CN211118297U - Low-temperature valve for reducing cold loss - Google Patents

Abstract

The utility model relates to a reduce cold volume loss's cryogenic valve relates to valve technical field, and its cold volume loss that is arranged in solving the valve that exists among the prior art is serious and there is the problem of fluid leakage. The utility model discloses a reduce cold volume loss's cryogenic valve, establish including disk seat and the cover that has fluid passage vacuum chamber cover on the disk seat outer wall, the cavity that the upper surface of the inner wall of vacuum chamber cover, disk seat, first diaphragm and the lower surface of second diaphragm were injectd is the vacuum chamber, and this vacuum chamber structure is isolated with the cryogenic fluid in the disk seat with external to greatly reduced cryogenic fluid and external heat exchange has reduced cold volume loss, because first, the effect of second diaphragm has simultaneously avoided appearing the condition that the fluid leaked from case department because of the low temperature.

Description

Low-temperature valve for reducing cold loss

Technical Field

The utility model relates to the technical field of valves, in particular to reduce cold volume loss's low temperature valve.

Background

The heat transfer path has three main forms: convection, radiation, and heat conduction. In the field of valves, the main form of heat transfer is heat conduction. The relationship between the heat conduction efficiency and the heat transfer area, the temperature difference and the heat transfer coefficient is large, and under the same condition, the larger the heat transfer area is, the larger the temperature difference is and the larger the heat transfer coefficient is, the higher the heat transfer efficiency is.

The current valve, taking a needle valve as an example, has a main structure comprising a valve body, a valve core, a sealing element, a fastening element and the like, wherein the on-off function of the valve is realized by the mutual combination and separation of the valve core and a small hole in the valve body; the sealing function of the valve is mainly realized by the mutual matching of the fastener and the sealing element and the pressing of the sealing element.

At present, the main body parts of a valve body and a valve core of a traditional valve are both composed of metal parts, low-temperature fluid circulates inside the valve body and the outside of the valve body and the valve core are in contact with the atmosphere, metal materials become direct heat transfer media between the low-temperature fluid and the outside atmosphere, and because the heat transfer coefficients of the metal materials are generally large, the metal materials are often condensed into frost or ice blocks on the outer surface of the valve after a long time, the low-temperature fluid absorbs heat through the metal materials of the valve body, and a large amount. In order to reduce the cold loss, the cold loss is reduced by adding a tetrafluoro pad to a part of valves, but the effect is limited.

In addition, in order to prevent the fluid leakage, a special diaphragm valve is designed, the fluid leakage is prevented through a built-in diaphragm valve plate, and the diaphragm valve has the characteristic of high heat transfer coefficient. And more importantly, as the transported cryogenic fluid, especially the fluid with extremely low temperature, such as liquid nitrogen, can continuously cause the sealing structure and the tetrafluoro pad to shrink and harden in the process of flowing through the valve, after the valve is opened and closed for several times, the sealing element is easy to lose efficacy, and the cryogenic fluid leaks along the clearance between the valve core and the sealing element as well as the tetrafluoro pad, so that not only is the refrigeration loss too large, but also a certain amount of cryogenic fluid is wasted.

SUMMERY OF THE UTILITY MODEL

The utility model provides a reduce cold volume loss's cryogenic valve, its cold volume loss that is arranged in solving the valve that exists among the prior art is serious and there is the problem of fluid leakage.

The utility model provides a low temperature valve for reducing cold loss, which comprises a valve seat with a fluid channel and a vacuum sleeve sleeved on the outer wall of the valve seat, wherein one side of the valve seat is hermetically connected with a first diaphragm, a second diaphragm is hermetically connected in the vacuum sleeve, and the first diaphragm and the second diaphragm are arranged oppositely in the axial direction;

wherein a cavity defined by the inner wall of the vacuum sleeve, the outer wall of the valve seat, the upper surface of the first diaphragm and the lower surface of the second diaphragm is a vacuum chamber.

In one embodiment, the portion of the vacuum sleeve that is attached to the valve seat forms a thin-walled structure.

In one embodiment, a second contact member is disposed between the first diaphragm and the second diaphragm, wherein an end of the second contact member having a larger bottom area is connected to a lower surface of the second diaphragm, and an end of the second contact member having a smaller bottom area is disposed opposite to an upper surface of the first diaphragm.

