CN211073231U - Sand blasting machine - Google Patents

Sand blasting machine Download PDF

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Publication number
CN211073231U
CN211073231U CN201921622190.5U CN201921622190U CN211073231U CN 211073231 U CN211073231 U CN 211073231U CN 201921622190 U CN201921622190 U CN 201921622190U CN 211073231 U CN211073231 U CN 211073231U
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CN
China
Prior art keywords
blasting machine
pipe
machine according
wedge block
clamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201921622190.5U
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Chinese (zh)
Inventor
郑波
张朝贵
赵彬涵
朱亚海
唐林
黄永胜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing Gas Compressor Factory Co Ltd
Original Assignee
Chongqing Gas Compressor Factory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chongqing Gas Compressor Factory Co Ltd filed Critical Chongqing Gas Compressor Factory Co Ltd
Priority to CN201921622190.5U priority Critical patent/CN211073231U/en
Application granted granted Critical
Publication of CN211073231U publication Critical patent/CN211073231U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a foundry goods sandblast field especially relates to a sand blasting machine, including the frame, be equipped with hopper, air compressor in the frame, defeated sand pipe and spray gun, defeated sand union coupling is between hopper and spray gun, air compressor and defeated sand union coupling are equipped with anchor clamps in the frame, and anchor clamps include the intubate, are equipped with a plurality of first through-holes on the lateral wall of intubate, and equal sliding connection has the piece of supporting mutually in the first through-hole, supports mutually and is connected with first spring between piece and the intubate, is connected with on the intubate and is used for adjusting the adjustment mechanism that supports the piece and stretch out length from the intubate. This scheme makes the surface processing of the foundry goods of pipe class more even.

