CN211078475U - Sulfuric acid recovery system - Google Patents

Sulfuric acid recovery system Download PDF

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Publication number
CN211078475U
CN211078475U CN201922184972.1U CN201922184972U CN211078475U CN 211078475 U CN211078475 U CN 211078475U CN 201922184972 U CN201922184972 U CN 201922184972U CN 211078475 U CN211078475 U CN 211078475U
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sulfuric acid
diffusion dialysis
hydrogen peroxide
dialysis equipment
recovery system
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CN201922184972.1U
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Chinese (zh)
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刘鸣
黄清云
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Suzhou Jimcel Electronic New Material Co ltd
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Suzhou Jimcel Electronic New Material Co ltd
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Abstract

The utility model provides a sulfuric acid recovery system, including acid storage tank, hydrogen peroxide solution degradation groove, fine filter and diffusion dialysis equipment, hydrogen peroxide solution degradation groove top and acid storage tank pass through the feed liquor pipe and communicate, are equipped with the defeated acid pump on the feed liquor pipe, the import and the hydrogen peroxide solution degradation groove of fine filter pass through the drain pipe and communicate, are equipped with the drain pump on the drain pipe, and the fine filter export is located diffusion dialysis equipment top and communicates with diffusion dialysis equipment, and the liquid after the filtration directly gets into diffusion dialysis equipment; the diffusion dialysis equipment uses concentration difference as driving force to separate sulfuric acid, and the bottom of the diffusion dialysis equipment is communicated with the receiving tank. The system is simple in structure, reasonable in arrangement, simple in operation and easy to realize, and the economic cost is reduced. The sulfuric acid recovery system is used for removing hydrogen peroxide and recovering sulfuric acid, so that the removal rate of hydrogen peroxide in a strong acid environment and the recovery utilization rate of sulfuric acid can be improved, hydrogen peroxide is effectively removed, and the application field of recovered sulfuric acid is widened.

