CN211041637U - Drying device for 2DMEMS probe card - Google Patents
Drying device for 2DMEMS probe card Download PDFInfo
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- CN211041637U CN211041637U CN201922107872.9U CN201922107872U CN211041637U CN 211041637 U CN211041637 U CN 211041637U CN 201922107872 U CN201922107872 U CN 201922107872U CN 211041637 U CN211041637 U CN 211041637U
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Abstract
The utility model discloses a 2DMEMS is drying device for probe card, including outer container, motor, anchor clamps, end cover, hollow plate, gas-supply pipe, installation mechanism and block mechanism, installation mechanism includes T type groove, T type piece, return spring, T type pole, spring one and sloping block, and block mechanism includes fixed block, fixed pin, L type pole, spring two and briquetting, the utility model discloses when the sloping block aligns with the spacing groove, under the effect of spring elasticity, the sloping block removes and gets into the spacing inslot portion, and then with T type piece joint in T type inslot portion, rotate L type pole, L type pole rotates and separates with the magnetic pole, under the effect of reset coil spring elasticity, L type pole rotation drives the pressure block and removes for briquetting and end cover laminating, L type pole continue to rotate and compress spring two, make spring two produce elasticity, the elasticity of spring two has improved the briquetting and has joined in marriage the pressure of end cover.
Description
Technical Field
The utility model relates to a drying device for 2DMEMS probe card belongs to probe card technical field.
Background
The probe card is a test interface, and is mainly used for testing a bare chip, and testing parameters of the chip by connecting a test machine and the chip and transmitting signals.
The probe card drying device who uses at present has certain defect, lacks the convenient dismouting function of hollow core slab, causes inconveniently to maintain hollow core slab, and then has reduced the drying efficiency to the probe card, lacks the convenient block function of end cover simultaneously, when high temperature high-pressure gas is from the inside blowout of hollow core slab, the end cover rocks under the effect of gaseous reaction easily, if connect through the hasp, then opening of inconvenient end cover, and then the inconvenience is installed the probe card on anchor clamps. Accordingly, a drying apparatus for a 2d ems probe card, a mounting mechanism, and an engaging mechanism have been proposed to address the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to provide a drying device for a 2d mems probe card, which solves the above problems.
The utility model discloses a following technical scheme realizes above-mentioned mesh, a drying device for 2DMEMS probe card, including outer container, motor, anchor clamps, end cover, hollow board, gas-supply pipe, installation mechanism and block mechanism, outer container rear end fixed mounting motor, and the motor front end extends to the outer container inside, motor front end fixed mounting anchor clamps, outer container top installation end cover, and the end cover bottom installs the hollow board, the gas-supply pipe is installed to the end cover top, and the gas-supply pipe bottom passes the end cover and is connected with the hollow board;
the installation mechanism comprises T-shaped grooves, T-shaped blocks, return springs, T-shaped rods, a first spring and an inclined block, wherein two T-shaped grooves are symmetrically formed in the bottom end of the end cover, the two T-shaped blocks are symmetrically and fixedly installed at the top end of the hollow plate, the T-shaped blocks are installed inside the T-shaped grooves, the two T-shaped rods are symmetrically installed at the top end of the end cover, one ends of the T-shaped rods extend into the T-shaped grooves, the inclined blocks are fixedly installed at the bottom ends of the T-shaped rods, the return springs are fixedly installed on the rear wall inside the T-shaped grooves, the first spring is installed on the annular side face of each T-shaped rod, and two ends of each first spring are;
block mechanism includes fixed block, fixed pin, L type pole, spring two and briquetting, two fixed blocks of outer container outside symmetry fixed mounting, and fixed mounting fixed pin between two fixed blocks, installation L type pole on the fixed pin annular side, and L type pole one end fixed mounting spring two, two one end fixed mounting of spring are on the briquetting top, and the briquetting bottom is laminated mutually with the end cover top.
Preferably, the installation mechanism is provided with two sets, two sets of installation mechanism structures are the same, and two sets of installation mechanism symmetry are installed in the end cover bottom.
Preferably, the top end of the inside of the T-shaped groove is provided with a containing groove, the top end of the inclined block extends into the containing groove, the top end of the T-shaped block is provided with a limiting groove, and the bottom end of the inclined block extends into the limiting groove.
Preferably, a reset coil spring is fixedly installed on the annular side face of the fixing pin, the outer side of the reset coil spring is fixedly installed inside an L-type rod, and a magnetic rod is fixedly installed between the fixing blocks.
Preferably, the clamping mechanism is provided with four groups, the four groups are identical in structure, the four groups of clamping mechanisms are symmetrically arranged at the left end and the right end of the outer box, external threads are formed in the annular side face of the gas pipe, threaded holes are formed in the top end of the hollow plate, the gas pipe is connected with the hollow plate through the threaded holes and the external threads, more than two gas injection holes are uniformly formed in the bottom end of the hollow plate, and one end of the gas pipe is connected with external high-temperature gas injection equipment.
Preferably, the end cover one end is through screw one fixed mounting spring hinge, and the spring hinge other end passes through screw two fixed mounting on the outer container, the end cover is connected with the outer container through the spring hinge.
The utility model provides a 2DMEMS probe card is installation mechanism for drying device, includes T type groove, T type piece, return spring, T type pole, spring one and sloping block, two T type grooves are seted up to end cover bottom symmetry, two T type pieces of hollow plate top symmetry fixed mounting, T type piece is installed at T type inslot portion, two T type poles of end cover top symmetry installation, and T type pole one end extend to T type inslot portion, oblique piece of T type pole bottom fixed mounting, fixed mounting return spring on the wall behind T type inslot portion, installation spring one on the annular side of T type pole, and spring both ends respectively fixed mounting on T type pole and the end cover.
The utility model provides a 2DMEMS probe card block mechanism for drying device, includes fixed block, fixed pin, L type pole, two springs and briquetting, two fixed blocks of outer container outside symmetry fixed mounting, and fixed mounting fixed pin between two fixed blocks, installation L type pole on the fixed pin annular side, and L type pole one end fixed mounting spring two, two one end fixed mounting of spring are on the briquetting top, and laminate mutually on briquetting bottom and the end cover top.
The utility model has the advantages that:
1. the probe card has the advantages that the T-shaped block is installed inside the T-shaped groove, then a user pushes the hollow plate, the hollow plate moves to drive the T-shaped block to move along the T-shaped groove, the T-shaped block moves to extrude the inclined block, the inclined block is extruded to move, the inclined block moves to drive the T-shaped rod to move, the T-shaped rod moves to stretch the first spring, the first spring is stretched to generate elasticity, when the inclined block is aligned with the limiting groove, the inclined block moves into the limiting groove under the action of the elasticity of the first spring, and then the T-shaped block is clamped inside the T-shaped groove, so that the problem that the hollow plate is inconvenient to maintain due to the lack of a convenient dismounting function of the hollow plate, and the drying efficiency of the probe card is reduced is solved;
2. the second beneficial effect, rotate the end cover, make the end cover laminate with the outer container mutually, the end cover rotates and makes the spring hinge produce elasticity, then the user rotates L type pole, L type pole rotates and separates with the magnetic pole, under the effect of reset coil spring elasticity, L type pole rotates and drives the briquetting and remove, make briquetting and end cover laminate, L type pole continues to rotate and compresses spring two, make spring two produce elasticity, spring two's elasticity has improved the pressfitting power of briquetting to the end cover, the convenient block function of end cover that lacks has been solved, when high temperature high-pressure gas is spout from hollow slab inside, the end cover rocks under the effect of gas reaction easily, if connect through the hasp, then the opening of inconvenient end cover, and then inconvenient drawback of installing the probe card on anchor clamps.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a sectional view of the overall structure of the present invention;
FIG. 3 is a schematic view of the structure of the installation mechanism of the present invention;
fig. 4 is a schematic structural view of the engaging mechanism of the present invention.
In the figure, the device comprises a base 1, an outer box 2, a motor 3, a clamp 4, an end cover 5, a hollow plate 6, a gas pipe 7, a T-shaped groove 8, a T-shaped block 9, a return spring 10, a T-shaped rod 11, a spring I, a spring 12, an inclined block 13, a limiting groove 14, a containing groove 15, a fixing block 16, a fixing pin 17, an L-shaped rod 18, a spring II, a spring 19, a pressing block 20, a return coil spring 21 and a magnetic rod.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the embodiments described below are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Detailed description of the preferred embodiment
The following examples are examples of the drying apparatus for a DMEMS probe card of the present application 2
Referring to fig. 1-4, a drying device for a 2d ems probe card comprises an outer box 1, a motor 2, a clamp 3, an end cover 4, a hollow plate 5, a gas pipe 6, an installation mechanism and a clamping mechanism, wherein the motor 2 is fixedly installed at the rear end of the outer box 1, the front end of the motor 2 extends into the outer box 1, the clamp 3 is fixedly installed at the front end of the motor 2, the end cover 4 is installed at the top end of the outer box 1, the hollow plate 5 is installed at the bottom end of the end cover 4, the gas pipe 6 is installed at the top end of the end cover 4, and the bottom end of the gas pipe 6 penetrates through the end cover 4 to be connected with;
the installation mechanism comprises a T-shaped groove 7, a T-shaped block 8, a return spring 9, a T-shaped rod 10, a first spring 11 and an inclined block 12, wherein two T-shaped grooves 7 are symmetrically formed in the bottom end of the end cover 4, the two T-shaped blocks 8 are symmetrically and fixedly installed on the top end of the hollow plate 5, the T-shaped blocks 8 are installed inside the T-shaped groove 7, the two T-shaped rods 10 are symmetrically installed on the top end of the end cover 4, one end of each T-shaped rod 10 extends into the T-shaped groove 7, the inclined block 12 is fixedly installed at the bottom end of the T-shaped rod 10, the return spring 9 is fixedly installed on the rear wall inside the T-shaped groove 7, the first spring 11 is installed on the annular side surface of the T-shaped rod 10, two ends of the first spring 11 are fixedly installed on the T-shaped rod 10 and the end cover 4 respectively, a user installs the T-shaped block 8 inside the T-shaped groove 7, then, the T-shaped block 8 moves to extrude the inclined block 12, the inclined block 12 is extruded to move, the inclined block 12 moves to drive the T-shaped rod 10 to move, the T-shaped rod 10 moves to stretch the first spring 11, the first spring 11 is stretched to generate elastic force, when the inclined block 12 is aligned with the limiting groove 14, the inclined block 12 moves to enter the limiting groove 14 under the action of the elastic force of the first spring 11, the T-shaped block 8 is clamped inside the T-shaped groove 7, installation of the hollow plate 5 is completed, the T-shaped block 8 slides inside the T-shaped groove 7 to extrude the return spring 9, the return spring 9 generates elastic force, the elastic force of the return spring 9 is convenient for pushing the T-shaped block 8 to reversely move inside the T-shaped groove 7, and the hollow plate 5 is convenient to take out;
the clamping mechanism comprises fixing blocks 15, fixing pins 16, L type rods 17, a second spring 18 and a pressing block 19, the two fixing blocks 15 are symmetrically and fixedly installed on the outer side of the outer box 1, the fixing pin 16 is fixedly installed between the two fixing blocks 15, L type rods 17 are installed on the annular side face of the fixing pin 16, the second spring 18 is fixedly installed at one end of the L type rod 17, one end of the second spring 18 is fixedly installed at the top end of the pressing block 19, the bottom end of the pressing block 19 is attached to the top end of the end cover 4, when the end cover 4 needs to be opened, a user rotates the L type rods 17, the L type rods 17 rotate around the fixing pin 16 to extrude the return coil spring 20, so that the return coil spring 20 generates elastic force, the L type rods 17 rotate to be attached to the magnetic rod 21, the adsorption force between the L type rods 17 and the magnetic rod 21 is larger than the elastic force of the return coil spring 20, the position of the L type rods 17 is fixed, under the elastic force of the spring hinge, the end cover 4 rotates to be opened, when the end cover 4 needs to be closed, the end cover 4 rotates to be opened, the end cover 4 rotates to be opened, when the end cover 4 needs to be closed, the end cover 4, so that the end cover 4 is attached to the outer box 4, the elastic force of the pressing block 15, the pressing block 17, the pressing block 19 is separated from the pressing block 19, the.
The air injection device is characterized in that the two groups of mounting mechanisms are arranged, the two groups of mounting mechanisms are identical in structure and are symmetrically mounted at the bottom end of the end cover 4, the top end of the inside of the T-shaped groove 7 is provided with a containing groove 13, the top end of the inclined block 12 extends into the containing groove 13, the top end of the T-shaped block 8 is provided with a limiting groove 14, the bottom end of the inclined block 12 extends into the limiting groove 14, the containing groove 13 is convenient to move due to the design of the inclined block 12, the annular side surface of the fixing pin 16 is fixedly provided with a reset coil spring 20, the outer side of the reset coil spring 20 is fixedly mounted inside the L-shaped rod 17, a magnetic rod 21 is fixedly mounted between the fixing blocks 15, the reset coil spring 20 is convenient to reset and move due to the design of the L-shaped rod 17, the four groups of clamping mechanisms are identical in structure and are symmetrically mounted at the left end and the right end of the outer box 1, the outer thread is formed on the annular side surface of the outer box 6, the top end of the hollow plate 5 is provided with a threaded hole, the air injection pipe 6, the air injection hole is connected with the hollow plate 5 through the threaded hole, the air injection spring and the hinge, the air injection spring is convenient to rotate through the hinge, the air injection spring 4, and the hinge, the hinge is convenient to rotate the air injection spring 1, and is convenient to rotate.
The utility model discloses when using, install T type piece 8 inside T type groove 7, then the user promotes hollow plate 5, hollow plate 5 removes and drives T type piece 8 and removes along T type groove 7, T type piece 8 removes and extrudees sloping block 12, sloping block 12 receives the extrusion removal, sloping block 12 removes and drives T type pole 10 and removes, T type pole 10 removes and stretches spring 11, spring 11 receives tensile production elasticity, when sloping block 12 aligns with spacing groove 14, under the effect of spring 11 elasticity, sloping block 12 removes and gets into spacing groove 14 inside, and then inside T type piece 8 joint at T type groove 7.
The end cover 4 is rotated to enable the end cover 4 to be attached to the outer box 1, the end cover 4 rotates to enable the spring hinge to generate elastic force, then a user rotates the L-shaped rod 17, the L-shaped rod 17 rotates to be separated from the magnetic rod 21, under the action of the elastic force of the reset coil spring 20, the L-shaped rod 17 rotates to drive the pressing block 19 to move, the pressing block 19 is attached to the end cover 4, the L-shaped rod 17 continues to rotate to compress the second spring 18, the second spring 18 generates elastic force, and the elastic force of the second spring 18 improves the pressing force of the pressing block 19 on the end cover 4.
Detailed description of the invention
The following embodiment is an embodiment of a mounting mechanism for a DMEMS probe card drying apparatus of the present application 2.
The utility model provides a 2DMEMS probe card is installation mechanism for drying device, includes T type groove 7, T type piece 8, return spring 9, T type pole 10, spring 11 and sloping block 12, two T type grooves 7 are seted up to 4 bottom symmetries of end cover, two T type pieces 8 of 5 top symmetries fixed mounting of hollow plate, T type piece 8 is installed inside T type groove 7, two T type poles 10 of 4 top symmetries of end cover installation, and inside T type pole 10 one end extends to T type groove 7, T type pole 10 bottom fixed mounting sloping block 12, fixed mounting return spring 9 on the inside back wall of T type groove 7, install spring 11 on the T type pole 10 annular side, and 11 both ends of spring are fixed mounting respectively on T type pole 10 and on end cover 4.
Detailed description of the preferred embodiment
The following embodiment is an embodiment of the engaging mechanism for the DMEMS probe card drying apparatus of the present application 2.
The utility model provides a 2DMEMS probe card is block mechanism for drying device, includes two 18 and briquetting 19 of fixed block 15, fixed pin 16, L type pole 17, spring, two fixed blocks 15 of 1 outside symmetry fixed mounting of outer container, and fixed mounting fixed pin 16 between two fixed blocks 15, installation L type pole 17 on the 16 annular side of fixed pin, and two 18 of L type pole 17 one end fixed mounting spring, two 18 one ends fixed mounting of spring are on 19 tops of briquetting, and laminate mutually on 19 bottoms of briquetting and 4 tops of end cover.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (6)
1. A drying device for a 2DMEMS probe card is characterized in that: the electric box comprises an outer box (1), a motor (2), a clamp (3), an end cover (4), a hollow plate (5), a gas pipe (6), an installing mechanism and a clamping mechanism, wherein the motor (2) is fixedly installed at the rear end of the outer box (1), the front end of the motor (2) extends into the outer box (1), the clamp (3) is fixedly installed at the front end of the motor (2), the end cover (4) is installed at the top end of the outer box (1), the hollow plate (5) is installed at the bottom end of the end cover (4), the gas pipe (6) is installed at the top end of the end cover (4), and the bottom end of the gas pipe (6) penetrates through the end cover (4) to be connected with;
the mounting mechanism comprises a T-shaped groove (7), a T-shaped block (8), a return spring (9), a T-shaped rod (10), a first spring (11) and an inclined block (12), two T-shaped grooves (7) are symmetrically formed in the bottom end of the end cover (4), two T-shaped blocks (8) are symmetrically and fixedly installed at the top end of the hollow plate (5), the T-shaped block (8) is arranged in the T-shaped groove (7), two T-shaped rods (10) are symmetrically arranged at the top end of the end cover (4), one end of the T-shaped rod (10) extends into the T-shaped groove (7), the bottom end of the T-shaped rod (10) is fixedly provided with an inclined block (12), a return spring (9) is fixedly arranged on the rear wall in the T-shaped groove (7), a first spring (11) is arranged on the annular side surface of the T-shaped rod (10), two ends of the first spring (11) are respectively and fixedly arranged on the T-shaped rod (10) and the end cover (4);
block mechanism includes fixed block (15), fixed pin (16), L type pole (17), two (18) of spring and briquetting (19), two fixed blocks (15) of outer container (1) outside symmetry fixed mounting, and fixed mounting fixed pin (16) between two fixed blocks (15), L type pole (17) of installation on fixed pin (16) ring side, and two (18) of L type pole (17) one end fixed mounting spring, two (18) one end fixed mounting of spring are on briquetting (19) top, and briquetting (19) bottom is laminated with end cover (4) top mutually.
2. The drying apparatus of claim 1, wherein: the installation mechanism is equipped with two sets ofly, two sets of installation mechanism structure is the same, and two sets of installation mechanism symmetry is installed in end cover (4) bottom.
3. The drying apparatus of claim 1, wherein: the T-shaped groove (7) is internally provided with a containing groove (13) at the top end, the inclined block (12) is extended to the inside of the containing groove (13) at the top end, the T-shaped block (8) is provided with a limiting groove (14) at the top end, and the inclined block (12) is extended to the inside of the limiting groove (14) at the bottom end.
4. The drying apparatus for a 2D EMS probe card according to claim 1, wherein the fixing pin (16) is fixedly provided with a return coil spring (20) on the annular side surface, the outer side of the return coil spring (20) is fixedly arranged in an L-shaped rod (17), and the magnetic rod (21) is fixedly arranged between the fixing blocks (15).
5. The drying apparatus of claim 1, wherein: the clamping mechanism is provided with four groups, the clamping mechanism is of the same structure, the clamping mechanisms are symmetrically arranged at the left end and the right end of the outer box (1), external threads are arranged on the annular side surface of the gas pipe (6), threaded holes are formed in the top end of the hollow plate (5), the gas pipe (6) is connected with the hollow plate (5) through the threaded holes and the external threads, more than two gas injection holes are uniformly formed in the bottom end of the hollow plate (5), and one end of the gas pipe (6) is connected with external high-temperature gas injection equipment.
6. The drying apparatus of claim 1, wherein: and one end of the end cover (4) is fixedly provided with a spring hinge through a first screw, the other end of the spring hinge is fixedly arranged on the outer box (1) through a second screw, and the end cover (4) is connected with the outer box (1) through the spring hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922107872.9U CN211041637U (en) | 2019-11-29 | 2019-11-29 | Drying device for 2DMEMS probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922107872.9U CN211041637U (en) | 2019-11-29 | 2019-11-29 | Drying device for 2DMEMS probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211041637U true CN211041637U (en) | 2020-07-17 |
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ID=71530329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922107872.9U Active CN211041637U (en) | 2019-11-29 | 2019-11-29 | Drying device for 2DMEMS probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211041637U (en) |
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2019
- 2019-11-29 CN CN201922107872.9U patent/CN211041637U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Strong half conductor (Shanghai) Co.,Ltd. Assignor: MAXONE SEMICONDUCTOR (SUZHOU) Co.,Ltd. Contract record no.: X2021320010005 Denomination of utility model: A drying device for 2dmems probe card Granted publication date: 20200717 License type: Common License Record date: 20210207 |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000 Patentee after: Strong Half Conductor (Suzhou) Co.,Ltd. Address before: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000 Patentee before: MAXONE SEMICONDUCTOR (SUZHOU) Co.,Ltd. |