Description

Sand blasting machine
Technical Field
The utility model relates to a foundry goods sandblast field especially relates to a sand blasting machine.
Background
After the pipe castings are formed, the surfaces of the castings need to be machined by using a sand blasting machine, and the surfaces of the castings are impacted and cut by using abrasive ejected by the sand blasting machine, so that the surfaces of the castings obtain certain cleanliness and roughness. The prior sand blasting machine comprises a frame, a hopper, an air compressor and a spray gun, wherein abrasive materials are filled in the hopper, a sand conveying pipe is connected between the hopper and the spray gun, the air compressor is connected with the sand conveying pipe, power is provided by the air compressor, airflow generated by the air compressor moves at a high speed to form negative pressure in the spray gun, the abrasive materials are sucked into the spray gun through the sand conveying pipe and are ejected through the spray gun, and therefore the spray gun is ejected to the machined surface of a casting to achieve the expected machining purpose.
However, in the existing sand blasting machine, in the process of machining the pipe castings, clamps are needed to clamp the outer surfaces of the two ends of the pipe castings, so that the clamped parts of the castings are covered by the clamps, the clamped parts of the castings are not contacted with abrasive materials, and the machining of the surfaces of the castings is not uniform.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a sand blasting machine to make the surface processing of the foundry goods of pipe class more even.
In order to achieve the above purpose, the technical scheme of the utility model is that: the utility model provides a sand blasting machine, includes the frame, is equipped with hopper, air compressor, defeated sand pipe and spray gun in the frame, and defeated sand union coupling is between hopper and spray gun, and air compressor and defeated sand union coupling are equipped with anchor clamps in the frame, and anchor clamps include the intubate, are equipped with a plurality of first through-holes on the lateral wall of intubate, and equal sliding connection has the piece of supporting mutually in the first through-hole, supports mutually and is connected with first spring between piece and the intubate, is connected with on the intubate and is used for adjusting the adjustment mechanism who supports the piece mutually and stretch out length from.
The working principle and the effect of the scheme are as follows: the frame is used for supporting whole sand blasting machine. The hopper is used for containing abrasive materials. The air compressor is used for providing power and generating airflow moving at high speed, so that negative pressure can be formed in the spray gun, and abrasive is sucked into the spray gun through the sand conveying pipe and is ejected through the spray gun. The anchor clamps are used for fixing the foundry goods of pipe class, when fixed, the both ends of pipe class foundry goods are inserted to the intubate, the counterbalance piece is used for offsetting with the inner wall of pipe class foundry goods, through controlling adjustment mechanism, thereby adjustable counterbalance piece stretches out the length and to the dynamics that pipe class foundry goods inner wall offsets from the intubate, thereby offset the inner wall of pipe class foundry goods simultaneously through a plurality of counterbalance pieces, realized fixing the pipe class foundry goods in the frame, compare among the prior art anchor clamps and carry out the centre gripping to the lateral wall of pipe class foundry goods, the inner wall of foundry goods is offset by the counterbalance piece, the outer wall of foundry goods can not be hidden by anchor clamps, thereby make the surface of foundry goods all can be processed by the abrasive material, make the outer wall processing of pipe class foundry goods more even, the outer wall of foundry goods can not appear because of being held by the anchor clamps and not processed the place. When the casting is loosened by the clamp, the adjusting mechanism is reversely controlled, the first spring enables the abutting block to move towards the inner wall of the casting, and therefore the abutting block does not abut against the inner wall of the casting any more, and the casting can be taken down from the clamp at the moment. In addition, this scheme still can realize carrying out the centre gripping fixedly to the foundry goods of different internal diameters size through the length that control blocks that support mutually stretches out from the intubate.
Furthermore, adjustment mechanism includes the voussoir, and voussoir sliding connection has the inclined plane that offsets with the voussoir in the inside of intubate on the piece that supports mutually, is connected with the second spring between voussoir and the intubate, and adjustment mechanism still includes the adjusting bolt who is used for controlling the voussoir and removes. Thus, the moving distance and direction of the wedge can be controlled by rotating the adjusting bolt. When the adjusting bolt is rotated in the forward direction, the adjusting bolt pushes the wedge block to move towards the direction close to the abutting block, at the moment, the second spring is stretched to store force, the wedge block pushes the abutting block to extend out of the insertion tube, and the extending length of the abutting block is lengthened. When the adjusting bolt rotates reversely, the adjusting bolt does not push the wedge block to move towards the direction close to the abutting block any more, when the wedge block moves towards the direction far away from the abutting block under the action of the second spring, the pushing force of the wedge block on the abutting block is reduced, the abutting block moves towards the inside of the insertion pipe under the action of the first spring, and the extending length of the abutting block from the insertion pipe is reduced.
