CN211220747U

CN211220747U - Fine operation manipulator based on ultrasonic motor

Info

Publication number: CN211220747U
Application number: CN201921840564.0U
Authority: CN
Inventors: 娄月轩; 李峰; 刘宇宸
Original assignee: Northeast Forestry University
Current assignee: Northeast Forestry University
Priority date: 2019-10-29
Filing date: 2019-10-29
Publication date: 2020-08-11
Anticipated expiration: 2029-10-29

Abstract

A fine operation manipulator based on an ultrasonic motor relates to an operation manipulator. The utility model discloses a when solving the meticulous operation of needs high accuracy such as current medical treatment operation and biological assay, the motion precision of ordinary manipulator is not high enough, leads to action error big, and the personnel of controlling are difficult to operate, influences the problem of operation effect. The utility model discloses a base, the carousel, the ring gear, slewing gear, gyration supersound motor, the main tributary arm, first rotatory supersound motor, oblique support arm, the rotatory supersound motor of second, the side spiral arm, the rotatory supersound motor of third, first rotary mechanism, second rotary mechanism, third rotary mechanism and tong mechanism, the middle part of base up end is equipped with the carousel, first rotatory supersound motor is through the gyration of the oblique support arm of first rotary mechanism drive, the rotatory supersound motor of second passes through the gyration of second rotary mechanism drive side spiral arm, the rotatory supersound motor of third passes through the gyration of third rotary mechanism drive tong mechanism. The utility model is used for meticulous operation.

Description

Fine operation manipulator based on ultrasonic motor

Technical Field

The utility model relates to an operating mechanical hand, concretely relates to meticulous operating mechanical hand based on supersound motor.

Background

The manipulator is an automatic operation device which can imitate some action functions of human hands and is used for grabbing and carrying objects or operating tools according to programs, is a high-tech automatic production device developed in recent decades, and becomes an important branch of an industrial robot due to the operation accuracy and the capability of completing operation in the environment. It can replace the heavy labor of people to realize the mechanization and automation of production, and can be operated under harmful environment to protect personal safety, so it is widely used in the fields of industrial manufacture, medical treatment, entertainment service, military, semiconductor manufacture and space exploration. The manipulator is widely applied to factories, hospitals, biological laboratories such as biochemistry, cell and the like, however, most of the existing manipulators adopt common servo motors, and when the manipulator is applied to fine operations such as medical operations, biological experiments and the like which need high precision, the action error is large because the motion precision of the common manipulator is not high enough, and the operation of operators is difficult to carry out, thereby affecting the operation effect.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a when solving the meticulous operation of needs high accuracy such as current medical treatment operation and biological assay, the motion precision of ordinary manipulator is not high enough, and it is big to lead to action error, and the personnel of controlling are difficult to operate, influences the problem of operation effect, and then provides a meticulous operation manipulator based on supersound motor.

The utility model discloses a solve the technical scheme that above-mentioned technical problem took and be:

a fine operation manipulator based on an ultrasonic motor comprises a base, a turntable, an inner gear ring, a rotary gear, a rotary ultrasonic motor, a main support arm, a first rotary ultrasonic motor, an inclined support arm, a second rotary ultrasonic motor, a side rotary arm, a third rotary ultrasonic motor, a first rotary mechanism, a second rotary mechanism, a third rotary mechanism and a clamping hand mechanism,

the base is horizontally arranged, the middle part of the upper end surface of the base is provided with a turntable, the middle part of the lower end surface of the turntable is provided with a mounting groove, an inner gear ring is horizontally and fixedly connected in the mounting groove, a rotary ultrasonic motor is fixedly arranged on the base, a motor shaft of the rotary ultrasonic motor is connected with a rotary transmission shaft, a rotary gear is fixedly arranged on the rotary transmission shaft, the rotary gear is meshed with the inner gear ring,

the main support arm is vertically and fixedly connected with the middle part of the upper end surface of the turntable, the upper end of the main support arm is provided with a first rotary ultrasonic motor and a first rotating mechanism, the side wall of one end of the inclined support arm is connected with the first rotating mechanism, the first rotary ultrasonic motor drives the inclined support arm to rotate through the first rotating mechanism,