In one embodiment, a first contact member is further disposed between the first membrane and the second membrane, the end of the first contact member having a larger bottom area is connected to the upper surface of the first membrane, and the end of the first contact member having a smaller bottom area is disposed opposite to the end of the second contact member having a smaller area;

wherein a gap is formed between the second contact member and the first contact member when the second diaphragm is not elastically deformed.

In one embodiment, the fluid passage in the valve seat includes a second hole communicating with the fluid passage, and an end of the second hole is provided with a spool for closing or opening the second hole.

In one embodiment, the first end of the valve core is connected to the lower surface of the first diaphragm, at least a portion of the second end of the valve core extends into the second hole, and the first diaphragm is elastically deformed to move the valve core in a direction close to the second hole, so that the valve core closes the second hole.

In one embodiment, the second end of the spool is configured as a conical tip.

In one embodiment, the first end of the valve element is provided with an elastic member, the elastic member abuts against a lower surface of the first diaphragm, and the elastic member moves the valve element in a direction away from the second hole to open the second hole.

In one embodiment, the fluid passageway in the valve seat further comprises first and third apertures in communication with the second aperture, respectively, the first aperture being proximate the inlet of the fluid passageway and the third aperture being proximate the outlet of the fluid passageway;

the second hole has a hole diameter equal to or larger than the first hole, and the first hole has a hole diameter equal to or larger than the third hole.

In one embodiment, further comprising a plunger mechanism, the plunger mechanism comprising:

the end part of the pressure rod is in contact with the second diaphragm and is used for applying load to the second diaphragm so as to enable the second diaphragm to generate elastic deformation; and

the vacuum device comprises a compression rod screw sleeve, wherein the compression rod screw sleeve is arranged between the compression rod and the vacuum sleeve, the inner wall of the vacuum sleeve is connected with the outer wall of the compression rod screw sleeve, and the inner wall of the compression rod screw sleeve is in threaded connection with the outer wall of the compression rod.

Compared with the prior art, the utility model has the advantages of:

(1) the cavity defined by the inner wall of the vacuum sleeve, the outer wall of the valve seat, the upper surface of the first diaphragm and the lower surface of the second diaphragm is a vacuum cavity, and the low-temperature fluid in the valve seat is isolated from the outside by the structure of the vacuum cavity, so that the heat exchange between the low-temperature fluid and the outside is greatly reduced, and the loss of cold energy is reduced.

(2) The first diaphragm is connected with the upper side of the valve seat in a sealing mode, so that the low-temperature fluid in the fluid channel of the valve seat can be completely isolated from the structure on the upper portion of the valve seat, and the possibility of leakage of the low-temperature fluid from the conventional hole-shaft fit clearance is eliminated.

Drawings

The present invention will be described in more detail hereinafter based on embodiments and with reference to the accompanying drawings.

Fig. 1 is a cross-sectional view of a cryogenic valve for reducing refrigeration losses in an embodiment of the present invention;

FIG. 2 is an enlarged view of FIG. 1 at B;

fig. 3 is an enlarged view of fig. 1 at C.

In the drawings, like components are denoted by like reference numerals. The figures are not drawn to scale.

Reference numerals:

1-a valve seat; 11-a first hole; 12-a second well; 13-a third aperture; 14-a radial projection;

2-vacuum sleeve; 3-a first membrane; 4-a second membrane; 5-valve core; 51-a tapered tip;

6-an elastic member; 61-a return spring; 62-spring seats; 7-a contact member; 71-a first contact; 72-a second contact;

8-a compression bar mechanism; 81-compression bar; 82-a pressure lever thread sleeve; 83-a gland; 84-a wrench; 85-a first screw; 86-second screw.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings.

As shown in fig. 1-3, the utility model provides a reduce cold volume loss's cryogenic valve, it establishes vacuum cover 2 on disk seat 1 outer wall including disk seat 1 and the cover that has fluid passage, and the upside of disk seat 1 is provided with first diaphragm 3, and the upside of vacuum cover 2 is provided with second diaphragm 4, and first diaphragm 3 and second diaphragm 4 set up relatively in the axial.

Specifically, one side of the valve seat 1 is in sealing connection with the lower surface of the first diaphragm 3, a stepped hole is provided in the vacuum jacket 2, and the second diaphragm 4 is disposed in the stepped hole and forms a sealing connection with the vacuum jacket 2. Wherein, the cavity defined by the inner wall of the vacuum sleeve 2, the outer wall of the valve seat 1, the upper surface of the first diaphragm 3 and the lower surface of the second diaphragm 4 is a vacuum chamber. The vacuum chamber structure isolates the low-temperature fluid in the valve seat 1 from the outside, thereby greatly reducing the heat exchange between the low-temperature fluid and the outside and reducing the loss of cold energy.

