CN211199399U - High-tightness height-adjustable electrode - Google Patents
High-tightness height-adjustable electrode Download PDFInfo
- Publication number
- CN211199399U CN211199399U CN201921576634.6U CN201921576634U CN211199399U CN 211199399 U CN211199399 U CN 211199399U CN 201921576634 U CN201921576634 U CN 201921576634U CN 211199399 U CN211199399 U CN 211199399U
- Authority
- CN
- China
- Prior art keywords
- electrode
- external
- ring
- fixed
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Plasma Technology (AREA)
Abstract
The utility model discloses a high leakproofness height-adjustable electrode mainly relates to vapor deposition technical field. The electrode assembly comprises an electrode cover plate, an insulator, a locking ring, an electrode frame, an electrode cooling interface and an electrode body; the device also comprises a displacement driving device assembly; the displacement driving device assembly comprises an external driving piece, an internal driven wheel with internal threads arranged on the inner surface, an external casing, a supporting ring fixed with the external casing, and a transmission pipe which is hollow inside and provided with external threads at the top end of the outer side; the external driving piece drives the internal driven wheel to rotate, and the internal thread of the internal driven wheel is in transmission connection with the external thread at the top end of the transmission pipe. The beneficial effects of the utility model reside in that: the existing corrugated pipe technology is abandoned, the height of the electrode is adjustable by adopting a new technology, a series of defects caused by the corrugated pipe technology are overcome, and other equipment can be connected without opening a fixing hole and a sealing hole on the equipment; and radiation leakage protection technology is added.
Description
Technical Field
The utility model relates to a vapor deposition technical field specifically is high leakproofness height-adjustable electrode.
Background
In both PEA L D and PECVD equipment, thin film deposition needs to be completed under certain vacuum conditions, the quality of film formation by the distance between electrodes is critical, and the electrode distance is one of important process parameters influencing the film formation quality, so that the performance of the thin film is critical to be improved and the performance of the thin film is favorably improved if the height of the electrode is continuously adjustable.
The height of the electrode is adjustable by adopting corrugations in the prior art, and when auxiliary devices such as a cooling pipeline, a heating electrode, an excitation source electrode, a thermocouple and the like are connected by adopting a corrugated pipe technology, the device is required to be additionally provided with a hole, and meanwhile, the sealing problem of the hole is also solved. And both ends of the corrugated pipe need to be sealed by O-shaped rings during sealing, so that the technical difficulty is very high. And the radiation leakage protection for the electrodes in the prior art is not good.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a highly sealed height-adjustable electrode, which abandons the prior bellows technology, adopts a new technology to realize the height adjustment of the electrode, solves a series of defects caused by the bellows technology, and can be connected with other auxiliary equipment without opening a fixed hole and a sealing hole on the equipment; and radiation leakage protection technology is added.
The utility model discloses a realize above-mentioned purpose, realize through following technical scheme:
the high-tightness height-adjustable electrode comprises an electrode assembly, wherein the electrode assembly comprises an electrode cover plate, an insulator, a locking ring, an electrode frame, an electrode cooling interface and an electrode body; the bottom edge of the electrode cover plate is fixed with the insulator through a bolt, the locking ring is fixed on the inner side table top of the insulator, the electrode frame is fixed on the locking ring through a bolt, the electrode body is fixed on the electrode frame, and the electrode cooling interface is arranged on the inner side of the electrode frame; the device also comprises a displacement driving device assembly; the displacement driving device assembly comprises an external driving piece, an internal driven wheel with internal threads arranged on the inner surface, an external casing, a supporting ring fixed with the external casing, and a transmission pipe which is hollow inside and provided with external threads at the top end of the outer side; the external driving piece drives the internal driven wheel to rotate, internal threads of the internal driven wheel are in transmission connection with external threads at the top end of the transmission tube, a rotation limiting pin is arranged between the bottom side of the external protective shell and the support ring, a vertical groove is formed in the side face of the lower section, far away from the external threads, of the transmission tube, and the rotation limiting pin is inserted into the vertical groove in a matched mode; and a lower pipe flange is arranged at the bottom of the transmission pipe, and the transmission pipe is fixed with the top of the electrode cover plate through the lower pipe flange.