Furthermore, a second through hole is formed in the side wall of the insertion pipe, the adjusting bolt is in threaded connection with the second through hole, and an inclined plane which is abutted against the adjusting bolt is arranged on the wedge block. Therefore, the wedge block is provided with an inclined surface which is abutted against the adjusting bolt, so that the adjusting bolt can more easily push the wedge block to move.
Furthermore, one end of the adjusting bolt, which is positioned in the insertion tube, is fixedly connected with a circular platform block, and the side surface of the circular platform block is abutted to the inclined surface of the wedge block. The side surface of the circular table block is also inclined, and the side surface of the circular table block is matched with the inclined surface of the wedge block, so that the bottom end of the adjusting bolt can push the wedge block more easily. And moreover, in the rotating process of the adjusting bolt, the circular truncated cone block can also rotate, and even if the circular truncated cone block rotates, the side surface of the circular truncated cone block can be abutted against the inclined surface on the wedge block, so that the smooth degree of the movement of the wedge block pushed by the adjusting bolt is not influenced by the rotation of the adjusting bolt.
Furthermore, a motor and an air cylinder are arranged on the rack, the motor and the air cylinder are arranged oppositely, the number of the clamps is two, one clamp is fixedly connected to an output shaft of the motor, and the other clamp is rotatably connected to an air cylinder rod of the air cylinder. From this, when anchor clamps carry out the centre gripping to the foundry goods, starter motor, the motor drives anchor clamps and rotates, and anchor clamps drive the foundry goods and rotate to can realize that the spray gun processes each side of foundry goods. Because the other clamp is rotatably connected to the air cylinder rod of the air cylinder, the air cylinder cannot influence the normal rotation of the clamp. The cylinder rod of the cylinder is telescopic and used for adjusting the distance between the two clamps, so that castings of different lengths can be clamped.
Further, a cylinder rod of the cylinder is rotatably connected with the clamp through a bearing. Therefore, the rotary connection between the cylinder rod of the cylinder and the clamp is realized.
Further, be equipped with the hang plate that is located the spray gun below in the frame, the hang plate is located the below of anchor clamps, and the low side of hang plate is equipped with the bits unit that removes, and the below of the low side of hang plate is equipped with the collecting vessel. From this, spout the abrasive material on the foundry goods and can drop to the hang plate under the effect of gravity on, because the hang plate slope sets up, the automatic low side to the hang plate of abrasive material flow on the so hang plate, finally enter into the collecting vessel to the collection of abrasive material has been realized. Can be mixed with the iron fillings on the foundry goods in the abrasive material that flows into the hang plate low side, because the low side of hang plate is equipped with except that the bits unit, so remove the bits unit and can separate abrasive material and iron fillings for the abrasive material purity of retrieving in the collecting vessel is higher, and impurity is less.
Furthermore, the scrap removing unit comprises a plurality of first magnetic strips and a plurality of second magnetic strips, and the first magnetic strips and the second magnetic strips are mutually crossed and arranged in a grid shape. From this, during the abrasive material accessible forms between first magnetic stripe and the second magnetic stripe on the hang plate flows into the collecting barrel in the blank, first magnetic stripe and second magnetic stripe are used for attracting iron fillings to make iron fillings and abrasive material separation.
Further, the first magnetic strip and the second magnetic strip are both electromagnets. From this, through for the electro-magnet circular telegram for remove the bits unit and have magnetism, thereby can attract iron fillings, through for the electro-magnet outage, remove the magnetism on the bits unit and disappear, remove iron fillings in the bits unit like this and can drop automatically, be convenient for clear up removing the iron fillings in the bits unit.
Furthermore, the number of spray guns is a plurality of, is connected with the branch workbin jointly on a plurality of spray guns, is equipped with a plurality of branch material pipes in the branch workbin, divides the one end and is connected with the spray gun of material pipe, divides the other end and the sand conveying union coupling of material pipe. Therefore, the grinding materials in the sand conveying pipe can enter the spray guns through the distributing pipes, so that the spray guns work simultaneously, and the machining effect of the surface of the casting is better. The material distribution pipe is located in the material distribution box, and the material distribution box is used for protecting the material distribution pipe.
Drawings
FIG. 1 is a perspective view of a blasting machine of embodiment 1;
FIG. 2 is a front view of the sander of FIG. 1;
FIG. 3 is a cross-sectional view of the clamp on the left side of FIG. 2;
