with an inclined surface matched with the inclined surface of the fixed part, a sliding surface is formed between the fixed part and the sliding part, the inclined angle of the sliding surface relative to the horizontal plane is 10-50 degrees, and the roughness of the sliding surface is 0.5-16 mu m. The utility model discloses a two slip planes that hold fever board can reduce the target unburned bricks when the sintering because of the shrink lead to with hold the frictional force that burns the board, be favorable to target densification and prevent that the target from producing defects such as deformation, fracture.
Preferably, the slip plane is inclined at an angle of 15 ° to 34 ° with respect to the horizontal plane, and the fired tubular rotary ceramic target has a small difference in outer diameter.
Preferably, the roughness of the slip surface is 0.5-8.0 μm, and the difference of the outer diameter of the fired tubular rotary ceramic target is small.
Preferably, the fixed part is a circular ring with an inner conical inclined surface at the upper part, the sliding part is composed of a plurality of circular ring section sliding blocks which are uniformly distributed at intervals and arranged to form a ring, inclined surfaces are arranged at the bottoms of the circular ring section sliding blocks, and the inclined surfaces of the circular ring section sliding blocks are combined to form an outer conical inclined surface. Have the clearance between a plurality of ring section sliders, the target unburned bricks is because of the shrink when the sintering, and the clearance between the ring section slider reduces, and the slider slides down along the slip face, reduces the frictional force between unburned bricks and the slider.
Preferably, the lowest part of the inclined surface of the fixed part is provided with a limiting component for limiting the sliding of the sliding part. The restricting member may be a raised structure or a bump.
The utility model discloses a be equipped with spacing part in the lower on fixed part inclined plane, prevent that the part that slides when rotatory ceramic target unburned bricks shrink puts in place from continuing the landing.
Preferably, the material of the setter plate is alumina.
The utility model discloses arrange tubular rotary ceramic target unburned bricks in the part of sliding that has the slip face and fire.
The utility model discloses a place the rotatory ceramic target unburned bricks of tubulose in the slip part that has the slip face on sintering, can promote the abundant sintering of target, and the slip face is 10-50 for the angle of inclination of horizontal plane, reduction target unburned bricks that can be very big lead to and hold the frictional force of burning the board because of the shrink when the sintering, be favorable to target densification and prevent that the target from producing defects such as deformation, fracture, very big improvement the yield of target.
The utility model is suitable for ZnO target, AZO target, GZO target, IZO target, IGZO target, ITO target, TiO target2Target material or Nb2O5Sintering of ceramic targets such as targets. The length of the rotary ceramic target green body is 600-1500mm, the diameter of the outer circle is 120-220mm, and the wall thickness is 8-20 mm. The utility model relates to a hold fever board and sintering method is applicable to the firing of the rotatory target of tubulose of suitable long pitch.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses can promote the abundant sintering of target, and hold the slip plane of fever board for the angle of inclination of horizontal plane be 10-50, reduction target unburned bricks that can be very big lead to with holding the frictional force of fever board because of the shrink when the sintering, be favorable to target densification and prevent that the target from producing defects such as deformation, fracture, very big improvement the yield of target.
Drawings
FIG. 1 is a schematic view of the structure of an alumina setter plate selected for use in examples 1 to 9;
FIG. 2 is a top view of the glide portion of examples 1-9;
1-a fixed part, 2-a sliding part, 3-a circular ring section sliding block, 4-a limiting part and 5-a green body.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to specific embodiments. It will be understood by those skilled in the art that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the examples, the experimental methods used were all conventional methods unless otherwise specified, and the materials, reagents and the like used were commercially available without otherwise specified.
Example 1
A burning bearing plate for sintering tubular rotary ceramic target material, as shown in figure 1-2, comprises a fixed part 1 and a sliding part 2, the burning bearing plate comprises a fixed part 1 and a sliding part 2, the sliding part 2 is positioned above the fixed part 1, the fixed part 1 is a circular ring, the upper part of the fixed part is provided with an inner conical inclined plane, the sliding part 2 consists of 4 circular ring section sliding blocks 3 which are uniformly distributed at intervals and are arranged to form a ring, the bottoms of the circular ring section sliding blocks 3 are all provided with inclined planes, and the inclined planes of the 4 circular ring section sliding blocks 3 are combined to form an outer conical inclined plane matched with the inner conical inclined plane on the fixed part, so that a sliding surface is formed between the fixed part 1 and the sliding part 2, the inclination angle alpha of the slip plane relative to the horizontal plane is 10 degrees, the roughness of the slip plane is 1.0 mu m, the wall thickness of the fixed part 1 is larger than that of the slip part 2, the lowest part of the inclined plane of the fixed part 1 is provided with a limiting part 4 for limiting the sliding of the sliding part.