Further, in order to secure the vacuum degree of the vacuum chamber, the first diaphragm 3 is connected to the upper side of the valve seat 1 by welding, so that the cryogenic fluid in the fluid passage of the valve seat 1 is completely isolated from the structure of the upper portion of the valve seat 1, and the possibility of the cryogenic fluid leaking from the conventional orifice-shaft fitting gap is eliminated. In addition, the second diaphragm 4 and the vacuum sleeve 2 can be connected by welding to ensure good sealing performance, so as to ensure the vacuum degree of the vacuum chamber.

It will be appreciated that other connections between the first diaphragm 3 and the valve seat 1 and between the second diaphragm 4 and the vacuum sleeve 2 may be used to provide a sealed connection therebetween.

In one embodiment, in order to reduce the contact area between the valve seat 1 and the vacuum sleeve 2, the portion of the vacuum sleeve 2 connected to the valve seat 1 is formed in a thin-walled structure. Specifically, the outer wall of the valve seat 1 is provided with a radial protrusion 14, the width of the radial protrusion 14 is smaller than the radius of the valve seat 1, and the vacuum sleeve 2 is connected with the radial protrusion 14. Since the thin-walled structure is formed at the portion where the vacuum jacket 2 is connected to the radial protrusion 14, the cryogenic fluid conducts heat outwards through the thin-walled portion where the vacuum jacket 2 is connected to the radial protrusion 14 (i.e., the portion a shown in fig. 1), and thus the size of the thin-walled structure should be minimized while ensuring the structural strength. Specifically, the width of the radial protrusion 14 can be reduced, so that the size of the contact part with the vacuum jacket 2 is smaller, the heat transfer area for conducting the cryogenic fluid to the outside is greatly reduced, and the cold loss is reduced.

Proved by tests, the utility model discloses a low temperature valve structure compares with conventional structure, and heat transfer rate can reduce more than 10 times.

It will be appreciated that the thin-walled structure may also be provided in other ways, for example by providing radial projections on the vacuum jacket 2, so that the two radial projections are in contact with each other to reduce the contact area.

It should be noted that the vacuum chamber vacuum exhaust structure (not shown in the figures) of the present invention can adopt the existing general technology, and is not described herein again.

A contact member 7 is further provided between the first diaphragm 3 and the second diaphragm 4, and as shown in fig. 2, the contact member 7 includes a second contact member 72, wherein the second contact member 72 is configured in a circular truncated cone shape, and one end having a larger bottom area is connected to the lower surface of the second diaphragm 4, and the other end having a smaller bottom area is disposed opposite to the upper surface of the first diaphragm 3.

Further, the contact element 7 also comprises a first contact element 71, which may be shaped similarly to the second contact element 72, i.e. the first contact element 71 is also configured in the shape of a circular truncated cone. The end of the first contact 71 having a large bottom area is connected to the upper surface of the first diaphragm 3, and the end of the first contact 71 having a small bottom area is disposed opposite to the end of the second contact 72 having a small area. As shown in fig. 2, the second contact member 72 and the first contact member 71 have a gap therebetween when the second diaphragm 4 is not elastically deformed. The two end surfaces of the corresponding parts of the first contact member 71 and the second contact member 72 with small bottom areas are contacted with each other, so that the contact area can be reduced, and the cold energy transmitted outwards through the contact area in the contact process can be reduced as much as possible. Specifically, since the cold of the cryogenic fluid in the fluid passage in the valve seat 1 is transmitted to the outside along the valve element 5, the first contact member 71, and the second contact member 72 when the first contact member 71 and the second contact member 72 are in contact with each other, the contact area between the first contact member 71 and the second contact member 72 is reduced, and the loss of the cold transmission can be reduced.

It is understood that the first contact member 71 and the second contact member 72 may be configured in other shapes, and any design scheme for reducing the cooling capacity of the heat transfer by reducing the contact area should be included in the scope of the present invention.

For ease of manufacture and installation, the axes of the first contact 71, the second contact 72, the first diaphragm 3 and the second diaphragm 4 coincide with one another.

