CN211182790U

CN211182790U - Light splitting device for ultraviolet laser

Info

Publication number: CN211182790U
Application number: CN202020311051.7U
Authority: CN
Inventors: 姚爽; 郑权; 曲大鹏; 蒲双双; 窦微; 李昕奇; 赵岭; 张文彦
Original assignee: Changchun New Industries Optoelectronics Tech Co ltd
Current assignee: Changchun New Industries Optoelectronics Tech Co ltd
Priority date: 2020-03-13
Filing date: 2020-03-13
Publication date: 2020-08-04
Anticipated expiration: 2030-03-13

Abstract

The utility model relates to a light splitting device for an ultraviolet laser, which comprises a heat sink base, three lens bases and three high-transmittance high-reflectivity chemical film-coated lenses; the heat sink base is arranged at the output front end of the ultraviolet laser; the three lens bases are all arranged on the heat sink base, the three high-transmittance high-reflectivity chemical plating lenses are respectively fixed on the three lens bases, each high-transmittance high-reflectivity chemical plating lens comprises a glass substrate, one side of the glass substrate is plated with an ultraviolet wavelength high-reflectivity film and a composite light beam anti-reflection film except the ultraviolet wavelength, and the other side of the glass substrate is plated with a composite light beam anti-reflection film except the ultraviolet wavelength; the composite laser is incident to the first lens, reflected, incident to the second lens, reflected again, incident to the third lens, and reflected by the third lens, and then the ultraviolet laser and the original composite incident beam are output in parallel. The light splitting device is simple in structure and small in size, and the damage probability threshold of the thin film is improved.

Description

Light splitting device for ultraviolet laser

Technical Field

The utility model belongs to the beam splitting device field, concretely relates to beam splitting device for ultraviolet laser instrument. The light splitting device can separate a plurality of laser beams during ultraviolet output and output ultraviolet laser beams.

Background

At present, an all-solid-state ultraviolet laser becomes an ideal laser light source for laser processing such as marking and micro-drilling of semiconductor materials, and is widely applied to the fields of semiconductor industry, material preparation, manufacturing of all-optical devices, integrated circuit boards, bioengineering and the like.

There are two types of beam splitting devices commonly used in the existing market for ultraviolet lasers. The first is to use ultraviolet isosceles triangle prism to split ultraviolet, the device needs two isosceles triangle prisms, first uses the first isosceles triangle prism to split ultraviolet wavelength and composite wavelength, the process is mainly to add a black baffle in front of the first isosceles triangle prism, and use the black baffle to block the composite wavelength; and then, outputting ultraviolet rays in parallel by using a second isosceles triangular prism to realize the output of the ultraviolet laser. The light splitting device occupies a large area of the output end of the laser, so that the laser is large in size, low in light splitting efficiency and long in light splitting path; in addition, because the deviation angles of the wavelengths in the triangular prism are different, the light rays with different wavelengths need to be emitted at the minimum deviation angle position, and the light rays cannot be output due to the limitation of the minimum deviation angle by using the triangular prism, such as missing the minimum deviation angle. The second is to adopt a single coated optical lens to perform light splitting, the light splitting device needs the ratio of the composite light beam reflectivity and the ultraviolet band transmissivity of the coated optical lens to be a certain value, and the cost for obtaining the coated optical lens with the required reflectivity and the transmissivity in a certain ratio is very high under the influence of coating precision; in addition, since the ultraviolet band laser is easy to damage the ultraviolet high-transmittance film, it is necessary to consider increasing the damage threshold of the ultraviolet high-transmittance film to improve the performance of the ultraviolet laser.

Disclosure of Invention

An object of the utility model is to provide a beam split device for ultraviolet laser to overcome the not enough that exists among the prior art. The light splitting device is simple in structure and small in size, and reduces the damage probability to the film when the ultraviolet laser is output, so that the output of the ultraviolet laser is realized.