FIG. 4 is a front view of a blasting machine of embodiment 2;
FIG. 5 is a top view of the chip removing unit.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: hopper 1, sand conveying pipe 2, air compressor 3, trachea 4, branch workbin 5, spray gun 6, roof 7, curb plate 8, motor 9, intubate 10, cylinder 11, adjusting bolt 12, counterbalance block 13, voussoir 14, connecting plate 16, first spring 17, round platform piece 18, second spring 19, hang plate 20, fixed plate 21, except that bits unit 22, collecting vessel 23, first magnetic stripe 27, second magnetic stripe 28.
Example 1
Substantially as shown in figures 1 to 3 of the accompanying drawings: a sand blasting machine comprises a frame, wherein the frame comprises two vertically arranged side plates 8 and a top plate 7 welded on the tops of the two side plates 8. The top of roof 7 is equipped with hopper 1, air compressor 3 and defeated sand pipe 2, and air compressor 3 passes through the fix with screw on roof 7, and the outer wall welding of defeated sand pipe 2 is on the bottom of hopper 1, and the outer wall welding of defeated sand pipe 2 is on roof 7, is connected with trachea 4 on the cavity compressor, and trachea 4's left end is connected with defeated sand pipe 2. The bottom of the top plate 7 is connected with a material distribution box 5 through screws, seven spray guns 6 are installed at the bottom of the material distribution box 5, seven material distribution pipes are arranged in the material distribution box 5, one ends of the material distribution pipes are connected with the spray guns 6, and the other ends of the material distribution pipes are connected with the sand conveying pipes 2.
The motor 9 and the cylinder 11 are fixedly mounted on the two side plates 8 through screws respectively, the motor 9 and the cylinder 11 are arranged oppositely, a clamp is arranged on a cylinder rod of the cylinder 11 and an output shaft of the motor 9, the clamp on the left side is welded on the output shaft of the motor 9, and the clamp on the right side is rotatably connected to the cylinder rod of the cylinder 11 through a bearing. Referring to fig. 3, taking a left clamp as an example, the clamp in this embodiment includes an insertion tube 10 that is hollow inside and is placed horizontally, a left end of the insertion tube 10 is welded on an output shaft of the motor 9, two first through holes are formed in a side wall of the insertion tube 10, the two first through holes are arranged oppositely, a butting block 13 is connected in the first through hole in a sliding manner, one end, located in the insertion tube 10, of the butting block 13 is provided with a left inclined surface, a connecting plate 16 is welded on a right side surface of the two butting blocks 13, a first spring 17 is connected between the connecting plate 16 above and a bottom of an inner wall of the insertion tube 10, and a first spring 17 is connected between the connecting plate 16 below and a top of the inner wall of the insertion tube 10. An adjusting mechanism for adjusting the protruding length of the abutting block 13 from the insertion tube 10 is connected to the insertion tube 10. The adjusting mechanism in this embodiment comprises an adjusting bolt 12 and a wedge 14 slidably connected to the inner wall of the insertion tube 10, and the specific sliding connection mode is as follows: the inner wall of the insertion tube 10 is provided with a sliding groove which is transversely arranged, and the bottom of the wedge block 14 is welded with a convex block which is positioned in the sliding groove. The two ends of the insertion tube 10 are both fixed with blocking plates through screws, a second spring 19 is connected between the left end of the wedge 14 and the blocking plate on the left side of the insertion tube 10, and the second spring 19 in this embodiment is a tension spring. The side wall of the insertion tube 10 is provided with a second through hole positioned at the left side of the first through hole, the adjusting bolt 12 is in threaded connection with the second through hole, and the upper end face of the left side of the wedge block 14 is provided with an inclined surface. One end of the adjusting bolt 12, which is positioned in the insertion tube 10, is welded with a circular truncated cone block 18, the small end of the circular truncated cone block 18 faces downwards, and the side surface of the circular truncated cone block 18 abuts against the inclined surface of the left end of the wedge block 14. The right end of the wedge 14 is also provided with an inclined surface, and the inclined surface at the right end of the wedge 14 is abutted against the inclined surface on the abutting block 13. Two anchor clamps in this embodiment set up about defeated sand pipe 2's vertical axis symmetry, so no longer describe anchor clamps on the cylinder pole, and the difference is that the right-hand member of the intubate 10 of right side anchor clamps passes through the bearing and rotates the connection on the cylinder pole of cylinder 11.