In one embodiment, the fluid passage in the valve seat 1 includes a second hole 12 communicating with the fluid passage, preferably, an axial direction of the second hole 12 is perpendicular to an axial direction of the valve seat 1, and an end of the second hole 12 is provided with a spool 5 for closing or opening the second hole 12.

Referring to fig. 3, specifically, a first end of the valve core 5 is connected to a lower surface of the first diaphragm 3, at least a portion of a second end of the valve core 5 extends into the second hole 12, and the first diaphragm 3 is elastically deformed to move the valve core 5 in a direction away from the first diaphragm 3, so that the valve core 5 closes the second hole 12. Wherein the second end of the spool 5 is configured as a conical tip 51. When the first diaphragm 3 is not elastically deformed, an annular gap of a certain size is left between the tapered tip 51 and the end of the second hole 12, and the second hole 12 is in an open state.

The end of the valve spool 5 that protrudes into the second bore 12 is provided with a conical tip 51 to better intercept cryogenic fluid. Specifically, firstly, it is able to intercept and seal the cryogenic fluid, and secondly, by the conical structure, it is advantageous to reduce the distance required for the spool 5 to move downwards when intercepting the fluid. In the embodiment shown in fig. 3, the angle of taper of the tapered tip 51, i.e. the angle between the generatrix of the taper where the tapered tip 51 is located and the axis, as shown in fig. 1, is 45 degrees, and the larger the angle, the shorter the distance the valve element 5 needs to be moved downwards.

It will be understood that the end of the valve core 5 extending into the second bore 12 may be a tapered tip 51 as shown in fig. 3, or may be other structures capable of closing the second bore 12, such as a cylindrical boss structure.

Further, the first end of the valve core 5 is provided with an elastic member 6, the elastic member 6 is connected to the lower surface of the first diaphragm 3, and the elastic member 6 moves the valve core 5 in a direction to approach the first diaphragm 3, so that the valve core 5 moves away from the second hole 12 along the axis of the second hole 12 to open the second hole 12.

It should be noted that the elastic member 6 is provided to provide an active resilient force to the valve element 5, so that the valve element 5 can smoothly leave the second hole 12 to open the second hole 12.

Specifically, the elastic member 6 includes a spring seat 62 and a return spring 61, the spring seat 62 is fitted outside the valve body 5, one end of the return spring 61 is connected to the lower surface of the first diaphragm 3, and the other end is connected to the spring seat 62, the return spring 61 is compressed when the first diaphragm 3 is elastically deformed, and at the same time, the first diaphragm 3 pushes the valve body 5 to be close to the second hole 12, so that the tapered tip 51 thereof extends into the end of the second hole 12 to close the second hole. When the load on the first diaphragm 3 is unloaded, the return spring 61 returns, which moves the spool 5 away from the second orifice 12 so that its tapered tip 51 clears the end of the second orifice 12 to open the second orifice.

Note that, for convenience of manufacture and installation, the axial direction of the valve body 5 coincides with the axial direction of the second hole 12, that is, the valve body 5 moves in the axial direction of the second hole 12 at the time of moving up and down.

Further, the fluid passage in the valve seat 1 further includes a first hole 11 and a third hole 13 respectively communicating with the second hole 12, the first hole 11 being near an inlet (i.e., left side in fig. 1) of the fluid passage, and the third hole 13 being near an outlet (i.e., right side in fig. 1) of the fluid passage. Preferably, in order to facilitate tolerance control, the axial directions of the first hole 11 and the third hole 13 are both perpendicular to the axial direction of the second hole 12.

Since the second hole 12 functions to conduct or block the fluid, the second hole 12 has a hole diameter greater than or equal to that of the input-side first hole 11, and the first hole 11 has a hole diameter greater than or equal to that of the output-side third hole 13, so as to ensure the normal flow of the fluid without clogging.

If the second orifice 12 is open, the cryogenic fluid enters the subsequent chamber directly from the inlet through the first orifice 11, flows through the annular gap (when the first diaphragm 3 is not elastically deformed, an annular gap of a certain size is left between the tapered tip 51 and the end of the second orifice 12), and then flows out of the valve seat 1 through the third orifice 13. The flow of cryogenic fluid is shown by the arrows in figure 1.

The area of the annular gap is equal to or larger than the cross-sectional area of the third hole 13, and further, the larger the aperture of the second hole 12 exceeds the aperture of the third hole 13, the larger the cone angle of the valve element 5 correspondingly, and the shorter the distance that the first diaphragm 3 moves the valve element 5 in the axial direction when the second hole 12 is closed.

