CN211030745U - Slicer for wafer processing - Google Patents
Slicer for wafer processing Download PDFInfo
- Publication number
- CN211030745U CN211030745U CN201921272602.7U CN201921272602U CN211030745U CN 211030745 U CN211030745 U CN 211030745U CN 201921272602 U CN201921272602 U CN 201921272602U CN 211030745 U CN211030745 U CN 211030745U
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- rotating motor
- rotating shaft
- threaded rod
- block
- bevel gear
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- 230000002093 peripheral effect Effects 0.000 claims description 11
- 229910003460 diamond Inorganic materials 0.000 claims description 10
- 239000010432 diamond Substances 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims 5
- 235000012431 wafers Nutrition 0.000 description 23
- 239000013078 crystal Substances 0.000 description 15
- 238000005520 cutting process Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013072 incoming material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model discloses a slicer for wafer processing, which comprises a base, a left mounting post is fixedly arranged on the left side of the upper end of the base, a right mounting post is fixedly arranged on the right side of the upper end of the base, a first rotating motor is fixedly arranged on the upper end of the left mounting post, a rotating shaft of the first rotating motor penetrates through the upper end of the left mounting post, a first threaded rod is welded at the lower end of the rotating shaft of the first rotating motor, a first bearing is rotatably connected at the lower end of the threaded rod, the first bearing is fixedly arranged at the bottom in the left mounting post, a threaded block is in threaded connection with one side of the threaded rod, a first connecting block is fixedly welded at the right side of the threaded block, the first connecting block penetrates through the right side of the left mounting post, and a mounting plate is welded at the right side of the first connecting block, a clamping device designed by, and has simple structure, reasonable and low cost.
Description
Technical Field
The utility model relates to a slicer specifically is a slicer is used in wafer processing.
Background
The wafer is one of the main raw materials of L ED, which is the light emitting component of L ED, the most core part of L ED, and the quality of the wafer will directly determine the performance of L ED. the wafer is composed of III and V compound semiconductor substances, when L ED is packaged, the wafer incoming material is arranged on the wafer film in order, the slicing machine is a machine for cutting thin and uniform tissue sheets, the tissue is supported by hard paraffin or other substances, and the required distance is automatically pushed forward (toward the knife) by a slicing thickness gauge once per cutting, and the gradient of the thickness gauge is usually 1 micron.
When the existing wafer is processed, a slicing machine is often needed, however, the traditional wafer cutting machine is expensive in manufacturing cost, complex in structure and low in cutting efficiency, and due to the fact that when the wafer is cut, a common clamping device cannot stably clamp a crystal block, the quality problem of the cut wafer is caused. Accordingly, one skilled in the art provides a wafer processing slicer to solve the above problems in the background art.
Disclosure of Invention
An object of the utility model is to provide a slicer is used in wafer processing to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a slicing machine for wafer processing comprises a base, wherein a left mounting column is fixedly mounted on the left side of the upper end of the base, a right mounting column is fixedly mounted on the right side of the upper end of the base, a first rotating motor is fixedly mounted on the upper end of the left mounting column, a first rotating shaft of the first rotating motor penetrates through the upper end of the left mounting column, a first threaded rod is welded at the lower end of the first rotating shaft of the first rotating motor, a first bearing is rotatably connected to the lower end of the first threaded rod, the first bearing is fixedly mounted at the bottom in the left mounting column, a threaded block is in threaded connection with the peripheral side of the first threaded rod, a first connecting block is fixedly welded on the right side of the threaded block, the first connecting block penetrates through the right side of the;
a third rotating motor is fixedly mounted at the upper end of the right mounting column, a rotating shaft of the third rotating motor penetrates through the upper end of the right mounting column, a second rotating shaft is welded at the lower end of the rotating shaft of the third rotating motor, a third bearing is rotatably connected to the lower end of the second rotating shaft, the third bearing is fixedly mounted at the bottom in the right mounting column, a first bevel gear is fixedly mounted on the periphery of the second rotating shaft, a second bevel gear meshed with the first bevel gear is arranged on the left side of the first bevel gear, a slide rail is fixedly mounted on the left side of the right mounting column corresponding to the position of the second bevel gear, a second threaded rod is arranged in the slide rail, two bearings are rotatably connected to the left end and the right end of the second threaded rod, the second left end of the left bearing is fixedly mounted on the left side of the slide rail;