In order to achieve the above purpose, the utility model particularly adopts the following technical scheme:

a light splitting device for an ultraviolet laser comprises a heat sink base, three lens bases and three high-transmittance high-reflectivity chemical coating lenses, wherein the heat sink base is arranged at the output front end of the ultraviolet laser, the three lens bases are all arranged on the heat sink base, the three high-transmittance high-reflectivity chemical coating lenses are respectively fixed on the three lens bases, each high-transmittance high-reflectivity chemical coating lens comprises a glass substrate, an ultraviolet wavelength high-reflectivity film and a composite light beam anti-reflection film except the ultraviolet wavelength are plated on one side of the glass substrate, the composite light beam anti-reflection film except the ultraviolet wavelength is plated on the other side of the glass substrate, composite laser enters a first high-transmittance high-reflectivity chemical coating lens at an angle of incidence theta, is reflected by the first high-transmittance high-reflectivity chemical coating lens, then enters a second high-transmittance high-reflectivity chemical coating lens at an angle of incidence of α, is reflected by the second high-transmittance high-reflectivity chemical coating lens, then enters a third high-transmittance high-reflectivity chemical coating lens at an angle of incidence of β, and then is reflected by the third high-transmittance high-reflectivity chemical coating lens, and then the ultraviolet output laser.

Preferably, the lens base is provided with L type mounting surfaces, and one surface of the high-transmittance high-reflectivity coated lens plated with the composite light beam antireflection film except for ultraviolet wavelength is adhered to the vertical surface of the L type mounting surface.

As the utility model discloses an it is preferred, the lens base is fixed on heat sink base through the screw, adjusts high reflection of light science coating film lens angle through adjusting the lens base.

As the optimization of the utility model, theta + α + β is 90 degrees, 0 degrees < theta < 90 degrees, 0 degrees < α < 90 degrees

Preferably, the ultraviolet wavelength range is 200nm to 380nm, and the wavelength range of the composite light beam excluding the ultraviolet wavelength range is 400nm to 1600 nm.

As the utility model discloses a preferred, high reflection of light coating with chemical lens size of penetrating is P, and 1 × 1 × 0.5.5 mm is ≦ P ≦ 9 × 9 × 1 mm.

The utility model has the advantages and beneficial effect:

1. the utility model provides a beam split device can realize carrying out beam split output to compound laser for specific wave band sees through the output, and ultraviolet wave band reflection output obtains the single wavelength of ultraviolet.

2. The light splitting device provided by the utility model has simple structure, compact installation, various placing modes and flexible use; in addition, the high-transmittance high-reflectivity chemical coating lens in the light splitting device has large allowable angle adjustment, larger allowable error, small size occupation space, low manufacturing cost and manufacturing difficulty and can realize batch production.

3. The light splitting device provided by the utility model adopts the multi-piece coated lens to realize the single output of wavelength more easily than the single coated lens, and obtains the higher laser wavelength of purity more easily.

4. The utility model adopts the multi-piece coated optical lens to perform high reflection and high transmission, continuously reflects ultraviolet wavelength, and improves the anti-damage efficiency of the film, because the anti-damage threshold of the ultraviolet reflecting film is higher than that of the ultraviolet high transmission film; in addition, the multi-piece ultraviolet high-reflection film lens can reduce the damage probability to the film and improve the threshold value of the damage probability of the film, so that the single stability of ultraviolet wavelength is realized more easily, and the multi-piece ultraviolet high-reflection film lens has the advantages of easy design and wide range of applicable ultraviolet wave bands.

5. The utility model discloses a with compound laser direct input beam split device, can realize the transmission and the reflection function of different wave band light through these optical film, do benefit to and realize laser output, do not have complicated debugging process, the light energy utilization rate is high.

6. The utility model has wide applicable wave band range and does not change laser facula; the linewidth of the laser light source is not changed, and the spectral purity is high.