The outer driving part comprises a stepping motor and a driving gear in transmission connection with an output shaft of the stepping motor, and the inner driven wheel is a gear meshed with the driving gear.
The displacement driving device assembly also comprises a displacement measuring device assembly, and the displacement measuring device assembly comprises a displacement sensor, a sensor fixing frame, a magnetic ring fixing plate and a magnetic ring fixing buckle; the sensor fixing frame is fixed at the top end of the outer protecting shell, the displacement sensor is arranged on the sensor fixing frame, a measuring magnetic ring on a measuring rod of the displacement sensor is limited in a magnetic ring fixing plate and a magnetic ring fixing buckle, two ends of the magnetic ring fixing plate are fixed at the top end of the transmission pipe, and the measuring magnetic ring can slide up and down along the measuring rod.
And a bottom pipe is arranged below the support ring, and a first O-shaped sealing ring is arranged between the side surface below the bottom pipe and the outer wall of the transmission pipe.
And a second O-shaped sealing ring is arranged between the lower pipe flange and the electrode cover plate, a third O-shaped sealing ring is arranged at the fixed position of the bottom edge of the electrode cover plate and the insulator, and a fourth O-shaped sealing ring is arranged between the top of the insulator and the electrode frame.
And a fifth O-shaped sealing ring is arranged at the top of the flange plate of the support ring.
And a shielding cover is arranged on the periphery of the electrode body.
The outer side of the shielding cover is in threaded connection with the outer wall of the cover body.
The outer enclosure wall includes a first outer wall and a second outer wall.
Contrast prior art, the beneficial effects of the utility model reside in that:
1. the height of the electrode can be adjusted by a thread transmission mode, and the transmission pipe is a hollow pipe fitting, and other equipment such as an excitation electrode, an electrode cooling interface, a heating electrode, a thermocouple (temperature sensor) and the like can be connected into the transmission pipe without opening holes on the equipment; the device can realize equipment sealing by five sealing rings through a simpler technology; and meanwhile, a shielding cover is arranged to solve the radiation leakage protection problem.
2. The first O-shaped sealing ring realizes the sealing between the lower side surface of the bottom tube and the outer wall of the transmission tube, ensures the sealing performance when the height of the electrode is adjusted, reduces the opening of equipment, reduces the use cost of the corrugated tube and ensures the sealing performance in the cavity; the second O-shaped sealing ring realizes the sealing between the lower pipe flange and the electrode cover plate; the third O-shaped sealing ring realizes the sealing between the bottom edge of the electrode cover plate and the insulator fixing position; the fourth O-shaped sealing ring realizes the sealing between the top of the insulator and the electrode frame; and after the flange plate of the support ring is connected with the external equipment, the fifth O-shaped sealing ring seals the joint between the flange plate and the external equipment. Thereby realizing the sealing of the cavity. The existence of the five sealing rings can ensure that the whole electrode and the joint of the electrode and the cavity are sealed and airtight. Because the film deposition needs to be finished under a certain vacuum kit, the vacuum pump is arranged in the cavity to pump out the gas in the cavity during working; poor sealing not only can cause air to enter the cavity to influence the film forming quality, but also can cause reactants to leak out of the cavity, and the consequences are not good for individual flammable or harmful gases.
3. The up-and-down movement amount of the electrode is detected by arranging a displacement measuring device assembly. The up-and-down movement of the transmission pipe can drive the magnetic ring fixing plate, the magnetic ring fixing buckle and the measuring magnetic ring to slide along the measuring rod, and the sliding distance of the measuring magnetic ring marks the up-and-down movement amount of the electrode. During operation, the characteristics of the film can be monitored in real time, the change quantity of the electrode distance is input according to the influence of the electrode height on the characteristic quality, the driving motor works, and after the movement quantity is reached, the displacement sensor feeds back, and the driving motor stops.
