CN211234451U - MEMS gyroscope calibration test platform - Google Patents
MEMS gyroscope calibration test platform Download PDFInfo
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- CN211234451U CN211234451U CN202020074336.3U CN202020074336U CN211234451U CN 211234451 U CN211234451 U CN 211234451U CN 202020074336 U CN202020074336 U CN 202020074336U CN 211234451 U CN211234451 U CN 211234451U
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Abstract
The utility model discloses a MEMS gyroscope calibration test platform, including the incubator that can simulate different temperature environment, be provided with the gyro board that is used for testing angular velocity in the incubator, the gyro board passes through the power supply cable and connects direct current constant voltage power supply, and the MEMS gyroscope that awaits measuring is placed on the gyro board, and the gyro board passes through the test cable and sends test data to the emulation machine, and the emulation machine can show and take notes test data. Based on the utility model discloses a calibration method of MEMS gyroscope at first handles the test data who gathers through MATLAB, obtains a set of known data sample point, then utilizes the interpolation method to carry out the skew compensation of full temperature range to the gyroscope according to known sample point. Based on the utility model discloses a MEMS gyroscope calibration method can make product property ability more reliable, meanwhile, also can make the reduction by a wide margin of the manufacturing cost of product.
Description
Technical Field
The utility model belongs to gyroscope test field, concretely relates to MEMS gyroscope calibration test platform.
Background
The MEMS gyroscope converts the angular velocity of a rotating object into a voltage signal proportional to the angular velocity by using the coriolis theorem, wherein the core component of the gyroscope is produced by adopting a doping technology, a photoetching technology, a LIGA technology, a corrosion technology, a packaging technology and the like. However, the biggest problem of the MEMS gyroscope is that there is a large offset error, which causes the test result to be inaccurate, and the accumulated error will become larger and larger as time goes on. To avoid such offset errors, high precision gyroscopes can be used, but are expensive and can result in very high manufacturing costs. Therefore, it is very important to design a high-precision and low-cost gyroscope calibration apparatus and method.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to there is the problem of skew error in the MEMS gyroscope among the above-mentioned prior art, provides a MEMS gyroscope calibration test platform, can reduce the skew error of MEMS gyroscope, and the cost is lower.
In order to achieve the above object, the present invention provides the following technical solutions:
the utility model provides a MEMS gyroscope calibration test platform, is equipped with the gyro board that is used for testing angular velocity including the incubator that can simulate different temperature environment in the incubator, and the gyro board passes through the power supply cable and connects direct current constant voltage power supply, and the MEMS gyroscope that awaits measuring is placed on the gyro board, and the gyro board passes through the test cable and sends test data to the emulation machine, and the emulation function shows and takes notes test data.
Preferably, in an embodiment of the MEMS gyroscope calibration test platform of the present invention, the incubator is provided with a switch, and the switch of the incubator is closed when the simulator records the MEMS gyroscope test data.
Preferably, in an embodiment of the MEMS gyroscope calibration test platform of the present invention:
the incubator can provide a temperature setting range of-40 ℃ to +60 ℃.
Preferably, in an embodiment of the MEMS gyroscope calibration test platform of the present invention:
the incubator is provided with a temperature adjusting mechanism capable of taking every 5 ℃ as a unit.
Preferably, in an embodiment of the MEMS gyroscope calibration test platform of the present invention:
the incubator can keep the temperature for at least 30min at the set temperature.
Preferably, in an embodiment of the MEMS gyroscope calibration test platform of the present invention:
and a stable heat transfer process is kept between the gyro plate and the incubator.
Preferably, in an embodiment of the MEMS gyroscope calibration test platform of the present invention:
the test cable adopts a CAN data communication cable.
Based on the utility model discloses a MEMS gyroscope calibration test platform's calibration method, including following step:
placing an MEMS gyroscope to be tested on a gyroscope plate at normal temperature;
setting a test temperature through a temperature box, testing the angular speed of the MEMS gyroscope at different temperatures through a gyroscope board to obtain the offset error of the MEMS gyroscope at different temperatures, and displaying and recording test data through a simulator;
inputting the test data into MATLAB, selecting a stable section of data on a graph obtained by the MATLAB for calculation to obtain numerical values (X, Y) corresponding to the offset error of the MEMS gyroscope at the temperature, and recording the obtained numerical values as a sample point; and in the same way, obtaining all sample points of the test data obtained in the step two, recording (X1, Y1) … … (Xn, Yn), and compensating the angular speed of the MEMS gyroscope at the full temperature by using an interpolation algorithm.