Drawings

Fig. 1 is a schematic structural view of the light splitting device of the present invention;

FIG. 2 is a schematic structural diagram of a light-splitting device when composite laser is incident on a first high-transmittance high-reflectivity optical coated lens;

FIG. 3 is a schematic structural view of the light-splitting device when the composite laser is incident on the third high-transmittance high-reflectivity electroless plating lens;

fig. 4 is a schematic angle diagram of the light splitting device when the composite laser is incident on the first high-transmittance high-reflectivity chemical plating lens.

Detailed Description

The present invention will be further described with reference to the following drawings and examples, but is not limited thereto.

Example 1

Referring to fig. 1, 2 and 4, the utility model provides a beam splitting device for ultraviolet laser, including heat sink base 1, first lens base 2, second lens base 3, third lens base 4, first high-transmittance high-reflectance optical coating lens 5, second high-transmittance high-reflectance optical coating lens 6, third high-transmittance high-reflectance optical coating lens 7, the heat sink base is installed at the output front end of the ultraviolet laser, first lens base 2, second lens base 3, third lens base 4 are all installed on the heat sink base through screws 8, the three lens bases are in triangular distribution, first high-transmittance high-reflectance optical coating lens 5 is fixed on first lens base 2, second high-transmittance high-reflectance optical coating lens 6 is fixed on second lens base 3, third high-transmittance high-reflectance optical coating lens 7 is fixed on third lens base 3, first high-transmittance high-reflectance optical coating lens 5, second high-transmittance high-reflectance optical coating lens 6, third high-reflectance optical coating lens 7 is fixed on third lens base 3, first high-reflectance optical coating lens base 5, second high-reflectance optical coating lens 6, third high-reflectance optical coating lens 7 is fixed on the same side of the ultraviolet reflection optical coating lens base, the same as the ultraviolet reflection optical coating lens, the ultraviolet reflection optical coating lens is coated with the ultraviolet reflection optical coating lens, the ultraviolet reflection optical coating lens, the high-reflection optical coating lens passes through the reflection optical coating lens 2, the reflection optical coating lens passes through reflection optical coating lens, the reflection optical coating lens passes through the reflection optical coating lens is coated with the reflection optical coating lens, the reflection optical coating lens passes through the reflection optical coating lens, the reflection optical coating lens is coated with the reflection optical coating lens, the reflection optical coating lens, the high-reflection optical coating.

The utility model discloses it has L type installation face all to process on first lens base 2, second lens base 3, the third lens base 4, and the vertical face of L type installation face is used for installing high reflection of light science coated lens, and the horizontal plane of L type installation face is used for installing screw 8, fixes the lens base through screw 8, in addition, still can realize the adjustment to the optical lens piece angle through adjusting the lens base.

Example 2

The difference from the embodiment 1 is that the composite laser (the wavelength λ 1 of the ultraviolet laser is 355nm, the wavelengths λ 2, λ 3 and λ 4 of other composite beams are 1064nm, 808nm and 532nm) enters the third high-transmittance high-reflectivity optical coating lens 7 at an incidence angle θ, is reflected by the third high-transmittance high-reflectivity optical coating lens 7, then enters the second high-transmittance high-reflectivity optical coating lens 6 at an incidence angle α, is reflected by the second high-transmittance high-reflectivity optical coating lens 6, then enters the first high-transmittance high-reflectivity optical coating lens 5 at an incidence angle β, and finally is horizontally output together with the original beam after being reflected by the first high-transmittance high-reflectivity optical coating lens (see fig. 3).

The utility model discloses laser beam incident position is free, can follow the high reflection of light chemical coating film lens 6, the high reflection of light chemical coating film lens 7 optional position incident and output.

Further, the material of the coated lens is K9 glass and quartz, but not limited to K9 and quartz, and the specification and size of the coated lens depend on the size of the laser model; the heat sink base 1, the first lens base 2, the second lens base 3 and the third lens base 4 are made of metal materials; the height and the size of the lens base depend on the light emitting height of the laser resonant cavity and the model of the laser.