A sintering method of a tubular rotary ceramic target comprises the following steps:
1)ZnO/Al2O3AZO granulation powder with the component ratio of 98:2 wt% is subjected to 150MPa cold isostatic pressing to obtain the powder with the following size: a green body with an outer diameter of 200mm, a height of 1000mm and a wall thickness of 15 mm;
2) placing the AZO green body 5 on a slippage part 1 of an alumina burning plate for high-temperature burning;
3) and sintering the AZO green blank 5 at 1400 ℃ for 20h in an air atmosphere to obtain a dark green AZO tubular rotary target blank.
Example 2
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the angle of inclination α of the slip plane with respect to the horizontal plane was 15 °.
Example 3
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the angle of inclination α of the slip plane with respect to the horizontal plane was 34 °.
Example 4
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the inclination angle α of the slip plane with respect to the horizontal plane was 50 ° in this example.
Example 5
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the inclination angle α of the slip plane with respect to the horizontal plane was 34 ° and the roughness of the slip plane was 0.5 μm in this example.
Example 6
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the inclination angle α of the slip plane with respect to the horizontal plane was 34 ° and the roughness of the slip plane was 5.7 μm in this example.
Example 7
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the inclination angle α of the slip plane with respect to the horizontal plane was 34 ° and the roughness of the slip plane was 8.0 μm in this example.
Example 8
The setter plate and the sintering method of this example were substantially the same as those of example 1 except that the inclination angle α of the slip plane with respect to the horizontal plane was 34 ° and the roughness of the slip plane was 16.0 μm in this example.
Example 9
The alumina setter plate of the present embodiment is shown in fig. 1, and includes a fixed portion 1 and a sliding portion 2, the sliding portion 2 is located above the fixed portion 1, the fixed portion 1 is a circular ring whose upper portion is provided with an inner conical inclined surface, the sliding portion 2 is composed of 4 circular ring segment sliders 3 which are uniformly distributed at intervals and arranged to form a ring shape, the bottoms of the circular ring segment sliders 3 are all provided with inclined surfaces, and the inclined surfaces of the 4 circular ring segment sliders 3 are combined to form an outer conical inclined surface which is matched with the inner conical inclined surface on the fixed portion 1, so that a sliding surface is formed between the fixed portion 1 and the sliding portion 2, an inclination angle α of the sliding surface relative to a horizontal plane is 32 °, a roughness of the sliding surface is 2.0 μm, a wall thickness of the fixed portion 1 is greater than a wall thickness of the sliding portion 2, and a limiting member 4 for limiting sliding of the sliding portion is arranged.
A tubular rotary ceramic target comprises the following steps:
1)In2O3/SnO2ITO granulation powder with the component ratio of 95:5 wt% is subjected to cold isostatic pressing at 300MPa to obtain the ITO granulation powder with the following dimensions: a green body having an outer diameter of 220mm, a height of 1200mm and a wall thickness of 10 mm;
2) placing the ITO green body 5 on the slippage part 1 of the alumina setter plate for high-temperature firing;
3) and sintering the ITO green blank at 1550 ℃ for 30h in an air atmosphere to obtain a black ITO tubular rotary target blank.
Example 10
The setter plate and sintering method of this example were substantially the same as In example 8 except that In this example was used2O3/SnO2The component ratio is 90:10 wt%, and the sintering temperature is 1560 ℃.
Example 11
The setter plate and sintering method of this example were substantially the same as In example 1 except that In this example2O3/SnO2The composition ratio was 97:3 wt%, and the sintering temperature was 1540 ℃.
Example 12
The setter plate and sintering method of this example were substantially the same as In example 1 except that In this example2O3/SnO2The component ratio is 93:7 wt%, and the sintering temperature is 1560 ℃.
Comparative example 1
The setter plate and sintering method of this example were substantially the same as in example 1 except that the α -tilt angle of the slip plane in this example was 7 °.