Drawings
Fig. 1 is a sectional view of the internal structure of the present invention.
Fig. 2 is an enlarged view of a portion a of fig. 1 of the present invention.
Fig. 3 is an enlarged view of the portion B of fig. 1 of the present invention.
Fig. 4 is an enlarged view of the portion C of fig. 1 of the present invention.
Fig. 5 is an enlarged view of the portion D of fig. 1 of the present invention.
Figure 6 is a three-dimensional view of the middle transmission tube of the utility model.
Fig. 7 is a disassembled exploded view of the present invention.
Fig. 8 is a three-dimensional structure diagram of the present invention.
Fig. 9 is a three-dimensional structure diagram of the middle displacement driving device assembly of the present invention.
Reference numerals shown in the drawings:
1. an electrode cover plate; 2. an insulator; 3. locking a ring; 4. an electrode holder; 5. an electrode cooling interface; 6. an electrode body; 7. an external drive member; 8. an inner driven wheel; 9. an outer protective shell; 10. a support ring; 11. a drive tube; 12. A rotation limiting pin; 13. a vertical slot; 14. a lower pipe flange; 15. a stepping motor; 16. a driving gear; 17. a displacement sensor; 18. a sensor mount; 19. a magnetic ring fixing plate; 20. a magnetic ring fixing buckle; 21. a measuring rod; 22. a measuring magnetic ring; 23. a bottom tube; 24. a first O-ring seal; 25. a second O-ring seal; 26. A third O-shaped sealing ring; 27. a fourth O-shaped sealing ring; 28. a fifth O-shaped sealing ring; 29. a shield case; 30. the outer wall of the cover body; 31. a first outer wall; 32. a second outer wall.
Detailed Description
The present invention will be further described with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teachings of the present invention, and these equivalents also fall within the scope defined in the present application.
The present invention will be described with reference to the accompanying drawings of fig. 1-9. The utility model discloses a high leakproofness height-adjustable electrode, the major structure includes the electrode assembly, the electrode assembly includes electrode cover plate 1, insulator 2, locking ring 3, electrode frame 4, electrode cooling interface 5 and electrode body 6; the bottom edge of the electrode cover plate 1 is fixed with the insulator 2 through bolts, the locking ring 3 is fixed on the inner side table top of the insulator 2, the electrode frame 4 is fixed on the locking ring 3 through bolts, the electrode body 6 is fixed on the electrode frame 4, and the electrode cooling interface 5 is arranged on the inner side of the electrode frame 4; the specific improvement scheme for the technology is as follows:
the device also comprises a displacement driving device assembly; the displacement driving device assembly comprises an external driving piece 7, an internal driven wheel 8 with internal threads arranged on the inner surface, an external casing 9, a support ring 10 fixed with the external casing 9, and a transmission pipe 11 which is hollow inside and provided with external threads at the top end of the outer side; the external driving piece 7 drives the internal driven wheel 8 to rotate, internal threads of the internal driven wheel 8 are in transmission connection with external threads at the top end of a transmission pipe 11, a rotation limiting pin 12 is arranged between the bottom side of the external protective shell 9 and the support ring 10, a vertical groove 13 is arranged on the side surface of the lower section, far away from the external threads, of the transmission pipe 11, and the rotation limiting pin 12 is inserted into the vertical groove 13 in a matched mode; the bottom of the transmission pipe 11 is provided with a pipe lower flange 14, and the transmission pipe 11 is fixed with the top of the electrode cover plate 1 through the pipe lower flange 14. The external driving part 7 comprises a stepping motor 15 and a driving gear 16 in transmission connection with an output shaft of the stepping motor 15, and the internal driven wheel 8 is a gear meshed with the driving gear 16.