Additionally, the utility model discloses according to the circumstances still can set up the fourth height and pass through high reflection of light science coating film lens, the fifth height passes through more high reflection of light science coating film lenses such as high reflection of light science coating film lens, the quantity that the high reflection of light science coating film lens of passing through depends on the demand of laser instrument, but select threely at least, compound light beam incides one of them high reflection of light science coating film lens of passing through, then through the reflection, inject again, the reflexion, through constantly reflecting the back, last ultraviolet laser output, other compound light beam incides the continuous transmission loss of optics coating film lens, the total transmission of compound laser does not have the reflection output at last.

The utility model discloses height is passed through high reflection of light chemical coating lens size and is P, and 1 × 1 × 0.5.5 mm is ≦ P ≦ 9 × 9 × 1mm promptly.

The utility model discloses the principle is: inputting the ultraviolet composite laser into the light splitting device, reflecting the ultraviolet laser, transmitting other composite beams, and finally outputting the ultraviolet laser, wherein the damage threshold of the ultraviolet laser reflecting film is higher than that of the ultraviolet transmitting film, so that the damage of the laser film is reduced; and the multi-piece optical lens can obtain single wavelength, has high purity, and avoids the disadvantage of high stray light ratio of the single-piece optical lens, thereby more easily realizing single stability of ultraviolet wavelength.

The above description is a preferred embodiment of the present invention, and certainly not intended to limit the scope of the present invention, it should be noted that other substantially equivalent alternatives, which may occur to those skilled in the art, are within the scope of the present invention.

Claims

1. A light splitting device for an ultraviolet laser is characterized by comprising a heat sink base, three lens bases and three high-transmittance high-reflectivity optical coating lenses, wherein the heat sink base is arranged at the output front end of the ultraviolet laser, the three lens bases are all arranged on the heat sink base, the three high-transmittance high-reflectivity optical coating lenses are respectively fixed on the three lens bases, each high-transmittance high-reflectivity optical coating lens comprises a glass substrate, one side of the glass substrate is coated with an ultraviolet wavelength high-reflectivity film and a composite light beam antireflection film except the ultraviolet wavelength, the other side of the glass substrate is coated with a composite light beam antireflection film except the ultraviolet wavelength, composite laser enters the first high-transmittance high-reflectivity optical coating lens at an incidence angle theta, is reflected by the first high-transmittance high-reflectivity optical coating lens, then enters the second high-transmittance high-reflectivity optical coating lens at α, is reflected by the second high-transmittance high-reflectivity optical coating lens, then enters the third high-transmittance high-reflectivity optical coating lens at an incidence angle β, and outputs an incident beam in parallel with the original composite laser beam.

2. The beam splitting device of claim 1, wherein the lens bases are formed with L-shaped mounting surfaces, and the highly transparent and highly reflective coated lens coated with an anti-reflection coating for composite light beams except for ultraviolet wavelengths is adhered to the vertical surface of the L-shaped mounting surface.

3. The beam splitting device of claim 1, wherein the lens base is fixed to the heat sink base by screws, and the angle of the high-transmittance high-reflectivity chemical coating lens is adjusted by adjusting the lens base.

4. The spectroscopic apparatus of claim 1, wherein θ + α + β is 90 °,0 ° < θ < 90 °,0 ° < α < 90 °.

5. The optical splitting device for an ultraviolet laser according to claim 1, wherein the ultraviolet wavelength range is 200nm to 380nm, and the wavelength range of the composite beam excluding the ultraviolet wavelength is 400nm to 1600 nm.

6. The beam splitting device of claim 1, wherein the size of the high transmittance high reflectivity lens is P, i.e. 1 × 1 × 0.5.5 mm < P < 9 × 9 × 1 mm.