The specific implementation process is as follows: the casting such as a pipe is transversely placed between the two clamps, and the left end of the casting is sleeved on the left clamp. And starting the air cylinder 11, wherein the air cylinder 11 drives the right clamp to move leftwards until the right clamp enters the casting, and the casting is in a suspended state under the action of the two clamps. Turning the adjusting bolts 12 on the two clamps, referring to fig. 3, the adjusting bolts 12 move downward, the adjusting bolts 12 drive the circular truncated cone block 18 to move downward, the circular truncated cone block 18 pushes the wedge block 14 rightward, and the wedge block 14 extends the second spring 19. Wedge 14 pushes two abutments 13 away from each other, and the length of extension of two abutments 13 from insertion tube 10 is increased, and at the same time, first spring 17 is also extended. As the abutting block 13 extends out of the insertion pipe 10, one end of the abutting block 13, which is positioned outside the insertion pipe 10, abuts against the inner wall of the casting, so that the abutting block 13 clamps the casting under the action of self-abutting force. And then starting the air compressor 3, wherein the air compressor 3 enables the sand conveying pipe 2 to generate negative pressure, and under the action of the air compressor 3, the grinding materials in the hopper 1 enter the sand conveying pipe 2, enter the material distributing pipes from the sand conveying pipe 2 and are finally sprayed out from the spray gun 6, so that the surface of the casting can be subjected to sand blasting. The working principle of the blasting of the lance 6 in this embodiment belongs to the prior art, and is not described in detail herein.
The foundry goods is at the sandblast in-process, and starting motor 9 simultaneously, and motor 9 drives anchor clamps and rotates, and the anchor clamps on right side rotate on the cylinder pole, and anchor clamps drive the foundry goods and rotate to can realize that spray gun 6 processes each side of foundry goods, make the surface sandblast of foundry goods more even.
In this embodiment, because the inner wall of foundry goods is by the anchor clamps centre gripping, but not the outer wall of anchor clamps to the foundry goods carries out the centre gripping, the outer wall of event foundry goods can not be covered by anchor clamps to make the surface of foundry goods all can be processed by the abrasive, make the outer wall processing of pipe class foundry goods more even, the outer wall of foundry goods can not contain the place that is not processed because of being held by anchor clamps.
After the sand blasting is finished, the air compressor 3 is closed, the adjusting bolt 12 is rotated reversely, as shown in fig. 3, the adjusting bolt 12 moves upwards, the wedge block 14 moves leftwards under the action of the elastic force of the second spring 19, the wedge block 14 is far away from the abutting block 13, the first spring 17 pulls the connecting plate 16, so that the abutting block 13 moves inwards the insertion tube 10, the abutting block 13 does not abut against the inner wall of the casting, and meanwhile, the air cylinder rod moves rightwards, so that the casting can be taken down from the clamp.
Example 2
As shown in fig. 4 and 5, the inclined plate 20 obliquely arranged is welded between the two side plates 8, the inclined plate 20 is located below the fixture, the right end of the inclined plate 20 is a low end, a discharge hole is formed in the side plate 8 on the right side, the right end of the inclined plate 20 is opposite to the discharge hole, the low end of the inclined plate 20 is provided with a scrap removing unit 22, and a material collecting barrel 23 fixed on the side plate 8 through screws or clamping is arranged below the low end of the inclined plate 20. As shown in fig. 5, the fixing plate 21 is fixed on the side plate 8 on the right side by screws, the scrap removing unit 22 in this embodiment includes a plurality of first magnetic strips 27 and a plurality of second magnetic strips 28, the plurality of first magnetic strips 27 are located on the same plane and are all vertically arranged with the fixing plate 21, the end portions of the first magnetic strips 27 are bonded on the fixing plate 21, the plurality of second magnetic strips 28 are bonded on the second magnetic strips 28, the plurality of second magnetic strips 28 are located on the same plane, and the first magnetic strips 27 and the second magnetic strips 28 are mutually vertically crossed to form a grid shape. The first magnetic strip 27 and the second magnetic strip 28 in this embodiment may be permanent magnets or electromagnets, and the present embodiment is preferably an electromagnet.
Therefore, the abrasive sprayed on the casting falls onto the inclined plate 20 under the action of gravity, and the inclined plate 20 is obliquely arranged, so that the abrasive on the inclined plate 20 automatically flows to the lower end of the inclined plate 20 and finally enters the collecting barrel 23, and the collection of the abrasive is realized. Can be mingled with the iron fillings on the foundry goods in the abrasive material of the 20 low sides of hang plate that flow in, can be to first magnetic stripe 27 and second magnetic stripe 28 circular telegram this moment, first magnetic stripe 27 and second magnetic stripe 28 produce magnetism, first magnetic stripe 27 and second magnetic stripe 28 attract iron fillings to make iron fillings and abrasive material separation, the abrasive material falls in collecting barrel 23 through the space between first magnetic stripe 27 and the second magnetic stripe 28, make the abrasive material purity of retrieving in collecting barrel 23 higher, impurity is less.
When removing the more back of iron fillings of collecting on the bits unit 22, the accessible gives the electro-magnet outage, removes the magnetism disappearance on the bits unit 22, removes like this iron fillings on the bits unit 22 and can drop automatically, is convenient for clear up the iron fillings that remove on the bits unit 22.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, without departing from the concept of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the present invention and the practicability of the patent. The technology, shape and construction parts which are not described in the present invention are all known technology.

Claims (10)

1. The utility model provides a sand blasting machine, includes the frame, be equipped with hopper, air compressor, defeated sand pipe and spray gun in the frame, defeated sand union coupling is between hopper and spray gun, air compressor and defeated sand union coupling, its characterized in that: the clamp is arranged on the rack and comprises an insertion pipe, a plurality of first through holes are formed in the side wall of the insertion pipe, the first through holes are internally and slidably connected with the abutting blocks, a first spring is connected between the abutting blocks and the insertion pipe, and the insertion pipe is connected with an adjusting mechanism used for adjusting the extending length of the abutting blocks from the insertion pipe.
2. A blasting machine according to claim 1, wherein: the adjusting mechanism comprises a wedge block, the wedge block is connected inside the insertion tube in a sliding mode, an inclined surface which abuts against the wedge block is arranged on the abutting block, a second spring is connected between the wedge block and the insertion tube, and the adjusting mechanism further comprises an adjusting bolt used for controlling the wedge block to move.
3. A blasting machine according to claim 2, wherein: the side wall of the insertion pipe is provided with a second through hole, the adjusting bolt is in threaded connection with the second through hole, and the wedge block is provided with an inclined plane which is abutted against the adjusting bolt.
4. A blasting machine according to claim 3, wherein: one end of the adjusting bolt, which is positioned in the insertion pipe, is fixedly connected with a circular platform block, and the side surface of the circular platform block is abutted to the inclined surface of the wedge block.
5. A blasting machine according to any of claims 1 to 4, wherein: the motor and the air cylinder are arranged on the rack, the motor and the air cylinder are arranged oppositely, the number of the clamps is two, one clamp is fixedly connected to an output shaft of the motor, and the other clamp is rotatably connected to an air cylinder rod of the air cylinder.
6. A blasting machine according to claim 5, wherein: and a cylinder rod of the cylinder is rotatably connected with the clamp through a bearing.
7. A blasting machine according to claim 5, wherein: the automatic material collecting device is characterized in that an inclined plate located below the spray gun is arranged on the rack and located below the clamp, a scrap removing unit is arranged at the lower end of the inclined plate, and a material collecting barrel is arranged below the lower end of the inclined plate.
8. A blasting machine according to claim 7, wherein: the scrap removing unit comprises a plurality of first magnetic strips and a plurality of second magnetic strips, and the first magnetic strips and the second magnetic strips are mutually crossed and arranged in a grid shape.
9. A blasting machine as claimed in claim 8, wherein: the first magnetic strip and the second magnetic strip are both electromagnets.
10. A blasting machine according to claim 5, wherein: the quantity of spray guns is a plurality of, is connected with the branch workbin jointly on a plurality of spray guns, is equipped with a plurality of branch material pipes in the branch workbin, the one end of dividing the material pipe is connected with the spray gun, divides the other end and the sand conveying union coupling of material pipe.
CN201921622190.5U 2019-09-26 2019-09-26 Sand blasting machine Expired - Fee Related CN211073231U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921622190.5U CN211073231U (en) 2019-09-26 2019-09-26 Sand blasting machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921622190.5U CN211073231U (en) 2019-09-26 2019-09-26 Sand blasting machine

Publications (1)

Publication Number Publication Date
CN211073231U true CN211073231U (en) 2020-07-24

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Application Number Title Priority Date Filing Date
CN201921622190.5U Expired - Fee Related CN211073231U (en) 2019-09-26 2019-09-26 Sand blasting machine

Country Status (1)

Country Link
CN (1) CN211073231U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111871950A (en) * 2020-07-27 2020-11-03 安徽富乐德科技发展股份有限公司 Surface treatment device and process for graphite component of semiconductor ion implantation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111871950A (en) * 2020-07-27 2020-11-03 安徽富乐德科技发展股份有限公司 Surface treatment device and process for graphite component of semiconductor ion implantation device

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Granted publication date: 20200724

Termination date: 20210926