Preferably, the specific compensation process of step three is as follows:
assuming that the MEMS gyroscope temperature is X, the corresponding offset error is Y, and X is in the range of X1 and X2, when (X1, Y1) and (X2, Y2) are processed in a linear manner, obtaining (Y-Y1)/(X-X1) (Y2-Y1)/(X2-X1);
and calculating an offset error Y corresponding to the temperature of the MEMS gyroscope as X, and subtracting the offset error Y from the angular velocity w acquired by the gyro plate to obtain the final calibration angular velocity of the MEMS gyroscope.
Compared with the prior art, the utility model discloses a MEMS gyroscope calibration test platform has simple structure, convenient operation and build advantage such as with low costs, through the angular velocity of the MEMS gyroscope that the gyro board test awaits measuring, the different temperature environment of incubator simulation, the passageway of data transmission is built to the test cable between emulation machine and the gyro board, and the emulation machine can show with the angular velocity of MEMS gyroscope under the form of wave form under the different temperature environment to test data record simultaneously.
Further, the utility model discloses a remain stable heat transfer process between top board and the incubator, place the MEMS gyroscope that will await measuring on the top board under the normal atmospheric temperature, avoid the test process top board because the heat gives off and does not go out and lead to the test result to go wrong.
Compared with the prior art, based on the utility model discloses MEMS gyroscope calibration method that MEMS gyroscope calibration test platform provided to the gyro plate is as the test component of MEMS gyroscope angular velocity, very big reduction test cost, at first handle the test data who gathers through MATLAB, obtain a set of known data sample point, then utilize interpolation method to carry out the skew compensation of full temperature range to the gyro according to known sample point. The utility model discloses MEMS gyroscope's calibration method can make product performance more reliable, meanwhile, also can make the reduction by a wide margin of the manufacturing cost of product.
Drawings
FIG. 1 is a schematic diagram of a MEMS gyroscope calibration test platform of the present invention;
FIG. 2 is a flow chart of a method for calibrating a MEMS gyroscope of the present invention;
FIG. 3 is a statistical chart of the test results of the MEMS gyroscope calibration method of the present invention;
in the drawings: 1-temperature box; 2-gyro board; 3-a simulator; 4-a direct current stabilized power supply; 5-testing the cable; 6-power supply cable.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Referring to the figure 1, the utility model discloses a MEMS gyroscope calibration test platform, including the incubator 1 that CAN simulate different temperature environment, be provided with the gyro board 2 that is used for testing angular velocity in the incubator 1, gyro board 2 passes through power supply cable 6 and connects direct current constant voltage power supply 4, and the MEMS gyroscope that awaits measuring is placed on gyro board 2, and gyro board 2 sends test data to simulator 3 through test cable 5, and test cable 5 adopts CAN data communication cable. The simulator 3 is capable of displaying and recording test data.
In an embodiment of the present invention, the incubator 1 can provide a temperature setting range of-40 ℃ to +60 ℃ and can perform temperature adjustment in units of every 5 ℃. Incubator 1 can keep warm the time of 30min at least under a certain settlement temperature, and incubator 1 is provided with the switch, closes incubator 1's switch when 3 record MEMS gyroscopes test data through the emulation machine, otherwise the vibration can make gyro plate 2's data inaccurate. The utility model discloses the heat transfer process who remains stable between calibration test platform's top board 2 and incubator 1, otherwise top board 2 probably gives off because of the heat and does not go out and lead to the test result to have the problem.
Referring to fig. 2, based on the above, the calibration method of the MEMS gyroscope calibration test platform of the present invention includes the following steps:
placing an MEMS gyroscope to be tested on a gyro plate 2 at normal temperature;
setting a test temperature through the incubator 1, setting the temperature from minus 40 ℃ to plus 60 ℃, increasing the temperature by 5 ℃ of unit temperature, keeping the incubator 1 at least for 30min at each temperature, testing the angular speed of the MEMS gyroscope at different temperatures through the gyro plate 2 to obtain the offset error of the MEMS gyroscope at different temperatures, and displaying and recording test data through the simulator 3; when data are recorded, the incubator 1 needs to be closed, otherwise, the vibration causes the data of the gyro plate 2 to be inaccurate;
inputting the test data into MATLAB, selecting a stable section of data on a graph obtained by the MATLAB for calculation to obtain numerical values (X, Y) corresponding to the offset error of the MEMS gyroscope at the temperature, and recording the obtained numerical values as a sample point; and in the same way, obtaining all sample points of the test data obtained in the step two, recording (X1, Y1) … … (Xn, Yn), and compensating the angular speed of the MEMS gyroscope at the full temperature by using an interpolation algorithm.