Description

Sulfuric acid recovery system
Technical Field
The utility model relates to a sulphuric acid recovery system.
Background
The sulfuric acid waste liquid is a waste liquid generated in the production process of the electronic semiconductor industry, and mainly contains unused sulfuric acid, hydrogen peroxide and pollutants after reaction with concentrated sulfuric acid. Sulfuric acid is used as an important chemical raw material, and relates to petroleum, chemical engineering, steel, electronic semiconductors and other departments in the industrial field, so that the yield of sulfuric acid waste liquid is huge. In recent years, with the rapid development of the electronic semiconductor industry, the electronic-grade concentrated sulfuric acid is widely applied to the industrial fields of the integrated circuit industry, the TFT industry, the photovoltaic industry, the semiconductor industry and the like, the discharge amount of sulfuric acid waste liquid is increased year by year, and the treatment cost is higher and higher due to the high treatment difficulty and the high environmental protection requirement, so that the environmental protection burden and the production and operation burden of enterprises are increased.
Therefore, a process technology is needed to recover the sulfuric acid waste liquid, so as to recover and utilize the expensive sulfuric acid, and greatly reduce the cost for treating the sulfuric acid waste liquid.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a sulphuric acid recovery system, this system simple structure, it is reasonable to set up, has reduced economic cost, and easy operation, easily realizes.
The utility model discloses a realize like this:
a sulfuric acid recovery system comprises an acid storage tank, a hydrogen peroxide degradation tank, a fine filter and diffusion dialysis equipment, wherein the top of the hydrogen peroxide degradation tank is communicated with the acid storage tank through a liquid inlet pipe, an acid delivery pump is arranged on the liquid inlet pipe, an inlet of the fine filter is communicated with the hydrogen peroxide degradation tank through a liquid outlet pipe, a liquid outlet pump is arranged on the liquid outlet pipe, an outlet of the fine filter is positioned above the diffusion dialysis equipment and is communicated with the diffusion dialysis equipment, and filtered liquid directly enters the diffusion dialysis equipment; the diffusion dialysis equipment uses concentration difference as driving force to separate sulfuric acid, and the bottom of the diffusion dialysis equipment is communicated with the receiving tank.
As a preferred scheme, the hydrogen peroxide degradation tank is an FRP high-temperature-resistant anti-corrosion tank and is provided with a heat exchanger.
As a preferred scheme, the filtration precision of the fine filter is 0.1-0.5 um.
Preferably, the fine filter is a PVDF filter.
As a preferred scheme, the fine filter is provided with a filter element made of PTFE materials.
As a preferable scheme, the diffusion dialysis equipment is internal circulation treatment equipment, and the number of times of internal circulation treatment is not less than two.
The utility model has the advantages that:
(1) the special acid-resistant hydrogen peroxide degradation agent has unique advantages compared with the traditional ferrous sulfate, biological enzyme and other technologies, can perform oxidation-reduction reaction in a high-concentration sulfuric acid environment to decompose hydrogen peroxide into water and oxygen, has the degradation rate of over 99 percent, and meets the liquid inlet requirement of subsequent diffusion dialysis equipment.
(2) The filter which is acid corrosion resistant and has the precision of 0.1-0.5um can effectively remove fine particles, meet the liquid inlet requirement of diffusion dialysis equipment and avoid the damage to the dialysis equipment;
(3) the diffusion dialysis equipment separates according to the concentration difference principle, is different from electrodialysis, does not need external electric energy consumption, and reduces the electric energy consumption cost;
(4) the treatment mode of integral internal circulation is adopted, so that salt impurities in the waste liquid can be effectively removed, and the sulfuric acid is recovered while the salt impurities are removed, so that the purity of the recovered sulfuric acid is greatly improved;
(5) compared with the traditional treatment technology, the method can effectively recover the sulfuric acid, can effectively reduce the addition amount of chemical neutralizing agents and the generation amount of hazardous waste sludge through subsequent waste liquid treatment, achieves the purposes of reducing resource investment and realizing sulfur recycling, reduces the economic cost, is simple to operate, does not need a high-temperature and high-pressure environment, is easy to realize, and has wide application prospect in the field of environment-friendly hazardous waste liquid treatment.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram provided in an embodiment of the present invention;
icon:
1-acid storage tank, 2-hydrogen peroxide degradation tank, 3-fine filter, 4-diffusion dialysis equipment, 5-liquid inlet pipe, 6-acid delivery pump, 7-liquid outlet pipe, 8-liquid outlet pump and 9-receiving tank.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the equipment or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the present disclosure, unless otherwise expressly stated or limited, the first feature may comprise both the first and second features directly contacting each other, and also may comprise the first and second features not being directly contacting each other but being in contact with each other by means of further features between them. Also, the first feature being above, on or above the second feature includes the first feature being directly above and obliquely above the second feature, or merely means that the first feature is at a higher level than the second feature. A first feature that underlies, and underlies a second feature includes a first feature that is directly under and obliquely under a second feature, or simply means that the first feature is at a lesser level than the second feature.
Example (b):
the purpose of this embodiment is in order to provide a sulphuric acid recovery system.
Specifically, referring to fig. 1, the sulfuric acid recovery system comprises an acid storage tank 1, a hydrogen peroxide degradation tank 2, a fine filter 3 and a diffusion dialysis device 4, wherein the top of the hydrogen peroxide degradation tank is communicated with the acid storage tank through a liquid inlet pipe 5, and an acid delivery pump 6 is arranged on the liquid inlet pipe. The import of smart filter passes through drain pipe 7 intercommunication with hydrogen peroxide solution degradation groove, is equipped with out the liquid pump 8 on the drain pipe, and the smart filter export is located diffusion dialysis equipment top and communicates with diffusion dialysis equipment, and the liquid after the filtration directly gets into in the diffusion dialysis equipment. The diffusion dialysis equipment 4 separates sulfuric acid by taking concentration difference as driving force, and the bottom of the diffusion dialysis equipment is communicated with a receiving groove 9.
