CN211226620U

CN211226620U - Zero-discharge integrated treatment device for grinding wastewater

Info

Publication number: CN211226620U
Application number: CN201922144506.0U
Authority: CN
Inventors: 韩骥东; 陈启伟; 陈素宁
Original assignee: Tianjin Teli Environment Technology Co ltd
Current assignee: Tianjin Teli Environment Technology Co ltd
Priority date: 2019-12-04
Filing date: 2019-12-04
Publication date: 2020-08-11
Anticipated expiration: 2029-12-04

Abstract

The utility model discloses a zero release integration processing apparatus of grinding waste water, including collecting system, recovery processing system, desliming system and backwash system, recovery processing system with collecting system, desliming system and backwash headtotail, collecting system is including collection water tank and grinding waste water delivery pump, recovery processing system includes bag filter, retrieves the UF device and produces the water pump, the end of intaking of grinding waste water delivery pump with the collection water tank is connected, go out the water end with bag filter connects, bag filter is connected with retrieving the UF device, retrieve the UF device with it connects to produce the water pump. The utility model is an integrated device, which adopts the immersed ultrafiltration membrane treatment technology, and the sludge filtrate returns to the ultrafiltration membrane treatment unit for treatment again, thereby realizing the zero discharge operation target of the grinding wastewater; chemical agents are not needed to be added, and the construction investment cost and the operation cost of the wastewater treatment station can be greatly reduced.

Description

Zero-discharge integrated treatment device for grinding wastewater

Technical Field

The utility model belongs to the technical field of the water treatment, in particular to grind waste water zero release integration processing apparatus.

Background

With the gradual improvement of economic level, various development projects in China are actively and stably developed. In the development process of the country, the semiconductor industry is a new and rapidly advanced production industry and is a more important content. As IC devices are gradually adopting multi-layer three-dimensional wiring with small size and high aggregation, the demand for planarization technology is more important, and Chemical Mechanical Polishing (CMP) process is widely used, so that a large amount of polishing wastewater (CMP wastewater) is generated. The CMP water consumption of domestic semiconductor factories accounts for about 5-25% of the total water consumption, the CMP wastewater discharge amount is about 50-500 tons, and the CMP wastewater discharge amount varies with the change of the factory scale and the production capacity. If the grinding wastewater is improperly treated and directly discharged, environmental pollution is easily caused; the grinding waste water is large, and if the grinding waste water is not recycled, water resources are wasted.

The main pollutants in the grinding wastewater are suspended particles (silicon powder), and the wastewater is characterized by high suspended matter concentration and turbidity, small particle size and colloid stability. In the grinding process, because the grinding fluid and the cleaning agent are added, and the grinding material is mixed after the ultra-pure water is washed, the grinding wastewater has more complex components and contains various organic matters and inorganic matters.

At present, most semiconductor plants adopt a traditional chemical coagulating sedimentation treatment mode, the treatment process has the defects of complex equipment, large floor area, high investment and operation cost, complex operation, poor treatment effect on extremely fine suspended matters and the like, and most of treated water is directly discharged and is not recycled. In addition, due to the intake of a large amount of chemicals, not only more sludge is generated, but also the equipment operation cost and the sludge disposal cost are increased.

Disclosure of Invention

The utility model provides a zero discharge integrated treatment device for grinding wastewater aiming at the technical problems in the prior art, which adopts the immersed ultrafiltration membrane treatment technology, and the grinding wastewater can be recycled after being treated; the filtered sludge is transported outside after dehydration treatment, and the sludge filtrate returns to the ultrafiltration membrane treatment unit for treatment again, so that the operation target of zero emission of the grinding wastewater is realized, and the effluent quality also meets the corresponding standard. The utility model does not need to add chemical agents, and can greatly reduce the construction investment cost and the operation cost of the wastewater treatment station; the grinding wastewater zero-discharge treatment device has the advantages of compact system structure, small occupied area, automatic control, high efficiency and energy conservation.

The utility model adopts the technical proposal that: the grinding wastewater zero-discharge integrated treatment device comprises a collection system, a recovery treatment system, a desliming system and a backwashing system, wherein the recovery treatment system is connected with the collection system, the desliming system and the backwashing system, the collection system comprises a collection water tank and a grinding wastewater delivery pump, the recovery treatment system comprises a cloth filter, a recovery UF device and a water production pump, the water inlet end of the grinding wastewater delivery pump is connected with the collection water tank, the water outlet end of the grinding wastewater delivery pump is connected with the cloth filter, the cloth filter is connected with the recovery UF device, and the recovery UF device is connected with the water production pump.