the other end of the inclined support arm is provided with a second rotary ultrasonic motor and a second rotary mechanism, the side wall of one end of the side rotary arm is connected with the second rotary mechanism, the second rotary ultrasonic motor drives the side rotary arm to rotate through the second rotary mechanism,

the other end of the side rotary arm is vertically and fixedly connected with a connecting plate, the connecting plate is provided with a third rotary ultrasonic motor and a third rotary mechanism, the clamping mechanism is connected with the third rotary mechanism, the third rotary ultrasonic motor drives the clamping mechanism to rotate through the third rotary mechanism,

the first rotary ultrasonic motor, the second rotary ultrasonic motor and the third rotary ultrasonic motor are respectively connected with the controller.

Compared with the prior art, the utility model the beneficial effect who contains is:

the utility model discloses on being applied to robotic arm with the supersound motor, directly being regarded as the driving source by the supersound motor to do not need decelerator, can overcome traditional motor and need complicated drive mechanism. The rotary ultrasonic motor is fixed on the base of the manipulator and mainly drives the whole manipulator arm to rotate. The ultrasonic motor is directly driven, power is transmitted through gear engagement, errors caused by complex structure are reduced, and the function of quick response and precision positioning is realized during operation.

The ultrasonic motor utilizes the inverse piezoelectric effect of piezoelectric ceramics to enable the stator to generate vibration in an ultrasonic frequency band, obtains movement and torque through friction between the stator and the rotor, and can control the main support arm, the inclined support arm, the side rotating arm and the hand clamping mechanism to rotate freely through the driving of the ultrasonic motor. According to the own characteristics of the ultrasonic motor, the power-off time of the motor is 3 milliseconds, and the starting time is 6 milliseconds, so that the ultrasonic motor has no inertia during rotation, the action error is extremely small, and the operation of an operator is facilitated. By utilizing the characteristics of low-speed large torque and power-off self-locking of the ultrasonic motor, the existing manipulator realizes the advantages of simple structure, quick response, precise positioning, silence, high efficiency, low cost and the like, and can be widely applied to precise operation requiring high precision, such as medical operation, biological experiment and the like.

The utility model discloses well gyration supersound motor can realize that tong mechanism uses vertical direction as the gyration of revolving axle, and first rotatory supersound motor and the rotatory supersound motor of second can realize using the horizontal direction to be the gyration of revolving axle, and then realize the adjustment on the vertical height of tong mechanism and the horizontal position, and the gyration of tong mechanism self can be realized to the rotatory supersound motor of third. Therefore, the whole manipulator can realize the adjustment in four degrees of freedom and realize the movement in any position. The clamping mechanism can clamp a precision feeding cutter, a precision small-sized inspection instrument, a precision small-sized test instrument and the like for direct operation according to the use requirement.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic structural diagram of the first rotating mechanism 9 in the present invention;

fig. 3 is a schematic structural diagram of the second rotating mechanism 13 in the present invention;

fig. 4 is a schematic structural diagram of a third rotating mechanism 15 in the present invention;

fig. 5 is a schematic structural diagram of the middle clamping mechanism 17 of the present invention.

Detailed Description

The first embodiment is as follows: the present embodiment is described with reference to fig. 1 to 5, and the ultrasonic motor-based fine manipulator of the present embodiment includes a base 1, a turntable 2, an inner gear 3, a rotary gear 4, a rotary ultrasonic motor 5, a main support arm 7, a first rotary ultrasonic motor 8, a tilt support arm 10, a second rotary ultrasonic motor 12, a side support arm 11, a third rotary ultrasonic motor 14, a first rotating mechanism 9, a second rotating mechanism 13, a third rotating mechanism 15, and a gripper mechanism 17,

the base 1 is horizontally arranged, the middle part of the upper end surface of the base 1 is provided with a turntable 2, the middle part of the lower end surface of the turntable 2 is provided with a mounting groove 2-1, an inner gear ring 3 is horizontally and fixedly connected in the mounting groove 2-1, a rotary ultrasonic motor 5 is fixedly arranged on the base 1, a motor shaft of the rotary ultrasonic motor 5 is connected with a rotary transmission shaft 6, a rotary gear 4 is fixedly arranged on the rotary transmission shaft 6, the rotary gear 4 is meshed with the inner gear ring 3,