The principle method for adjusting the height of the electrode is detailed as follows: step motor 15 drive driving gear 16's rotation to drive driving gear 16 engaged with interior driven wheel 8 and rotate, interior internal thread and the external screw thread transmission on driving pipe 11 top of following wheel 8 are connected, the hypomere side of keeping away from the external screw thread on driving pipe 11 is equipped with perpendicular groove 13, limit commentaries on classics round pin 12 cooperation is inserted in perpendicular groove 13, this just makes interior driven wheel 8 rotate the time realization driving pipe 11 reciprocate, the electrode assembly sets up in driving pipe 11 below, thereby driving reciprocating of electrode assembly. The height of the electrode can be adjusted by the method. In addition, the transmission pipe 11 is hollow, and other devices such as an excitation electrode, an electrode cooling interface 5, a heating electrode, a thermocouple temperature sensor and the like can be connected into the transmission pipe 11 without opening holes on the devices.
Further improvement:
in order to more conveniently know the electrode displacement, the displacement driving device assembly further comprises a displacement measuring device assembly, and the displacement measuring device assembly comprises a displacement sensor 17, a sensor fixing frame 18, a magnetic ring fixing plate 19 and a magnetic ring fixing buckle 20; the sensor fixing frame 18 is fixed at the top end of the outer casing 9, the displacement sensor 17 is arranged on the sensor fixing frame 18, a measuring magnetic ring 22 on a measuring rod 21 of the displacement sensor 17 is limited inside a magnetic ring fixing plate 19 and a magnetic ring fixing buckle 20, two ends of the magnetic ring fixing plate 19 are fixed at the top end of the transmission pipe 11, and the measuring magnetic ring 22 can slide up and down along the measuring rod 21.
The electrode displacement detection principle method is detailed as follows: when the transmission pipe 11 moves up and down under the screw thread transmission, the magnetic ring fixing plate 19, the magnetic ring fixing buckle 20 and the measuring magnetic ring 22 can be driven to slide along the measuring rod 21, and the sliding distance of the measuring magnetic ring 22 marks the up-and-down movement amount of the electrode. Therefore, the displacement measuring device assembly can be used for conveniently detecting the up-and-down movement of the electrode.
Further improvement:
a bottom tube 23 is arranged below the support ring 10, and a first O-shaped sealing ring 24 is arranged between the side surface below the bottom tube 23 and the outer wall of the transmission tube 11.
The first O-shaped sealing ring 24 realizes the sealing between the side surface below the bottom tube 23 and the outer wall of the transmission tube 11, ensures the sealing performance when the height of the electrode is adjusted, reduces the opening of equipment, reduces the use cost of the corrugated tube and ensures the sealing performance in the cavity.
Further improvement:
a second O-shaped sealing ring 25 is arranged between the lower pipe flange 14 and the electrode cover plate 1, a third O-shaped sealing ring 26 is arranged at the fixed position of the bottom edge of the electrode cover plate 1 and the insulator 2, and a fourth O-shaped sealing ring 27 is arranged between the top of the insulator 2 and the electrode frame 4. The second O-shaped sealing ring 25 realizes the sealing between the lower pipe flange 14 and the electrode cover plate 1; the third O-shaped sealing ring 26 realizes the sealing between the bottom edge of the electrode cover plate 1 and the fixed part of the insulator 2; a fourth O-ring 27 seals between the top of the insulator 2 and the electrode holder 4.
Further improvement:
and a fifth O-shaped sealing ring 28 is arranged at the top of the flange plate of the support ring 10.
After the flange of the support ring 10 is connected to the external device, the fifth O-ring 28 seals the joint between the flange and the external device, thereby sealing the electrode and the cavity.
To sum up, five sealing steps are carried out: the existence of the five sealing rings can ensure that the whole electrode and the joint of the electrode and the cavity are sealed and airtight. Because the film deposition needs to be finished under a certain vacuum kit, the vacuum pump is arranged in the cavity to pump out the gas in the cavity during working; poor sealing not only can cause air to enter the cavity to influence the film forming quality, but also can cause reactants to leak out of the cavity, and the consequences are not good for individual flammable or harmful gases.
