CN211118041U - Air supply duct structure of stepped polishing chamber - Google Patents
Air supply duct structure of stepped polishing chamber Download PDFInfo
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- CN211118041U CN211118041U CN201921935088.0U CN201921935088U CN211118041U CN 211118041 U CN211118041 U CN 211118041U CN 201921935088 U CN201921935088 U CN 201921935088U CN 211118041 U CN211118041 U CN 211118041U
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Abstract
The utility model provides a cascaded room air supply tuber pipe structure of polishing, include: an air inlet; the air supply duct is formed by sequentially connecting a plurality of sections of ducts with different cross sections end to end, and the air inlet is connected with one end of the air supply duct and supplies air into the air supply duct; the air outlet each section of air supply tuber pipe the pipeline side sets up one, will wind in the air supply tuber pipe is through a plurality of each station of room of polishing is sent into to the air outlet, has solved current room air supply system of polishing, and the air supply loops through a plurality of air outlets through the air supply tuber pipe and sends each station to on, the inhomogeneous problem of the amount of wind of air outlet.
Description
Technical Field
The utility model relates to an air supply tuber pipe technical field, in particular to cascaded room air supply tuber pipe structure of polishing.
Background
The air supply system of the polishing chamber is a component of station equipment, at present, the air supply pipe structure of the traditional polishing chamber is fixed and unchanged relative to the vertical pipeline section of the length direction, air supply is sent to each station through the air supply pipe sequentially through the air outlet, the air quantity of the station close to the air inlet is large, the air quantity of the station far away from the air inlet is small, and the air quantity of each air outlet is uneven.
SUMMERY OF THE UTILITY MODEL
The utility model provides a cascaded room air supply tuber pipe structure of polishing for solve current room air supply system of polishing, on the air supply loops through a plurality of air outlet and sends each station, the inhomogeneous problem of the amount of wind of air outlet through the air supply tuber pipe.
A cascaded room air supply tuber pipe structure of polishing includes: an air inlet; the air supply duct is formed by sequentially connecting a plurality of sections of ducts with different cross sections end to end, the cross sections are perpendicular to the length direction of the ducts, and the air inlet is connected with one end of the air supply duct and supplies air into the air supply duct; and one air outlet is arranged on the side surface of each section of the pipeline of the air supply pipe, and the air in the air supply pipe is sent into each station of the grinding chamber through a plurality of air outlets.
Preferably, the blast air duct further includes:
the air inlet is hermetically connected with the periphery of one end of the first pipeline, and one side of the inner wall of the first pipeline is provided with the air outlet;
the periphery of the other end of the first pipeline is hermetically connected with the periphery of one end of the second pipeline, and one side of the inner wall of the second pipeline is provided with the air outlet;
the other end of the second pipeline is hermetically connected with the periphery of one end of the third pipeline, and one side of the inner wall of the third pipeline is provided with the air outlet; the other end of the third pipeline is sealed.
Preferably, the first pipe, the second pipe and the third pipe are equal in length.
Preferably, the cross section of the first pipeline, the cross section of the second pipeline and the cross section of the third pipeline which are perpendicular to the length direction are rectangular, and the widths of the first pipeline, the second pipeline and the third pipeline are equal.
Preferably, the cross-sectional height of the first pipe is constant, the cross-sectional height of the third pipe is constant, the cross-sectional height of the first pipe is higher than the cross-sectional height of the third pipe, the cross-sectional height of the second pipe is gradually reduced, and the cross-sectional height of the second pipe is gradually reduced from the cross-sectional height of the first pipe to the cross-sectional height of the third pipe along the length direction.
Preferably, the air outlet further comprises: the shell is installed air supply tuber pipe inner wall one side opening part, high efficiency filter install in the shell, the board that looses set up in shell air-out one end, and be located high efficiency filter's below.
Preferably, the first pipeline and the second pipeline are connected by welding, and the second pipeline and the third pipeline are connected by welding.
Preferably, the second duct has a trapezoidal longitudinal cross section.