the main support arm 7 is vertically and fixedly connected with the middle part of the upper end surface of the turntable 2, the upper end of the main support arm 7 is provided with a first rotary ultrasonic motor 8 and a first rotary mechanism 9, the side wall of one end of the inclined support arm 10 is connected with the first rotary mechanism 9, the first rotary ultrasonic motor 8 drives the inclined support arm 10 to rotate through the first rotary mechanism 9,

the other end of the inclined support arm 10 is provided with a second rotary ultrasonic motor 12 and a second rotary mechanism 13, the side wall of one end of the side radial arm 11 is connected with the second rotary mechanism 13, the second rotary ultrasonic motor 12 drives the side radial arm 11 to rotate through the second rotary mechanism 13,

the other end of the side radial arm 11 is vertically and fixedly connected with a connecting plate 16, the connecting plate 16 is provided with a third rotary ultrasonic motor 14 and a third rotary mechanism 15, a clamping mechanism 17 is connected with the third rotary mechanism 15, the third rotary ultrasonic motor 14 drives the clamping mechanism 17 to rotate through the third rotary mechanism 15,

the first rotary ultrasonic motor 8, the second rotary ultrasonic motor 12, and the third rotary ultrasonic motor 14 are connected to a controller, respectively.

The utility model discloses well gyration supersound motor 5 is through the meshing of slewing gear 4 and ring gear 3, drives the gyration of carousel 2, and main tributary arm 7 sets up on the up end of carousel 2, and then drives the gyration of main support arm 7. Because the cross section size of carousel 2 is big, and carousel 2 sets up on base 1, so carousel 2 is when the gyration, and the operation process is more steady, guarantees to remove the precision. The first rotary ultrasonic motor 8 drives the inclined support arm 10 to rotate through the first rotating mechanism 9, the second rotary ultrasonic motor 12 drives the side rotary arm 11 to rotate through the second rotating mechanism 13, the third rotary ultrasonic motor 14 drives the gripper mechanism 17 to rotate through the third rotating mechanism 15, the first rotary ultrasonic motor 8, the second rotary ultrasonic motor 12 and the third rotary ultrasonic motor 14 are respectively connected with the controller, the controller is controlled through an operator, control over the first rotary ultrasonic motor 8, the second rotary ultrasonic motor 12 and the third rotary ultrasonic motor 14 is further achieved, and position movement and angle adjustment of the manipulator are achieved.

An Ultrasonic Motor (USM) technology is a new technology combining the disciplines of vibration, wave motion, tribology, dynamic design, power electronics, automatic control, new materials and new processes. Ultrasonic motors do not use electromagnetic cross force to achieve their motion and torque as do conventional motors. The ultrasonic motor obtains the motion and the moment of the piezoelectric ceramic by utilizing the inverse piezoelectric effect and the ultrasonic vibration of the piezoelectric ceramic, and converts the microscopic deformation of the material into the macroscopic motion of the rotor through mechanical resonance amplification and frictional coupling. In this new type of motor, a disk of piezoelectric ceramic material replaces a large number of copper coils.

The ultrasonic motor comprises a stator, a rotor, an output shaft, a base and a shell connected with the base, wherein the stator is arranged on the base, piezoelectric ceramics are adhered to the lower surface of the stator, and lead wires of the piezoelectric ceramics are led out through a reserved gap between the shell and the base; the rotor is installed on the output shaft, and the damping material has been pasted to the rotor upper end, and the terminal surface is pasted and is had the friction material layer and contact with the stator under the rotor.

The second embodiment is as follows: referring to fig. 1, the embodiment is described, in the embodiment, a positioning convex circle 19 is arranged on the outer circumferential side wall of the lower end of the turntable 2, a circular groove 1-1 is arranged on the upper end surface of the base 1, the positioning convex circle 19 is arranged in the circular groove 1-1, a retaining ring 18 is arranged at the notch of the circular groove 1-1, the retaining ring 18 is arranged at the upper end of the positioning convex circle 19, and the outer side of the retaining ring 18 is fixedly connected with the upper end surface of the base 1 through a plurality of positioning bolts 20. Other components and connection modes are the same as those of the first embodiment.

The outer side wall of the mounting groove 2-1 is clamped on the inner circumferential side wall of the circular groove 1-1 in the design, so that the movement of the rotary table 2 in the horizontal direction is limited, the positioning convex circle 19 is clamped between the retainer ring 18 and the groove bottom of the circular groove 1-1, the movement of the rotary table 2 in the vertical direction is further limited, and the rotation precision of the rotary table 2 is guaranteed.

The third concrete implementation mode: referring to fig. 1, the embodiment is described, in which a plurality of sets of rollers 21 are disposed at the lower end of the positioning bead 19 along the circumferential direction, the side wall of the lower end of the roller 21 is disposed at the bottom of the circular groove 1-1, and a rotary bearing 23 is disposed between the outer side wall of the installation groove 2-1 and the inner side wall of the circular groove 1-1. Other components and connection modes are the same as those of the second embodiment.

The design changes the sliding friction between the positioning convex circle 19 and the groove bottom of the circular groove 1-1 and between the outer side wall of the mounting groove 2-1 and the inner side wall of the circular groove 1-1 into rolling friction, so as to reduce the friction resistance and prolong the service life of the device.

The fourth concrete implementation mode: referring to fig. 1, the present embodiment is described, wherein two sets of rolling wheels 22 are uniformly arranged at the lower end of the base 1. Other components and connection modes are the same as those of the third embodiment.

The design is convenient for the movement of the whole manipulator.

The fifth concrete implementation mode: referring to fig. 1 and 2, the first rotating mechanism 9 of the present embodiment includes a first housing 9-1, a first driving shaft 9-2, a first driving bevel gear 9-3, a first driven shaft 9-4 and a first driven bevel gear 9-5, the first housing 9-1 is fixedly connected to the upper end surface of the main arm 7, a first ultrasonic rotating motor 8 is fixedly connected to the outer side of the first housing 9-1, a motor shaft of the first ultrasonic rotating motor 8 is connected to the first driving shaft 9-2, the first driving shaft 9-2 is arranged in the first housing 9-1 along the axial direction of the main arm 7, the first driving shaft 9-2 is fixedly connected to the first driving bevel gear 9-3, the first driven shaft 9-4 is arranged along the radial direction of the main arm 7, one end of the first driven shaft 9-4 is fixedly connected to the first driven bevel gear 9-5, the first driving bevel gear 9-3 is meshed with the first driven bevel gear 9-5, and the other end of the first driven shaft 9-4 penetrates through the first shell 9-1 and is vertically and fixedly connected with the outer circumferential side wall of one end of the inclined support arm 10. Other components and connection modes are the same as those of the first embodiment, the second embodiment, the third embodiment or the fourth embodiment.

The design is that the inclined support arm 10 is driven to rotate by the first rotary ultrasonic motor 8 by taking the radial direction of the main support arm 7 as a rotating shaft.

In the embodiment, a first driving shaft 9-2 is connected with a first shell 9-1 through a first driving shaft support frame 9-6, a first driven shaft 9-4 is connected with the first shell 9-1 through a first driven shaft support frame 9-7, and bearings are arranged between a motor shaft of a first rotary ultrasonic motor 8 and the first shell 9-1, between the first driving shaft 9-2 and the first driving shaft support frame 9-6, between the first driven shaft 9-4 and the first driven shaft support frame 9-7 and between the first driven shaft 9-4 and the first shell 9-1. A motor shaft of the first rotary ultrasonic motor 8 is connected with the first driving shaft 9-2 through a first coupler.

The sixth specific implementation mode: referring to fig. 1 and 3 for explaining the present embodiment, the second rotating mechanism 13 according to the present embodiment includes a second housing 13-1, a second driving shaft 13-2, a second driving bevel gear 13-3, a second driven shaft 13-4 and a second driven bevel gear 13-5, the second housing 13-1 is fixedly connected to the end surface of the other end of the tilt arm 10, a second rotary ultrasonic motor 12 is fixedly connected to the outer side of the second housing 13-1, the motor shaft of the second rotary ultrasonic motor 12 is connected to the second driving shaft 13-2, the second driving shaft 13-2 is arranged in the second housing 13-1 along the axial direction of the tilt arm 10, the second driving shaft 13-2 is fixedly connected to the second driving bevel gear 13-3, the second driven shaft 13-4 is arranged along the radial direction of the tilt arm 10, one end of the second driven shaft 13-4 is fixedly connected to the second driven bevel gear 13-5, the second driving bevel gear 13-3 is meshed with the second driven bevel gear 13-5, and the other end of the second driven shaft 13-4 penetrates through the second shell 13-1 and is vertically and fixedly connected with the outer circumferential side wall at one end of the side spiral arm 11. The other components and the connection mode are the same as the fifth embodiment mode.

The design is such that the side swing arm 11 is driven by the second rotary ultrasonic motor 12 to rotate with the radial direction of the inclined arm 10 as the rotation axis.

In the embodiment, the second driving shaft 13-2 is connected with the second housing 13-1 through a second driving shaft support frame 13-6, the second driven shaft 13-4 is connected with the second housing 13-1 through a second driven shaft support frame 13-7, and bearings are arranged between a motor shaft of the second rotary ultrasonic motor 12 and the second housing 13-1, between the second driving shaft 13-2 and the second driving shaft support frame 13-6, between the second driven shaft 13-4 and the second driven shaft support frame 13-7, and between the second driven shaft 13-4 and the second housing 13-1. The motor shaft of the second rotary ultrasonic motor 12 is connected with the second driving shaft 13-2 through a second coupling.

The seventh embodiment: referring to fig. 1 and 4, the third rotating mechanism 15 of the present embodiment includes a third housing 15-1, a third driving shaft 15-2, a third driving spur gear 15-3, a third driven shaft 15-4 and a third driven spur gear 15-5, a connecting plate 16 is perpendicularly fixed on an end surface of the other end of the side swing arm 11, the third housing 15-1 is fixed on an outer end surface of the connecting plate 16, a third ultrasonic rotary motor 14 is fixed on an inner end surface of the connecting plate 16, a motor shaft of the third ultrasonic rotary motor 14 is connected with the third driving shaft 15-2, the third driving shaft 15-2 is arranged in the third housing 15-1 along an axial direction of the side swing arm 11, the third driving spur gear 15-3 is fixed on the third driving shaft 15-2, the third driven shaft 15-4 is arranged in parallel to one side of the third driving shaft 15-2, one end of a third driven shaft 15-4 is fixedly connected with a third driven spur gear 15-5, a third driving spur gear 15-3 is meshed with the third driven spur gear 15-5, and the other end of the third driven shaft 15-4 penetrates through a third shell 15-1 and is vertically and fixedly connected with a gripper mechanism 17. Other components and connection modes are the same as those of the sixth embodiment.

The third rotary ultrasonic motor 14 is designed to drive the gripper mechanism 17 to rotate about the axial direction of the side swing arm 11 as a rotation axis.

In the embodiment, the third driving shaft 15-2 is connected with the third housing 15-1 through a third driving shaft support frame 15-6, the third driven shaft 15-4 is connected with the third housing 15-1 through a third driven shaft support frame 15-7, and bearings are arranged between a motor shaft of the third rotary ultrasonic motor 14 and the third housing 15-1, between the third driving shaft 15-2 and the third driving shaft support frame 15-6, between the third driven shaft 15-4 and the third driven shaft support frame 15-7, and between the third driven shaft 15-4 and the third housing 15-1. The motor shaft of the third rotary ultrasonic motor 14 is connected with the third driving shaft 15-2 through a third coupler.

The specific implementation mode is eight: the embodiment is described with reference to fig. 1 and 5, the gripper mechanism 17 of the embodiment includes a gripper ultrasonic motor 17-1, a driving gear 17-2, two clamping plates 17-5, two driven gears 17-3, two jaw fixing plates 17-4 and two link mechanisms, the other end of a third driven shaft 15-4 is vertically and oppositely fixed to the inner end face of an installation frame 17-10, the two jaw fixing plates 17-4 are vertically and oppositely arranged on the outer end face of the installation frame 17-10, a motor shaft of the gripper ultrasonic motor 17-1 is fixedly connected to the driving gear 17-2, the driving gear 17-2 is arranged between the two jaw fixing plates 17-4 in parallel, the two driven gears 17-3 are arranged in parallel, a rotating shaft of the driven gear 17-3 is rotatably connected to the jaw fixing plate 17-4, two driven gears 17-3 are meshed, a driving gear 17-2 is meshed with one driven gear 17-3, each driven gear 17-3 is provided with a connecting rod mechanism, the two connecting rod mechanisms are symmetrically arranged, the front end of each connecting rod mechanism is provided with a clamping plate 17-5, the two clamping plates 17-5 are arranged oppositely, and a clamping hand ultrasonic motor 17-1 is connected with a controller. The other components and the connection mode are the same as those of the seventh embodiment.