It should be noted that, the first diaphragm 3 and the second diaphragm 4 in the present invention can both generate elastic deformation, thereby moving up and down by a certain size in the axis direction. In particular, the first diaphragm 3 can maintain good mechanical performance and material performance at low temperature so as to ensure the whole structural strength of the valve and the tightness of the material.

The utility model provides a first diaphragm 3 and second diaphragm 4 can adopt current low temperature resistant diaphragm, and its minimum operating temperature is-130 ℃, and maximum operating pressure is 6 bar.

In one embodiment, the cryogenic valve of the present invention further comprises a pressure bar mechanism 8, the pressure bar mechanism 8 comprises a pressure bar 81 and a pressure bar screw 82, wherein an end of the pressure bar 81 is in contact with the second membrane 4 for applying a load to the second membrane 4 to elastically deform the second membrane; the inner wall of the vacuum sleeve 2 is connected with the outer wall of the pressure rod screw sleeve 82 between the pressure rod 81 and the vacuum sleeve 2 through the pressure rod screw sleeve 82, and the inner wall of the pressure rod screw sleeve 82 is in threaded connection with the outer wall of the pressure rod 81.

As shown in fig. 1, the vacuum sleeve 2 and the pressure rod screw sleeve 82 can be connected by welding, and other sealing connection methods can be adopted. The pressure lever 81 and the pressure lever screw 82 form a screw connection, so that the pressure lever 81 can move up and down along the axial direction thereof.

In addition, the contact part between the pressure rod 81 and the second diaphragm 4 is subjected to wear-resistant treatment so as to prolong the service life of the low-temperature valve.

Further, the pressing rod mechanism 8 further includes a wrench 84 and a pressing cover 83 at the upper end of the pressing rod 81, the wrench 84 is connected with the pressing rod 81 through a first screw 85, and the pressing rod 81 is rotated by the wrench 84 to realize the up-and-down movement of the pressing rod 81. The gland 83 is fixed with the compression bar thread sleeve 82 through a second screw 86, and plays a role in limiting the compression bar 81 upwards.

The wrench 84, which serves as an auxiliary rotation lever 81, may be configured as an elongated bar as shown in fig. 1, but may be circular or have other shapes.

The process of closing and opening the cryogenic valve of the present invention is explained below.

In the state shown in fig. 1, that is, in the state where the cryovalve is opened, the lever 84 is turned to rotate the pressing rod 81, so that the pressing rod 81 moves downward to contact the second diaphragm 4, and further, the lever 84 is turned to apply downward pressure to the second diaphragm 4 by the pressing rod 81, so that the second diaphragm 4 is elastically deformed to transmit the pressure to the first diaphragm 3. The first diaphragm 3 is elastically deformed by being pressed, so that the valve element 5 is moved downward in the axial direction thereof, and the tapered tip 51 is caused to protrude into the second hole 12 to close the second hole 12. Thereby, the first hole 11 and the third hole 13 are disconnected, and the fluid is blocked to perform the function of closing the low temperature valve.

Conversely, when the wrench 84 is turned to rotate the pressing rod 81 in the opposite direction, the pressing rod 81 moves upward to separate the pressing rod 81 from the second diaphragm 4, the first contact member 71 is separated from the second contact member 72, the valve element 5 is reset under the action of the elastic member 6, the tapered tip 51 is separated from the second hole 12, the second hole 12 is opened, and thus the first hole 11 and the third hole 13 are communicated with each other, and the fluid flows through the first hole 11, the second hole 12 and the third hole 13 in sequence and flows out of the valve seat 1, thereby realizing the function of opening the cryogenic valve.

It should be noted that the "upper end" and the "lower end" are defined with reference to the state of the target valve seat 1 in use, and it can be determined that the above-mentioned directional words are only used for clearly expressing the relative position relationship between the fitting members, and the protection scope of the present solution is not substantially limited.

The utility model has the advantages as follows:

compared with the prior art, the utility model has the advantages of:

(1) the cavity defined by the inner wall of the vacuum sleeve 2, the outer wall of the valve seat 1, the upper surface of the first diaphragm 3 and the lower surface of the second diaphragm 4 is a vacuum chamber, and the low-temperature fluid in the valve seat 1 is isolated from the outside by the structure of the vacuum chamber, so that the heat exchange between the low-temperature fluid and the outside is greatly reduced, and the loss of cold energy is reduced;

(2) by hermetically connecting the first diaphragm 3 to the upper side of the valve seat 1, the cryogenic fluid in the fluid passage of the valve seat 1 can be completely isolated from the structure of the upper portion of the valve seat 1, thereby preventing the possibility of cryogenic fluid leakage from the conventional orifice-shaft fitting gap.

