CN211199476U - Crystal silicon furnace heat preservation device and crystal silicon furnace - Google Patents
Crystal silicon furnace heat preservation device and crystal silicon furnace Download PDFInfo
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- CN211199476U CN211199476U CN201922310294.9U CN201922310294U CN211199476U CN 211199476 U CN211199476 U CN 211199476U CN 201922310294 U CN201922310294 U CN 201922310294U CN 211199476 U CN211199476 U CN 211199476U
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Abstract
The utility model discloses a crystal silicon stove heat preservation device and crystal silicon stove, heat preservation device includes: the graphite cylinder, the heat preservation layer, the reinforcing layer and the protective layer; the heat-insulating layer surrounds the outer side of the graphite cylinder and comprises a graphite soft felt; the reinforcing layer is arranged on the outer side of the heat-insulating layer and used for fixing the heat-insulating layer; the protective layer surrounds the outer side of the heat insulation layer provided with the reinforcing layer; the graphite barrel and the protective layer form an interlayer space with openings at two axial sides of the graphite barrel, and the openings at two sides of the interlayer space are sealed by sealing layers. The utility model discloses when guaranteeing heat preservation performance of heat preservation device, provide a heat preservation device convenient to dismouting to the leakproofness is better, prevents wherein insulation material oxidation.
Description
Technical Field
The utility model relates to a crystal silicon manufacturing and processing technology field, in particular to crystal silicon furnace heat preservation device and crystal silicon furnace.
Background
In the crystal silicon furnace, the heat preservation device of the thermal field can not only ensure the stability of the crystal forming condition, but also help to reduce the power consumption of the crystal silicon furnace. The existing crystal silicon furnace heat preservation device mainly comprises two main flow structures: one is a heat preservation device for a solidified felt, wherein the solidified felt is a product obtained by bonding and molding a carbon felt by using a binder and graphitizing and purifying the carbon felt in a calcining furnace. The other is a graphite soft felt heat preservation device, and the graphite soft felt is a product obtained by graphitizing and purifying a carbon felt in a calcining furnace. The heat preservation device for the solidified felt is convenient to disassemble and assemble and long in service life, but the heat preservation effect of the heat preservation device is inferior to that of a graphite soft felt, and the preparation process is high in cost and complicated. For the heat preservation device using the graphite soft felt as the heat preservation material, the cost is low, the heat preservation effect is good, but the disassembly and the assembly are inconvenient, and the service life is short. In addition, both the cured felt and the graphite soft felt have the defect of easy oxidation, and once the heat insulation material is oxidized, the heat insulation performance and the service life of the heat insulation device are directly reduced.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem that mainstream crystal silicon stove heat preservation device exists, the embodiment of the utility model provides a brilliant silicon stove heat preservation device and brilliant silicon stove. The technical scheme is as follows:
in one aspect, a crystal silicon furnace heat preservation device is provided, including:
the graphite cylinder, the heat preservation layer, the reinforcing layer and the protective layer; the heat-insulating layer surrounds the outer side of the graphite cylinder and comprises a graphite soft felt; the reinforcing layer is arranged on the outer side of the heat-insulating layer and used for fixing the heat-insulating layer; the protective layer surrounds the outer side of the heat insulation layer provided with the reinforcing layer; the graphite barrel and the protective layer form an interlayer space with openings at two axial sides of the graphite barrel, and the openings at two sides of the interlayer space are sealed by sealing layers.
Further, the reinforcing layer is a molybdenum wire surrounding the heat insulation layer.
Further, the protective layer is made of a stainless steel material.
Further, the sealing layer is made of graphite powder.
Furthermore, graphite paper is arranged on the outer side of the graphite cylinder, and the graphite paper covers gaps of the graphite cylinder.
Further, the graphite cylinder may be a cylinder having a circular radial cross section or a polygonal cylinder having a polygonal radial cross section.
Furthermore, the height of the protective layer is greater than that of the protective layer which protrudes out of the graphite cylinder along the two axial sides of the graphite cylinder to form an inner-outer height difference, openings of the heat preservation layer along the two axial sides of the graphite cylinder are both stepped structures matched with the inner-outer height difference, and the stepped structures comprise vertical faces and planes which are perpendicular to each other.
Furthermore, the upper port of the heat-insulating layer in the openings at two sides along the axial direction of the graphite cylinder comprises a step-shaped structure with a vertical surface connecting two planes.
Furthermore, the lower port of the heat-insulating layer in the openings at two sides in the axial direction of the graphite cylinder comprises the step-shaped structure formed by connecting three planes at intervals on two vertical surfaces.
On the other hand, the crystal silicon furnace is provided with the crystal silicon furnace heat preservation device.