In the embodiment, the tong ultrasonic motor 17-1 drives the driving gear 17-2 to rotate, so as to drive the two driven gears 17-3 to rotate, the driven gear 17-3 transmits power to the clamping plate 17-5 through the link mechanism, so that the two clamping plates 17-5 are opened and closed, and the grabbing and releasing of operating tools such as precision feeding cutters, precision small-sized inspection instruments, precision small-sized test instruments and the like are completed. According to different types of operating tools, the output force of the ultrasonic motor 17-1 of the clamping hand is adjusted through the controller, so that the clamping force of the clamping plate 17-5 is adjusted, and the tool is prevented from being damaged and deformed by clamping on the premise that the tool can be clamped.

The specific implementation method nine: the embodiment is described with reference to fig. 1 and 5, the link mechanism of the embodiment includes a clamping arm 17-6, two supporting rods 17-8, two connecting rods 17-7 and two pins 17-9, the clamping arm 17-6 is disposed on the outer side of the driven gear 17-3, the upper and lower ends of the driven gear 17-3 are respectively provided with one connecting rod 17-7, one end of the connecting rod 17-7 is fixedly connected with the rotating shaft of the driven gear 17-3, the other end of the connecting rod 17-7 is rotatably connected with the rear end of the clamping arm 17-6, the front side of the driven gear 17-3 is provided with the pin 17-9, the pin 17-9 is vertically fixedly connected with the clamping jaw fixing plate 17-4, two supporting rods 17-8 are disposed between the pin 17-9 and the clamping arm 17-6 in parallel, one end of the supporting rod 17-8 is rotatably connected with the, the other end of the supporting rod 17-8 is rotatably connected with the middle part of the clamping arm 17-6, and the outer side wall of the clamping plate 17-5 is rotatably connected with the front end of the clamping arm 17-6. The other components and connection modes are the same as those of the eighth embodiment.

The detailed implementation mode is ten: the embodiment is described with reference to fig. 1 and 5, and the inner side wall of the clamping plate 17-5 of the embodiment is provided with a concave surface 17-5-1. The other components and the connection mode are the same as those of the ninth embodiment.

Due to the design, the operating tool is arranged in the two concave surfaces 17-5-1, so that the clamping of the operating tool is convenient to realize.

Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.

Claims

1. The utility model provides a meticulous manipulator based on supersound motor which characterized in that: the fine operation manipulator based on the ultrasonic motor comprises a base (1), a rotary table (2), an inner gear ring (3), a rotary gear (4), a rotary ultrasonic motor (5), a main support arm (7), a first rotary ultrasonic motor (8), an inclined support arm (10), a second rotary ultrasonic motor (12), a side rotary arm (11), a third rotary ultrasonic motor (14), a first rotary mechanism (9), a second rotary mechanism (13), a third rotary mechanism (15) and a gripper mechanism (17),

the base (1) is horizontally arranged, the middle part of the upper end surface of the base (1) is provided with a turntable (2), the middle part of the lower end surface of the turntable (2) is provided with a mounting groove (2-1), an inner gear ring (3) is horizontally and fixedly connected in the mounting groove (2-1), a rotary ultrasonic motor (5) is fixedly arranged on the base (1), a motor shaft of the rotary ultrasonic motor (5) is connected with a rotary transmission shaft (6), a rotary gear (4) is fixedly arranged on the rotary transmission shaft (6), the rotary gear (4) is meshed with the inner gear ring (3),

the main support arm (7) is vertically and fixedly connected with the middle part of the upper end surface of the turntable (2), the upper end of the main support arm (7) is provided with a first rotary ultrasonic motor (8) and a first rotary mechanism (9), the side wall of one end of the inclined support arm (10) is connected with the first rotary mechanism (9), the first rotary ultrasonic motor (8) drives the inclined support arm (10) to rotate through the first rotary mechanism (9),