Further improvement:
a shielding cover 29 is arranged on the periphery of the electrode body 6. The shield 29 solves the radiation leakage protection problem.
Further improvement:
the outer side of the shielding case 29 is in threaded connection with a case outer wall 30. The outer wall 30 of the housing and the shield 29 are connected by screw threads, and the size of the shielding space of the shield 29 can be adjusted by rotation.
Further improvement:
the housing outer wall 30 includes a first outer wall 31 and a second outer wall 32. The first outer wall 31 and the second outer wall 32 are provided so that the outer wall of the shield case 29 is fixed to the shield case 29 by screwing the upper and lower portions. When only one cover outer wall 30 is arranged, the size of the shielding space can be irregularly changed by irregularly rotating the cover outer wall 30 along the outer side thread of the shielding cover 29. This is similar to: if a single nut is resting on the screw, the nut is easily moved on the screw, and if two nuts are screwed on the screw at the same time, the two nuts are screwed together, thus ensuring that the nuts do not move on the screw any more.
Claims (9)
1. The high-tightness height-adjustable electrode comprises an electrode assembly, wherein the electrode assembly comprises an electrode cover plate (1), an insulator (2), a locking ring (3), an electrode frame (4), an electrode cooling interface (5) and an electrode body (6); the bottom edge of the electrode cover plate (1) is fixed with the insulator (2) through bolts, the locking ring (3) is fixed on the table top on the inner side of the insulator (2), the electrode frame (4) is fixed on the locking ring (3) through bolts, the electrode body (6) is fixed on the electrode frame (4), and the electrode cooling interface (5) is arranged on the inner side of the electrode frame (4);
the method is characterized in that:
the device also comprises a displacement driving device assembly; the displacement driving device assembly comprises an external driving piece (7), an internal driven wheel (8) with internal threads arranged on the inner surface, an external casing (9), a support ring (10) fixed with the external casing (9), and a transmission pipe (11) which is hollow inside and provided with external threads at the top end of the outer side; the external driving piece (7) drives the internal driven wheel (8) to rotate, internal threads of the internal driven wheel (8) are in transmission connection with external threads at the top end of a transmission pipe (11), a rotation limiting pin (12) is arranged between the bottom side of the external protective shell (9) and the support ring (10), a vertical groove (13) is formed in the side face of the lower section, far away from the external threads, of the transmission pipe (11), and the rotation limiting pin (12) is inserted into the vertical groove (13) in a matched mode;
the bottom of the transmission pipe (11) is provided with a pipe lower flange (14), and the transmission pipe (11) is fixed with the top of the electrode cover plate (1) through the pipe lower flange (14).
2. The highly hermetic height adjustable electrode according to claim 1, wherein: the external driving piece (7) comprises a stepping motor (15) and a driving gear (16) in transmission connection with an output shaft of the stepping motor (15), and the internal driven wheel (8) is a gear meshed with the driving gear (16).
3. The highly hermetic height adjustable electrode according to claim 1, wherein: the displacement driving device assembly also comprises a displacement measuring device assembly, and the displacement measuring device assembly comprises a displacement sensor (17), a sensor fixing frame (18), a magnetic ring fixing plate (19) and a magnetic ring fixing buckle (20); the sensor fixing frame (18) is fixed to the top end of the outer protecting shell (9), the displacement sensor (17) is arranged on the sensor fixing frame (18), a measuring magnetic ring (22) on a measuring rod (21) of the displacement sensor (17) is limited to the inside of a magnetic ring fixing plate (19) and a magnetic ring fixing buckle (20), two ends of the magnetic ring fixing plate (19) are fixed to the top end of the transmission pipe (11), and the measuring magnetic ring (22) can slide up and down along the measuring rod (21).
4. The highly sealable height adjustable electrode according to claim 1 or 3, wherein: a bottom tube (23) is arranged below the support ring (10), and a first O-shaped sealing ring (24) is arranged between the side surface below the bottom tube (23) and the outer wall of the transmission tube (11).
