CN211236535U - Multi-lens micro-camera - Google Patents
Multi-lens micro-camera Download PDFInfo
- Publication number
- CN211236535U CN211236535U CN201922447800.9U CN201922447800U CN211236535U CN 211236535 U CN211236535 U CN 211236535U CN 201922447800 U CN201922447800 U CN 201922447800U CN 211236535 U CN211236535 U CN 211236535U
- Authority
- CN
- China
- Prior art keywords
- lens
- light source
- rubber ring
- camera
- transition step
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007704 transition Effects 0.000 claims abstract description 13
- 238000000386 microscopy Methods 0.000 claims 4
- 238000001514 detection method Methods 0.000 abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229940095676 wafer product Drugs 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model discloses a many camera lenses micro-camera, including camera body, transition step, rubber ring one, rubber ring two, first lens, second lens, light source one and light source two, the transition step sets up on the camera body, rubber ring one, rubber ring two set up respectively on the transition step, first lens is connected with rubber ring one, and second lens is connected with rubber ring two, first light source, second light source are coaxial light source, first light source, second light source are connected with first lens, second lens from the side respectively. The utility model discloses a set of coaxial light source carries out the light filling to the wafer, and the light filling homogeneity is good, luminance is high, and the twin-lens scanning of rethread acquires wafer surface image in addition, and scanning efficiency is high, the image definition is good to can improve detection efficiency and detection precision.
Description
The technical field is as follows:
the utility model relates to a wafer product scanning technical field especially relates to a many camera lenses micro-camera.
Background art:
the wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions. Various properties of the surface of a wafer product need to be detected in the production process, an industrial camera is usually adopted for scanning to obtain an image of the surface of the wafer, and then the image is analyzed through software, so that the scanning efficiency of the existing industrial camera is low, and the image display definition is poor.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information constitutes prior art already known to a person skilled in the art.
The utility model has the following contents:
an object of the utility model is to provide a many camera lenses micro-camera to overcome the defect among the above-mentioned prior art.
In order to achieve the purpose, the utility model provides a many camera lenses micro-camera, including camera body, transition step, rubber ring one, rubber ring two, lens one, camera lens two, light source one and light source two, the transition step sets up on the camera body, rubber ring one, rubber ring two set up respectively on the transition step, lens one is connected with rubber ring one, and camera lens two is connected with rubber ring two, light source one, light source two are coaxial light source, light source one, light source two are connected with camera lens one, camera lens two respectively from the side.
A photosensitive chip is arranged in the camera body.
The rubber ring I and the rubber ring II are detachably connected with the lens I and the lens II.
The first light source and the first lens are detachably connected, and the second light source and the second lens are detachably connected.
The first light source and the second light source are located on the same side.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model discloses a set of coaxial light source carries out the light filling to the wafer, and the light filling homogeneity is good, luminance is high, and the twin-lens scanning of rethread acquires wafer surface image in addition, and scanning efficiency is high, the image definition is good to can improve detection efficiency and detection precision.
Description of the drawings:
fig. 1 is a schematic structural view of a multi-lens micro-camera according to the present invention;
fig. 2 is a schematic view of an application of the multi-lens micro-camera of the present invention;
the reference signs are: the camera comprises a camera body 1, a photosensitive chip 11, a transition step 2, a rubber ring I3, a rubber ring II 4, a lens I5, a lens II 6, a light source I7 and a light source II 8.
The specific implementation mode is as follows:
the following detailed description of the embodiments of the present invention is provided, but it should be understood that the scope of the present invention is not limited by the embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the word "comprise", or variations such as "comprises" or "comprising", will be understood to imply the inclusion of a stated element or component but not the exclusion of any other element or component.
As shown in fig. 1-2, a multi-lens micro-camera comprises a camera body 1, a transition step 2, a rubber ring I3, a rubber ring II 4, a lens I5, a lens II 6, a light source I7 and a light source II 8, wherein the transition step 2 is arranged on the camera body 1, the rubber ring I3 and the rubber ring II 4 are respectively arranged on the transition step 2, the lens I5 is connected with the rubber ring I3, the lens II 6 is connected with the rubber ring II 4, the light source I7 and the light source II 8 are both coaxial light sources, and the light source I7 and the light source II 8 are respectively connected with the lens I5 and the lens II 6 from the side surface.
The camera body 1 is internally provided with a photosensitive chip 11.
The rubber ring I3 and the rubber ring II 4 are detachably connected with the lens I5 and the lens II 6.
The first light source 7 is detachably connected with the first lens 5, and the second light source 8 is detachably connected with the second lens 6.
The first light source 7 and the second light source 8 are located on the same side.
When the wafer scanning device is implemented, a wafer to be detected is placed below the first lens 5 and the second lens 6, light rays of the first light source 7 and the second light source 8 are emitted from the side face and are transmitted to the wafer to be detected through the first lens 5 and the second lens 6 to supplement light to the wafer, the light rays are transmitted to the camera body 1 through the first lens 5 and the second lens 6 after striking the surface of the wafer, a photosensitive chip 11 arranged in the camera body 1 starts to scan images on the surface of the wafer through the first lens 5 and the second lens 6 after sensing the light rays, and then the images are analyzed and judged through software; the rubber ring and the lens, and the light source and the lens are detachably connected, so that each part can be conveniently detached and maintained; the utility model discloses simple structure can improve the definition of image scanning and the efficiency of scanning to improve detection speed and detection efficiency.
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.
Claims (5)
1. A multi-lens micro-camera is characterized in that: the camera comprises a camera body, a transition step, a first rubber ring, a second rubber ring, a first lens, a second lens, a first light source and a second light source, wherein the transition step is arranged on the camera body, the first rubber ring and the second rubber ring are respectively arranged on the transition step, the first lens is connected with the first rubber ring, the second lens is connected with the second rubber ring, the first light source and the second light source are coaxial light sources, and the first light source and the second light source are respectively connected with the first lens and the second lens from the side surface.
2. A multi-lens microscopy camera as defined in claim 1, characterized in that: a photosensitive chip is arranged in the camera body.
3. A multi-lens microscopy camera as defined in claim 1, characterized in that: the rubber ring I and the rubber ring II are detachably connected with the lens I and the lens II.
4. A multi-lens microscopy camera as defined in claim 1, characterized in that: the first light source and the first lens are detachably connected, and the second light source and the second lens are detachably connected.
5. A multi-lens microscopy camera as defined in claim 1, characterized in that: the first light source and the second light source are located on the same side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922447800.9U CN211236535U (en) | 2019-12-30 | 2019-12-30 | Multi-lens micro-camera |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922447800.9U CN211236535U (en) | 2019-12-30 | 2019-12-30 | Multi-lens micro-camera |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211236535U true CN211236535U (en) | 2020-08-11 |
Family
ID=71919633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922447800.9U Expired - Fee Related CN211236535U (en) | 2019-12-30 | 2019-12-30 | Multi-lens micro-camera |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211236535U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112485879A (en) * | 2020-12-15 | 2021-03-12 | 江苏卓玉智能科技有限公司 | Wafer detection double-lens module |
| CN112505872A (en) * | 2020-12-15 | 2021-03-16 | 江苏卓玉智能科技有限公司 | Wafer detection single-lens assembly |
-
2019
- 2019-12-30 CN CN201922447800.9U patent/CN211236535U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112485879A (en) * | 2020-12-15 | 2021-03-12 | 江苏卓玉智能科技有限公司 | Wafer detection double-lens module |
| CN112505872A (en) * | 2020-12-15 | 2021-03-16 | 江苏卓玉智能科技有限公司 | Wafer detection single-lens assembly |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200811 |