the other end of the inclined support arm (10) is provided with a second rotary ultrasonic motor (12) and a second rotary mechanism (13), the side wall of one end of the side rotary arm (11) is connected with the second rotary mechanism (13), the second rotary ultrasonic motor (12) drives the side rotary arm (11) to rotate through the second rotary mechanism (13),

the other end of the side spiral arm (11) is vertically and fixedly connected with a connecting plate (16), a third rotary ultrasonic motor (14) and a third rotary mechanism (15) are arranged on the connecting plate (16), a hand clamping mechanism (17) is connected with the third rotary mechanism (15), the third rotary ultrasonic motor (14) drives the hand clamping mechanism (17) to rotate through the third rotary mechanism (15),

the first rotary ultrasonic motor (8), the second rotary ultrasonic motor (12) and the third rotary ultrasonic motor (14) are respectively connected with a controller.

2. The ultrasonic motor-based fine manipulator of claim 1, wherein: the outer circumferential side wall of the lower end of the rotary table (2) is provided with a positioning convex circle (19), the upper end face of the base (1) is provided with a circular groove (1-1), the positioning convex circle (19) is arranged in the circular groove (1-1), a check ring (18) is arranged at a notch of the circular groove (1-1), the check ring (18) is arranged at the upper end of the positioning convex circle (19), and the outer side of the check ring (18) is fixedly connected with the upper end face of the base (1) through a plurality of positioning bolts (20).

3. The ultrasonic motor-based fine manipulator of claim 2, wherein: the lower end of the positioning convex circle (19) is provided with a plurality of groups of rollers (21) along the circumferential direction, the side wall of the lower end of each roller (21) is arranged at the bottom of the circular groove (1-1), and a rotary bearing (23) is arranged between the outer side wall of the mounting groove (2-1) and the inner side wall of the circular groove (1-1).

4. The ultrasonic motor-based fine manipulator of claim 3, wherein: two groups of rolling wheels (22) are uniformly distributed at the lower end of the base (1).

5. An ultrasonic motor based fine manipulator according to claim 1, 2, 3 or 4, characterized in that: the first rotating mechanism (9) comprises a first shell (9-1), a first driving shaft (9-2), a first driving bevel gear (9-3), a first driven shaft (9-4) and a first driven bevel gear (9-5), the first shell (9-1) is fixedly connected to the upper end face of the main support arm (7), a first rotary ultrasonic motor (8) is fixedly connected to the outer side of the first shell (9-1), a motor shaft of the first rotary ultrasonic motor (8) is connected with the first driving shaft (9-2), the first driving shaft (9-2) is arranged in the first shell (9-1) along the axial direction of the main support arm (7), the first driving shaft (9-2) is fixedly connected with the first driving bevel gear (9-3), the first driven shaft (9-4) is arranged along the radial direction of the main support arm (7), one end of the first driven shaft (9-4) is fixedly connected with a first driven bevel gear (9-5), the first driving bevel gear (9-3) is meshed with the first driven bevel gear (9-5), and the other end of the first driven shaft (9-4) penetrates through the first shell (9-1) and is vertically and fixedly connected with the outer circumferential side wall of one end of the inclined support arm (10).

6. The ultrasonic motor-based fine manipulator of claim 5, wherein: the second rotating mechanism (13) comprises a second shell (13-1), a second driving shaft (13-2), a second driving bevel gear (13-3), a second driven shaft (13-4) and a second driven bevel gear (13-5), the second shell (13-1) is fixedly connected to the end face of the other end of the inclined support arm (10), a second rotary ultrasonic motor (12) is fixedly connected to the outer side of the second shell (13-1), a motor shaft of the second rotary ultrasonic motor (12) is connected with the second driving shaft (13-2), the second driving shaft (13-2) is arranged in the second shell (13-1) along the axial direction of the inclined support arm (10), the second driving shaft (13-2) is fixedly connected with the second driving bevel gear (13-3), and the second driven shaft (13-4) is arranged along the radial direction of the inclined support arm (10), one end of a second driven shaft (13-4) is fixedly connected with a second driven bevel gear (13-5), a second driving bevel gear (13-3) is meshed with the second driven bevel gear (13-5), and the other end of the second driven shaft (13-4) penetrates through a second shell (13-1) and is vertically and fixedly connected with the outer circumferential side wall of one end of the side spiral arm (11).