Preferably, the desliming system comprises a dehydrator and a sludge pump, the sludge pump is respectively connected with the UF recovery device and the dehydrator, and the dehydrator is connected with the UF recovery device through a filtrate return pipeline.

Preferably, the backwashing system comprises a backwashing water pump, a backwashing pipeline, a compressed air pipeline, a dosing pump and a dosing tank, the backwashing pipeline is respectively connected with the backwashing water pump, the dosing pump and the UF recycling device, the dosing pump is connected with the dosing tank, and the compressed air pipeline is connected with the UF recycling device.

The working principle is as follows: grinding wastewater enters a collecting water tank through a water inlet pipeline, is lifted by a grinding wastewater conveying pump to enter a cloth bag filter after being homogenized and equalized, is pretreated and filtered by the cloth bag filter, enters a recycling UF device after large-particle suspended matters are removed, and is sucked and conveyed to a recycling point by a water producing pump after being filtered by an ultrafiltration membrane. Suspended matters filtered and intercepted by the ultrafiltration membrane are deposited at the bottom of the UF recovery device and are conveyed to the dehydrator through the sludge pump, sludge cakes are transported out for treatment after the sludge is dehydrated by the dehydrator, and filtrate returns to the UF recovery device through the filtrate return pipeline for secondary treatment.

In order to maintain the filtration performance of the ultrafiltration membrane and reduce membrane fouling, the ultrafiltration membrane needs to be periodically backwashed to remove contaminants from the surface of the ultrafiltration membrane, so that the transmembrane pressure difference is restored to the level of the previous water production cycle. The backwashing is divided into maintenance backwashing and chemical dosing backwashing, chemical agents do not need to be added in the maintenance backwashing process, and backwashing water enters the inside of the membrane filaments through a backwashing water pump to loosen and strip off pollutants on the surface of the membrane. In the backwashing process, purified compressed air is introduced into the bottom of the ultrafiltration membrane through a compressed air pipeline, and gas can be stirred on the surface of the membrane to remove firmer impurities, so that the backwashing effect is enhanced. In the chemical dosing backwashing process, a dosing pump conveys NaClO agent with a certain concentration configured in a dosing tank to a backwashing pipeline, the NaClO agent and backwashing water enter the inside of membrane filaments, pollutants on the surface of an ultrafiltration membrane are removed in a soaking mode, and the flux of the membrane is recovered by matching with air washing.

Compared with the prior art, the utility model discloses the beneficial effect who has is:

1. the utility model discloses to grinding waste water composition complicacy, suspended solid concentration and turbidity are higher, characteristics such as granule particle diameter is less and the limitation of chemical coagulating sedimentation in grinding waste water treatment process utilize ultrafiltration treatment process, realize handling grinding waste water's retrieval and utilization.

2. The utility model discloses a specially to the submergence type suction formula milipore filter of high turbidity waste water treatment, grinding waste water can directly be as the intake of factory pure water preparation system after handling, mud cake outward transportation after the dewatering machine is handled to the mud that recovery processing produced, and mud filtrating then gets back to and retrieves UF device and handles once more, and whole processing system does not produce the emission of waste water, has realized the zero release target of waste water, and is energy-efficient.

3. The utility model adopts a modularized integrated device, and four unit devices of a collecting system, a recovery processing system, a desliming system and a backwashing system are designed in a modularized way, and are optimally combined into the integrated device; the method has the advantages of low engineering investment, short construction period, small occupied area, high treatment efficiency and greatly reduced production cost.

4. The utility model can select the parallel quantity of the integrated devices and the unit devices participating in the treatment process according to the requirements, and has different treatment capacities and configurations, and is flexible and variable; and the integrated treatment device can be selected or separately placed according to the unit device according to the floor space requirement, so that the site space is flexibly utilized according to local conditions.

5. The utility model discloses a sack filter can select the sack filter of different precision different forms according to the quality of water and the processing requirement of difference as the pretreatment unit of milipore filter, simple structure, and the cost of manufacture is low, and it is convenient to maintain, can reduce engineering investment and maintenance cost.

6. The utility model discloses a compressed air does not need to increase aeration equipment alone as the air purge air supply, saves area and engineering investment, has reduced the operation maintenance cost.

7. The utility model discloses a self priming pump produces the water pump as the UF, and submergence formula milipore filter needs produce the vacuum in the membrane, forms drive power in face both sides of membrane, makes water get into outlet conduit through the membrane surface, and the self priming pump has stronger from the ability of inhaling, satisfies the play water requirement of submergence formula milipore filter.