While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present invention is not limited to the particular embodiments disclosed herein, but encompasses all technical solutions falling within the scope of the claims.

Claims (10)

1. The cryogenic valve capable of reducing cold loss is characterized by comprising a valve seat (1) with a fluid channel and a vacuum sleeve (2) sleeved on the outer wall of the valve seat (1), wherein one side of the valve seat (1) is hermetically connected with a first diaphragm (3), a second diaphragm (4) is hermetically connected in the vacuum sleeve (2), and the first diaphragm (3) and the second diaphragm (4) are arranged oppositely in the axial direction;

wherein a cavity defined by the inner wall of the vacuum sleeve (2), the outer wall of the valve seat (1), the upper surface of the first diaphragm (3) and the lower surface of the second diaphragm (4) is a vacuum chamber.

2. Cryogenic valve with reduced refrigeration losses according to claim 1, characterised in that the vacuum jacket (2) forms a thin-walled structure in the area where it is connected to the valve seat (1).

3. The cryogenic valve for reducing cold loss according to claim 1 or 2, characterized in that a second contact member (72) is arranged between the first diaphragm (3) and the second diaphragm (4), wherein the end with the larger bottom area of the second contact member (72) is connected to the lower surface of the second diaphragm (4), and the end with the smaller bottom area of the second contact member (72) is arranged opposite to the upper surface of the first diaphragm (3).

4. The cryogenic valve for reducing cold loss according to claim 3, characterized in that a first contact member (71) is further arranged between the first diaphragm (3) and the second diaphragm (4), wherein one end of the first contact member (71) with a larger bottom area is connected with the upper surface of the first diaphragm (3), and the other end of the first contact member (71) with a smaller bottom area is arranged opposite to one end of the second contact member (72) with a smaller area;

wherein a gap is provided between the second contact member (72) and the first contact member (71) when the second diaphragm (4) is not elastically deformed.

5. Cryogenic valve with reduced refrigeration losses according to claim 1 or 2, characterized in that the fluid channel in the valve seat (1) comprises a second hole (12) communicating with the fluid channel, the end of the second hole (12) being provided with a valve plug (5) for closing or opening the second hole (12).

6. The cryogenic valve with reduced refrigeration loss according to claim 5, characterized in that the first end of the valve element (5) is connected to the lower surface of the first diaphragm (3), at least a part of the second end of the valve element (5) extends into the second hole (12), and the first diaphragm (3) is elastically deformed to move the valve element (5) in a direction close to the second hole (12) so that the valve element (5) closes the second hole (12).

7. Cryogenic valve with reduced refrigeration loss according to claim 6, characterised in that the second end of the valve element (5) is configured as a conical tip.

8. Cryogenic valve with reduced refrigeration loss according to claim 6, characterised in that the first end of the valve spool (5) is provided with an elastic element (6), the elastic element (6) abutting the lower surface of the first diaphragm (3), the elastic element (6) moving the valve spool (5) in a direction away from the second hole (12) opening the second hole (12).

9. Cryogenic valve with reduced refrigeration losses according to claim 5, characterized in that the fluid channel in the valve seat (1) further comprises a first hole (11) and a third hole (13) communicating with the second hole (12), respectively, the first hole (11) being close to the inlet of the fluid channel and the third hole (13) being close to the outlet of the fluid channel;

the second hole (12) has a hole diameter larger than or equal to that of the first hole (11), and the first hole (11) has a hole diameter larger than or equal to that of the third hole (13).

10. Cryogenic valve with reduced refrigeration loss according to claim 9, characterized in that it further comprises a lever mechanism (8), the lever mechanism (8) comprising:

a pressure lever (81), the end of the pressure lever (81) being in contact with the second diaphragm (4) for applying a load to the second diaphragm (4) to elastically deform it; and

the vacuum pump comprises a compression rod swivel nut (82), the compression rod swivel nut (82) is arranged between the compression rod (81) and the vacuum sleeve (2), the inner wall of the vacuum sleeve (2) is connected with the outer wall of the compression rod swivel nut (82), and the inner wall of the compression rod swivel nut (82) is in threaded connection with the outer wall of the compression rod (81).

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