Comparative example 2
The setter plate and sintering method of this example were substantially the same as in example 1 except that the α -tilt angle of the slip plane in this example was 70 °.
Comparative example 3
A method for sintering a tubular rotary ceramic target, which comprises the same steps as in example 1, except that in this comparative example, a conventional alumina setter plate was used, and alumina balls having a diameter of 5mm were used as a slip medium, and the alumina balls were placed between the alumina setter plate and a vertically placed target green compact.
Comparative example 4
A method for sintering a tubular rotary ceramic target, which comprises the same steps as in example 1, except that in this comparative example, a conventional alumina setter plate was used, and alumina balls having a diameter of 3mm were used as a slip medium, and the alumina balls were placed between the alumina setter plate and a vertically placed target green compact.
Comparative example 5
The sintering method of the tubular rotary ceramic target material is basically the same as that in the embodiment 1, except that an upper sintering bearing plate and a lower sintering bearing plate are adopted in the comparative example, the upper sintering bearing plate and the lower sintering bearing plate are both conventional alumina sintering bearing plates, an alumina ball with the diameter of 5mm is adopted between the upper sintering bearing plate and the lower sintering bearing plate as a sliding medium, and a target material green body is placed on the upper sintering bearing plate.
TABLE 1
From the results of examples 1 to 12 and comparative examples 1 to 5, it is known that when the inclination angle of the slip plane of the setter plate relative to the horizontal plane is designed to be 10 ° to 50 °, the friction between the green target material and the setter plate due to shrinkage during sintering can be greatly reduced, the densification of the target material and the generation of defects such as deformation and cracking of the target material can be facilitated, the yield of the target material can be improved, and particularly, when the inclination angle of the slip plane of the double setter plates relative to the horizontal plane is 15 ° to 34 °, the difference in the outer diameter of the fired tubular rotary ceramic target material is small. It is thus clear that, when sintering long-pitch tubular rotary ceramic target, adopt the utility model discloses a sintering method, under the unchangeable prerequisite of sintering procedure, sintering shrink resistance is little, has avoided the appearance of substandard product during the large-scale production, has improved the yield.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention.
Claims (6)
1. The sintering bearing plate for sintering the tubular rotary ceramic target is characterized by comprising a fixed part and a sliding part, wherein the sliding part is positioned above the fixed part, the upper part of the fixed part is provided with an inclined surface, the bottom of the sliding part is provided with an inclined surface matched with the inclined surface of the fixed part, a sliding surface is formed between the fixed part and the sliding part, the inclined angle of the sliding surface relative to the horizontal plane is 10-50 degrees, and the roughness of the sliding surface is 0.5-16 mu m.
2. The setter plate for sintering tubular rotary ceramic targets of claim 1, wherein the slip plane has an inclination angle of 15 ° to 34 °.
3. The setter plate for sintering tubular rotary ceramic targets of claim 1, wherein the slip surface has a roughness of 0.5 to 8.0 μm.
4. The sintering bearing plate for sintering the tubular rotary ceramic target material as claimed in claim 1, wherein the fixed part is a circular ring with an inner conical inclined surface on the upper part, the sliding part is composed of a plurality of circular ring segment sliding blocks which are evenly distributed at intervals and arranged to form a ring, the bottom of each circular ring segment sliding block is provided with an inclined surface, and the inclined surfaces of the circular ring segment sliding blocks are combined to form an outer conical inclined surface.
5. The setter plate for sintered tubular rotary ceramic targets of claim 1, wherein a lowest portion of the slope of the fixing portion is provided with a stopper member for restricting sliding of the sliding portion.
6. The setter plate for sintered tubular rotary ceramic targets of any of claims 1 to 5, wherein the setter plate is made of alumina.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922493276.9U CN211261791U (en) | 2019-12-30 | 2019-12-30 | A hold fever board for sintering tubulose rotatory ceramic target |
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| CN201922493276.9U CN211261791U (en) | 2019-12-30 | 2019-12-30 | A hold fever board for sintering tubulose rotatory ceramic target |
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| CN211261791U true CN211261791U (en) | 2020-08-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114702312A (en) * | 2022-04-18 | 2022-07-05 | 株洲火炬安泰新材料有限公司 | ITO target material sintering size control method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114702312A (en) * | 2022-04-18 | 2022-07-05 | 株洲火炬安泰新材料有限公司 | ITO target material sintering size control method |
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