The specific compensation process is as follows:
assuming that the MEMS gyroscope temperature is X, the corresponding offset error is Y, and X is in the range of X1 and X2, when (X1, Y1) and (X2, Y2) are processed in a linear manner, obtaining (Y-Y1)/(X-X1) (Y2-Y1)/(X2-X1);
and calculating an offset error Y corresponding to the temperature of the MEMS gyroscope as X, and subtracting the offset error Y from the angular velocity w acquired by the gyro plate 2 to obtain the final calibration angular velocity of the MEMS gyroscope.
Referring to fig. 3, from the utility model discloses in the test result statistical chart among the MEMS gyroscope calibration method can see out, the skew error of MEMS gyroscope is obviously reducing, has improved the data precision of MEMS gyroscope greatly, and the utility model discloses a whole calibration process is simple, and easy to carry out can satisfy the use under most of the circumstances, has reduced manufacturing cost.
The foregoing is a more detailed description of the present invention that is presented in connection with specific embodiments, and it is not intended that the present invention be limited to these specific embodiments. For those skilled in the art, without departing from the spirit of the present invention, a number of simple deductions or replacements can be made, all of which should be considered as belonging to the protection scope of the present invention.
Claims (7)
1. A MEMS gyroscope calibration test platform which is characterized in that: including incubator (1) that can simulate different temperature environment, incubator (1) in be provided with gyro plate (2) that are used for testing angular velocity, gyro plate (2) are passed through power supply cable (6) and are connected direct current constant voltage power supply (4), the MEMS gyroscope that awaits measuring is placed on gyro plate (2), gyro plate (2) are through test cable (5) with test data transmission to emulation machine (3), emulation machine (3) can show and take notes test data.
2. The MEMS gyroscope calibration test platform of claim 1, wherein: the incubator (1) is provided with a switch, and the switch of the incubator (1) is closed when the MEMS gyroscope test data is recorded through the simulator (3).
3. The MEMS gyroscope calibration test platform of claim 1, wherein:
the incubator (1) can provide a temperature setting range of-40 ℃ to +60 ℃.
4. The MEMS gyroscope calibration test platform of claim 3, wherein:
the incubator (1) is provided with a temperature adjusting mechanism which can take every 5 ℃ as a unit.
5. The MEMS gyroscope calibration test platform of claim 3, wherein:
the incubator (1) can keep the temperature for at least 30min at a set temperature.
6. The MEMS gyroscope calibration test platform of claim 1, wherein:
the gyro plate (2) and the incubator (1) keep a stable heat transfer process.
7. The MEMS gyroscope calibration test platform of claim 1, wherein:
the test cable (5) adopts a CAN data communication cable.
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| CN202020074336.3U CN211234451U (en) | 2020-01-14 | 2020-01-14 | MEMS gyroscope calibration test platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111024133A (en) * | 2020-01-14 | 2020-04-17 | 西安深瞳智控技术有限公司 | MEMS gyroscope calibration test platform and calibration method |
| CN112857402A (en) * | 2021-04-25 | 2021-05-28 | 北京三快在线科技有限公司 | Sensor calibration method, device and equipment |
| CN113252071A (en) * | 2021-04-20 | 2021-08-13 | 北京航天时代光电科技有限公司 | Critical angle acceleration test system and test method based on double fiber-optic gyroscope |
-
2020
- 2020-01-14 CN CN202020074336.3U patent/CN211234451U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111024133A (en) * | 2020-01-14 | 2020-04-17 | 西安深瞳智控技术有限公司 | MEMS gyroscope calibration test platform and calibration method |
| CN113252071A (en) * | 2021-04-20 | 2021-08-13 | 北京航天时代光电科技有限公司 | Critical angle acceleration test system and test method based on double fiber-optic gyroscope |
| CN112857402A (en) * | 2021-04-25 | 2021-05-28 | 北京三快在线科技有限公司 | Sensor calibration method, device and equipment |
| CN112857402B (en) * | 2021-04-25 | 2021-09-07 | 北京三快在线科技有限公司 | Sensor calibration method, device and equipment |
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