CN211206608U - 一种射频匹配网络及射频电源系统 - Google Patents
一种射频匹配网络及射频电源系统 Download PDFInfo
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CN110456136A (zh) * | 2019-09-06 | 2019-11-15 | 深圳市百世达半导体设备有限公司 | 一种射频匹配网络及射频电源系统 |
CN112505398A (zh) * | 2020-12-15 | 2021-03-16 | 杭州和利时自动化有限公司 | 一种ai装置及系统 |
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CN110456136A (zh) * | 2019-09-06 | 2019-11-15 | 深圳市百世达半导体设备有限公司 | 一种射频匹配网络及射频电源系统 |
CN112505398A (zh) * | 2020-12-15 | 2021-03-16 | 杭州和利时自动化有限公司 | 一种ai装置及系统 |
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Address after: 518102 Room 101, 201, 301, Building B, Functional Support Area, Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Baoan District, Shenzhen, Guangdong Province Patentee after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Address before: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Patentee before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. |
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