The utility model provides a beneficial effect that technical scheme brought is:
1. the utility model adopts the graphite soft felt as the main heat insulation material, and utilizes the reinforcing layer to fix the heat insulation material, thereby ensuring the heat insulation performance, simultaneously shaping the heat insulation material, preventing the heat insulation material from loosening and being convenient for disassembly and assembly;
2. the utility model utilizes the graphite paper outside the graphite cylinder, the sealing layers at the upper end and the lower end of the graphite cylinder and the stainless steel protective layer outside the heat preservation layer to completely seal the heat preservation layer material, prevent the heat preservation layer material from contacting air and oxidizing, and is beneficial to prolonging the service life of the heat preservation device;
3. the utility model discloses when guaranteeing heat preservation performance of heat preservation device, provide a heat preservation device convenient to dismouting to the leakproofness is better, prevents wherein insulation material oxidation.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic view of a heat preservation device of a crystalline silicon furnace provided by the embodiment of the present invention.
In the figure: 1. a graphite cylinder; 2. a heat-insulating layer; 3. a reinforcement layer; 4. a protective layer; 5. graphite paper; 6. an upper port; 7. a lower port; 8. a sealing layer; 9. a top cover; 10. a bottom cover.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following description will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. It should be noted that: the directions or positional relationships indicated as "inner" and "outer" in the description of the present invention are the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, and do not indicate or imply that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention.
The crystal silicon furnace heat preservation device is arranged in a crystal silicon furnace body and plays a role in maintaining the stability of a thermal field. The heat insulating material in the heat insulating device mainly adopts a solidified felt or a graphite soft felt, and both the solidified felt and the graphite soft felt have the defect of easy oxidation. The heat preservation device adopting the solidified felt has weaker heat preservation performance and higher preparation cost, and the heat preservation device adopting the graphite soft felt is inconvenient to disassemble and assemble and has shorter service life. The utility model discloses a overcome the defect that the soft felt heat preservation device of graphite exists and propose following technical scheme:
example 1
As shown in fig. 1, a heat preservation device of a crystalline silicon furnace sequentially comprises from inside to outside: graphite cylinder 1, heat preservation 2, back up coat 3, protective layer 4.
The graphite cylinder 1 may be a cylinder with a circular radial cross section, or a polygonal cylinder with a polygonal radial cross section, wherein the polygonal cylinder may be a square cylinder, a hexagonal cylinder, an octagonal cylinder, or the like. The graphite cylinder 1 is generally formed by splicing and combining a plurality of parts, such as: the graphite barrel is of a complete barrel-shaped structure formed by splicing three barrel-shaped single bodies in a stacked mode, and therefore a transverse splicing gap exists in the graphite barrel. In order to improve the sealing performance of the graphite cylinder, graphite paper 5 is attached to the outside of the graphite cylinder 1. Specifically, the graphite paper 5 may be attached to the gap outside the graphite barrel 1 separately, for example, the graphite paper is attached to the gap, the upper and lower sides of the graphite paper exceed the gap center line by 3cm to 5cm, or the graphite paper may be attached to the entire outside of the graphite barrel 1. The heat-insulating layer 2 adopts graphite soft felt as a heat-insulating material. The reinforcing layer 3 is made of molybdenum wires and tied up on the outer side of the graphite soft felt to fix the graphite soft felt, and the defects that the graphite soft felt is easy to loosen and difficult to shape are overcome. The molybdenum wire has good heat resistance, is suitable for high-temperature thermal fields, and has long service life. The protective layer 4 is a stainless steel plate made of stainless steel, and surrounds the outer side of the heat preservation layer provided with the reinforcing layer and is located on the outermost side of the whole heat preservation device. The graphite soft felt is filled in an interlayer space which is formed by the graphite cylinder 1 and the protective layer 4 and is opened along two axial sides of the graphite cylinder 1, the protective layer 4 protrudes out of the graphite cylinder along two axial sides of the graphite cylinder 1 to form an inner-outer height difference, two ends of the graphite soft felt are of a step-shaped structure matched with the inner-outer height difference and used for being matched and sealed with a top cover 9 and a bottom cover 10 which are installed subsequently, and specifically, the end face of the graphite soft felt at the upper port 6 of the interlayer space is of a step-shaped structure comprising a vertical face and two planes connected. The end surface of the graphite soft felt at the lower port 7 of the interlayer space is of a step-shaped structure comprising two planes which are connected at intervals. The upper port 6 and the lower port 7 of the interlayer space both adopt graphite powder as a sealing layer 8, namely the sealing layer 8 covers the end face of the graphite cylinder 1, the end face of the graphite soft felt and the end face of the stainless steel protective layer 4.
Based on above-mentioned heat preservation device, the utility model discloses an inboard graphite section of thick bamboo 1 with graphite paper, the stainless steel protective layer 4 in the outside of pasting to and graphite section of thick bamboo 1 and stainless steel protective layer 4 form the upper port 6 of the intermediate layer space and the graphite powder sealing layer 8 of lower port 7, carried out all-round sealing to the heat preservation, prevent insulation material contact air oxidation.