8. The utility model discloses a plate and frame filter press is as the hydroextractor, and plate and frame filter press compact structure, stable performance, efficient working costs are low.

9. The utility model discloses autonomous system adopts PLC control, can realize full automatic operation, and processing unit operational parameter passes through signal transmission and concentrates the demonstration on the computer, and the personnel of patrolling and examining only need know the technology operational aspect and adjust the technology operational parameter through the computer display.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

In the figure, 1-a water inlet pipeline, 2-a collection water tank, 3-a grinding wastewater delivery pump, 4-a cloth bag filter, 5-a recovery UF device, 6-a water production pump, 7-a sludge pump, 8-a dehydrator, 9-a filtrate return pipeline, 10-a backwashing water pump, 11-a backwashing pipeline, 12-a compressed air pipeline, 13-a dosing pump and 14-a dosing tank.

Detailed Description

In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.

The embodiment of the utility model discloses a zero release integration processing apparatus of grinding waste water, as shown in the figure, it includes collecting system, recovery processing system, desliming system and backwash system, recovery processing system with collecting system, desliming system and backwash system connect, collecting system is including collecting tank 2 and grinding waste water delivery pump 3, recovery processing system includes sack filter 4, retrieves UF device 5 and produces water pump 6, the desliming system includes hydroextractor 8 and sludge pump 7, the backwash system includes backwash water pump 10, backwash pipeline 11, compressed air pipeline 12, dosing pump 13 and dosing tank 14. The collecting water tank 2 is connected with the water inlet pipeline 1, the water inlet pipeline 1 is connected with grinding wastewater, the water inlet end of the grinding wastewater delivery pump 3 is connected with the collecting water tank 2, the water outlet end of the grinding wastewater delivery pump is connected with the cloth filter 4, the cloth filter 4 is connected with the recycling UF device 5, the recycling UF device 5 is connected with the water production pump 6, recycled water is discharged by the water production pump 6, the sludge pump 7 is respectively connected with the recycling UF device 5 and the dewatering machine 8, the dewatering machine 8 is connected with the recycling UF device 5 through the filtrate return pipeline 9, sludge is subjected to outward transportation treatment of sludge cakes after being dewatered by the dewatering machine 8, and filtrate returns to the recycling UF device 5 through the filtrate return pipeline 9. The backwashing pipeline 11 is respectively connected with the backwashing water pump 10, the dosing pump 13 and the UF recovery device 5, the dosing pump 13 is connected with the dosing tank 14, and the compressed air pipeline 12 is connected with the UF recovery device 5. The backwashing agent is generally NaClO.

The present invention has been described in detail with reference to the embodiments, but the description is only exemplary of the present invention and should not be construed as limiting the scope of the present invention. The protection scope of the present invention is defined by the claims. Technical scheme, or technical personnel in the field are in the utility model technical scheme's inspiration the utility model discloses an essence and protection within range, design similar technical scheme and reach above-mentioned technological effect, perhaps to the impartial change that application scope was made and improve etc. all should still belong to within the protection scope is covered to the patent of the utility model.

Claims

1. The utility model provides a grind waste water zero release integration processing apparatus, includes collection system, recovery processing system, desliming system and backwash system, recovery processing system with collection system, desliming system and backwash system are connected, its characterized in that: the collecting system comprises a collecting water tank and a grinding wastewater delivery pump, the recovery processing system comprises a cloth bag filter, a recovery UF device and a water production pump, the water inlet end of the grinding wastewater delivery pump is connected with the collecting water tank, the water outlet end of the grinding wastewater delivery pump is connected with the cloth bag filter, the cloth bag filter is connected with the recovery UF device, and the recovery UF device is connected with the water production pump.

2. The zero-discharge integrated treatment device for grinding wastewater as claimed in claim 1, characterized in that: the desliming system comprises a dehydrator and a sludge pump, the sludge pump is respectively connected with the UF recovery device and the dehydrator, and the dehydrator is connected with the UF recovery device through a filtrate return pipeline.

3. The zero-discharge integrated treatment device for grinding wastewater as claimed in claim 1, characterized in that: the backwashing system comprises a backwashing water pump, a backwashing pipeline, a compressed air pipeline, a dosing pump and a dosing tank, wherein the backwashing pipeline is respectively connected with the backwashing water pump, the dosing pump and the UF recycling device, the dosing pump is connected with the dosing tank, and the compressed air pipeline is connected with the UF recycling device.