clamping device comprises clamp splice, two splint, pivot three, two carousels, connecting piece, two rubber slipmats, the spout has been seted up with clamp splice fixed connection to slider upper end and clamp splice one end, and the clamp splice joint is in the spout of two splint, and the inside rotation of clamp splice is connected with pivot three, and pivot three is located between two splint, and the clamp splice both sides are run through at the both ends of pivot three, and the equal fixedly connected with carousel in the three both ends of pivot all rotates between the splint of carousel and carousel both sides and is connected with the connecting piece. When in use, the slicer is powered on firstly, the crystal block is placed between the two clamping plates, the controller controls the motor arranged in the clamping block to rotate the rotating shaft III, the clamping block and the two clamping plates are in sliding connection, the connecting piece is rotationally connected between the clamping plates and the turntable, so that the two clamping plates on the clamping block are close to each other, the crystal block placed between the two clamping plates is clamped, the controller controls the rotating motor III to drive the rotating shaft II rotationally connected in the right mounting column to rotate, the rotating shaft II rotates to drive the threaded rod II rotationally connected in the sliding rail to rotate due to the meshing relation of the bevel gear I sleeved on the two peripheral sides of the rotating shaft and the bevel gear II welded at the right end of the threaded rod II, the sliding block is in threaded connection with the two peripheral sides of the threaded rod and is in sliding connection in the sliding rail, and the threaded connection relation between the sliding block and the threaded rod II and the limiting, the diamond saw blade is close to, the controller controls the first rotating motor to drive the first threaded rod connected to the inside of the mounting column on the left side to rotate, the threaded block connected to the side of the first threaded rod on the side is driven to move up and down through the first connecting block and the second rotating motor fixedly connected with the first connecting block, and the diamond saw blade moving up and down cuts the crystal block which is fixedly moved on the right side by the clamping device.
As a further aspect of the present invention: an opening is formed in the right side wall of the left mounting column, the length of the first threaded rod is equal to that of the opening, and the width of the first connecting block is equal to that of the opening. And an opening is formed to facilitate the vertical movement of the first connecting block in the left mounting column.
As a further aspect of the present invention: the connecting piece is crescent, and the connecting piece rotates through the pivot to be connected between splint and carousel. The turntable rotates, and the clamping plates on the two sides are close to each other through the connecting piece, so that the crystal blocks are clamped.
As a further aspect of the present invention: the clamping blocks are internally provided with a rotating motor driving the rotating shaft to rotate, and two opposite side surfaces of the two clamping plates are fixedly provided with rubber anti-slip pads. The rotating shaft three rotates to clamp the crystal blocks by rotating the motor, and the rubber anti-slip mat can better clamp the crystal blocks.
As a further aspect of the present invention: the clamping block is in threaded connection with the rotating shaft II through the sliding block, the threaded rod II, the bevel gear I and the bevel gear II, and the rotating motor II is in threaded connection with the threaded rod I through the mounting plate, the connecting block I and the threaded block.
As a further aspect of the present invention: the base upper surface right side fixed mounting has the standing groove, and the welding of base lower extreme has a plurality of support columns. The placing groove is used for storing the cut wafers.
As a further aspect of the present invention: the base front side fixed mounting has the controller, the controller respectively with rotate motor one, rotate motor two, rotate motor three and the clamp splice internally mounted rotate motor electric connection. The controller respectively controls the first rotating motor, the second rotating motor, the third rotating motor and the rotating motors arranged in the clamping blocks to work.
Compared with the prior art, the beneficial effects of the utility model are that:
through setting up two erection columns about, act on cutting device and clamping device respectively, clamping device passes through the built-in motor rotation of clamp splice and makes splint press from both sides tight brilliant piece, the motor on right side drives clamping device and impels to the saw bit, left motor drives electronic diamond saw bit and reciprocates and cuts the brilliant piece, the clamping device that this slicer designed can be stable presss from both sides tightly the brilliant piece, the brilliant piece cutting is coordinated the cooperation each other by controlling the motor again, the cutting process is high-efficient swift, the condition that wafer cutting thickness differs can not appear, and the reasonable cost of simple structure is cheap.
Drawings
Fig. 1 is a schematic structural view of a wafer processing slicer.
Fig. 2 is an enlarged view of a wafer processing microtome at a.
Fig. 3 is a schematic view of a clamping device in a microtome for wafer processing.
FIG. 4 is a schematic view of a clamp plate of a wafer slicing machine
In the figure: 1. a base; 2. a left mounting post; 3. a right mounting post; 4. rotating the first motor; 5. a thread block; 6. a first connecting block; 7. a first rotating shaft; 8. a first threaded rod; 9. a first bearing; 10. a splint; 11. a placement groove; 12. a second bearing; 13. a turntable; 14. mounting a plate; 15. rotating a second motor; 16. a diamond saw blade; 17. a slider; 18. a slide rail; 19. rotating a motor III; 20. a second rotating shaft; 21. a first bevel gear; 22. a second bevel gear; 23. a third bearing; 24. a connecting member; 25. a rotating shaft III; 26. a clamping block; 27. a rubber non-slip mat; 28. a second threaded rod; 29. a support pillar; 30. and a controller.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 to 4, in an embodiment of the present invention, a wafer slicing machine for wafer processing includes a base 1, a left mounting post 2 is fixedly installed on the left side of the upper end of the base 1, a right mounting post 3 is fixedly installed on the right side of the upper end of the base 1, a first rotating motor 4 is fixedly installed on the upper end of the left mounting post 2, a rotating shaft of the first rotating motor 4 penetrates through the upper end of the left mounting post 2, a first threaded rod 8 is welded on the lower end of the rotating shaft of the first rotating motor 4, a first bearing 9 is rotatably connected to the lower end of the first threaded rod 8, the first bearing 9 is fixedly installed on the bottom of the left mounting post 2, a threaded block 5 is screwed on the side of the first threaded rod 8, a first connecting block 6 is fixedly welded on the right side of the threaded block 5, the first connecting block 6 penetrates through the right side of the left mounting post 2, a diamond saw blade 16 is welded at the right end of the first rotating shaft 7;
a third rotating motor 19 is fixedly arranged at the upper end of the right mounting column 3, a rotating shaft of the third rotating motor 19 penetrates through the upper end of the right mounting column 3, a second rotating shaft 20 is welded at the lower end of the rotating shaft of the third rotating motor 19, a third bearing 23 is rotatably connected at the lower end of the second rotating shaft 20, the third bearing 23 is fixedly arranged at the bottom in the right mounting column 3, a first bevel gear 21 is fixedly arranged on the peripheral side of the second rotating shaft 20, a second bevel gear 22 meshed with the first bevel gear 21 is arranged on the left side of the first bevel gear 21, a slide rail 18 is fixedly arranged on the left side of the right mounting column 3 corresponding to the position of the second bevel gear 22, a second threaded rod 28 is arranged in the slide rail 18, two bearings 12 are rotatably connected at the left and right ends of the second threaded rod 28, the second left bearing 12 is fixedly arranged on the left side in the slide rail 18, the second right bearing 12 is, the upper end of the sliding block 17 is fixedly connected with a clamping device;
clamping device comprises clamp splice 26, two splint 10, three 25 of pivot, two carousel 13, connecting piece 24, two rubber slipmats 27, slider 17 upper end and clamp splice 26 fixed connection, the spout has been seted up to splint 10 one end, and clamp splice 26 joint is in the spout of two splint 10, and clamp splice 26 internal rotation is connected with three 25 of pivot, and three 25 of pivot are located between two splint 10, and clamp splice 26 both sides are run through at the both ends of three 25 of pivot, and the equal fixedly connected with carousel 13 in three 25 both ends of pivot, all rotates between the carousel 13 of clamp splice 26 both sides and the splint 10 of carousel 13 both sides to be connected with connecting piece 24. When in use, the slicer is powered on, the crystal block is placed between the two clamping plates 10, the controller 30 controls the motor arranged in the clamping block 26 to rotate the rotating shaft III 25, the clamping block 26 is in sliding connection with the two clamping plates 10, the connecting piece 24 is rotationally connected between the clamping plates 10 and the rotating disc 13, so that the two clamping plates 10 on the clamping block 26 are close to each other, the crystal block placed between the two clamping plates 10 is clamped, the controller 30 controls the rotating motor III 19 to drive the rotating shaft II 20 rotationally connected in the right mounting post 3 to rotate, because of the meshing relationship between the bevel gear I21 sleeved on the peripheral side of the rotating shaft II 20 and the bevel gear II 22 welded at the right end of the threaded shaft II 28, the rotating shaft II 20 rotates, the threaded rod II 28 rotationally connected in the sliding rail 18 is driven to rotate, the sliding block 17 threadedly connected on the peripheral side of the threaded rod II 28 and slidably connected in the sliding rail 18, because of the threaded connection relationship between the sliding, will remove in slide rail 18 to drive the clamping device of fixed connection in slider 17 upper end and remove, be close to diamond saw blade 16, controller 30 control rotates motor 4 and drives and rotate and connect 8 rotations at the inside threaded rod of left side erection column, and threaded block 5 of threaded connection 8 week side on threaded rod will drive and reciprocate through connecting block 6 rather than fixed connection's rotation motor two 15, and diamond saw blade 16 that reciprocates cuts the crystal block that the right side was come by clamping device fixed removal.
An opening is formed in the right side wall of the left mounting column 2, the length of a first threaded rod 8 is equal to that of the opening, and the width of a first connecting block 6 is equal to that of the opening. An opening is formed to facilitate the connection block I6 to move up and down in the left mounting column 2.
The connecting piece 24 is crescent, and the connecting piece 24 is rotatably connected between the clamping plate 10 and the rotating disc 13 through a rotating shaft. The turntable 13 is rotated to bring the side clamping plates 10 close to each other through the connecting members 24, thereby clamping the ingot.
A rotating motor for driving the rotating shaft three 25 to rotate is arranged in the clamping block 26, and rubber anti-slip pads 27 are fixedly arranged on two opposite side surfaces of the two clamping plates 10. The rotating shaft III 25 rotates to clamp the crystal blocks by rotating the motor, and the rubber anti-slip pads 27 can better clamp the crystal blocks.
The clamping block 26 is in threaded connection with the second rotating shaft 20 through the sliding block 17, the second threaded rod 28, the first bevel gear 21 and the second bevel gear 22, and the second rotating motor 15 is in threaded connection with the first threaded rod 8 through the mounting plate 14, the first connecting block 6 and the second threaded block 5.
The right side of the upper surface of the base 1 is fixedly provided with a placing groove 11, and the lower end of the base 1 is welded with a plurality of supporting columns 29. The placing groove 11 is used for storing the cut wafers.
The front side surface of the base 1 is fixedly provided with a controller 30, and the controller 30 is respectively electrically connected with a first rotating motor 4, a second rotating motor 15, a third rotating motor 19 and a rotating motor arranged inside the clamping block 26. The controller 30 controls the first rotating motor 4, the second rotating motor 15, the third rotating motor 19 and the rotating motors arranged in the clamping blocks 26 to work respectively.
The utility model discloses a theory of operation is:
when in use, the slicer is powered on, the crystal block is placed between the two clamping plates 10, the controller 30 controls the motor arranged in the clamping block 26 to rotate the rotating shaft III 25, the clamping block 26 is in sliding connection with the two clamping plates 10, the connecting piece 24 is rotationally connected between the clamping plates 10 and the rotating disc 13, so that the two clamping plates 10 on the clamping block 26 are close to each other, the crystal block placed between the two clamping plates 10 is clamped, the controller 30 controls the rotating motor III 19 to drive the rotating shaft II 20 rotationally connected in the right mounting post 3 to rotate, because of the meshing relationship between the bevel gear I21 sleeved on the peripheral side of the rotating shaft II 20 and the bevel gear II 22 welded at the right end of the threaded shaft II 28, the rotating shaft II 20 rotates, the threaded rod II 28 rotationally connected in the sliding rail 18 is driven to rotate, the sliding block 17 threadedly connected on the peripheral side of the threaded rod II 28 and slidably connected in the sliding rail 18, because of the threaded connection relationship between the sliding, will remove in slide rail 18 to drive the clamping device of fixed connection in slider 17 upper end and remove, be close to diamond saw blade 16, controller 30 control rotates motor 4 and drives and rotate and connect 8 rotations at the inside threaded rod of left side erection column, and threaded block 5 of threaded connection 8 week side on threaded rod will drive and reciprocate through connecting block 6 rather than fixed connection's rotation motor two 15, and diamond saw blade 16 that reciprocates cuts the crystal block that the right side was come by clamping device fixed removal.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (7)
1. A slicing machine for wafer processing comprises a base (1) and is characterized in that a left mounting column (2) is fixedly mounted on the left side of the upper end of the base (1), a right mounting column (3) is fixedly mounted on the right side of the upper end of the base (1), a first rotating motor (4) is fixedly mounted on the upper end of the left mounting column (2), a rotating shaft of the first rotating motor (4) penetrates through the upper end of the left mounting column (2), a first threaded rod (8) is welded at the lower end of the rotating shaft of the first rotating motor (4), a first bearing (9) is rotatably connected at the lower end of the first threaded rod (8), the first bearing (9) is fixedly mounted at the inner bottom of the left mounting column (2), a first threaded block (5) is in threaded connection with the peripheral side of the first threaded rod (8), a first connecting block (6) is fixedly welded on the right side of the first threaded block (5), a second rotating motor (15) is fixedly installed on the right side of the installation plate (14), a first rotating shaft (7) is installed on the right side of the second rotating motor (15), and a diamond saw blade (16) is welded at the right end of the first rotating shaft (7);
a rotating motor III (19) is fixedly installed at the upper end of the right installation column (3), a rotating shaft of the rotating motor III (19) penetrates through the upper end of the right installation column (3), a rotating shaft II (20) is welded at the lower end of the rotating shaft of the rotating motor III (19), a bearing III (23) is rotatably connected at the lower end of the rotating shaft II (20), the bearing III (23) is fixedly installed at the inner bottom of the right installation column (3), a bevel gear I (21) is fixedly installed on the peripheral side of the rotating shaft II (20), a bevel gear II (22) meshed with the bevel gear I (21) is arranged on the left side of the bevel gear I (21), a sliding rail (18) is fixedly installed on the left side of the right installation column (3) corresponding to the position of the bevel gear II (22), a threaded rod II (28) is arranged in the sliding rail (18), the left end and the right end of the threaded rod II (28) are both rotatably connected with a bearing, the right end of the second threaded rod (28) penetrates through the left side wall of the right mounting column (3) and is fixedly connected with the second bevel gear (22), the peripheral side of the second threaded rod (28) is in threaded connection with a sliding block (17), and the upper end of the sliding block (17) is fixedly connected with a clamping device;
clamping device comprises clamp splice (26), two splint (10), pivot three (25), two carousel (13), connecting piece (24), two rubber slipmats (27), slider (17) upper end and clamp splice (26) fixed connection, the spout has been seted up to splint (10) one end, clamp splice (26) joint is in the spout of two splint (10), clamp splice (26) internal rotation is connected with pivot three (25), pivot three (25) are located between two splint (10), clamp splice (26) both sides are run through at the both ends of pivot three (25), the equal fixedly connected with carousel (13) in pivot three (25) both ends, all rotate between carousel (13) of clamp splice (26) both sides and the splint (10) of carousel (13) both sides and be connected with connecting piece (24).
2. The wafer processing slicer as claimed in claim 1, wherein the left mounting post (2) has an opening formed in a right side wall thereof, the first threaded rod (8) has a length equal to the length of the opening, and the first connecting block (6) has a width equal to the width of the opening.
3. The wafer processing slicer of claim 1 wherein the link (24) is crescent shaped, the link (24) being pivotally connected between the clamp plate (10) and the turntable (13) by a pivot.
4. The wafer processing slicer according to claim 1, wherein a rotating motor for driving the rotating shaft III (25) to rotate is installed in the clamping block (26), and rubber anti-slip pads (27) are fixedly installed on two opposite side surfaces of the two clamping plates (10).
5. The wafer processing slicer according to claim 1, wherein the clamping block (26) is in threaded connection with the second rotating shaft (20) through the sliding block (17), the second threaded rod (28), the first bevel gear (21) and the second bevel gear (22), and the second rotating motor (15) is in threaded connection with the first threaded rod (8) through the mounting plate (14), the first connecting block (6) and the second threaded block (5).
6. The wafer processing slicer according to claim 1, wherein a placing groove (11) is fixedly arranged on the right side of the upper surface of the base (1), and a plurality of supporting columns (29) are welded at the lower end of the base (1).
7. The wafer processing slicer according to claim 1, wherein the controller (30) is fixedly installed on the front side surface of the base (1), and the controller (30) is electrically connected with the first rotating motor (4), the second rotating motor (15), the third rotating motor (19) and a rotating motor installed inside the clamping block (26) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921272602.7U CN211030745U (en) | 2019-08-07 | 2019-08-07 | Slicer for wafer processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921272602.7U CN211030745U (en) | 2019-08-07 | 2019-08-07 | Slicer for wafer processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211030745U true CN211030745U (en) | 2020-07-17 |
Family
ID=71568781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921272602.7U Active CN211030745U (en) | 2019-08-07 | 2019-08-07 | Slicer for wafer processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211030745U (en) |
-
2019
- 2019-08-07 CN CN201921272602.7U patent/CN211030745U/en active Active
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
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Denomination of utility model: A chip processing slicer Effective date of registration: 20231228 Granted publication date: 20200717 Pledgee: Bank of Suzhou Co.,Ltd. Zhangjiagang sub branch Pledgor: JIANGSU ZHONGKE JINGYUAN INFORMATION MATERIALS CO.,LTD. Registration number: Y2023980075354 |