When the heat preservation device is used, the heat preservation device is matched with the top cover 9 and the bottom cover 10, a technician places the bottom cover into the crystal silicon furnace, puts the heat preservation device on the bottom cover, and finally installs the top cover on the heat preservation device.
When the heat preservation device disclosed by the embodiment is prepared, the heat preservation device can be sequentially installed from the inner layer to the outer layer, and finally the heat preservation material between the graphite cylinder and the protective layer is packaged by the sealing layer.
Based on above-mentioned disclosed heat preservation device, this embodiment still discloses a crystal silicon stove, sets up above-mentioned disclosed crystal silicon stove heat preservation device in this crystal silicon stove.
The utility model provides a beneficial effect that technical scheme brought is:
1. the utility model adopts the graphite soft felt as the main heat insulation material, and utilizes the reinforcing layer to fix the heat insulation material, thereby ensuring the heat insulation performance, simultaneously shaping the heat insulation material, preventing the heat insulation material from loosening and being convenient for disassembly and assembly;
2. the utility model utilizes the graphite paper outside the graphite cylinder, the sealing layers at the upper end and the lower end of the graphite cylinder and the stainless steel protective layer outside the heat preservation layer to completely seal the heat preservation layer material, prevent the heat preservation layer material from contacting air and oxidizing, and is beneficial to prolonging the service life of the heat preservation device;
3. the utility model discloses when guaranteeing heat preservation performance of heat preservation device, provide a heat preservation device convenient to dismouting to the leakproofness is better, prevents wherein insulation material oxidation.
Above-mentioned all optional technical scheme can adopt arbitrary combination to form the optional embodiment of this utility model, and the repeated description is no longer given here.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (10)
1. A heat preservation device of a crystal silicon furnace is characterized by comprising: the graphite cylinder, the heat preservation layer, the reinforcing layer and the protective layer; the heat-insulating layer surrounds the outer side of the graphite cylinder and comprises a graphite soft felt; the reinforcing layer is arranged on the outer side of the heat-insulating layer and used for fixing the heat-insulating layer; the protective layer surrounds the outer side of the heat insulation layer provided with the reinforcing layer; the graphite barrel and the protective layer form an interlayer space with openings at two axial sides of the graphite barrel, and the openings at two sides of the interlayer space are sealed by sealing layers.
2. The crystal silicon furnace heat preservation device of claim 1, wherein the reinforcing layer is molybdenum wires surrounding the heat preservation layer.
3. The crystal silicon furnace heat preservation device of claim 1, wherein the protective layer is made of stainless steel.
4. The crystalline silicon furnace heat preservation device of claim 1, wherein the sealing layer is graphite powder.
5. The crystal silicon furnace heat preservation device of claim 1, wherein the outside of the graphite cylinder is further provided with graphite paper, and the graphite paper covers the gap of the graphite cylinder.
6. The crystal silicon furnace heat preservation device of claim 1, wherein the graphite cylinder is a cylinder with a circular radial section or a polygonal cylinder with a polygonal radial section.
7. The crystal silicon furnace heat preservation device of any one of claims 1 to 6, wherein the protective layer protrudes from the graphite cylinder along two axial sides of the graphite cylinder to form an inside-outside height difference, the heat preservation layer is provided with a step-shaped structure matched with the inside-outside height difference along two axial side openings of the graphite cylinder, and the step-shaped structure comprises vertical faces and planes which are perpendicular to each other.
8. The crystal silicon furnace heat preservation device according to claim 7, wherein the heat preservation layer comprises a stepped structure with two planes connected in a vertical plane along an upper port of two openings in the axial direction of the graphite cylinder.
9. The crystal silicon furnace heat preservation device of claim 7, wherein the lower port of the heat preservation layer along the two side openings in the axial direction of the graphite cylinder comprises the step-shaped structure formed by connecting three planes at intervals on two vertical surfaces.
10. A crystalline silicon furnace, characterized in that the crystalline silicon furnace is internally provided with a heat preservation device of the crystalline silicon furnace as claimed in any one of claims 1 to 9.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112695486A (en) * | 2020-12-22 | 2021-04-23 | 宁晋晶兴电子材料有限公司 | Preparation method of high-purity graphite felt and crystal silicon furnace |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112695486A (en) * | 2020-12-22 | 2021-04-23 | 宁晋晶兴电子材料有限公司 | Preparation method of high-purity graphite felt and crystal silicon furnace |
CN112695486B (en) * | 2020-12-22 | 2023-03-14 | 包头晶澳太阳能科技有限公司 | Preparation method of high-purity graphite felt and crystal silicon furnace |
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Effective date of registration: 20220906 Address after: 055550 Jing Long Street, Ningjin County, Xingtai, Hebei Patentee after: JA SOLAR Co.,Ltd. Address before: 055550 high tech Development Zone, Ningjin County, Xingtai City, Hebei Province Patentee before: NINGJIN JINGXING ELECTRONIC MATERIAL Co.,Ltd. |
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