7. The ultrasonic motor-based fine manipulator of claim 6, wherein: the third rotating mechanism (15) comprises a third shell (15-1), a third driving shaft (15-2), a third driving straight gear (15-3), a third driven shaft (15-4) and a third driven straight gear (15-5), a connecting plate (16) is vertically and fixedly connected to the end face of the other end of the side rotating arm (11), the third shell (15-1) is fixedly connected to the end face of the outer side of the connecting plate (16), a third rotary ultrasonic motor (14) is fixedly connected to the end face of the inner side of the connecting plate (16), a motor shaft of the third rotary ultrasonic motor (14) is connected with the third driving shaft (15-2), the third driving shaft (15-2) is arranged in the third shell (15-1) along the axial direction of the side rotating arm (11), the third driving straight gear (15-3) is fixedly connected to the third driving shaft (15-2), a third driven shaft (15-4) is arranged on one side of the third driving shaft (15-2) in parallel, one end of the third driven shaft (15-4) is fixedly connected with a third driven straight gear (15-5), a third driving straight gear (15-3) is meshed with the third driven straight gear (15-5), and the other end of the third driven shaft (15-4) penetrates through a third shell (15-1) and is vertically and fixedly connected with a gripper mechanism (17).

8. The ultrasonic motor-based fine manipulator of claim 7, wherein: the hand clamping mechanism (17) comprises a hand clamping ultrasonic motor (17-1), a driving gear (17-2), two clamping plates (17-5), two driven gears (17-3), two clamping jaw fixing plates (17-4) and two connecting rod mechanisms, the other end of a third driven shaft (15-4) is vertically and fixedly connected with the inner side end face of an installation rack (17-10), the two clamping jaw fixing plates (17-4) are vertically and oppositely arranged on the outer side end face of the installation rack (17-10), a motor shaft of the hand clamping ultrasonic motor (17-1) is fixedly connected with the driving gear (17-2), the driving gear (17-2) is arranged between the two clamping jaw fixing plates (17-4) in parallel, the two driven gears (17-3) are arranged in parallel, and a rotating shaft of the driven gear (17-3) is rotatably connected with the clamping jaw fixing plates (17-4), the two driven gears (17-3) are meshed, the driving gear (17-2) is meshed with one driven gear (17-3), each driven gear (17-3) is provided with a connecting rod mechanism, the two connecting rod mechanisms are symmetrically arranged, the front end of each connecting rod mechanism is provided with a clamping plate (17-5), the two clamping plates (17-5) are arranged oppositely, and the ultrasonic gripper motor (17-1) is connected with the controller.

9. The ultrasonic motor-based fine manipulator of claim 8, wherein: the connecting rod mechanism comprises a clamping arm (17-6), two supporting rods (17-8), two connecting rods (17-7) and two pin shafts (17-9), the clamping arm (17-6) is arranged on the outer side of a driven gear (17-3), the upper end and the lower end of the driven gear (17-3) are respectively provided with one connecting rod (17-7), one end of each connecting rod (17-7) is fixedly connected with a rotating shaft of the driven gear (17-3), the other end of each connecting rod (17-7) is rotatably connected with the rear end of the corresponding clamping arm (17-6), the pin shaft (17-9) is arranged on the front side of the driven gear (17-3), the pin shaft (17-9) is vertically and fixedly connected with a clamping jaw fixing plate (17-4), the two supporting rods (17-8) are arranged between the pin shaft (17-9) and the clamping arm (17-, one end of the supporting rod (17-8) is rotatably connected with the pin shaft (17-9), the other end of the supporting rod (17-8) is rotatably connected with the middle part of the clamping arm (17-6), and the outer side wall of the clamping plate (17-5) is rotatably connected with the front end of the clamping arm (17-6).

10. The ultrasonic motor-based fine manipulator of claim 9, wherein: the inner side wall of the splint (17-5) is provided with a concave surface (17-5-1).