The hydrogen peroxide degradation tank 2 is made of FRP high-temperature-resistant anticorrosive materials and is provided with a heat exchanger, the fine filter 3 is an acid-resistant filter, such as a filter made of PVDF materials and a filter element made of PTFE and similar materials, the filtering precision of the filter is 0.1-0.5 um., the diffusion dialysis equipment 4 is internal circulation treatment equipment, the number of times of internal circulation treatment of the diffusion dialysis equipment is preferably more than or equal to 2, the impurity removal rate of recovered sulfuric acid reaches 99%, the recovery rate of sulfuric acid reaches 80%, the diffusion dialysis equipment 4 is driven by concentration difference, the concentration difference is preferably more than or equal to 10000 mg/L (1%), the concentration of sulfuric acid in waste liquid which can be treated by the technology is 1-50%, and the application field is wide.
When the acid-resistant hydrogen peroxide degrading agent is used, sulfuric acid waste liquid containing hydrogen peroxide is sent into a hydrogen peroxide degrading tank 2 through an acid delivery pump 6, an acid-resistant hydrogen peroxide degrading agent is added, the waste liquid without hydrogen peroxide is pumped into a fine filter 3 through a liquid outlet pump 8 for filtering, the filtered waste liquid enters a diffusion dialysis device 4 from the outlet of the fine filter, the diffusion dialysis device further separates sulfuric acid from the waste liquid by taking concentration difference as a driving force and applying a selective permeability principle in an internal circulation treatment mode, and the sulfuric acid enters a receiving tank 9, wherein the acid-resistant hydrogen peroxide degrading agent is a composite sulfate substance containing transition metal vanadium and chromium, can degrade hydrogen peroxide in high-concentration sulfuric acid waste liquid, and degrades hydrogen peroxide with the concentration of 3000-.
The sulfuric acid recovery system of the present application is described below with a specific example:
370000 mg/L (37%) sulfuric acid, 70000ppm (7%) hydrogen peroxide, 22900 mg/L (2.29%) iron and 1920 mg/L (0.192%) aluminum in acid waste liquid generated in a semiconductor industry, wherein the flow rate is 1m3/D, and the acid waste liquid sequentially passes through a hydrogen peroxide degradation tank (added with a special acid-resistant hydrogen peroxide degradation agent), a 0.1um PVDF filter (matched with a PTFE filter core) and internal-circulation diffusion dialysis equipment;
firstly, degrading hydrogen peroxide through a hydrogen peroxide degradation tank to meet the requirement of subsequent liquid feeding; then, removing the particles with the particle size of more than or equal to 0.1um in the waste liquid through a filter, so that the waste liquid meets the liquid inlet requirement of diffusion dialysis equipment;
and (3) enabling the filtered waste liquid to enter diffusion dialysis equipment, circulating for 3 times, and collecting the recovered sulfuric acid to enter a receiving tank for recycling in a workshop.
The sampling test in the receiving tank shows that the concentration of the recovered sulfuric acid is 31.6 percent, the recovery rate reaches 85.41 percent, the content of hydrogen peroxide is less than 10 mg/L, the degradation rate is more than 99.9 percent, the content of aluminum and iron is less than 0.2 mg/L, and the removal rate is more than 99 percent.
Therefore, the method solves the defects that the prior art and the equipment can not treat the sulfuric acid waste liquid containing hydrogen peroxide; the problem that the prior art can only treat low-concentration sulfuric acid waste liquid and has narrow application field is solved; also solves the problem of high comprehensive cost of the prior treatment of the sulfuric acid waste liquid containing hydrogen peroxide. The method realizes the purpose of recycling sulfur with less resource investment, reduces economic cost, and has wide application prospect in the field of environmental protection and hazardous waste liquid treatment.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A sulfuric acid recovery system is characterized by comprising an acid storage tank (1), a hydrogen peroxide degradation tank (2), a fine filter (3) and diffusion dialysis equipment (4), wherein the top of the hydrogen peroxide degradation tank is communicated with the acid storage tank through a liquid inlet pipe (5), an acid delivery pump (6) is arranged on the liquid inlet pipe, an inlet of the fine filter is communicated with the hydrogen peroxide degradation tank through a liquid outlet pipe (7), a liquid outlet pump (8) is arranged on the liquid outlet pipe, an outlet of the fine filter is positioned above the diffusion dialysis equipment and is communicated with the diffusion dialysis equipment, and filtered liquid directly enters the diffusion dialysis equipment; the diffusion dialysis equipment (4) separates sulfuric acid by taking concentration difference as driving force, and the bottom of the diffusion dialysis equipment is communicated with the receiving groove (9).
2. A sulfuric acid recovery system according to claim 1, characterized in that the hydrogen peroxide solution degradation tank (2) is a FRP high temperature resistant corrosion resistant tank equipped with a heat exchanger.
3. A sulfuric acid recovery system according to claim 1, characterized in that the fine filter (3) has a filtration accuracy of 0.1-0.5 um.
4. A sulfuric acid recovery system according to claim 1, characterized in that the fine filter (3) is a PVDF filter.
5. A sulfuric acid recovery system according to claim 1, characterized in that the fine filter (3) is provided with a filter element of PTFE material.
6. A sulfuric acid recovery system according to claim 1, characterized in that the diffusion dialysis unit (4) is an internal circulation treatment unit, the number of internal circulation treatments being not less than two.
CN201922184972.1U 2019-12-09 2019-12-09 Sulfuric acid recovery system Active CN211078475U (en)

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CN201922184972.1U CN211078475U (en) 2019-12-09 2019-12-09 Sulfuric acid recovery system

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Application Number Priority Date Filing Date Title
CN201922184972.1U CN211078475U (en) 2019-12-09 2019-12-09 Sulfuric acid recovery system

Publications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110790240A (en) * 2019-12-09 2020-02-14 苏州市晶协高新电子材料有限公司 Sulfuric acid recovery system and method for recovering sulfuric acid by removing hydrogen peroxide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110790240A (en) * 2019-12-09 2020-02-14 苏州市晶协高新电子材料有限公司 Sulfuric acid recovery system and method for recovering sulfuric acid by removing hydrogen peroxide

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