Preferably, the material of the air supply duct is stainless steel.
Preferably, the air inlet is provided with a flow equalizing plate.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of an air supply duct structure of a stepped polishing chamber according to an embodiment of the present invention;
FIG. 2 is a schematic view of an air supply duct according to an embodiment of the present invention;
fig. 3 is a schematic sectional view of the air outlet in the embodiment of the present invention;
in the figure, 1, an air inlet; 2. an air supply duct; 21. a first conduit; 22. a second conduit; 23. a third pipeline; 3. an air outlet; 31. a housing; 32. a high efficiency filter; 33. the flow dispersing plate.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for description purposes, not specifically referring to the order or sequence, and are not intended to limit the present invention, but only to distinguish the components or operations described in the same technical terms, and are not to be construed as indicating or implying any relative importance or implicit indication of the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions and technical features between the various embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent, and is not within the protection scope of the present invention.
The embodiment of the utility model provides a cascaded room air supply tuber pipe structure of polishing, as shown in figure 1, its characterized in that includes: an air inlet 1; the air supply duct 2 is formed by sequentially connecting a plurality of sections of ducts with different cross sections end to end, the cross sections are perpendicular to the length direction of the ducts, and the air inlet 1 is connected with one end of the air supply duct 2 and supplies air into the air supply duct 2; the air outlets 3 are arranged on the side surface of each section of the pipeline of the air supply duct 2, and air in the air supply duct 2 is sent to each station of the polishing chamber through the air outlets 3;
the working principle of the technical scheme is that air enters an air supply duct through an air inlet, the air in the air supply duct sequentially passes through a plurality of air outlets and is sent to each station of a grinding chamber, the total air volume required by the grinding chamber is Q0, Q0 is Q1+ Q2+ Q3+, Q1, Q2 and Q3 are air volumes required to be sent to each station of the grinding chamber, Q1 is S1 × V1 × T1, S1 is the air outlet cross-sectional area of the first station of the grinding chamber, V1 is the air outlet air speed of the first station of the grinding chamber, T1 is the air supply time of the first station of the grinding chamber, and so on, Q2 is S2 × V2 × T2, Q3 is S3 × V3 × T3, the cross-sectional area S1 is S2 is S3, T1 is the air outlet cross-sectional area of the air supply duct, and the air flow rate of each air outlet cross-section of the air duct is reduced according to the air supply duct Q72, the air flow required by a certain air flow of the air supply duct Q2, the air duct Q is the air supply duct Q, the air flow required by a certain air flow of the air duct Q2, the air flow of the air supply duct Q2, the air duct Q is the air duct Q2, the air flow of the air duct Q sections of the air supply duct Q sections of the air duct Q sections of the air supply duct Q sections of the air ducts, the air ducts is reduced by the air ducts, and the air ducts of the sections of the air ducts, the air ducts of the air ducts;
the beneficial effects of the above technical scheme are: the air supply speed of each section of pipeline is ensured to be the same, and the air quantity of the air outlets of the polishing chambers at different stations is the same.
In one embodiment, as shown in fig. 2, the blast duct 2 further includes: the air inlet 1 is hermetically connected with the periphery of one end of the first pipeline 21, and one side of the inner wall of the first pipeline 21 is provided with the air outlet 3;
the periphery of the other end of the first pipeline 21 is hermetically connected with the periphery of one end of the second pipeline 22, and one side of the inner wall of the second pipeline 22 is provided with the air outlet 3;
the other end of the second pipeline 22 is hermetically connected with the periphery of one end of the third pipeline 23, and one side of the inner wall of the third pipeline 23 is provided with the air outlet 3; the other end of the third pipeline 23 is sealed;
the working principle of the technical scheme is as follows: the air supply duct is composed of three sections of ducts: the first pipeline, the second pipeline and the third pipeline are connected, and each section of pipeline is provided with an air outlet for supplying air to a polishing chamber station;
the beneficial effects of the above technical scheme are: the sectional type of air supply pipe is connected and is convenient for disassembly and assembly.
In one embodiment, the first duct 21, the second duct 22 and the third duct 23 are equal in length;
the working principle of the technical scheme is as follows: the first pipeline, the second pipeline and the third pipeline respectively correspond to a polishing chamber station, the lengths of the polishing chamber stations are equal, and the lengths of the first pipeline, the second pipeline and the third pipeline are also equal;
the beneficial effects of the above technical scheme are: the first pipeline, the second pipeline and the third pipeline are relatively convenient to install and transport, and correspond to one polishing chamber station respectively.
In one embodiment, the cross-section of the first duct 21, the second duct 22 and the third duct 23 perpendicular to the length direction is rectangular, and the widths of the first duct 21, the second duct 22 and the third duct 23 are equal;
the working principle of the technical scheme is as follows: the first pipeline, the second pipeline and the third pipeline are different in cross section, and the cross sections of the first pipeline, the second pipeline and the third pipeline are rectangular cross sections with the same width and different heights;
the beneficial effects of the above technical scheme are: the pipeline of cross-section rectangle facilitates processing, the installation, first pipeline, second pipeline, with third pipeline 23 width equals, connects conveniently.
In one embodiment, the cross-sectional height of the first conduit 21 is constant, the cross-sectional height of the third conduit 23 is constant, the cross-sectional height of the first conduit 21 is higher than the cross-sectional height of the third conduit 23, the cross-sectional height of the second conduit 22 gradually decreases, and the cross-sectional height of the second conduit 22 gradually decreases from the cross-sectional height of the first conduit 21 to the cross-sectional height of the third conduit 23 along the length direction;
the working principle of the technical scheme is as follows: the first pipeline is close to the air inlet, the air volume is large, the relative section is also large, the air volume is reduced along with entering the second pipeline, the section is correspondingly reduced, the height is reduced because the width is unchanged, the air volume is further reduced along with entering the third pipeline, the section is correspondingly further reduced, and the height is further reduced because the width is unchanged;
the beneficial effects of the above technical scheme are: the cross sections of the first pipeline, the second pipeline and the third pipeline are gradually reduced, the consistency of air quantity of the air outlet is kept, and materials of the ventilation pipeline are saved.
In one embodiment, as shown in fig. 3, the air outlet 3 of the stepped grinding chamber blast duct structure comprises: the air supply device comprises a shell 31, a high-efficiency filter 32, a flow dispersing plate 33 and a fan, wherein the shell 31 is arranged on one side of the inner wall of the air supply duct 2;
the working principle of the technical scheme is as follows: the air outlet of the air supply duct is provided with a shell to support an efficient filter and a flow dispersing plate inside the shell, and the air of the air supply duct passes through the efficient filter and the flow dispersing plate in sequence and is sent out;
the beneficial effects of the above technical scheme are: the high-efficiency filter filters ash layers and various suspended matters in air supply, and the flow dispersing plate enables air quantity of the air outlet to be uniform.
In one embodiment, the connections between the first pipe 21 and the second pipe 22, and between the second pipe 22 and the third pipe 23 are all welds;
the working principle of the technical scheme is as follows: the first pipeline and the second pipeline and the third pipeline are in welded sealing connection;
the beneficial effects of the above technical scheme are: the welding sealing effect is good.
In one embodiment, the second conduit 22 is trapezoidal in longitudinal cross-section;
the working principle of the technical scheme is as follows: one section of the second pipeline is connected with the first pipeline, the height of the connecting section is the height of the section of the first pipeline, the other end of the second pipeline is connected with the third pipeline, the height of the connecting section is the height of the section of the third pipeline, the two connecting sections are not equal in height, and the longitudinal section forms a trapezoid;
the beneficial effects of the above technical scheme are: the height is excessively gentle, and the air supply is smooth.
In one embodiment, the material of the blast air pipe 2 is stainless steel;
the working principle of the technical scheme is as follows: the stainless steel material is resistant to weak corrosive media such as air, steam, water and the like;
the beneficial effects of the above technical scheme are: prevent the air supply pipe from being corroded in a humid environment.