5. The highly hermetic height adjustable electrode according to claim 1, wherein: a second O-shaped sealing ring (25) is arranged between the lower pipe flange (14) and the electrode cover plate (1), a third O-shaped sealing ring (26) is arranged at the fixed position of the bottom edge of the electrode cover plate (1) and the insulator (2), and a fourth O-shaped sealing ring (27) is arranged between the top of the insulator (2) and the electrode frame (4).
6. The highly hermetic height adjustable electrode according to claim 1, wherein: and a fifth O-shaped sealing ring (28) is arranged at the top of the flange plate of the support ring (10).
7. The highly hermetic height adjustable electrode according to claim 1, wherein: and a shielding cover (29) is arranged on the periphery of the electrode body (6).
8. The highly hermetic height adjustable electrode according to claim 7, wherein: the outer side of the shielding cover (29) is in threaded connection with a cover outer wall (30).
9. The highly hermetic height adjustable electrode according to claim 8, wherein: the cover outer wall (30) comprises a first outer wall (31) and a second outer wall (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921576634.6U CN211199399U (en) | 2019-09-20 | 2019-09-20 | High-tightness height-adjustable electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921576634.6U CN211199399U (en) | 2019-09-20 | 2019-09-20 | High-tightness height-adjustable electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211199399U true CN211199399U (en) | 2020-08-07 |
Family
ID=71886869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921576634.6U Expired - Fee Related CN211199399U (en) | 2019-09-20 | 2019-09-20 | High-tightness height-adjustable electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211199399U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110527985A (en) * | 2019-09-20 | 2019-12-03 | 杨永亮 | High leakproofness height adjustable electrode |
-
2019
- 2019-09-20 CN CN201921576634.6U patent/CN211199399U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110527985A (en) * | 2019-09-20 | 2019-12-03 | 杨永亮 | High leakproofness height adjustable electrode |
| CN110527985B (en) * | 2019-09-20 | 2024-02-20 | 皖西学院 | High-tightness height-adjustable electrode |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211199399U (en) | High-tightness height-adjustable electrode | |
| CN116203122A (en) | Magnet structure defect detection device | |
| CN110527985B (en) | High-tightness height-adjustable electrode | |
| CN209166742U (en) | A kind of multi-purpose performing leak test tooling of one | |
| CN106799338A (en) | Glue dispensing valve | |
| EP3965133A1 (en) | High anti-vibration gas density relay | |
| CN105782458A (en) | Dynamic seal device for star sensor calibration device in compound environment | |
| CN108916382A (en) | Vacuum with non-contacting seal drive mechanism is fluorinated device | |
| CN112540140B (en) | Equipment and method for measuring trace impurities in HF (hydrogen fluoride) by gas chromatography | |
| CN207717304U (en) | A kind of air leakage detector | |
| WO2023123635A1 (en) | Multifunctional automatic capping machine | |
| CN211008625U (en) | Movable natural gas well head pressure test is equipped | |
| CN210372018U (en) | Sealing device and medical equipment | |
| CN213120979U (en) | Waterproof performance measuring instrument for engine assembly | |
| CN2844905Y (en) | Low temperature in-situ infrared reflective spectrum electrochemical pool | |
| CN211121735U (en) | Vacuum capsule manometer | |
| CN113465841A (en) | Air tightness detection device | |
| CN216207207U (en) | Intelligent high-precision digital differential pressure transmitter | |
| CN107449564B (en) | A kind of hybrid vehicle P2 housing seal detection device | |
| CN219095419U (en) | Hot-pressing composite forming device | |
| CN220819302U (en) | Pressure transmitter for high vacuum environment | |
| CN215722602U (en) | Hydraulic engineering pipeline leakage detection device convenient to dismouting | |
| CN220154801U (en) | Intelligent child watch air tightness detector | |
| CN209820709U (en) | Air-tight device | |
| CN212806564U (en) | Linear feeding device for vacuum packaging furnace chamber for chip welding |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200807 Termination date: 20210920 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |