CN211073205U - Grinding fluid supply system - Google Patents
Grinding fluid supply system Download PDFInfo
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- CN211073205U CN211073205U CN201921910666.5U CN201921910666U CN211073205U CN 211073205 U CN211073205 U CN 211073205U CN 201921910666 U CN201921910666 U CN 201921910666U CN 211073205 U CN211073205 U CN 211073205U
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Abstract
The utility model provides a lapping liquid supply system, include: the first end of the main pipeline is connected with a grinding fluid supply end, and the second end of the main pipeline is connected with a grinding fluid output end; the pneumatic valve is arranged on the main pipeline and used for controlling the on-off of the main pipeline; a gas supply pipeline, wherein a first end of the gas supply pipeline is connected with a gas supply end, and a second end of the gas supply pipeline is connected with a gas inlet end of the pneumatic valve, and is used for supplying compressed air to the pneumatic valve; the electromagnetic valve is arranged on the gas supply pipeline and is used for controlling the on-off of the gas supply pipeline; and the liquid leakage detection device is arranged between the pneumatic valve and the electromagnetic valve, is connected with the gas supply pipeline and is used for detecting whether the pneumatic valve leaks or not. According to the utility model discloses lapping liquid feed system can whether leak by the automated inspection pneumatic valve, avoids lapping liquid to damage solenoid valve, gaseous pollutants supply line.
Description
Technical Field
The utility model relates to a polishing processing technology field, concretely relates to lapping liquid supply system.
Background
The silicon wafer polishing process achieves polishing effect through chemical and mechanical interaction, and polishing equipment needs to accurately control the supply of grinding fluid. The general control method is to complete the automatic feeding action by combining a solenoid valve and a pneumatic valve. When the equipment runs for a long time, the pneumatic valve is frequently opened and closed, so that the sealing performance of the valve is poor, and the grinding fluid is leaked. The leakage of the slurry not only causes a change in the flow rate of the polishing slurry, but also causes the leaked slurry to flow into the gas supply line of the pneumatic valve, thereby damaging the solenoid valve and the line for supplying the contaminated gas.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a grinding fluid feed system to solve the gaseous supply line pollution that the grinding fluid leaked and leads to and the problem that the solenoid valve damaged.
In order to solve the technical problem, the utility model discloses a following technical scheme:
the utility model provides a lapping liquid supply system, a serial communication port, include:
the first end of the main pipeline is connected with a grinding fluid supply end, and the second end of the main pipeline is connected with a grinding fluid output end;
the pneumatic valve is arranged on the main pipeline and used for controlling the on-off of the main pipeline;
a gas supply pipeline, wherein a first end of the gas supply pipeline is connected with a gas supply end, and a second end of the gas supply pipeline is connected with a gas inlet end of the pneumatic valve, and is used for supplying compressed air to the pneumatic valve;
the electromagnetic valve is arranged on the gas supply pipeline and is used for controlling the on-off of the gas supply pipeline;
and the liquid leakage detection device is arranged between the pneumatic valve and the electromagnetic valve, is connected with the gas supply pipeline and is used for detecting whether the pneumatic valve leaks or not.
Optionally, the liquid leakage detecting device includes:
the first three-way valve is arranged between the pneumatic valve and the solenoid valve, a first end of the first three-way valve is connected with an air inlet end of the pneumatic valve, and a second end of the first three-way valve is connected with one end of the solenoid valve;
and the liquid leakage detection unit is connected with the third end of the first three-way valve.
Optionally, the liquid leakage detecting unit is a liquid leakage sensor.
Optionally, the first three-way valve is a manual three-way valve or an electric three-way valve.
Optionally, the slurry supply system further includes:
a second three-way valve disposed between the slurry supply end and the pneumatic valve, a first end of the second three-way valve being connected to the slurry supply end, and a second end of the second three-way valve being connected to the first end of the pneumatic valve;
a third three-way valve, which is arranged between the pneumatic valve and the grinding fluid output end, wherein a first end of the third three-way valve is connected with a second end of the pneumatic valve, and a second end of the third three-way valve is connected with the grinding fluid output end;
and one end of the standby pipeline is connected with the third end of the second three-way valve, and the other end of the standby pipeline is connected with the third end of the third three-way valve.
Optionally, the second three-way valve and the third three-way valve are manual three-way valves.
Optionally, the second three-way valve and the third three-way valve are electric three-way valves.
Optionally, the slurry supply system further includes:
and a signal input end of the controller is connected with a signal output end of the liquid leakage detection unit, and a control signal output end of the controller is respectively connected with control ends of the second three-way valve and the third three-way valve.
Optionally, a switch valve is arranged on the standby pipeline.
The utility model discloses above-mentioned technical scheme's beneficial effect as follows:
according to the utility model discloses lapping liquid feed system can whether leak by the automated inspection pneumatic valve, avoids lapping liquid to damage solenoid valve, gaseous pollutants supply line.
Drawings
Fig. 1 is a schematic structural diagram of a polishing slurry supply system according to an embodiment of the present invention.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
The silicon wafer polishing process achieves polishing effect through chemical and mechanical interaction, and polishing equipment needs to accurately control the supply of grinding fluid. In a conventional polishing liquid supply line, a combination of an electromagnetic valve and a pneumatic valve is generally used to automatically supply the polishing liquid. However, the polishing apparatus requires an interval of slurry during operation, and therefore, the pneumatic valve needs to be frequently switched to control the on and off of the supply line, but such frequent switching operation may cause poor sealing of the valve, resulting in slurry leakage. The leakage of the slurry not only causes a change in the flow rate of the polishing slurry, but also causes the leaked slurry to flow into the gas supply line of the pneumatic valve, thereby damaging the solenoid valve and the line for supplying the contaminated gas.
Therefore, the embodiment of the utility model provides a lapping liquid supply system to solve pneumatic valve wearing and tearing and lead to lapping liquid to leak, and then damage the problem of the pipeline that solenoid valve and polluted gas supplied with.
As shown in fig. 1, the slurry supply system according to an embodiment of the present invention may include: the main pipeline 1 is used for providing a grinding fluid conveying channel, a first end of the main pipeline 1 is connected with a grinding fluid supply end 2, a second end of the main pipeline 1 is connected with a grinding fluid output end 3, and grinding fluid provided by the grinding fluid supply end 2 is conveyed to the grinding fluid output end 3 through the main pipeline 1 and sprayed to a silicon wafer polishing part; further, the main pipeline 1 is further provided with a pneumatic valve 4, the pneumatic valve 4 is used for controlling the on-off of the main pipeline 1 so as to control whether the grinding fluid is delivered to the silicon wafer polishing part, and the pneumatic valve 4 is further connected with a gas supply pipeline 5, specifically, a first end of the gas supply pipeline 5 is connected with a gas supply end 6, the supply end 6 is used for providing compressed air, a second end of the gas supply pipeline 5 is connected with a gas inlet end of the pneumatic valve 4, the compressed air provided by the supply end 6 is delivered to the gas inlet end of the pneumatic valve 4 through the gas supply pipeline 5, as the grinding fluid in the main pipeline 1 generally has certain pressure and has high flow rate, the closing performance of the valve can be ensured by adopting the pneumatic valve 4 for on-off control; in addition, an electromagnetic valve 7 is further provided on the gas supply line 5, and the electromagnetic valve 7 is used for controlling the on/off of the gas supply line 5 to control the on/off of the air-operated valve 4.
The utility model discloses in, because pneumatic valve 4's frequent switching action, its leakproofness will descend, thereby will arouse the lapping liquid to leak, the lapping liquid of part leakage still can flow into gas supply pipeline 5, then flow into in the solenoid valve 7, lead to gas supply pipeline 5 to receive the pollution, even lead to solenoid valve 7 impaired, therefore, on gas supply pipeline 5 between pneumatic valve 4 and solenoid valve 7, be provided with the liquid leakage detection device 8 that is used for detecting whether pneumatic valve 4 takes place to leak, when pneumatic valve 4 takes place to leak, the lapping liquid that flows into in gas supply pipeline 5 will be detected by liquid leakage detection device 8, thereby operating personnel can in time change damaged pneumatic valve 4 before the lapping liquid flows into solenoid valve 7, avoid solenoid valve 7 to damage.
In some embodiments of the present invention, the liquid leakage detecting device 8 may include a first three-way valve 81 and a liquid leakage detecting unit 82, wherein the first three-way valve 81 is disposed between the air-operated valve 4 and the solenoid valve 7, specifically, a first end of the first three-way valve 81 is connected to the air inlet end of the air-operated valve 4, a second end of the first three-way valve 81 is connected to one end of the solenoid valve 7, and the liquid leakage detecting unit 82 is connected to a third end of the first three-way valve 81; under normal conditions, all three ports of the first three-way valve 81 are opened, and a sealing measure is taken at one end of the first three-way valve 81 connected to the liquid leakage detecting unit 82, so that the compressed air provided from the air supply end 6 can be normally delivered to the air-operated valve 4 via the gas supply pipeline 5, when the air-operated valve 4 leaks, a part of the leaked slurry flows into the gas supply pipeline 5 and then passes through the first three-way valve 81, so as to be detected by the liquid leakage detecting unit 82 connected to the third end of the first three-way valve 81, so that an operator can find out that the air-operated valve 4 leaks and replace the air-operated valve 4 in time.
The utility model discloses an in some embodiments, first three-way valve 81 is manual three-way valve or electronic three-way valve, and liquid leakage detecting element 82 specifically can be liquid leakage sensor, whether liquid leakage sensor can sensitively detect its detected position and take place liquid leakage, of course, liquid leakage detecting element 82 also can be liquid leakage alarm etc. sends out the police dispatch newspaper when detecting the lapping liquid and leak to remind the staff in time to change the pneumatic valve 4 of leakage.
In other embodiments of the present invention, the slurry supply system further comprises: a second three-way valve 9, a third three-way valve 10 and a standby pipeline 11, wherein the second three-way valve 9 is arranged between the grinding fluid supply end 2 and the pneumatic valve 4, specifically, a first end of the second three-way valve 9 is connected with the grinding fluid supply end 2, and a second end of the second three-way valve 9 is connected with a first end of the pneumatic valve 4; the third three-way valve 10 is arranged between the pneumatic valve 4 and the grinding fluid output end 3, specifically, a first end of the third three-way valve 10 is connected with a second end of the pneumatic valve 4, and a second end of the third three-way valve 10 is connected with the grinding fluid output end 3; one end of the spare pipeline 11 is connected with the third end of the second three-way valve 9, and the other end of the spare pipeline 11 is connected with the third end of the third three-way valve 10, thereby, the grinding fluid can flow from the main pipeline 1 to the grinding fluid output end 3 after sequentially passing through the second three-way valve 9, the pneumatic valve 4 and the third three-way valve 10, and can flow from the main pipeline 1 to the grinding fluid output end 3 after sequentially passing through the second three-way valve 9, the spare pipeline 11 and the third three-way valve 10, so that, under normal conditions, the third ends of the second three-way valve 9 and the third three-way valve 10 are both closed, the spare pipeline 11 is not conducted, the grinding fluid flows from the main pipeline 1 through the pneumatic valve 4, and the pneumatic valve 4 controls the on-off of the main pipeline 1, and when the leakage of the pneumatic valve 4 is detected, the second end of the second three-way valve 9 and the first end of the third three-way valve 10 are both closed, from not influencing subsequent normal production and processing to avoided the lapping liquid supply that leads to because of leaking the deviation appearing, can guarantee that current silicon chip polishing process is not influenced, thereby ensured the quality of the polishing of current silicon chip, avoided pneumatic valve 4's further leakage, also made things convenient for operating personnel to change pneumatic valve 4 of damage.
In some embodiments of the present invention, when the supply of the slurry is not needed, the supply of the slurry can be cut off by closing the first end of the second three-way valve 9 and/or the second end of the third three-way valve 10; of course, an additional on-off valve may be provided on the backup pipeline 11 to control the on-off of the backup pipeline 11.
The embodiment of the utility model provides an in, second three-way valve 9 and third three-way valve 10 can be manual three-way valve, also can be electric three-way valve, when second three-way valve 9 and third three-way valve 10 are manual three-way valves, when liquid leakage detection device 8 detects pneumatic valve 4 and takes place the lapping liquid and leak, the staff can manually close the second end of second three-way valve 9 and the first end of third three-way valve 10, and open the third end of second three-way valve 9 and the third end of third three-way valve 10, manual standby pipeline 11 that launches.
In other embodiments of the present invention, when the second three-way valve 9 and the third three-way valve 10 are electric three-way valves, the slurry supply system may further include a controller 12, a signal input terminal of the controller 12 is connected to a signal output terminal of the liquid leakage detecting unit 82, and a control signal output terminal of the controller 12 is connected to control terminals of the second three-way valve 9 and the third three-way valve 10, respectively, so that when the liquid leakage detecting unit 82 detects the leakage of the pneumatic valve 4, an electric signal is sent to the signal input terminal of the controller 12 through the signal output terminal, and the controller 12 sends a control signal to control corresponding valves of the second three-way valve 9 and the third three-way valve 10 to open or close after receiving the electric signal, thereby automatically cutting off a passage through the pneumatic valve 4, starting the standby pipeline 11, and thus improving the automation degree of the slurry supply system, the situation that the leakage is always continuous due to the fact that the worker cannot timely know the leakage information of the pneumatic valve 4 is avoided. Wherein, the controller 12 may be a single chip microcomputer.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A slurry supply system, comprising:
the first end of the main pipeline is connected with a grinding fluid supply end, and the second end of the main pipeline is connected with a grinding fluid output end;
the pneumatic valve is arranged on the main pipeline and used for controlling the on-off of the main pipeline;
a gas supply pipeline, wherein a first end of the gas supply pipeline is connected with a gas supply end, and a second end of the gas supply pipeline is connected with a gas inlet end of the pneumatic valve, and is used for supplying compressed air to the pneumatic valve;
the electromagnetic valve is arranged on the gas supply pipeline and is used for controlling the on-off of the gas supply pipeline;
and the liquid leakage detection device is arranged between the pneumatic valve and the electromagnetic valve, is connected with the gas supply pipeline and is used for detecting whether the pneumatic valve leaks or not.
2. The polishing liquid supply system according to claim 1, wherein the liquid leakage detection means comprises:
the first three-way valve is arranged between the pneumatic valve and the solenoid valve, a first end of the first three-way valve is connected with an air inlet end of the pneumatic valve, and a second end of the first three-way valve is connected with one end of the solenoid valve;
and the liquid leakage detection unit is connected with the third end of the first three-way valve.
3. The polishing liquid supply system according to claim 2, wherein the liquid leakage detection unit is a liquid leakage sensor.
4. The slurry supply system according to claim 2, wherein the first three-way valve is a manual three-way valve or an electric three-way valve.
5. The polishing liquid supply system according to claim 2, further comprising:
a second three-way valve disposed between the slurry supply end and the pneumatic valve, a first end of the second three-way valve being connected to the slurry supply end, and a second end of the second three-way valve being connected to the first end of the pneumatic valve;
a third three-way valve, which is arranged between the pneumatic valve and the grinding fluid output end, wherein a first end of the third three-way valve is connected with a second end of the pneumatic valve, and a second end of the third three-way valve is connected with the grinding fluid output end;
and one end of the standby pipeline is connected with the third end of the second three-way valve, and the other end of the standby pipeline is connected with the third end of the third three-way valve.
6. The slurry supply system according to claim 5, wherein the second three-way valve and the third three-way valve are manual three-way valves.
7. The polishing slurry supply system according to claim 5, wherein the second three-way valve and the third three-way valve are electric three-way valves.
8. The polishing liquid supply system according to claim 7, further comprising:
and a signal input end of the controller is connected with a signal output end of the liquid leakage detection unit, and a control signal output end of the controller is respectively connected with control ends of the second three-way valve and the third three-way valve.
9. The polishing liquid supply system according to claim 5, wherein an on-off valve is provided on the backup line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921910666.5U CN211073205U (en) | 2019-11-07 | 2019-11-07 | Grinding fluid supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921910666.5U CN211073205U (en) | 2019-11-07 | 2019-11-07 | Grinding fluid supply system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211073205U true CN211073205U (en) | 2020-07-24 |
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ID=71647310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921910666.5U Active CN211073205U (en) | 2019-11-07 | 2019-11-07 | Grinding fluid supply system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211073205U (en) |
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2019
- 2019-11-07 CN CN201921910666.5U patent/CN211073205U/en active Active
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