In one embodiment, a flow equalizing plate is arranged at the air inlet 1;
the working principle of the technical scheme is as follows: grooves are formed in the two sides of the air inlet, and flow equalizing plates are arranged in the grooves;
the beneficial effects of the above technical scheme are: the air entering the air supply pipe is uniform, and the flow equalizing plate is convenient to mount and dismount.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. The utility model provides a cascaded room air supply tuber pipe structure of polishing which characterized in that includes:
an air inlet (1);
the air supply duct (2) is formed by sequentially connecting a plurality of sections of ducts with different cross sections end to end, the cross sections are perpendicular to the length direction of the ducts, and the air inlet (1) is connected with one end of the air supply duct (2) and supplies air into the air supply duct (2);
and air outlets (3) are arranged on the side surface of each section of the air supply air pipe (2), and air in the air supply air pipe (2) is sent into each station of the polishing chamber through the air outlets (3).
2. The stepped grinding chamber blast duct structure of claim 1, wherein said blast duct (2) comprises:
the air inlet (1) is connected with the periphery of one end of the first pipeline (21) in a sealing mode, and one side of the inner wall of the first pipeline (21) is provided with the air outlet (3);
the periphery of the other end of the first pipeline (21) is hermetically connected with the periphery of one end of the second pipeline (22), and one side of the inner wall of the second pipeline (22) is provided with the air outlet (3);
the other end of the second pipeline (22) is hermetically connected with the periphery of one end of the third pipeline (23), and one side of the inner wall of the third pipeline (23) is provided with the air outlet (3); the other end of the third pipeline (23) is sealed.
3. A stepped grinding chamber supply air duct arrangement as claimed in claim 2, characterised in that said first duct (21), said second duct (22) and said third duct (23) are of equal length.
4. The stepped grinding chamber blast duct structure according to claim 3, wherein said first duct (21), said second duct (22) and said third duct (23) are rectangular in cross section perpendicular to the length direction, and the widths of said first duct (21), said second duct (22) and said third duct (23) are equal.
5. The stepped grinding chamber blast duct structure of claim 4, wherein said cross-sectional height of said first duct (21) is constant, said cross-sectional height of said third duct (23) is constant, said cross-sectional height of said first duct (21) is higher than said cross-sectional height of said third duct (23), said cross-sectional height of said second duct (22) is gradually reduced, and said second duct (22) is gradually reduced from said cross-sectional height of said first duct (21) to said cross-sectional height of said third duct (23) along the length direction.
6. A stepped grinding chamber blast duct structure according to claim 1, wherein said air outlet (3) comprises:
the shell (31) is arranged on one side of the inner wall of the air supply duct (2);
a high efficiency filter (32) mounted within the housing (31);
and the flow dispersing plate (33) is arranged at the air outlet end of the shell (31) and is positioned below the high-efficiency filter (32).
7. The stepped grinding chamber blast duct structure of claim 2, wherein the connection between said first duct (21) and said second duct (22), and the connection between said second duct (22) and said third duct (23) are all welded.
8. A stepped grinding chamber supply air duct arrangement according to claim 5, characterised in that the longitudinal cross-section of said second duct (22) is trapezoidal.
9. The stepped grinding chamber blast duct structure according to claim 1, characterized in that the blast duct (2) is made of stainless steel.
10. The stepped grinding chamber blast duct structure according to claim 1, wherein a flow equalizing plate is provided at the air inlet (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921935088.0U CN211118041U (en) | 2019-11-11 | 2019-11-11 | Air supply duct structure of stepped polishing chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921935088.0U CN211118041U (en) | 2019-11-11 | 2019-11-11 | Air supply duct structure of stepped polishing chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211118041U true CN211118041U (en) | 2020-07-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921935088.0U Active CN211118041U (en) | 2019-11-11 | 2019-11-11 | Air supply duct structure of stepped polishing chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211118041U (en) |
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2019
- 2019-11-11 CN CN201921935088.0U patent/CN211118041U/en active Active
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